CN211246077U - Processing apparatus who contains chlorosilane waste gas - Google Patents
Processing apparatus who contains chlorosilane waste gas Download PDFInfo
- Publication number
- CN211246077U CN211246077U CN201921852834.XU CN201921852834U CN211246077U CN 211246077 U CN211246077 U CN 211246077U CN 201921852834 U CN201921852834 U CN 201921852834U CN 211246077 U CN211246077 U CN 211246077U
- Authority
- CN
- China
- Prior art keywords
- waste gas
- washing tower
- filter
- chlorosilane
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Treating Waste Gases (AREA)
Abstract
The utility model provides a treatment device for waste gas containing chlorosilane, which relates to the technical field of waste gas treatment; the waste gas washing unit comprises a primary washing tower and a secondary washing tower which are sequentially connected through pipelines, spray heads and water inlet pipelines connected with the spray heads are arranged in the primary washing tower and the secondary washing tower, and a circuit breaking valve and a filter are arranged on the water inlet pipeline connected with the primary washing tower, so that chlorosilane-containing waste gas recovered by the waste gas recovery unit is washed by the waste gas washing unit, and the residual gas after washing is conveyed to the waste gas emptying unit for discharge; through implementing this technical scheme, can effectively solve current chlorosilane waste gas treatment device and have the technical problem that the shower head blockked up easily for the volume of spraying of shower head can be guaranteed, and then makes the waste gas of emptying accord with emission standard, can reduce maintenance frequency and cost of overhaul by a wide margin.
Description
Technical Field
The utility model relates to a waste gas treatment technical field especially relates to a processing apparatus who contains chlorosilane waste gas.
Background
The chlorosilane waste gas comprises nitrogen, hydrogen chloride gas, chlorosilane gas, B, P and other mixed impurities; wherein B, P and other impurities include: PCl3(phosphorus trichloride), PCl5(phosphorus pentachloride), BCl5(boron pentachloride) and pH3(phosphine), and chlorides of B (boron) and P (phosphorus); chlorosilanes (chlorosilanes) are Silanes (SiH)4) The product of which the hydrogen atom is replaced by chlorine atom is a gas when the chlorine content is low and is a liquid when the chlorine content is high, and the general formula is SiHnCl4-n, n ═ 0, 1, 2, 3; the leakage of the waste gas containing chlorosilane can cause serious pollution to the environment, so that a person skilled in the art needs to research and design a waste gas treatment device containing chlorosilane, which can fully recover chlorosilane resources in the waste gas and can perform pollution-free treatment on the unrecoverable chlorosilane in the waste gas.
The conventional chlorosilane-containing waste gas treatment device generally comprises a waste gas recovery unit, a waste gas leaching unit and a waste gas emptying unit which are connected in sequence, wherein the waste gas recovery unit is used for recovering chlorosilane-containing waste gas and conveying the residual waste gas to the waste gas leaching unit; the waste gas leaching unit is used for leaching the residual chlorosilane gas and the hydrogen chloride gas in the residual waste gas to remove the chlorosilane gas and the hydrogen chloride gas in the residual waste gas, and conveying the residual waste gas from which the chlorosilane gas and the hydrogen chloride gas are removed to the waste gas emptying unit; and the waste gas emptying unit is used for emptying the residual waste gas from which the chlorosilane gas and the hydrogen chloride gas are removed. And a waste gas leaching tower is arranged in the waste gas leaching unit, after the waste gas containing chlorosilane is gathered and sent into the waste gas leaching tower, hydrogen chloride, chlorosilane and the like which are easily soluble in water in the waste gas are leached by leaching liquid sprayed by a spray head, hydrogen and nitrogen which are insoluble in water and free of pollution are directly discharged through a waste gas discharge port after leaching, and waste liquid formed after leaching is directly conveyed to a waste liquid tank.
However, in the process of implementing the embodiment of the present invention, the inventors found that at least the following technical problems exist in the existing treatment process of waste gas containing chlorosilane: the existing leacheate is large in usage amount, so that the leacheate after the waste gas is leached is used as a circulating liquid to return to a spray header of a leaching tower for spraying after a sewage treatment process, however, the problem of blockage of the leaching tower, a pipeline or the spray header frequently occurs in the actual leaching process, the normal operation of a system is affected, the discharged waste gas after leaching is unqualified, and particularly in winter, the overhauling difficulty is very high.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that to the above-mentioned defect that exists among the prior art, provide a processing apparatus who contains chlorosilane waste gas, it can effectively solve the easy problem of blockking up of current shower head, can let chlorosilane waste gas can fully drip washing to reach qualified emission index, also can effectively reduce spraying system maintenance cost.
The utility model adopts the technical scheme as follows:
the utility model provides a processing apparatus who contains chlorosilane waste gas, includes waste gas recovery unit, waste gas drip washing unit and the waste gas unloading unit that connects gradually through the pipeline, waste gas drip washing unit includes one-level scrubbing tower and the second grade scrubbing tower that connects gradually through the pipeline, all be equipped with the shower head in one-level scrubbing tower and the second grade scrubbing tower and with the water inlet pipe line that the shower head is connected, be connected with the one-level scrubbing tower be provided with broken circuit valve and filter on the water inlet pipe line to the chlorosilane waste gas that contains that makes waste gas recovery unit retrieve drenches after the shower head on one-level scrubbing tower and the second grade scrubbing tower in proper order, and will drench the residual gas after carrying to waste gas unloading unit and discharging.
Optionally, the waste gas emptying unit is provided with a gas detector and an exhaust valve, and the gas detector is used for detecting the content of chlorosilane gas and hydrogen chloride gas in the gas to be exhausted. Therefore, the gas detector can be used for detecting the component indexes of the waste gas which is sequentially washed by the spray headers on the first-stage washing tower and the second-stage washing tower, so that after the chlorosilane gas and the hydrogen chloride gas are removed, the exhaust valve is opened to discharge the residual water-insoluble and pollution-free hydrogen and nitrogen, and the normal operation of the system can be effectively monitored.
Optionally, the circuit breaking valve is a manual control valve, the spray header is a spiral spray header, and the water outlet gap of the spiral spray header is 8-12 mm. The spiral spray header is used for enabling the leacheate flowing into the first-stage washing tower and the second-stage washing tower from the water inlet pipeline to be uniformly sprayed downwards, and the waste gas output by the waste gas recovery unit is positioned below the spray header, so that the leacheate can leach chlorosilane gas and hydrogen chloride gas in the waste gas to form hydrolysate so as to remove the chlorosilane gas and the hydrogen chloride gas in the waste gas; the manual control valve and the filter on the water inlet pipeline can effectively filter large-particle impurities in the leacheate in the water inlet pipeline introduced into the spray header, and the applicant analyzes and finds that the problem of blockage of the spray header, the pipeline or the spray header frequently occurs, and the large-particle impurities contained in the leacheate are reclaimed water and can block the spray header, and then small-particle impurities are slowly deposited to block the spray header, so that the spray header, the pipeline and the spray header are blocked, the spray amount is greatly reduced, and the normal operation of a system is influenced, and the discharged waste gas is unqualified after leaching; the manual control valve can effectively control the liquid inlet quantity of the water inlet pipeline, and the arrangement of the filter can ensure that only particle impurities smaller than the water outlet clearance of the spray header are allowed to enter the waste gas leaching unit, so that the normal operation of the system is ensured, and the waste gas emission index is normal.
Optionally, be provided with gas-supply line and infusion pipeline between one-level scrubbing tower and the second grade scrubbing tower, the gas-supply line is used for inputing the waste gas after the washing in the one-level scrubbing tower to the second grade scrubbing tower in, be provided with the booster pump on the infusion pipeline for in letting in the shower head of second grade scrubbing tower with the washing liquid after the washing in the one-level scrubbing tower, carry out the drip washing to the waste gas that gets into in the second grade scrubbing tower. Therefore, the leacheate after being leached in the first-stage washing tower can be recycled, the problem of large use amount of the leacheate caused by additionally introducing recycled water is avoided, the design process is simplified, and a better spraying effect is achieved.
Optionally, the liquid feeding line is communicated with a water inlet line connected with the secondary washing tower, and the filter is arranged on a water inlet line connected with the secondary washing tower. The method can further realize the filtration of the leacheate entering the second-stage washing tower, can design the design of the spray header positioned in the second-stage washing tower to ensure that the water outlet gap is more uniform and dense, so as to achieve the better spraying effect on the waste gas entering the second-stage washing tower and then leached secondarily, and clear away chlorosilane gas and hydrogen chloride gas in the residual waste gas after the first-stage washing tower is leached, thereby ensuring that the system has better stability and safety.
Optionally, the washing device further comprises a waste liquid recovery unit, wherein the waste liquid recovery unit is communicated with the second-stage washing tower through a pipeline and is used for recovering the leacheate in the second-stage washing tower and introducing a water inlet pipeline connected with the first-stage washing tower after being treated by the conventional sewage treatment device. The eluent can be used as circulating liquid to return to the waste gas elution unit, and the alkali liquor with the pH value of 9 is selected as the eluent after the treatment of the sewage treatment device, so that the waste gas eluent can be effectively recycled, and the dosage of the eluent is reduced; on the other hand, the method can effectively remove chlorosilane gas and hydrogen chloride gas in the waste gas and prevent the problem of blockage of a spray head and a pipeline caused by additional ingestion of other particle impurities in the leacheate.
Optionally, the filter includes filters the barrel and locates filter the lid of barrel upper end filters, be provided with the filter core in the filtration barrel, and filter the both sides of barrel upper end and be provided with inlet and liquid outlet respectively, inlet and liquid inlet pipeline intercommunication, the liquid outlet with the shower head intercommunication to make the leacheate filter the back and enter the shower head interior leaching waste gas through the filter core of filter. So, the filter can effectively block up the large granule impurity interception of shower head for the volume of spraying of shower head gets to guarantee, and then has better spraying effect, makes the atmospheric gas qualified with cleaing away chlorosilane gas and hydrogen chloride gas, and the system operation is stable, avoids the problem of maintenance frequency.
Optionally, an inclined opening is formed in the upper end of the filter element, and the inclined surface of the opening is opposite to the liquid inlet; the lateral wall of filter core cover in the liquid outlet, the filtration pore diameter of filter core is 6.0 +/-0.5 mm. The filter with the structural design can completely obtain the leacheate flowing into the liquid inlet through the liquid inlet pipeline, and the filter element at the liquid outlet is vertically arranged, so that a good filtering effect can be achieved, the problem of blockage at the liquid outlet is not easily caused, the long-term operation can be kept, the filter element is prevented from being cleaned frequently, and the filter has good practicability; and the diameter of the filtering hole of the filter element is designed to be 6.0 +/-0.5 mm, so that particle impurities with the size larger than the water outlet gap can be effectively intercepted, the spray head is effectively prevented from being blocked, and the labor cost and the maintenance cost of the spray system are reduced.
Optionally, be provided with the connecting plate on the open-ended lateral wall, be provided with on the inside wall of filtering the barrel with connecting plate matched with limiting plate, and be provided with the installation handle in the upper end of connecting plate for fix the filter core in the filter cylinder body. So, utilize the spacing fixed action of connecting plate and limiting plate to install the filter core in cartridge filter, avoid additionally designing fixed mounting structure, the design is simple, simple to operate, but has better filter effect, and usable installation handle conveniently takes out the filter core, and clearance filter core and renew cartridge all can reach very convenient effect, and its is with low costs and have better practicality.
Optionally, a backwashing inlet and a backwashing outlet which are communicated with the bottom of the filter element are arranged at the lower end of the filter cylinder body, the backwashing inlet and the backwashing outlet are both provided with sealing flanges, and an inspection port is arranged on the filter cover body. Therefore, the sealing flange can be opened to effectively backwash the filter element, and the filtration or backwash operation of the filter element can be observed through the inspection hole, so that a better monitoring effect is achieved.
As described above, the present invention has at least the following advantages:
1. the utility model discloses almost all chlorosilane gas and hydrogen chloride gas that waste gas recovery unit collected are clear away to the shower head that sets up on usable one-level scrubbing tower and the second grade scrubbing tower, and the waste gas index that detects in the waste gas unloading unit accords with the gas emission index for hydrogen and nitrogen gas that can discharge, and the exhaust treatment device system operation safety and stability after the improvement can reduce labour cost and cost of overhaul by a wide margin.
2. The utility model is provided with the circuit breaking valve and the filter on the water inlet pipeline connected with the primary washing tower, the filter can effectively intercept large granular impurities blocking the spray head, so that the spraying amount of the spray head can be ensured, and further, the spraying effect is better, so as to remove chlorosilane gas and hydrogen chloride gas and make the emptying gas qualified, thus ensuring the stable operation of the system and avoiding the problem of maintenance frequency; and the manual control valve can effectively control the liquid inlet quantity of the water inlet pipeline and further ensure the stable reliability of the system operation.
3. The filter designed by the utility model has simple structure design and convenient installation, can completely obtain the leacheate flowing into the liquid inlet through the liquid inlet pipeline, and the filter element at the liquid outlet is vertically arranged, thereby not only achieving better filtering effect, but also being not easy to cause the problem of blockage at the liquid outlet, keeping the long-term operation, avoiding frequently cleaning the filter element and having better practicability; after the filter element is used for a period of time, the filter element can be conveniently taken out by utilizing the mounting handle, the filter element can be cleaned and replaced conveniently, the cost is low, and the practicability is good.
4. The utility model is provided with a waste liquid recovery unit, the leacheate can be returned to the waste gas leaching unit as a circulating liquid, the leacheate treated by the sewage treatment device adopts an alkali liquid with the pH value of 9, on one hand, the waste gas leacheate can be effectively recycled, and the using amount of the leacheate is reduced; on the other hand, chlorosilane gas and hydrogen chloride gas in the waste gas can be effectively removed, the problem that other particle impurities are additionally absorbed in the leacheate to cause blockage of a spray head and a pipeline is prevented, the leacheate after the waste gas treatment does not need to be discharged outside, the environment is prevented from being polluted, and the win-win effect of reasonable utilization can be achieved.
Drawings
FIG. 1 is a schematic flow chart of embodiment 1 of a waste gas treatment apparatus for chlorosilane-containing waste gas according to the present invention;
FIG. 2 is a schematic view of a filter in a chlorosilane-containing waste gas treatment apparatus according to the present invention;
fig. 3 is a schematic flow chart of embodiment 2 of the waste gas treatment device containing chlorosilane of the present invention.
Reference numerals in the drawings of the specification include: 10-a waste gas recovery unit; 20-a waste gas leaching unit; 21-a first stage washing tower; 22-a secondary washing column; 23-a water inlet line; 24-a shut-off valve; 25-a filter; 26-a gas line; 27-an infusion line; 28-a booster pump; 30-a waste gas emptying unit; 31-an exhaust valve; 250-a filter cartridge; 251-a filter cover body; 252-a filter element; 253-a liquid inlet; 254-a liquid outlet; 255-a connecting plate; 256-limiting plate; 257 — mounting a handle; 258-inspection opening; 259-backwash inlet; 260-backwash outlet; 40-a waste liquid recovery unit.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings.
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments.
Example 1
The embodiment is basically as shown in figure 1: the embodiment provides a processing apparatus for waste gas containing chlorosilane, which comprises a waste gas recovery unit 10, a waste gas leaching unit 20 and a waste gas emptying unit 30 which are sequentially connected through pipelines, wherein the waste gas recovery unit 10 is used for collecting waste gas containing chlorosilane in a workshop, and inputting the waste gas containing chlorosilane into the waste gas leaching unit 20 through pipelines, specifically, the waste gas leaching unit 20 comprises a primary washing tower 21 and a secondary washing tower 22 which are sequentially connected through pipelines, spray headers and water inlet pipelines 23 connected with the spray headers are respectively arranged at the tops of the primary washing tower 21 and the secondary washing tower 22 and are used for uniformly spraying out initial leaching liquid downwards, and the waste gas containing chlorosilane output by the waste gas recovery unit 10 enters the primary washing tower 21 from an air inlet end positioned below the spray header of the primary washing tower 21.
In this embodiment, a water inlet pipeline 23 connected to the primary scrubber 21 is provided with a shut-off valve 24 and a filter 25, so that the chlorosilane-containing waste gas recovered by the waste gas recovery unit 10 is sequentially washed by the showers of the primary scrubber 21 and the secondary scrubber 22, and the residual gas after washing is delivered to the waste gas emptying unit 30 for discharge; preferably, the waste gas emptying unit 30 is provided with a gas detector and an exhaust valve 31, the configuration model and the installation mode of the gas detector are the prior art, or the gas in the waste gas emptying unit 30 can be sampled and detected, the specific detection method and principle are the prior art, and are not the invention of the present disclosure, so the detailed description is not repeated herein, so the gas detector can be used for detecting the indexes and the contents of the waste gas components which are sequentially washed by the spray headers on the primary washing tower 21 and the secondary washing tower 22, so that after the chlorosilane gas and the hydrogen chloride gas are removed, the exhaust valve 31 is opened to discharge the residual water-insoluble and pollution-free hydrogen and nitrogen, and the normal operation of the system can be effectively monitored.
A gas pipeline 26 and a liquid conveying pipeline 27 are arranged between the primary washing tower 21 and the secondary washing tower 22, the gas pipeline 26 is used for inputting the waste gas after being washed in the primary washing tower 21 into the secondary washing tower 22, and the liquid conveying pipeline 27 is provided with a booster pump 28 for introducing the washing liquid after being washed in the primary washing tower 21 into a spray header of the secondary washing tower 22 to wash the waste gas entering the secondary washing tower 22. Therefore, the leacheate after being leached in the first-stage washing tower 21 can be recycled, the problem of large usage of the leacheate caused by additionally introducing recycled water is avoided, the design process is simplified, and a better spraying effect is achieved.
The embodiment further comprises a waste liquid recovery unit 40, the waste liquid recovery unit 40 is communicated with the second-stage washing tower 22 through a pipeline, the waste liquid recovery unit 40 further comprises a pressure pump, an input end of the pressure pump is connected with the bottom of the second-stage washing tower 22 and used for recovering the leacheate in the second-stage washing tower 22, an output end of the pressure pump is connected with the existing sewage treatment device, the leacheate is treated by the existing sewage treatment device and then is introduced into the water inlet pipeline 23 connected with the first-stage washing tower 21, and the leacheate is returned to the spray head of the first-stage washing tower 21 for leaching. The eluent can be used as circulating liquid to return to the waste gas eluting unit 20, and the eluent treated by the sewage treatment device is alkaline liquor with pH of 9, so that the waste gas eluent can be effectively recycled, and the dosage of the eluent is reduced; on the other hand, the method can effectively remove chlorosilane gas and hydrogen chloride gas in the waste gas and prevent the problem of blockage of a spray head and a pipeline caused by additional ingestion of other particle impurities in the leacheate.
Meanwhile, the spray header is a spiral spray header, the water outlet gap of the spiral spray header is 8-12mm, and the water outlet gap of the spiral spray header provided by the embodiment is 10mm, and the applicant analyzes and finds that the problem of blockage of the spray tower, the pipeline or the spray header frequently occurs, because the spray solution is recycled water, large-particle impurities contained in the spray solution can block the spray header, and then small-particle impurities are slowly deposited to block the spray header, so that the spray header, even the pipeline and the spray tower are blocked, the spray amount is greatly reduced, and the normal operation of the system is influenced, and the discharged waste gas is unqualified after the spray is washed. In order to prevent the shower head from being blocked, the short-circuit valve provided on the water inlet line 23 connected to the first-stage scrubber 21 in this embodiment is a manual control valve, which can effectively control the liquid inlet amount of the water inlet line 23, and the filter 25 can ensure that only the particulate impurities smaller than the water outlet gap of the shower head are allowed to enter the waste gas leaching unit 20, thus ensuring the normal operation of the system, so as to ensure the normal emission index of the waste gas.
As shown in fig. 2, the filter 25 provided in this embodiment includes a filtering cylinder 250 and a filtering cover 251 disposed at the upper end of the filtering cylinder 250, wherein the filtering cylinder 250 is specifically made of DN250 carbon steel pipe, the filtering cover 251 is made of 14 carbon steel plate, a filter element 252 is disposed in the filtering cylinder 250, the filter element 252 is made of a sieve plate, and the left and right sides of the upper end of the filtering cylinder 250 are respectively provided with a liquid inlet 253 and a liquid outlet 254, the liquid inlet 253 is communicated with a liquid inlet pipeline, and the liquid outlet 254 is communicated with a spray header, so that a leacheate is filtered by the filter element 252 of the filter 25 and then enters the spray header to rinse waste gas, so that the filter 25 can effectively intercept large granular impurities blocking the spray header, the spraying amount of the spray header can be ensured, and further has a better spraying effect, so as to remove chlorosilane gas and hydrogen chloride gas, avoiding the problem of maintenance frequency.
Specifically, an inclined opening is formed in the upper end of the filter element 252, the inclined surface of the opening faces the liquid inlet 253, two side walls of the opening, which face the liquid inlet 253, are provided with connecting plates 255, the connecting plates 255 are fixedly connected with the filter element 252, a limiting plate 256 which is matched with the connecting plates 255 is arranged on the inner side wall of the filtering cylinder 250, and an installation handle 257 is arranged at the upper end of the connecting plates 255 and used for fixing the filter element 252 in the filtering cylinder 250; so, utilize connecting plate 255 and limiting plate 256's spacing fixed action to install filter core 252 in filtering barrel 250, avoid extra design fixed mounting structure, the design is simple, simple to operate, nevertheless has better filter effect, and usable installation handle 257 conveniently takes out filter core 252, and clearance filter core 252 and renew cartridge 252 all can reach very convenient effect, and its is with low costs and have better practicality. In addition, the right side wall of the filter element 252 covers the liquid outlet 254, and the diameter of the filter hole of the filter element 252 is 6.0 +/-0.5 mm. The filter 25 with the structural design can completely obtain the leacheate flowing into the liquid inlet 253 through the liquid inlet pipeline, and the filter element 252 at the liquid outlet 254 is vertically arranged, so that a good filtering effect can be achieved, the problem of blockage at the liquid outlet 254 is not easily caused, the long-term operation can be kept, the filter element 252 is prevented from being cleaned frequently, and the filter 25 has good practicability; and the diameter of the filtering hole of the filter element 252 is designed to be 6.0 +/-0.5 mm, the diameter of the filtering hole of the filter element 252 provided by the implementation is 6.0mm, particle impurities with the size larger than a water outlet gap can be effectively intercepted, the spray header is effectively prevented from being blocked, and the labor cost and the overhaul cost of the spray system are reduced.
Meanwhile, a backwashing inlet 259 and a backwashing outlet 260 which are communicated with the bottom of the filter element 252 are arranged at the lower end of the filtering cylinder body 250, sealing flanges are arranged on the backwashing inlet 259 and the backwashing outlet 260, specifically DN150 and CL150 flat welding flanges are adopted, and an inspection port 258 is arranged on the filtering cover body 251. Thus, the sealing flange can be opened to effectively backwash the filter element 252, and the operation of filtration or backwash can be observed through the inspection port 258, so that a better monitoring effect can be achieved.
The specific implementation manner of this embodiment is: the waste gas recovery unit 10 inputs the chlorosilane-containing waste gas collected in the workshop into the waste gas leaching unit 20, the chlorosilane-containing waste gas is leached by spraying alkali liquor with the pH value of 9 through spray heads in a first-stage washing tower 21 and a second-stage washing tower 22 in the waste gas leaching unit 20, most of chlorosilane gas and hydrogen chloride gas in the waste gas are leached to form hydrolysate after the chlorosilane-containing waste gas is leached by the spray heads in the first-stage washing tower 21, the residual waste gas without hydrolysis enters the secondary washing tower 22 through the gas pipeline 26, the hydrolysis liquid after being washed in the primary washing tower 21 is introduced into the spray header of the secondary washing tower 22 through the liquid conveying pipeline 27, further leaching the waste gas in the secondary washing tower 22, removing a small amount of chlorosilane gas and hydrogen chloride gas left in the residual waste gas, and enabling the waste gas after further leaching treatment to enter a waste gas emptying unit 30 through a gas outlet end at the top of the secondary washing tower 22; the indexes of the waste gas after the leaching treatment are detected by a gas detector, and the rest waste gas is pollution-free hydrogen and nitrogen, so that the qualified discharge indexes can be directly prevented from being discharged; because the leacheate introduced into the spray header is recycled water treated by the wastewater treatment device and contains particle impurities, the liquid inlet quantity of the water inlet pipeline 23 is controlled by a manual control valve arranged on the water inlet pipeline 23 communicated with the spray header, the particle impurities with the size larger than 6.0mm can be intercepted by the filter 25, the spray header is effectively prevented from being blocked, the spray quantity of the leacheate can be ensured, the spray header has a good spray effect, the discharged waste gas meets the requirement of gas emission indexes, the improved exhaust gas treatment device runs stably and safely, the running time before improvement is about 4 days per set, the spray header can run for more than one month after improvement, and the overhaul frequency and the overhaul cost can be greatly reduced.
Meanwhile, the eluent after the system operation can be used as a circulating liquid to return to the waste gas leaching unit 20, and the alkali liquor with the pH value of 9 is selected as the eluent after the treatment of the sewage treatment device, so that the waste gas eluent can be effectively recycled, and the dosage of the eluent is reduced; on the other hand, chlorosilane gas and hydrogen chloride gas in the waste gas can be effectively removed, the problem that the spray head and the pipeline are blocked due to the fact that other particle impurities are additionally taken into the leacheate can be effectively solved after the system runs for a period of time, the leacheate treated by the waste gas does not need to be discharged outside, the environment is prevented from being polluted, and the win-win effect of reasonable utilization can be achieved.
Example 2
Example 2 is substantially the same as example 1 except that: referring to fig. 3, in the apparatus for treating waste gas containing chlorosilane of the present embodiment, the liquid feeding line 27 is communicated with the water inlet line 23 connected to the secondary washing tower 22, and the water inlet line 23 connected to the secondary washing tower 22 is provided with the filter 25 having the same structure as that of embodiment 1, and the filter 25 has a filter element 252 with a filter hole diameter of 5.5 mm. The leacheate entering the second-stage washing tower 22 can be further filtered, the water outlet gap of the spray header which is located in the second-stage washing tower 22 can be designed to be more uniform and dense, the water outlet gap of the spiral spray header provided by the embodiment is 8mm, so that the waste gas entering the second-stage washing tower 22 and then leached for the second time has a better spraying effect, the chlorosilane gas and the hydrogen chloride gas in the residual waste gas after the first-stage washing tower 21 is leached are removed, and the system has better stability and safety.
The above description is only for the preferred embodiment of the present invention, and the present invention is not limited thereto, the protection scope of the present invention is defined by the claims, and all structural changes equivalent to the contents of the description and drawings of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The utility model provides a processing apparatus who contains chlorosilane waste gas, includes waste gas recovery unit, waste gas drip washing unit and the waste gas emptying unit that connects gradually through the pipeline, its characterized in that: the waste gas leaching unit comprises a first-stage washing tower and a second-stage washing tower which are sequentially connected through pipelines, spray heads and water inlet pipelines connected with the spray heads are arranged in the first-stage washing tower and the second-stage washing tower, a circuit breaking valve and a filter are arranged on the water inlet pipelines, so that chlorosilane-containing waste gas recovered by the waste gas recovery unit is sequentially leached and washed by the spray heads on the first-stage washing tower and the second-stage washing tower, and residual gas after leaching is conveyed to the waste gas emptying unit for discharge.
2. The apparatus for treating waste gas containing chlorosilane as claimed in claim 1, comprising: the waste gas emptying unit is provided with a gas detector and an exhaust valve, and the gas detector is used for detecting the contents of chlorosilane gas and hydrogen chloride gas in the gas to be exhausted.
3. The apparatus for treating waste gas containing chlorosilane as claimed in claim 1, comprising: the circuit breaking valve is a manual control valve, the spray header is a spiral spray header, and the water outlet gap of the spiral spray header is 8-12 mm.
4. The apparatus for treating waste gas containing chlorosilane as claimed in claim 1, comprising: be provided with gas-supply line and infusion pipeline between one-level scrubbing tower and the second grade scrubbing tower, the gas-supply line is used for inputing the waste gas after the leacheate in the one-level scrubbing tower to the second grade scrubbing tower in, be provided with the booster pump on the infusion pipeline for in letting in the shower head of second grade scrubbing tower with the leacheate after the leacheate in the one-level scrubbing tower, carry out the drip washing to the waste gas that gets into in the second grade scrubbing tower.
5. The apparatus for treating waste gas containing chlorosilane as claimed in claim 4, wherein the apparatus comprises: the liquid conveying pipeline is communicated with a water inlet pipeline connected with the secondary washing tower, and the filter is arranged on a water inlet pipeline connected with the secondary washing tower.
6. The apparatus for treating waste gas containing chlorosilane as claimed in claim 5, comprising: the device is characterized by further comprising a waste liquid recovery unit, wherein the waste liquid recovery unit is communicated with the second-stage washing tower through a pipeline and is used for recovering the leacheate in the second-stage washing tower and introducing a water inlet pipeline connected with the first-stage washing tower after being treated by the conventional sewage treatment device.
7. The apparatus according to any one of claims 1 to 6, wherein: the filter is including filtering the barrel and locating the filtration lid of filtering the barrel upper end, be provided with the filter core in the filtration barrel, and the both sides of filtering the barrel upper end are provided with inlet and liquid outlet respectively, inlet and liquid inlet pipeline intercommunication, the liquid outlet with the shower head intercommunication to make the leacheate filter the back and enter the shower head interior drip washing waste gas through the filter core of filter.
8. The apparatus according to claim 7, wherein: the upper end of the filter element is provided with an inclined opening, and the inclined surface of the opening is opposite to the liquid inlet; the lateral wall of filter core cover in the liquid outlet, the filtration pore diameter of filter core is 6.0 +/-0.5 mm.
9. The apparatus for treating waste gas containing chlorosilane as claimed in claim 8, comprising: the filter cartridge is characterized in that a connecting plate is arranged on the side wall of the opening, a limiting plate matched with the connecting plate is arranged on the inner side wall of the filter cartridge body, and an installation handle is arranged at the upper end of the connecting plate and used for fixing the filter cartridge in the filter cartridge body.
10. The apparatus for treating waste gas containing chlorosilane as claimed in claim 9, comprising: the lower end of the filtering cylinder body is provided with a backwashing inlet and a backwashing outlet which are communicated with the bottom of the filter element, the backwashing inlet and the backwashing outlet are both provided with sealing flanges, and the filtering cover body is provided with an inspection port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921852834.XU CN211246077U (en) | 2019-10-31 | 2019-10-31 | Processing apparatus who contains chlorosilane waste gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921852834.XU CN211246077U (en) | 2019-10-31 | 2019-10-31 | Processing apparatus who contains chlorosilane waste gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211246077U true CN211246077U (en) | 2020-08-14 |
Family
ID=71984071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921852834.XU Active CN211246077U (en) | 2019-10-31 | 2019-10-31 | Processing apparatus who contains chlorosilane waste gas |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211246077U (en) |
-
2019
- 2019-10-31 CN CN201921852834.XU patent/CN211246077U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206566629U (en) | A kind of harmful exhaust treatment and purification device | |
| CN114452799A (en) | Efficient purification washing tower system based on acid-base waste gas treatment and working method thereof | |
| CN201842708U (en) | Purifying device for online separation of metal salt and free acid in pickling solution | |
| CN211246077U (en) | Processing apparatus who contains chlorosilane waste gas | |
| CN213012253U (en) | Carbon black tail gas power generation boiler waste heat and waste water recycle device | |
| CN210699050U (en) | Waste liquid recovery processing device | |
| CN210057623U (en) | Purifying water tank | |
| CN211563937U (en) | Cleaning device for hydrogen oil storage tank | |
| CN208809691U (en) | A kind of environment-friendly type industrial waste-gas purifier | |
| CN209612500U (en) | A kind of emission-control equipment convenient for cleaning | |
| CN215627370U (en) | Oil-water separation filter equipment for digit control machine tool | |
| CN115970460B (en) | Flue gas treatment device and method | |
| CN216825077U (en) | Alkali liquor purification and recovery device based on cluster filtration method | |
| CN217367698U (en) | Device for treating tail gas of drying kiln | |
| KR101848790B1 (en) | Self-cleaning waste gas scrubber | |
| CN109200816A (en) | A kind of photocatalysis treatment volatile organic contaminant circular treatment collection device | |
| CN218755344U (en) | Spray column wastewater collection device | |
| CN217437892U (en) | Walnut shell filter cleaned by external circulation | |
| CN213357254U (en) | Coal chemical industry coking wastewater recovery processing device that filter effect is good | |
| CN219091408U (en) | Convenient filter equipment of industry useless salt resourceization | |
| CN203408599U (en) | Activated carbon filter | |
| CN218077202U (en) | Carbon dioxide recovery unit for industrial waste gas purification treatment | |
| CN219209509U (en) | Exhaust gas treatment device | |
| CN106139681A (en) | A kind of phosphor ammonium slurry defecator and the cleaning method of this device | |
| CN214809512U (en) | Industrial waste gas desulfurization dust collecting equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |