CN211208411U

CN211208411U - Etching groove

Info

Publication number: CN211208411U
Application number: CN201922482367.2U
Authority: CN
Inventors: 王建树; 黄调调; 董焕苗
Original assignee: Zhejiang Fortune Energy Co ltd
Current assignee: Zhejiang Fortune Energy Co ltd
Priority date: 2019-12-30
Filing date: 2019-12-30
Publication date: 2020-08-07
Anticipated expiration: 2029-12-30

Abstract

The utility model discloses an etching groove, including cell body and silicon chip conveying mechanism, silicon chip conveying mechanism comprises a plurality of interval connection's pay-off unit in proper order, every pay-off unit is including two backup pads and a plurality of rollers that are located between two backup pads, the backup pad is including base part and baffle part, the movable block is installed respectively at the both ends of roller, the baffle part is equipped with the mounting groove, the height of movable block in the mounting groove is adjusted through adjusting the pole, be connected with the gear after the one end of roller is passed the bearing, all gears are through linking with gear complex chain, the chain is rotated by the actuating mechanism drive. The utility model discloses an etching groove can realize the steady transport of silicon chip, implements monitoring silicon chip operation process on line, and the discovery etching groove warp can in time adjust the roller state on line after the roller level that leads to is unusual to avoid the liquid level undulant unusual influence silicon chip sculpture effect.

Description

Etching groove

Technical Field

The utility model belongs to the technical field of the sculpture equipment, concretely relates to sculpture groove.

Background

Compared with the traditional solar cell, the single crystal PERC SE cell has the following advantages: 1. the recombination rate of the diffusion layer is reduced, and the short-wave response of light is improved; 2. the contact resistance between the front metal electrode and silicon is reduced, and the short-circuit current, the open-circuit voltage and the fill factor are improved; 3. the back surface recombination rate is reduced, and the open-circuit voltage is improved; 4. the long-wave light reflection effect of the back surface is enhanced, and the short-circuit current is improved. The single crystal PERC SE battery comprises the steps of texturing, diffusion, laser SE-etching, PECVD/ARC-screen printing, sintering, testing and sorting and the like, wherein the etching process is used for removing PN junctions on the back side and the side face of a silicon wafer so as to achieve the purpose of insulating the front side and the back side. The equipment used in the etching process is generally a chain type etching machine. The existing etching tank of the chain type etching machine has the defects of large liquid level fluctuation, easy deformation of the etching tank and the like. Single crystal PERC SE cells have more stringent process requirements than conventional cells. Therefore, the existing chain type etching machine is difficult to meet the requirements of the etching process of the single crystal PERC SE battery, and the etching groove needs to be improved so as to improve the yield of the single crystal PERC SE battery.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model discloses a technical scheme is: the utility model provides an sculpture groove, is including cell body and the silicon chip conveying mechanism of installation in the cell body, silicon chip conveying mechanism comprises a plurality of interval connection's pay-off unit in proper order, and every pay-off unit is including two backup pads and being located a plurality of rollers between two backup pads, the backup pad including fix on the cell body base part and with base part body coupling's baffle part, the both ends of roller are respectively through the rotatable movable block of installing of bearing, and the baffle part is equipped with the mounting groove that supplies the movable block to reciprocate, and the height of movable block in the mounting groove is adjusted through adjusting the pole, the one end of roller is passed and is connected with the gear after the bearing, and all gears are through linking with gear complex chain, and the chain is rotated by the actuating.

Preferably, the guide strips are fixed to two sides of the movable block respectively, and guide grooves for the guide strips to move up and down are formed in two sides of the mounting groove respectively.

Preferably as above-mentioned technical scheme, the upper end of movable block is equipped with the spliced pole, the cavity has in the spliced pole, the cavity is equipped with the plectane that can rotate at the cavity internal level, the upper end of spliced pole has the through-hole of intercommunication cavity, the lower extreme of adjusting the pole is mobilizable inserts the fixed connection plectane behind the through-hole, the diameter of through-hole is less than the diameter of plectane, the upper end of mounting groove is equipped with fixed beam, the both ends of fixed beam are fixed respectively on the baffle part, the middle part of fixed beam is equipped with the screw hole, have the external screw thread with screw hole matched with on the regulation pole, the upper.

Preferably, the middle part of the roller is recessed to form an annular groove, an annular transparent pipe is sleeved on the annular groove, an annular cavity is formed in the annular transparent pipe, liquid and leveling bubbles are arranged in the annular cavity, and a leveling area formed by two graduated rings is arranged in the middle part of the annular transparent pipe.

Preferably, in the above technical means, the annular transparent tube is made of corrosion-resistant glass.

Preferably, the rollers on both sides of the annular groove are provided with a plurality of annular grooves which are uniformly arranged at intervals.

Preferably, one support plate of the feeding unit is rotatably provided with a guide gear, the guide gear is matched with the chain, one guide gear is connected with a first bevel gear, the driving mechanism comprises a motor and a gear shaft driven by the motor to rotate, a second bevel gear is arranged on the gear shaft, the second bevel gear is meshed with the first bevel gear, and the gear shaft is perpendicular to the roller.

Preferably, in the above technical solution, the gear, the second bevel gear and the first bevel gear are all made of corrosion-resistant materials, and the chain is a corrosion-resistant chain.

The utility model has the advantages that: the utility model discloses an etching groove can realize the steady transport of silicon chip, implements monitoring silicon chip operation process on line, and the discovery etching groove warp can in time adjust the roller state on line after the roller level that leads to is unusual to avoid the liquid level undulant unusual influence silicon chip sculpture effect.

Drawings

Fig. 1 is a schematic structural diagram of the present invention;

fig. 2 is a schematic cross-sectional view of the present invention;

FIG. 3 is a schematic cross-sectional view of another aspect of the present invention;

FIG. 4 is a schematic view of a part of the structure of the present invention;

fig. 5 is a schematic cross-sectional view of a feed unit.

Detailed Description

The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1-5, an etching tank comprises a tank body 1 and a silicon wafer conveying mechanism arranged in the tank body, the silicon chip conveying mechanism consists of a plurality of feeding units 2 which are sequentially connected at intervals, each feeding unit 2 comprises two supporting plates 3 and a plurality of rollers 4 positioned between the two supporting plates 3, each supporting plate 3 comprises a base part 5 fixed on the groove body 1 and a baffle part 6 integrally connected with the base part 5, two ends of the roller 4 are respectively provided with a movable block 7 in a rotatable way through a bearing, the baffle part 6 is provided with a mounting groove 8 for the movable block 7 to move up and down, the height of the movable block 7 in the mounting groove 8 is adjusted through an adjusting rod 9, one end of the roller 4 penetrates through the bearing and then is connected with gears 10, all the gears 10 are linked through chains 11 matched with the gears 10, and the chains 11 are driven to rotate by a driving mechanism. When the level of the roller 4 is abnormal, the height and the level of the roller 4 are adjusted by adjusting the adjusting rod 9. Driven by the chain 11, the roller 4 has certain up-and-down adjusting space.

Furthermore, the two sides of the movable block 7 are respectively fixed with a guide bar 12, and the two sides of the mounting groove 8 are respectively provided with a guide groove 13 for the guide bar 12 to move up and down. The guide bar 12 and the guide groove 13 make the up and down movement of the movable block 7 smooth.

Further, the upper end of movable block 7 is equipped with spliced pole 14, cavity 15 has in the spliced pole 14, cavity 15 is equipped with the plectane 16 that can rotate at cavity 15 internal level, the upper end of spliced pole 14 has the through-hole of intercommunication cavity 15, adjust pole 9's lower extreme mobilizable insert behind the through-hole fixed connection plectane 17, the diameter of through-hole is less than the diameter of plectane 17, the upper end of mounting groove 8 is equipped with fixed beam 18, the both ends of fixed beam 18 are fixed respectively on baffle part 6, the middle part of fixed beam 18 is equipped with the screw hole, adjust and have the external screw thread with screw hole matched with on the pole 9, the upper end of adjusting pole 9 has regulation handle 19. Through screw-thread fit for the regulation of movable block 7 is more accurate.

Further, the middle part of roller 4 caves in and forms annular groove 20, and the cover has cyclic annular transparent pipe 21 on the annular groove 20, has annular cavity in the cyclic annular transparent pipe 21, has liquid and level bubble in the annular cavity, and the middle part of cyclic annular transparent pipe 21 is equipped with the level district that constitutes by two graduated circles. Through the position of level bubble in the level district, the levelness of roller 4 is reacted on line constantly, avoids long-term work back roller 4 to take place the level unusual and not be perceived because of the sculpture groove deformation, observes can make roller 4 resume normal condition through adjusting pole 9 immediately after the roller 4 level is unusual.

Further, the annular transparent tube 21 is made of corrosion-resistant glass.

Furthermore, a plurality of annular grooves which are uniformly arranged at intervals are arranged on the rollers 4 at two sides of the annular groove 20. The annular groove can reduce the contact area of the roller 4 and the silicon wafer and improve the etching efficiency.

Furthermore, a plurality of guide gears 22 are rotatably mounted on one support plate 3 of the feeding unit 2, the guide gears 22 are matched with the chain 11, one of the guide gears 22 is connected with a first bevel gear 23, the driving mechanism comprises a motor and a gear shaft 24 driven by the motor to rotate, a second bevel gear 25 is mounted on the gear shaft 24, the second bevel gear 25 is meshed with the first bevel gear 23, and the gear shaft 24 is perpendicular to the roller 4.

Further, the gear 10, the second bevel gear 25 and the first bevel gear 23 are all made of corrosion-resistant materials, and the chain 11 is a corrosion-resistant chain.

It is worth mentioning that the utility model discloses an etching groove that the patent application relates to is the etching groove in the chain etching machine, and technical characterstic such as chain etching machine, motor should be regarded as prior art, and other mechanism parts in the chain etching machine refer to current chain etching machine, and the concrete structure of these technical characterstic, theory of operation and the control mode that probably involves, spatial arrangement mode adopt the conventional selection in this field can, should not be regarded as the invention point of the utility model discloses a place, the utility model discloses a do not further specifically expand the detailing.

Having described in detail preferred embodiments of the present invention, it is to be understood that modifications and variations can be made by persons skilled in the art without inventive faculty, and therefore all technical solutions which can be obtained by a person skilled in the art based on the concepts of the present invention through logic analysis, reasoning or limited experimentation will fall within the scope of protection defined by the claims.

Claims

1. The utility model provides an sculpture groove, its characterized in that, including cell body and the silicon chip conveying mechanism of installation in the cell body, silicon chip conveying mechanism comprises a plurality of interval connection's pay-off unit in proper order, and every pay-off unit is including two backup pads and being located a plurality of rollers between two backup pads, the backup pad including fix on the cell body base part and with base part body coupling's baffle part, the both ends of roller are respectively through the rotatable movable block of installing of bearing, and the baffle part is equipped with the mounting groove that supplies the movable block to reciprocate, and the height of movable block in the mounting groove is adjusted through adjusting the pole, the one end of roller is connected with the gear after passing the bearing, and all gears are through linking with gear complex chain, and the chain is rotated by actuating mechanism drive.

2. The etching tank of claim 1, wherein guide bars are fixed to both sides of the movable block, respectively, and guide grooves for the guide bars to move up and down are provided to both sides of the mounting tank, respectively.

3. The etching tank as claimed in claim 2, wherein the movable block has a connecting column at an upper end thereof, a cavity is formed in the connecting column, the cavity has a circular plate horizontally rotatable in the cavity, the connecting column has a through hole at an upper end thereof, the adjusting rod is movably inserted into the through hole and then fixedly connected to the circular plate, the diameter of the through hole is smaller than that of the circular plate, the mounting groove has a fixing beam at an upper end thereof, both ends of the fixing beam are respectively fixed to the baffle portions, the fixing beam has a threaded hole at a middle portion thereof, the adjusting rod has an external thread engaged with the threaded hole, and the adjusting rod has an adjusting handle at an upper end thereof.

4. The etching tank of claim 1, wherein the roller is recessed in the middle to form an annular groove, the annular groove is sleeved with an annular transparent tube, an annular cavity is arranged in the annular transparent tube, liquid and a leveling bubble are arranged in the annular cavity, and a leveling area consisting of two graduated rings is arranged in the middle of the annular transparent tube.

5. The etched tank of claim 4, wherein the annular transparent tube is made of corrosion resistant glass.

6. The etching tank of claim 4 wherein the rollers on both sides of the annular groove are provided with a plurality of uniformly spaced annular grooves.

7. The etching tank of claim 1, wherein a support plate of the feeding unit is rotatably provided with guide gears, the guide gears are matched with the chain, one of the guide gears is connected with a first bevel gear, the driving mechanism comprises a motor and a gear shaft driven by the motor to rotate, a second bevel gear is arranged on the gear shaft, the second bevel gear is meshed with the first bevel gear, and the gear shaft is perpendicular to the roller.

8. The etched channel of claim 7, wherein said gear, said second bevel gear, and said first bevel gear are made of a corrosion resistant material, and said chain is a corrosion resistant chain.