CN211170886U - Constant temperature device and MOCVD equipment - Google Patents

Abstract

The utility model provides a constant temperature equipment and MOCVD equipment, wherein, a constant temperature equipment includes two at least cell bodies, at least one be provided with constant temperature subassembly in the cell body, constant temperature subassembly is used for keeping the constancy of temperature of the liquid in the cell body, two the intercommunication has two honeycomb ducts, two between the cell body the honeycomb duct is connected with two water pumps respectively, two the water pump is used for driving two liquid in the honeycomb duct flows to opposite direction, so that two the liquid circulation in the cell body flows. The utility model provides a constant temperature equipment and MOCVD equipment, the power consumption is low, is favorable to reducing constant temperature equipment's cost, improves the production profit.

Description

Constant temperature device and MOCVD equipment

Technical Field

The utility model relates to a constant temperature technical field especially relates to a constant temperature equipment and MOCVD equipment.

Background

The constant temperature water bath is a device which bears liquid water and controls the water temperature through a temperature control system arranged in the constant temperature water bath to achieve long-term constancy. The constant temperature water bath requires precise temperature control of the liquid in the bath (the temperature control precision is 0.1 ℃ or even 0.01 ℃), and the most common method is heating by a resistance wire and refrigerating by a compressor, and stabilizing the temperature of the liquid water in the constant temperature water bath at the required set temperature by assisting a PID (proportion, integral and differential) microcomputer self-setting precise temperature control mode.

In the L ED industry, MOCVD (Metal-organic Chemical Vapor Deposition) equipment is used to use an organometallic compound as a raw material, which is called MO source (Metal-organic source) because MO source is usually stored in a steel cylinder and used in the form of MO source steel cylinder, and the MO source steel cylinder is usually placed in a constant temperature water bath to stabilize the temperature of the MO source steel cylinder, so as to achieve the stability and continuity of production.

However, the operating power of each constant temperature water bath is large, and the energy consumption of a plurality of constant temperature water baths which operate simultaneously is high, so that the use cost of the MOCVD equipment is high.

SUMMERY OF THE UTILITY MODEL

The embodiment of the utility model provides a constant temperature equipment and MOCVD equipment for it is high to solve a plurality of constant temperature tanks simultaneous working power consumption, and leads to the high problem of use cost of MOCVD equipment.

In order to achieve the above purpose, the utility model provides a following technical scheme:

an aspect of the embodiment of the utility model provides a constant temperature equipment, including two at least cell bodies, at least one be provided with constant temperature subassembly in the cell body, constant temperature subassembly is used for keeping the constancy of temperature of liquid in the cell body, two the intercommunication has two honeycomb ducts, two between the cell body the honeycomb duct is connected with two water pumps respectively, two the water pump is used for driving two liquid in the honeycomb duct flows to opposite direction, so that two the liquid circulation in the cell body flows.

In one possible implementation manner, each tank body is at least connected with two flow guide pipes, the two flow guide pipes are respectively a liquid inlet pipe and a liquid outlet pipe, and the liquid outlet pipe and the liquid inlet pipe are respectively located on two sides of the same tank body.

In one possible implementation manner, a space is formed between the communication position of the liquid inlet pipe and the trough body and the communication position of the liquid outlet pipe and the trough body in the vertical direction.

In one possible implementation manner, the liquid outlet pipe is located at the lower part of the trough body.

In one possible implementation mode, a temperature alarm is arranged in the tank body, and at least part of the temperature alarm is fixed below the liquid level in the tank body and used for sending an alarm prompt when the liquid temperature exceeds a preset temperature range.

In one possible implementation mode, the temperature alarm device further comprises a master controller, each thermostatic assembly is arranged in each tank body, the master controller and each thermostatic assembly in each tank body are respectively connected, and the master controller is used for controlling to close the currently opened thermostatic assembly and open the currently closed thermostatic assembly when the temperature alarm device in one of the tank bodies gives an alarm.

In one possible implementation manner, the number of the groove bodies is multiple, the groove bodies are mutually communicated, and at least one groove body without the constant temperature component is communicated with the groove body with the constant temperature component.

In one possible implementation manner, the device further comprises a communicating pipe, wherein two ends of the communicating pipe are respectively communicated with the two groove bodies, and the two ends of the communicating pipe are flush with each other in the height direction in the vertical direction.

In one possible implementation mode, a liquid level alarm is arranged on the tank body, and at least part of the liquid level alarm is fixed below the liquid level in the tank body and used for sending an alarm prompt when the liquid level height exceeds a preset liquid level range.

An MOCVD apparatus comprises a plurality of MO source steel cylinders and a thermostat, wherein the MO source steel cylinders are arranged in a tank body of the thermostat, and are in heat transfer contact with liquid in the tank body.

The utility model provides a constant temperature equipment and MOCVD equipment sets up two honeycomb ducts in two cell bodies, the both ends of honeycomb duct respectively with two cell bodies intercommunication, and through set up the water pump respectively on two honeycomb ducts, the pump water opposite direction of two water pumps to make the flow opposite direction of the liquid in two honeycomb ducts, and then make the liquid in two cell bodies form a hydrologic cycle. Therefore, when the liquid in the two tanks needs to be thermostated, only the thermostatic component in one of the tanks needs to be started. When the constant temperature assembly in one of them cell body starts, because the existence of hydrologic cycle, in this cell body hotter liquid flowed to another cell body through the honeycomb duct, the colder water in another cell body flowed to and opened in the cell body of constant temperature assembly and heated, so circulated for the water in two cell bodies of a constant temperature assembly ability constant temperature. Compared with two constant temperature assemblies for simultaneously keeping the temperature of water in the two tanks constant, the method has the advantages that the number of the started constant temperature assemblies is small, the water pump is low in power, the energy consumption of the constant temperature device is low, the cost of the constant temperature device is favorably reduced, and the processing profit is improved.

In addition to the technical problems, technical features constituting technical aspects, and advantageous effects brought by the technical features of the technical aspects described above, other technical problems, technical features included in technical aspects, and advantageous effects brought by the technical features that can be solved by the embodiments of the present invention will be described in further detail in the detailed description.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.

FIG. 1 is a schematic view of a thermostat provided in accordance with an exemplary embodiment, wherein arrows indicate the direction of flow of a liquid;

FIG. 2 is a schematic view of another thermostat provided in accordance with an exemplary embodiment;

FIG. 3 is a schematic view of a portion of a thermostat assembly according to an exemplary embodiment illustrating the connection of a fluid conduit within one of the tanks, wherein the arrows indicate the direction of fluid flow;

FIG. 4 is a schematic diagram of a control scheme for a thermostat provided in accordance with an exemplary embodiment, with arrows indicating the direction of signal transmission;

fig. 5 is a schematic view of yet another thermostat provided in accordance with an exemplary embodiment.

Description of reference numerals:

1. a trough body; 11. a main tank body; 12. a first tank body; 13. a second tank body; 2. a flow guide pipe; 21. a water inlet main pipe; 211. a first water inlet pipe; 212. a second water inlet pipe; 22. a water outlet main pipe; 221. a first water outlet pipe; 222. a second water outlet pipe; 23. a liquid inlet pipe; 24. a liquid outlet pipe; 3. a water pump; 31. discharging the water pump; 32. a first water inlet pump; 33. a second water inlet pump; 4. a temperature alarm; 41. a temperature sensor; 42. a temperature controller; 43. a first alarm; 5. a communication pipe is provided.

With the above figures, certain embodiments of the present invention have been shown and described in more detail below. The drawings and the description are not intended to limit the scope of the inventive concept in any way, but rather to illustrate the inventive concept by those skilled in the art with reference to specific embodiments.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention.

Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention. The embodiments described below and the features of the embodiments can be combined with each other without conflict.

In the L ED industry, the K465i MOCVD equipment of VEECO, USA, is widely used, the equipment is provided with L AUDA brand constant temperature water bath, each MOCVD is provided with 5-7 constant temperature water baths, wherein at least two to three constant temperature water baths in each MOCVD set the same water temperature as a plurality of MO source steel cylinders as carriers, so a plurality of constant temperature water baths with the same temperature are required to be opened at the same time.

In summary, how to improve the constant temperature water bath on the basis of the existing MOCVD equipment to reduce the working efficiency is the technical problem to be solved by the application.

Specifically, the present embodiment provides a thermostat device including: at least two cell bodies 1 are provided with constant temperature subassembly in at least one cell body, and constant temperature subassembly is used for keeping the constancy of temperature of the liquid in the cell body, and the intercommunication has two honeycomb ducts 2 between two cell bodies, and two honeycomb ducts 2 are connected with two water pumps 3 respectively, and two water pumps 3 are used for driving the liquid in two honeycomb ducts 2 to flow to opposite direction to make the liquid circulation in two cell bodies 1 flow.

Specifically, the tank body 1 may include a hollow prism, a longitudinal section of the prism may be rectangular or trapezoidal, and corners of the prism may be rounded to prevent a user from being scratched. Illustratively, the tank 1 may comprise a bottom wall and a side wall, the side wall being connected to the periphery of the bottom wall and extending in a vertical direction towards the cover. Specifically, two ends of the draft tube 2 may be respectively installed on the sidewalls of the two tanks 1.

Specifically, the water pump 3 is a low power water pump 3, and the rated power of the water pump 3 may be several hundred watts. The water pump 3 may include, but is not limited to, a submersible pump 3, a pipeline; illustratively, the submersible pump 3 comprises an integrally arranged motor and pump, and the submersible pump 3 can be positioned inside the tank body 1 and works below the liquid level. The motor of the submersible pump 3 can work underwater, and the cooling of the motor is realized by water; the pipeline pump can be positioned outside the tank body 1, the water inlet and the water outlet of the pump of the pipeline pump are connected with the pipeline, the pump is mainly used for pressurizing water of the pipeline or reliably circulating water used for equipment, and a motor of the pump is cooled by wind and cannot feed water. Alternatively, the rated power of the water pump 3 on each draft tube 2 may be the same in order to maintain a constant liquid level in the tank 1.

Specifically, the constant temperature components are installed in the tank body 1, and only one constant temperature component is started at the same time. The constant temperature component can accurately control the temperature of the liquid in the tank body 1 (the temperature control precision is 0.1 ℃ or even 0.01 ℃). The method of heating by a resistance wire and refrigerating by a compressor can be selected, and the temperature of the liquid in the tank body 1 is stabilized at the required set temperature by assisting the PID microcomputer self-setting accurate temperature control mode.

In addition, the thermostatic assembly may be equipped with a highly stable platinum resistor or other temperature sensor for implementing the temperature control and automatic protection functions of the thermostatic bath, respectively. The controller may use special noise suppression circuitry to detect the small resistance changes required for a high stability thermostatic bath. The thermostatic assembly may use an ac bridge to measure temperature to reduce the thermoelectric potential. The customized, high precision, low temperature coefficient of resistance ensures short and long term stability of the temperature set point.

By arranging the constant temperature device on MOCVD equipment or other equipment needing constant temperature, the MO source steel cylinders are respectively placed in the plurality of tank bodies 1 in the constant temperature device, and the liquid in the plurality of tank bodies 1 pumps water mutually through the water pump 3, so that the liquid in the plurality of tank bodies 1 flows circularly. Only need start the constant temperature subassembly in the cell body 1, just can carry out the constant temperature operation to the liquid in a plurality of cell bodies 1 to reduce the energy consumption of equipment, do benefit to and reduce manufacturing cost.

The achievable thermostat device is described below with reference to the drawings so that the technical solutions and advantages of the present invention can be more clearly understood by those skilled in the art.

Example one

Fig. 1 is a schematic view of a thermostat device provided according to an exemplary embodiment, wherein arrows indicate a flow direction of a liquid. Referring to fig. 1, there may be two tanks 1, and there may be two draft tubes 2, and two ends of each draft tube 2 are respectively communicated with the two tanks 1. Each draft tube 2 is provided with a water pump 3, and the water pumps 3 enable the flowing directions of the liquid in the two draft tubes 2 to be opposite.

It is worth to say that the constant temperature component is installed in one of the tank bodies 1 to directly perform constant temperature operation on the liquid in the tank body 1, and the constant temperature component may or may not be arranged in the other tank body 1. When a constant temperature component is arranged in the other tank body 1, only one constant temperature component needs to work at the same time. Namely, the thermostatic assembly in the other tank body 1 is not opened.

When the liquid in the two tank bodies 1 needs to be kept at constant temperature, the liquid in the two tank bodies 1 circulates under the action of the two water pumps 3 and the two flow guide pipes 2, the constant temperature assembly in one of the tank bodies 1 is started, hotter liquid in one tank body 1 flows into the other tank body 1 through the flow guide pipes 2, colder water in the other tank body 1 flows into the hotter tank body 1 through the flow guide pipes 2, and the circulation is carried out, so that the constant temperature assembly can keep the temperature of the water in the two tank bodies 1 constant at the same time. Compared with two constant temperature components for simultaneously keeping the temperature of the water in the two tank bodies 1 constant, the method has the advantages that the number of the started constant temperature components is small, the water pump 3 is low in power, the energy consumption of the constant temperature device is low, the cost of the constant temperature device is favorably reduced, and the processing profit is improved.

It should be noted that although the present solution is specifically described above by taking two tanks 1 as an example, the number of tanks 1 may be more than two, and only one thermostatic assembly in one tank 1 works at any time.

Example two

Fig. 2 is a schematic view of another thermostat provided in accordance with an exemplary embodiment. Referring to fig. 2, the thermostat may include three tanks 1, a plurality of draft tubes 2, two ends of each draft tube 2 are respectively communicated with two different tanks 1, and a water pump 3 is disposed on each draft tube 2. For convenience of description, the leftmost tank 1 is referred to as a total tank 11, the middle tank 1 is referred to as a first tank 12, and the rightmost tank 1 is referred to as a second tank 13. The draft tube 2 may include a water inlet main tube 21, a water outlet main tube 22, a first water inlet tube 211, a second water inlet tube 212, a first water outlet tube 221, a second water outlet tube 222, a water inlet pipeline, and a water outlet pipeline; the water pump 3 may include a water outlet pump 31, a first water inlet pump 32, a second water inlet pump 33, and a water inlet pump.

Illustratively, a water inlet manifold 21 and a water outlet manifold 22 are communicated with the first tank body 12, a water outlet pump 31 is arranged on the water outlet manifold 22, a first water inlet pipe 211 and a second water inlet pipe 212 are communicated with the water inlet manifold 21, a first water inlet pump 32 and a second water inlet pump 33 are respectively arranged on the first water inlet pipe 211 and the second water inlet pipe 212, and a first water outlet pipe 221 and a second water outlet pipe 222 are communicated with the water outlet manifold 22. The first water inlet pipe 211 and the first water outlet pipe 221 are communicated with the first tank body 12, and the second water inlet pipe 212 and the second water outlet pipe 222 are communicated with the second tank body 13. Alternatively, only the thermostatic assembly in the main tank 11 or only the thermostatic assembly in the first tank 12 or the second tank 13 may be activated at the same time.

The circulation of the liquid in the main tank 11, the first tank 12 and the second tank 13 is that the liquid in the main tank 11 enters the water outlet main 22 under the action of the water outlet pump 31, and the liquid is supplied to the first tank 12 and the second tank 13 through the first water outlet pipe 221 and the second water outlet pipe 222 respectively. The liquid in the first tank body 12 and the second tank body 13 enters the first water inlet pipe 211 and the second water inlet pipe 212 under the action of the first water inlet pump 32 and the second water inlet pump 33, and finally flows into the main tank body 11 through the water inlet main pipe 21. And the process is circulated. Alternatively, the rated capacity of the effluent pump 31 may be the sum of the first and second inlet pumps 32, 33, or the rated capacity of the first and second inlet pumps 32, 33 may be half that of the effluent pump 31.

In another exemplary embodiment, four flow guide pipes 2 are connected to the main tank 11, two of the flow guide pipes 2 are water inlet pipes, the other two are water outlet pipes, and two water outlet pipes are respectively provided with a water outlet pump 31. The liquid in the main tank body 11 enters the first tank body 12 and the second tank body 13 through two water outlet pipelines under the action of two water outlet pumps 31. The two water inlet pipelines are respectively provided with a water inlet pump 3, and the liquid in the first tank body 12 and the liquid in the second tank body 13 respectively enter the main tank body 11 through the two water inlet pipelines under the action of the two water inlet pumps 3. Thus, the circulation of the liquid in the three tank bodies 1 is completed.

Note that the positions of the total groove body 11, the first groove body 12, and the second groove body 13 are not particularly limited. The communication mode of the draft tube 2 in the main tank 11, the first tank 12 and the second tank 13 may be other forms, which are only for illustration and are not limited specifically, as long as the liquid in the main tank 11, the first tank 12 and the second tank 13 can be circulated.

In addition, the number of the tank bodies 1 included in the thermostatic device can exceed three, and the circulation mode of the liquid in the tank bodies 1 can refer to the circulation mode of the liquid in the tank bodies 1, and the circulating mode can be obtained by simply pushing the liquid in the tank bodies 1, and is not described in detail herein. Wherein, at least one cell body that does not set up the constant temperature subassembly or the constant temperature subassembly does not start communicates with the cell body that has the constant temperature subassembly and open to the constant temperature subassembly can heat the liquid in a plurality of cell bodies that communicate with each other.

It is easy to understand, set up two honeycomb ducts 2 in two cell bodies 1, the both ends of honeycomb duct 2 communicate with two cell bodies 1 respectively, and through set up water pump 3 respectively on two honeycomb ducts 2, the pump water opposite direction of two water pumps 3 to make the flow opposite direction of the liquid in two honeycomb ducts 2, and then make the liquid in two cell bodies 1 form a circulation. Therefore, when the liquid in the two tank bodies 1 needs to be thermostated, only the thermostatic component in one of the tank bodies 1 needs to be started. Namely, when the constant temperature assembly in one of the tank bodies 1 is started, because of the existence of water circulation, hotter liquid in the tank body 1 flows into the other tank body 1 through the draft tube 2, and colder water in the other tank body 1 flows into the tank body 1 which opens the constant temperature assembly to be heated, and the circulation is carried out, so that one constant temperature assembly can keep constant temperature for water in the two tank bodies 1. Compared with two constant temperature components for simultaneously keeping the temperature of the water in the two tank bodies 1 constant, the method has the advantages that the number of the started constant temperature components is small, the water pump 3 is low in power, the energy consumption of the constant temperature device is low, the cost of the constant temperature device is favorably reduced, and the processing profit is improved.

EXAMPLE III

Fig. 3 is a partial schematic view of a thermostat device according to an exemplary embodiment, which is used to illustrate the connection of a draft tube 2 in one tank 1, wherein the arrows indicate the flowing direction of liquid. Referring to fig. 3, at least two flow guide pipes 2 may be communicated with one tank body 1, one of the flow guide pipes 2 may be a liquid outlet pipe 24, a water pump 3 is disposed on the liquid outlet pipe 24, and the liquid in the tank body 1 is conveyed into the other tank body 1 through the liquid outlet pipe 24 under the action of the water pump 3; the other flow guide pipe 2 can be a liquid inlet pipe 23, a water pump 3 is arranged on the liquid inlet pipe 23, and liquid in the other tank body 1 is conveyed into the tank body 1 through the liquid inlet pipe 23 under the action of the water pump 3. Thus, the liquids in the two tank bodies 1 flow in a mutually circulating manner.

In one of them possible implementation, feed liquor pipe 23 and drain pipe 24 communicate respectively in the both sides of same cell body 1 to make stagger from the position of this cell body 1 outflow and the liquid that flows into this cell body 1, the flow of the interior liquid of two cell bodies 1 of being convenient for, make the liquid in two cell bodies 1 carry out the heat exchange better, improve thermostatic assembly's work efficiency.

In one possible implementation manner, the communication position of the liquid inlet pipe 23 and the tank body 1, and the communication position of the liquid outlet pipe 24 and the tank body 1 have a distance in the vertical direction, so as to promote the circulation of the liquid in the tank body 1 and improve the working efficiency of the constant temperature assembly.

Optionally, the outlet pipes 24 communicate with the underside of the housing 1 so that the outlet pipes 24 can draw out liquid located under the housing 1. If the liquid outlet pipe 24 is communicated with the upper part of the tank body 1, no liquid is pumped out by the liquid outlet pipe 24 when the liquid level in the tank body 1 is lowered. Namely, the liquid outlet pipe 24 is communicated with the lower part of the tank body 1, and can maintain the continuity of the liquid flow.

Optionally, the liquid outlet pipe 24 is communicated with the lower part of the tank body 1, and the liquid inlet pipe 23 is communicated with the upper part of the tank body 1, so that the liquid in the tank body 1 can circulate.

Example four

On the basis of any of the above embodiments, fig. 4 is a schematic diagram of a control principle of a thermostat device according to an exemplary embodiment, wherein arrows indicate the direction of signal transmission; as shown in fig. 4, a temperature alarm 4 is arranged in the tank body 1, and at least part of the temperature alarm 4 is fixed below the liquid level in the tank body 1 and used for giving an alarm prompt when the liquid temperature exceeds a preset temperature range.

Specifically, the temperature alarm 4 may include a temperature sensor 41, a temperature controller 42, and a first alarm 43. The temperature sensor 41, the temperature controller 42, and the first alarm 43 are communicatively connected. A temperature sensor 41 installed in the water tank for measuring a temperature of the liquid in the water tank and outputting a temperature signal; a temperature controller 42 receiving the temperature signal and outputting a control signal to control the first alarm 43; and a first alarm 43 which responds to the control signal to start or close the alarm prompt function. The controller is internally provided with a preset temperature

When any constant temperature component causes water temperature deviation due to faults, the temperature of the liquid in the tank body 1 exceeds

Or

In the meantime, the first alarm 43 sends out an alarm prompt to remind a technician nearby to arrive at the site for processing at the first time. Alternatively, the first alarm 43 may be a buzzer, a flashing light, or a combination thereof.

In one of the possible implementations, the temperature sensor 41 is used to measure the temperature of the liquid above the tank 1. The temperature sensor 41 is arranged above the tank body 1 and below the liquid level, when the liquid level in the tank body 1 is lowered, the temperature sensor 41 is exposed, the temperature sensor 41 measures the temperature of air near the liquid level, and the difference between the temperature of the air and the temperature of the liquid level can trigger the first alarm 43 to give an alarm prompt. In this way, the temperature alarm device 4 can issue an alarm not only when the temperature changes but also when the liquid level falls.

Alternatively, the temperature alarm 4 may be waterproof and the temperature sensor 41 may be located 1cm below the liquid surface.

EXAMPLE five

On the basis of any one of the above embodiments, a constant temperature component is arranged in each tank body 1, and when the temperature of the liquid in the tank body 1 is within the alarm temperature range, the currently opened constant temperature component is closed, and the currently closed constant temperature component is opened.

For example, when the first alarm 43 gives an alarm, and a nearby operator arrives at the place of affairs and a technician determines that the temperature of the water bath is abnormal, the thermostatic assembly in the accident tank body 1 is closed, and the thermostatic assembly in another tank body 1 is opened, so as to recover the operation of the whole thermostatic device.

As another example, fig. 4 is a schematic diagram of a control principle of a thermostat device according to an exemplary embodiment, wherein arrows indicate the direction of signal transmission; as shown in fig. 4, the thermostat device further includes a master controller, each tank body is provided with a thermostat assembly, the master controller is connected with the thermostat assembly in each tank body, and the master controller is used for controlling to close the currently opened thermostat assembly and open the currently closed thermostat assembly when the temperature alarm in one of the tank bodies gives an alarm.

Specifically, the main controller may be a temperature controller 42, the temperature controller 42 is in communication connection with the thermostatic components, and when the temperature of the liquid in the tank body 1 is abnormal, the temperature controller 42 may send a cut-off instruction to a currently opened thermostatic component and send an open instruction to one of currently closed thermostatic components while controlling the first alarm 43 to open. The currently opened constant temperature component receives a cutting instruction and adjusts the constant temperature component to be in a closed state according to the cutting instruction; one of the currently closed thermostatic assemblies receives the opening instruction and adjusts itself to the open state according to the opening instruction. Therefore, the function of automatically opening or closing the constant temperature component according to the temperature signal is realized.

Each tank body 1 is internally provided with a constant temperature component, when one running constant temperature component is broken down, the other constant temperature component can be opened to continue working, so that the constant temperature device can continuously work.

EXAMPLE six

On the basis of any one of the above embodiments, fig. 5 is a schematic view of another thermostat device provided according to an exemplary embodiment. As shown in fig. 5, the thermostatic device further includes a communicating pipe 5, two ends of the communicating pipe 5 are respectively communicated with the two tank bodies 1, and two ends of the communicating pipe 5 are level with each other in the vertical direction, so that the liquid levels in the plurality of tank bodies 1 are kept level.

Specifically, two ends of the communication pipe 5 may be communicated with the bottom wall of the tank body 1, and may also be communicated with the side wall of the tank body 1. Optionally, the communicating tube 5 may be sealably connected to the sink to ensure no risk of water leakage for long term use.

EXAMPLE seven

On the basis of any one of the above embodiments, the tank body 1 is provided with a liquid level alarm, and at least part of the liquid level alarm is fixed below the liquid level in the tank body 1 and used for giving an alarm prompt when the liquid level exceeds a preset liquid level range.

Optionally, the liquid level alarm may be a gravity magnetic induction contact alarm, and the gravity magnetic induction contact alarm may include a suspension block, a magnetic induction controller located below the liquid level, and a second alarm, the magnetic induction controller being in communication connection with the second alarm. The magnetic induction controller is positioned below the liquid level, and the liquid in the tank body 1 passes through the magnetic induction controller. Under normal state, the suspension block suspends on the liquid level, and there is the liquid of certain distance between suspension block and the magnetic induction controller, and make suspension block can not contact with the magnetic induction controller. When the liquid level in the tank body 1 is lowered due to the abnormality of the water pump 3, the suspension block is immediately lowered to contact the magnetic induction controller, and the magnetic induction controller controls the second alarm to give an alarm prompt. To alert surrounding technicians to handle the exception for the first time. When the technician judges that the water pump 3 pumps water abnormally, the power supply of the whole constant temperature device can be closed and the submersible pump 3 starts to be replaced, and the power supply of the system is restarted to restore the operation of the whole constant temperature device after the replacement is finished.

Optionally, the magnetic induction controller can be arranged in a waterproof mode and can be installed at a position 1cm below the liquid level.

The terms "upper" and "lower" are used to describe relative positions of the structures in the drawings, and are not used to limit the scope of the present invention, and the relative relationship between the structures may be changed or adjusted without substantial technical changes.

It should be noted that: in the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

Furthermore, in the present disclosure, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the description herein, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.

Claims (10)

1. The utility model provides a constant temperature equipment, its characterized in that, includes two at least cell bodies, at least one be provided with constant temperature subassembly in the cell body, constant temperature subassembly is used for keeping the constancy of temperature of liquid in the cell body, two the intercommunication has two honeycomb ducts, two between the cell body the honeycomb duct is connected with two water pumps respectively, two the water pump is used for driving two liquid in the honeycomb duct flows to opposite direction, so that two the liquid circulation in the cell body flows.

2. The thermostat device as claimed in claim 1, wherein each tank body is connected with at least two flow guide pipes, the two flow guide pipes are respectively a liquid inlet pipe and a liquid outlet pipe, and the liquid outlet pipe and the liquid inlet pipe are respectively located on two sides of the same tank body.

3. The thermostat device as claimed in claim 2, wherein the communicating position of the liquid inlet pipe and the tank body and the communicating position of the liquid outlet pipe and the tank body are vertically spaced.

4. A thermostatic device according to claim 2, characterised in that said outlet duct is located in the lower part of said tank.

5. The thermostatic device according to claim 1, characterized in that a temperature alarm is arranged in the tank body, at least part of the temperature alarm is fixed below the liquid level in the tank body and used for giving an alarm prompt when the temperature of the liquid exceeds a preset temperature range.

6. The constant temperature device according to claim 5, further comprising a master controller, wherein each of the tanks is internally provided with the constant temperature component, the master controller is respectively connected with the constant temperature components in each of the tanks, and the master controller is used for controlling to turn off the currently-turned-on constant temperature component and turn on the currently-turned-off constant temperature component when the temperature alarm in one of the tanks gives an alarm.

7. The thermostat device as claimed in claim 1, wherein the number of the tanks is plural, the plural tanks are communicated with each other, and at least one tank not provided with the thermostat assembly is communicated with the tank having the thermostat assembly.

8. The constant temperature equipment as claimed in claim 1, further comprising a communicating pipe, wherein two ends of the communicating pipe are respectively communicated with the two tank bodies, and the two ends of the communicating pipe are level with each other in height in the vertical direction.

9. The thermostatic device according to claim 1, wherein a liquid level alarm is arranged on the tank body, and at least part of the liquid level alarm is fixed below the liquid level in the tank body and used for giving an alarm prompt when the liquid level exceeds a preset liquid level range.

10. MOCVD tool comprising a plurality of MO source cylinders, characterized in that it further comprises a thermostat according to any one of claims 1 to 9, said MO source cylinders being placed in the tank of said thermostat, said MO source cylinders being in heat-transferring contact with the liquid in said tank.

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