CN211168231U - Improved generation prevents slow-witted sour bucket quick connect system - Google Patents

Abstract

the utility model relates to an improved generation prevents slow-witted sour bucket quick connect system, including the electronic scale main part, the electronic scale gauge outfit, the gyro wheel platform main part, the PFA pipe, P L C control system, prevent slow-witted sour bucket supply quick-operation joint, the gyro wheel platform main part is arranged in on the electronic scale main part, the gyro wheel platform main part is overhead has the sour bucket of standard 200L, installs on the bung of the sour bucket of standard 200L and prevents slow-witted sour bucket supply quick-operation joint, prevents slow-witted sour bucket supply quick-operation joint bottom and is connected with the PFA pipe, and the PFA pipe other end stretches into the sour bucket of standard 200L bottom, and the electronic scale main part passes through the line connection electronic scale gauge outfit, and the electronic scale gauge outfit other end passes through line connection P L C control system, compared with prior art, overall structure can exchange with preceding platform, conveniently reforms transform and structural reliability is high, adopts electronic scale and P L C linkage to make overall system more stable and safe simultaneously to make convenient operation.

Description

Improved generation prevents slow-witted sour bucket quick connect system

[ technical field ]

The utility model belongs to the technical field of the chemical supply technique and specifically relates to an improved generation prevents slow-witted sour bucket quick connect system.

[ background art ]

as the semiconductor industry in China is continuously developing, chip production lines are also becoming more and more scaled in China, and the purpose of cleaning impurities and fine particles on chips is achieved, and as a chemical supply system at the front end of semiconductor manufacturing, any problem in the work of the chip production lines can cause loss of measure, so that semiconductor manufacturers increasingly pay more attention to each chemical supply device in the manufacturing process in order to continuously improve the stability and reliability of the chemical supply system.

According to the condition that the barrel is changed manually in the chemical supply system at present, before chemicals are distributed to different user ends from an acid barrel, the joint of the chemical barrel needs to be changed manually, the chemicals are guaranteed to be correct to the required chemicals, the chemicals meeting the requirements can be taken by the user ends, the required chemicals can be obtained more safely, waste liquid is conveniently treated and discharged, and the method is of great importance for improving the safety of operators and the accuracy of joint changing. At present, batch chemical barrels are all the same covers and matched same joints, so that the risk of replacing the joints in a wrong way is easily caused, and customers pay more and more attention to the consideration of personnel safety.

And with the continuous development of the semiconductor industry in China, the varieties of chemicals are more and more, but the chemical barrels are the same, and the interface modes are also safe and the same, under the condition, if the joints are changed by mistake, the consequences are not imaginable. Meanwhile, the existing chemical barrel replacement mode is fixed, so that automation cannot be realized, the automation degree of the existing electronic-grade chemical barrel replacement component is low, and safety protection measures are insufficient. With the rapid development of the domestic semiconductor industry, higher requirements are put forward on the production efficiency, cleanliness, safety and the like of equipment.

In addition, since the chemical supply barrel needs to be supplemented with inert gas such as nitrogen gas to achieve pressure balance in the barrel when chemicals are supplied to a supply system, a gas port and a chemical inlet and outlet are respectively formed in the chemical supply barrel, and since semiconductor chemicals are dangerous chemicals, even under the condition of using a special tool, replacing the chemical supply barrel is a time-consuming and labor-consuming work for an operator, and the main reason is to prevent leakage of chemicals and replacement of a joint, so that the structure of the joint design is very complicated to prevent replacement of the joint.

[ contents of utility model ]

The utility model aims at solving foretell not enough and provide an improved generation prevents slow-witted sour bucket quick connect system, not only make entire system more stable and safe, structural reliability is higher, makes to connect more laborsaving easy operation moreover, has improved work efficiency and security greatly.

in order to achieve the purpose, the improved foolproof acid bucket quick connection system comprises an electronic scale main body 1, an electronic scale gauge outfit 2, a roller platform main body 3, a PFA pipe 5, a PLC control system 6 and a foolproof acid bucket supply quick connector 7, wherein the roller platform main body 3 is arranged on the electronic scale main body 1, a standard 200L acid bucket 4 is arranged on the roller platform main body 3, the foolproof acid bucket supply quick connector 7 is arranged on a bucket cover of the standard 200L acid bucket 4, the bottom end of the foolproof acid bucket supply quick connector 7 is connected with the PFA pipe 5, the other end of the PFA pipe 5 extends into the inner bottom of the standard 200L acid bucket 4, the electronic scale main body 1 is connected with the electronic scale gauge outfit 2 through a line, and the other end of the electronic scale gauge outfit 2 is connected with the PLC control system 6.

Furthermore, the electronic scale main body 1 is coated with a polypropylene PP plate, and the end cover and the roller of the roller platform main body 3 are both made of anti-corrosion polypropylene.

Further, prevent that sour bucket of slow-witted supplies quick-operation joint 7 includes that sour bucket connects body 8, the scalable spring 13 of PTFE, non return device 14, sour bucket connects and is provided with the scalable spring 13 of PTFE and non return device 14 in the body 8, sealed snap ring 17 is connected to the scalable spring 13 upper end of PTFE, sealed snap ring 17 is installed in sour bucket connects the annular groove that body 8 internal middle part arranged along circumference, non return device 14 is connected to the scalable spring 13 lower extreme of PTFE, non return device 14 is T type structure, non return device 14 installs the bottom in sour bucket connects body 8.

further, 8 upper portions of sour barrel head body are equipped with chemicals hose nipple adapter 12, 8 lower extreme designs of sour barrel head body have rotatable chemicals barrel adapter 9, 9 bottoms of chemicals barrel adapter are equipped with the locating piece of barrel head to through the locating piece connection on sour barrel 4 of standard 200L, 9 threaded connection chemicals hose nipple adapter 12 of chemicals barrel adapter, 8 bottom end faces of sour barrel head body are provided with PFA pipe adapter 11, PFA pipe adapter 11 is used for connecting PFA pipe 5, be equipped with between PFA pipe adapter 11 and the chemicals barrel adapter 9 and prevent slow-witted type device 10, PFA pipe adapter 11 and prevent the different buckle one-to-one on the slow-witted type device 10.

Further, the acid bucket joint body 8 and the non-return device 14 are both made of ethylene chlorotrifluoroethylene copolymer bars.

Further, the chemical barrel adaptor 9 and the chemical hose joint adaptor 12 are made of ethylene chlorotrifluoroethylene copolymer bars.

Further, the joint between the acid barrel joint body 8 and the chemical barrel adapter 9 is sealed by a PFA anti-corrosion sealing snap ring.

Further, the PFA pipe adapter 11 is made of PFA, and the PTFE retractable spring 13 is made of PTFE rods.

Compared with the prior art, the utility model, have following advantage:

(1) the utility model has the advantages that the whole structure can be exchanged with the previous platform, the transformation is convenient, the structure reliability is high, and meanwhile, the electronic scale and the PLC linkage are adopted, so that the whole system is more stable and safer, the operation is convenient, and the working efficiency and the safety are greatly improved;

(2) The chemical barrel joint with high cleanliness of the utility model meets the harsh use requirement of semiconductor silicon wafer manufacturing, and has good wear resistance to reduce the maintenance cost;

(3) The utility model adopts standardized mechanical parts which are easy to purchase and produce, thus reducing the equipment cost, being convenient to maintain and can be made in China;

(4) The lower end of the acid bucket joint body of the utility model is designed with a rotatable chemical bucket adapter, the bottom of the chemical bucket adapter is provided with a positioning block of the bucket joint, the structure is simple and novel, the use is convenient and safe, and the rotatable chemical bucket adapter is arranged on the acid bucket joint body, so that when the acid bucket joint body is separated from the chemical bucket joint, the chemical bucket adapter can be directly rotated to take work without disconnecting an external joint, thereby greatly improving the replacement speed of the chemical bucket joint;

(5) The utility model discloses can make the sour bucket open laborsaving easy operation to open the environment and for airtight environment, guaranteed the cleanliness factor of opening the environment, operating personnel's safety is considered to the bigger degree, and whole operation process safety is reliable, is worth popularizing and applying.

[ description of the drawings ]

Fig. 1 is a schematic structural diagram of the present invention;

FIG. 2a is a schematic perspective view of a quick disconnect coupling for a foolproof acid cartridge of the present invention;

FIG. 2b is a schematic front view of the structure of FIG. 2 a;

FIG. 2c is a schematic top view of the structure of FIG. 2 a;

3 FIG. 3 2 3 d 3 is 3 a 3 cross 3- 3 sectional 3 view 3 A 3- 3 A 3 of 3 FIG. 3 2 3 b 3; 3

Fig. 3a is a schematic view of the external structure of the acid bucket joint body of the present invention;

FIG. 3b is a schematic view of the internal structure of the acid bucket joint body according to the present invention;

Fig. 4a is a schematic perspective view of the chemical barrel adaptor of the present invention;

FIG. 4b is a schematic front view of the structure of FIG. 4 a;

FIG. 4c is a schematic top view of the structure of FIG. 4 a;

FIG. 5a is a schematic structural diagram of a fool-proof device of the present invention;

FIG. 5b is a schematic structural diagram of the fool-proof device of the present invention;

FIG. 5c is a schematic front view of the fool-proof device of the present invention;

FIG. 5d is a schematic top view of the fool-proof device of the present invention;

FIG. 6a is a schematic perspective view of a PFA adapter according to the present invention;

FIG. 6b is a schematic front view of the structure of FIG. 6 a;

FIG. 6c is a cross-sectional view B-B of FIG. 6B;

FIG. 7a is a schematic perspective view of a chemical hose coupler adapter according to the present invention;

FIG. 7b is a schematic front view of the structure of FIG. 7 a;

FIG. 7c is a schematic side view of the structure of FIG. 7 a;

FIG. 8a is a schematic front view of a PTFE retractable spring of the present invention;

Fig. 8b is a schematic top view of the PTFE stretchable spring of the present invention;

Fig. 9a is a schematic perspective view of a check device according to the present invention;

FIG. 9b is a schematic front view of the structure of FIG. 9 a;

FIG. 9c is a schematic top view of the structure of FIG. 9 a;

FIG. 9d is a cross-sectional view C-C of FIG. 9 b;

in the figure, 1, an electronic scale main body 2, an electronic scale head 3, a roller platform main body 4, a standard 200L acid bucket 5, a PFA pipe 6, a PLC control system 7, a foolproof acid bucket supply quick joint 8, an acid bucket joint body 9, a chemical bucket adapter 10, a foolproof device 11, a PFA pipe adapter 12, a chemical hose joint adapter 13, a PTFE telescopic spring 14, a non-return device 15, a 3/4 'PFA joint 16, a 1/2' PFA joint 17 and a sealing snap ring.

[ detailed description of the invention ]

The invention is further described below with reference to the accompanying drawings:

as shown in the accompanying drawings, the utility model provides an improved generation prevents slow-witted sour bucket quick connect system, including electronic scale main part 1, electronic scale gauge outfit 2, gyro wheel platform main part 3, PFA pipe 5, P L C control system 6, prevent slow-witted sour bucket supply quick joint 7, gyro wheel platform main part 3 is arranged in on the electronic scale main part 1, gyro wheel platform main part 3 is overhead to have the sour bucket 4 of standard 200L, install on the bung of the sour bucket 4 of standard 200L and prevent slow-witted sour bucket supply quick joint 7, prevent that slow-witted sour bucket supply quick joint 7 bottom is connected with PFA pipe 5, the PFA pipe 5 other end stretches into the sour bucket 4 bottom of standard 200L, electronic scale main part 1 is through line connection electronic scale gauge outfit 2, the electronic scale gauge outfit 2 other end is through line connection P L C control system 6.

the quick foolproof acid bucket supply connector 7 comprises an acid bucket connector body 8, a PTFE telescopic spring 13 and a non-return device 14, the PTFE telescopic spring 13 and the non-return device 14 are arranged in the acid bucket connector body 8, the upper end of the PTFE telescopic spring 13 is connected with a sealing snap ring 17, the sealing snap ring 17 is arranged in an annular groove which is circumferentially arranged in the middle of the acid bucket connector body 8, the lower end of the PTFE telescopic spring 13 is connected with the non-return device 14, the non-return device 14 is of a T-shaped structure, the non-return device 14 is installed at the bottom of the acid bucket connector body 8, a chemical hose connector adapter 12 is sleeved on the upper portion of the acid bucket connector body 8, a rotatable chemical bucket adapter 9 is designed at the lower end of the acid bucket connector body 8, a positioning block of a bucket connector is arranged at the bottom of the chemical bucket adapter 9 and connected to a standard 200L acid bucket 4 through the positioning block, the chemical bucket adapter 9 is in threaded connection with the chemical hose connector adapter 12, a PFA pipe adapter 11 is arranged on the bottom end face of the acid bucket connector body 8, the pipe adapter 11 is used for connecting a PFA pipe 5, anti-foolproof pipe adapter 10 is connected to a PFA hose connector 16, PFA/PFA hose connector 16 is connected to the top end face of.

the utility model discloses in, electronic scale main part 1 outsourcing polypropylene PP board, reach and prevent inorganic solution and gas corrosion, install electronic scale gauge outfit 2 linkage PLC control system 6 real time monitoring chemicals residual liquid situation simultaneously, parts such as end cover and gyro wheel that gyro wheel platform main part 3 contains all adopt anticorrosive polypropylene PP preparation, have corrosion-resistant characteristics, when high-purity electronic grade chemicals liquid medicine bucket transports this platform, utilize the gyro wheel to conveniently transport, supply quick-operation joint 7 through preventing slow-witted sour bucket and combine to reach the process of chemicals supply at the user end under PFA's 5 drainage effect at PUMP, under electronic scale and PLC's effect, reduce as far as possible and supply the interior chemicals liquid medicine of bucket and remain, sour bucket joint body 8 adopts ethylene trifluoro vinyl chloride finish machining copolymer (ECTFE) rod to form, increase its intensity, the wearability, creep resistance is greatly higher than polytetrafluoroethylene PTFE, and no metal ion is appeared, wherein sour bucket joint body 8 middle PTFE design has scalable spring 13 and prevents the chemicals under the condition that stops supplying the joint, when changing sour bucket joint, the interior chemicals can not change the chemicals or the leakage of chemicals can not change the precision ethylene trifluoro ethylene finishing device, the back flow device design has ensured that the non return is 14 is adopted.

The chemical barrel adaptor 9 is formed by performing finish machining on an Ethylene Chlorotrifluoroethylene (ECTFE) rod, is connected with the chemical hose connector adaptor 12 in a threaded manner, and is also formed by performing finish machining on an Ethylene Chlorotrifluoroethylene (ECTFE) rod, is used for connecting a PFA hose to supply chemicals to a client, and is correspondingly processed with the foolproof device 10 according to different chemical solvent barrel types so as to prevent the irretrievable danger caused by the fact that the connector is installed in an incorrect chemical barrel. Sour barrel head body 8 lower extreme design has rotatable chemicals barrel head adapter 9, the bottom of chemicals barrel head adapter 9 is equipped with the locating piece that the barrel head connects, because be equipped with rotatable chemicals barrel head adapter 9 on sour barrel head body 8, when connecting the separation with the chemicals barrel, need not to break off chemicals hose and connect adapter 12 and can directly rotate chemicals barrel head adapter 9 and change the work, so improved the change speed that chemicals barrel head connects greatly, it can carry out sample analysis to the chemicals simultaneously to have increased the sample import simultaneously.

The acid bucket joint body 8, the chemical bucket adapter 9 and the chemical hose joint adapter 12 are all made of Ethylene Chlorotrifluoroethylene (ECTFE) bars through finish machining, PFA anti-corrosion sealing snap rings are adopted at joints of the adapters, and a new high-molecular pipeline connecting technology is adopted to ensure that the whole pipeline system has no leakage. The chemical outlet that sets up on the sour bucket connects 8 bottom end faces connects bucket liquid inlet pipe DIP-TUBE device adapter promptly PFA pipe adapter 11 adopts the PFA material, ensures the quality of chemical, and this PFA pipe adapter 11 passes through the one-to-one with the different buckles on preventing slow-witted type device 10, ensures to change the accuracy and the security of chemical kind. The PTFE retractable spring 13 is processed by adopting an imported PTFE rod, and the retractable ratio of the check pressure of the elasticity meeting the chemical supply and the backflow is designed through stress analysis, so that smooth supply and circulation are ensured. And meanwhile, the check device 14 is designed, so that the pressure of the return pipeline can enable the PTFE telescopic spring 13 to press the check device 14, chemicals cannot return to the barrel through the PFA pipe adapter 11, and meanwhile, when the acid barrel joint is replaced, the chemicals in the pipeline cannot drip out of the equipment, so that the safety of workers is ensured.

The utility model discloses an applied principle does: sour bucket connects body lower extreme design to have rotatable chemicals bucket adapter, and the bottom of adapter is equipped with the locating piece that the bucket connects, and its simple structure is novel, and convenient to use safety because sour bucket connects to be equipped with rotatable chemicals bucket adapter on the body, when connecting the separation with the chemicals bucket, need not to break off external connection and can directly rotate chemicals bucket adapter and take work, so improved the change speed that the chemicals bucket connects greatly. The acid bucket joint body and the chemical bucket adapter are made of Ethylene Chlorotrifluoroethylene (ECTFE) bars through finish machining, PFA anti-corrosion sealing snap rings are adopted at the joints of the acid bucket joint body and the chemical bucket adapter, and a new high-molecular pipeline connecting technology is adopted to ensure that the whole pipeline system is free of leakage. A chemical outlet arranged on the bottom end face of the acid bucket joint body is connected with a bucket liquid inlet pipe DIP-TUBE which is made of PFA materials, so that the quality of chemicals is ensured. Therefore, the utility model discloses can guarantee that the environment of chemical bucket before opening is clean, connect the chemical joint after that, the work of uncapping of solvent bucket is accomplished, and this design makes the solvent bucket open laborsaving easy operation to open the environment and be airtight environment, guaranteed the cleanliness factor of opening the environment, operating personnel's safety is considered to the bigger degree, whole operation process safety, reliable.

The utility model discloses can realize: the barrel cover is convenient to open, the replacement speed is improved, and the wrong chemical barrel is prevented from being replaced; the acid supply environment is prevented from being polluted, and the safety of operators is improved; the reasonable air return system improves the cleanliness of the split charging area, prevents the volatilization of residual corrosive gas and greatly considers the safety of operators; the cleaning and waste liquid amount is more effectively and reasonably controlled, and the energy-saving effect is achieved; the chemical split charging pipeline adopts advanced layout design materials to ensure the cleanliness of chemicals during split charging; necessary fool-proof measures and equipment detection devices are designed to control the quality of chemical products and improve the safety of operators; prevent that chemicals from flowing out, corroding ground and the components and parts below the joint.

The present invention is not limited by the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be equivalent replacement modes, and are all included in the protection scope of the present invention.

Claims (8)

1. the improved foolproof acid bucket quick connection system is characterized by comprising an electronic scale main body (1), an electronic scale gauge outfit (2), a roller platform main body (3), a PFA pipe (5), a P L C control system (6) and a foolproof acid bucket supply quick connector (7), wherein the roller platform main body (3) is arranged on the electronic scale main body (1), a standard 200L acid bucket (4) is arranged on the roller platform main body (3), the foolproof acid bucket supply quick connector (7) is installed on a bucket cover of the standard 200L acid bucket (4), the PFA pipe (5) is connected to the bottom end of the foolproof acid bucket supply quick connector (7), the other end of the PFA pipe (5) extends into the inner bottom of the standard 200L acid bucket (4), the electronic scale main body (1) is connected with the electronic scale gauge outfit (2) through a line, and the other end of the electronic scale gauge outfit (2) is connected with the P L C control system (6).

2. The improved foolproof acid bucket quick connect system of claim 1, wherein: the electronic scale is characterized in that a polypropylene PP plate is coated outside the electronic scale main body (1), and the end cover and the roller of the roller platform main body (3) are both made of anti-corrosion polypropylene.

3. The improved foolproof acid bucket quick connect system of claim 1, wherein: prevent slow-witted sour bucket supply quick-operation joint (7) including sour bucket joint body (8), PTFE scalable spring (13), non return device (14), be provided with PTFE scalable spring (13) and non return device (14) in sour bucket joint body (8), sealed snap ring (17) is connected to PTFE scalable spring (13) upper end, install in sour bucket joint body (8) middle part along the annular groove that circumference was arranged, non return device (14) are connected to PTFE scalable spring (13) lower extreme, non return device (14) are T type structure, non return device (14) are installed and are connected the bottom in sour bucket joint body (8).

4. the improved foolproof acid bucket quick connection system as claimed in claim 3, characterized in that a chemical hose connector adapter (12) is sleeved on the upper portion of the acid bucket connector body (8), a rotatable chemical bucket adapter (9) is designed at the lower end of the acid bucket connector body (8), a positioning block of a bucket connector is arranged at the bottom of the chemical bucket adapter (9) and connected to a standard 200L acid bucket (4) through the positioning block, the chemical bucket adapter (9) is in threaded connection with the chemical hose connector adapter (12), a PFA pipe adapter (11) is arranged on the bottom end face of the acid bucket connector body (8), the PFA pipe adapter (11) is used for connecting PFA pipes (5), a foolproof device (10) is arranged between the PFA pipe adapter (11) and the chemical bucket adapter (9), and the PFA pipe adapter (11) corresponds to different buckles on the foolproof device (10) one to one.

5. The improved foolproof acid bucket quick connect system of claim 4, wherein: the acid bucket joint body (8) and the non-return device (14) are both made of ethylene chlorotrifluoroethylene copolymer bars.

6. The improved foolproof acid bucket quick connect system of claim 4, wherein: the chemical barrel adapter (9) and the chemical hose joint adapter (12) are made of ethylene chlorotrifluoroethylene copolymer bars.

7. The improved foolproof acid bucket quick connect system of claim 4, wherein: the joint between the acid barrel joint body (8) and the chemical barrel adapter (9) is sealed by a PFA (Poly fluoro alkoxy) anticorrosive sealing snap ring.

8. The improved foolproof acid bucket quick connect system of claim 4, wherein: PFA pipe adapter (11) adopts the PFA material to make, PTFE scalable spring (13) adopt the processing of PTFE stick to form.

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