CN211164755U - Silicon rod automatic leveling mechanism - Google Patents
Silicon rod automatic leveling mechanism Download PDFInfo
- Publication number
- CN211164755U CN211164755U CN201921595155.9U CN201921595155U CN211164755U CN 211164755 U CN211164755 U CN 211164755U CN 201921595155 U CN201921595155 U CN 201921595155U CN 211164755 U CN211164755 U CN 211164755U
- Authority
- CN
- China
- Prior art keywords
- silicon rod
- frame
- leveling
- automatic leveling
- leveling mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 43
- 239000010703 silicon Substances 0.000 title claims abstract description 43
- 238000001514 detection method Methods 0.000 claims abstract description 13
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
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Abstract
A silicon rod automatic leveling mechanism belongs to the technical field of mechanical equipment, and particularly relates to a silicon rod automatic leveling mechanism. The utility model provides an automatic degree of automation is high, convenient to use's silicon rod automatic leveling mechanism. The utility model discloses a frame is provided with silicon rod center detection device and silicon rod leveling supporting mechanism in the frame, its characterized in that: the silicon rod center detection mechanism comprises at least three corresponding distance sensors arranged on the rack.
Description
Technical Field
The utility model belongs to the technical field of mechanical equipment, concretely relates to silicon rod automatic leveling mechanism.
Background
In the current single crystal czochralski technology, the diameter of the produced long silicon rod is changed from beginning to end, so that in order to ensure the verticality of the cut end surface, the silicon rod needs to be leveled during cutting, and the aim of improving the product quality is fulfilled.
Disclosure of Invention
The utility model discloses just to above-mentioned problem, provide a silicon rod automatic leveling mechanism that degree of automation is high, convenient to use.
For realizing the above purpose of the utility model, the utility model discloses a following technical scheme, the utility model discloses a frame is provided with silicon rod center detection device and silicon rod leveling supporting mechanism in the frame, its characterized in that: the silicon rod center detection mechanism comprises at least three corresponding distance sensors arranged on the rack.
As the utility model discloses an optimal scheme, silicon rod leveling mechanism includes the leveling frame that corresponds with the central detection mechanism of silicon rod, is provided with servo motor on the leveling frame, and servo motor passes through the screw nut subassembly and links to each other with the jacking frame on the leveling frame, is provided with the jacking roller on the jacking frame.
As another preferred scheme of the utility model, jacking frame bottom is provided with the guide arm, links to each other through vertical direction subassembly between guide arm and the leveling frame.
The beneficial effects of the utility model.
The utility model discloses mutually supporting's silicon rod center detection mechanism and silicon rod leveling supporting mechanism can detect the silicon rod both ends centre of a circle, according to the measured data, the fine setting that goes up and down is carried out to servo motor control silicon rod tip, makes the silicon rod both ends centre of a circle keep on same straight line, improves the cutting accuracy, and the silicon rod leveling is accomplished in the automation, reduces intensity of labour, improves work efficiency.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural view of a silicon rod center detection device.
Fig. 3 is a schematic structural view of a silicon rod leveling and supporting mechanism.
In the attached drawing, 1 is a frame, 2 is a distance sensor, 3 is a hair rod, 4 is a servo motor, 5 is a leveling frame, 6 is a jacking frame, 7 is a jacking roller, 8 is an electromagnet, and 9 is a guide rod.
Detailed Description
The utility model discloses a frame 1 is provided with silicon rod center detection device and silicon rod leveling supporting mechanism, its characterized in that in the frame 1: the silicon rod center detection mechanism comprises at least three corresponding distance sensors 2 arranged on the rack 1.
As the utility model discloses an optimal scheme, silicon rod leveling mechanism includes the leveling frame 5 that corresponds with silicon rod center detection mechanism, is provided with servo motor 4 on the leveling frame 5, and servo motor 4 links to each other with the jacking frame 6 on the leveling frame 5 through lead screw subassembly, is provided with jacking roller 7 on the jacking frame 6.
As another preferred scheme of the utility model, 6 bottoms of jacking frame are provided with guide arm 9, link to each other through vertical direction subassembly between guide arm 9 and the leveling frame 5.
And the bottom of the leveling frame 5 is provided with a connecting slide block and a locking device.
The locking device may be an electromagnet 8.
The three distance sensors 2 detect three points on the silicon rod, and the circle center of the silicon rod can be judged according to the arc formed by the three points.
The utility model discloses during the use, open three distance sensor 2, calculate the height in the centre of a circle of 3 both ends of hair stick through data processing module (can be P L C module), control silicon rod leveling mechanism's servo motor 4 motion makes the lower one end in the centre of a circle of hair stick 3 raise, and is leveled mutually with the other end.
It should be understood that the above detailed description of the present invention is only for illustrating the present invention and is not limited by the technical solutions described in the embodiments of the present invention, and those skilled in the art should understand that the present invention can still be modified or equivalently replaced to achieve the same technical effects; as long as the use requirement is satisfied, the utility model is within the protection scope.
Claims (5)
1. The utility model provides a silicon rod automatic leveling mechanism, includes frame (1), is provided with silicon rod center detection device and silicon rod leveling supporting mechanism on frame (1), its characterized in that: the silicon rod center detection mechanism comprises at least three corresponding distance sensors (2) arranged on the rack (1).
2. The silicon rod automatic leveling mechanism of claim 1, wherein: the silicon rod leveling mechanism comprises a leveling frame (5) corresponding to the silicon rod center detection mechanism, a servo motor (4) is arranged on the leveling frame (5), the servo motor (4) is connected with a jacking frame (6) on the leveling frame (5) through a screw and nut assembly, and a jacking roller (7) is arranged on the jacking frame (6).
3. The silicon rod automatic leveling mechanism according to claim 2, wherein: the bottom of the jacking frame (6) is provided with a guide rod (9), and the guide rod (9) is connected with the leveling frame (5) through a vertical guide assembly.
4. The silicon rod automatic leveling mechanism according to claim 2, wherein: and a connecting slide block and a locking device are arranged at the bottom of the leveling frame (5).
5. The silicon rod automatic leveling mechanism as set forth in claim 4, wherein: the locking device is an electromagnet (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921595155.9U CN211164755U (en) | 2019-09-24 | 2019-09-24 | Silicon rod automatic leveling mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921595155.9U CN211164755U (en) | 2019-09-24 | 2019-09-24 | Silicon rod automatic leveling mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211164755U true CN211164755U (en) | 2020-08-04 |
Family
ID=71822318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921595155.9U Expired - Fee Related CN211164755U (en) | 2019-09-24 | 2019-09-24 | Silicon rod automatic leveling mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211164755U (en) |
-
2019
- 2019-09-24 CN CN201921595155.9U patent/CN211164755U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200804 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |