CN211158037U - Miniature pressure sensor - Google Patents
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- CN211158037U CN211158037U CN201921594346.3U CN201921594346U CN211158037U CN 211158037 U CN211158037 U CN 211158037U CN 201921594346 U CN201921594346 U CN 201921594346U CN 211158037 U CN211158037 U CN 211158037U
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Abstract
The utility model discloses a miniature pressure sensor. The sensor comprises a pressure sensor body fixedly connected to the outer wall of a guide pipe, wherein the pressure sensor body with a coaxial annular structure is formed on the outer wall of the guide pipe, when the outer electrode layer is deformed due to the fact that the outer electrode layer feels external pressure, the outer electrode layer is inwards attached to a dielectric layer and an inner electrode layer to form an electrode/dielectric/electrode capacitor structure, the butt joint area of the outer electrode layer and the inner electrode layer changes along with the change of the external pressure, the capacity of formed capacitance changes, the numerical value of the external pressure is presumed to be known through the specific change of electric quantity obtained by a capacitance detection device, and the purpose of detecting the change of the external pressure applied to the head of the guide pipe in real. The pressure sensor main body has mechanical flexibility, can be bent randomly along with the catheter, and adapts to the application scene of bending blood vessels in an interventional body.
Description
Technical Field
The utility model relates to a miniature pressure sensor technical field, more specifically say, relate to and can fix miniature pressure sensor on millimeter level pipe or seal wire.
Background
The pressure sensor disclosed in the prior pressure sensor, such as the published article, "piezoresistive medical catheter end micro pressure sensor", is a piezoresistive sensor, and is a silicon chip for measuring pressure, only a part of a catheter is a silicon chip, and the whole catheter is not covered, so that the whole sensor has a measuring blind area, the sensor is greatly influenced by temperature, and the measuring precision is not high.
SUMMERY OF THE UTILITY MODEL
To the problem that exists among the prior art, the utility model aims to provide a fix can be along with its crooked miniature pressure sensor on millimeter level pipe or seal wire.
In order to solve the above problem, the utility model adopts the following technical scheme:
the miniature pressure sensor is characterized by comprising an annular pressure sensor body fixedly connected to the outer wall of a millimeter-scale conduit, wherein the pressure sensor body is a capacitive pressure sensor and comprises an inner electrode layer with electronic conductivity, a dielectric layer with ionic conductivity, a non-conductive spacing layer, an outer electrode layer with electronic conductivity and a packaging layer which are sequentially distributed from inside to outside, the stretching amplitude of the inner electrode layer, the dielectric layer, the spacing layer, the outer electrode layer and the packaging layer is not less than that of the conduit, and the inner electrode layer and the outer electrode layer are respectively connected with a conductive lead.
The conductive lead is made of a biocompatible material or the outer surface of the conductive lead is wrapped by the biocompatible material, and the conductive lead is adhered to the catheter and connected with an external capacitance detection device.
The spacing layer can be a complete air layer or an incomplete air layer with support structures distributed discontinuously, and the support structures are made of non-conductive materials.
And a biocompatible thermal isolation film with the stretching amplitude consistent with that of the conduit is sprayed on the outer surface of the packaging layer.
The packaging layer is made of a biocompatible material.
The inner electrode layer and the outer electrode layer are made of a material having both mechanical flexibility and good electron conductivity, and preferably, but not limited to, a metal plating film or a graphene film or a carbon nanotube film or a silver nanowire film. The dielectric layer is made of a material having both mechanical flexibility and good ion conductivity, and preferably, but not limited to, the following materials, such as an ionic gel polymer, are selected.
The diameter of the conduit is 0.5-3mm, and the overall diameter of the conduit after the micro pressure sensor is fixed on the head of the conduit is increased by 0.01-2 mm.
A preparation method of the miniature pressure sensor comprises the following steps:
s1, stirring the graphene ink uniformly, inverting the beaker, plugging a PFA plastic plug into a pipe orifice at one end of the catheter (1), blocking the pipe orifice, vertically immersing one end of the catheter (1) with the PFA plastic plug into the graphene ink, vertically pulling out the catheter after dipping, forming a film by naturally drying for 10-14 hours to form an inner electrode layer (21), and connecting a conductive lead at a certain position of the inner electrode layer (21);
s2, vertically immersing the catheter (1) coated with the inner electrode layer (21) into an ionic gel stock solution, vertically pulling out the catheter after dipping the ionic gel, and naturally drying for 3-4 hours to volatilize most of water in the coated ionic gel stock solution to form a gel-state dielectric layer (22);
s3, under the exposure condition, taking enough photoresist in a beaker, vertically placing the catheter (1) with the dielectric layer (22) in the photoresist, dipping the photoresist, vertically pulling out the catheter, standing for 10-15 minutes, and drying within the effective temperature range of ionic gel to solidify the photoresist film;
s4, vertically placing the catheter (1) coated with the photoresist film in graphene conductive ink under an exposure condition, vertically pulling out the catheter after dipping, and forming a film through natural air drying for 10-14 hours to form an outer electrode layer (24);
s5, placing the catheter (1) with the outer electrode layer (24) in a sufficient amount of glue removing liquid, washing away the photoresist film to form a spacer layer (23) with air, connecting the outer electrode layer and the dielectric layer together through residual trace photoresist, connecting a conductive lead at a certain position of the outer electrode layer (24), and then attaching a packaging layer (25) to form the miniature pressure sensor.
Further, the preparation process of the ionic gel stock solution comprises the following steps: mixing polyvinyl alcohol, water and phosphoric acid in proportion, gradually heating to 80-100 ℃ under the stirring condition until the mixed solution becomes clear and transparent, and then naturally cooling to room temperature to obtain an ionic gel stock solution; the mass ratio of the polyvinyl alcohol to the water to the phosphoric acid is 0.8-1.2: 8-10: 0.8-1.2.
Further, a thermal isolation film (3) is fixedly connected to the outer surface of the packaging layer, and the thermal isolation film (3) is formed by a spraying method and has a thickness of 0.001-0.500 mm; the thermal isolation film (3) is made of a material with mechanical flexibility and biological compatibility, and is made of parylene or polytetrafluoroethylene, the pressure sensor main body can generate a small amount of heat in the using process, the thermal isolation film has the temperature isolation effect, the generated heat is not prone to acting on blood vessels of a human body and damaging the blood vessels, and meanwhile, the thermal isolation film has good flexibility and is not prone to influencing the use of the catheter and the pressure sensor main body.
Further, the thickness of the conductive lead is 0.01-1.00 mm.
Further, the photoresist in S3 is selected to be compatible with the photoresist stripper solution, and preferably, but not limited to, a positive photoresist resin, which is a novolac formaldehyde called novolac resin, provides the adhesion and chemical resistance of the photoresist.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model has the substantive characteristics that: the utility model adopts the electrode layer in the form of film coating, which is directly fixed on the catheter or the guide wire by virtue of the flexibility of the catheter or the guide wire to form a coaxial ring shape, realizes the flexible attachment on a millimeter tube or a cylinder, can be bent along with the bending of the catheter, can not peel off, forms a capacitance type micro pressure sensor, has small influence on temperature and higher sensitivity relative to a resistance type pressure sensor, and can have great capacitance value change under the change of blood micro pressure; and the annular sensor is fixed at the head of the guide pipe, so that signals can be acquired on the contact surface of the whole sensor, almost no measuring blind area exists, the manufacturing cost is low, and the economical efficiency is high.
The utility model discloses a show the progress and be:
(1) the utility model forms the pressure sensor main body with the coaxial annular structure on the outer wall of the conduit, when the outer electrode layer is deformed by the external pressure, the outer electrode layer is inwards attached to the dielectric layer and the inner electrode layer to form the capacitor structure of the electrode/dielectric/electrode, and the butt joint area of the outer electrode layer and the inner electrode layer is changed along with the change of the external pressure, so that the capacity of the formed capacitor is changed, the specific change of the electric quantity is obtained through the external capacitance detection device, the numerical value of the external pressure is deduced and known, thereby realizing the purpose of detecting the change of the external pressure applied to the conduit in real time, and the pressure sensor main body has small size and thin thickness, and the structure material has mechanical flexibility, so that the appearance shape can be matched with the symmetrical cylindrical appearance of the conduit under different bending states, can be bent freely along with the conduit, so as to adapt to the application scene of intervening, the utility model discloses but not limited to detect the regional real-time blood pressure of pipe head in the intervention operation process.
(2) The utility model discloses well inner electrode layer and outer electrode layer all choose for use to have the film material of mechanical pliability and good electron conductivity concurrently, directly attach to on the pipe, and thickness is very thin, and the pliability can be followed the bending with the help of the flexibility of pipe well, realizes the device compliance requirement. The dielectric layer is made of a material with mechanical flexibility and good ion conductivity, preferably but not limited to a material such as an ionic gel polymer, the formed dielectric layer is formed by mutually connecting or winding polymer molecular chains to form a spatial network structure, structural gaps are filled with anions and cations serving as dispersion media, the network structure provides high tensile strength for the ionic gel, and simultaneously provides channels for the movement of ions, so that the requirements of the toughness and the ion conductivity of the ionic gel are met.
(3) The outer surface of the pressure sensor main body is fixedly connected with a thermal isolation membrane, the thermal isolation membrane is made of a material with mechanical flexibility and biological compatibility, preferably but not limited to the following materials such as parylene and polytetrafluoroethylene, the thermal isolation membrane is formed by a spraying method, the thickness is 0.001-0.500mm, a small amount of heat can be generated in the use process of the pressure sensor main body, the thermal isolation membrane has the temperature isolation effect, the generated heat is not prone to acting on blood vessels of a human body and damaging the blood vessels, and meanwhile, the thermal isolation membrane has good flexibility and is not prone to influencing the use of the catheter and the pressure sensor main body.
Drawings
FIG. 1 is a schematic view of the structure of the present invention;
FIG. 2 is a cross-sectional view of the present invention;
fig. 3 is a schematic structural diagram of the pressure sensor main body of the present invention;
fig. 4 is a flow chart of the manufacturing process of the pressure sensor main body according to the present invention.
The reference numbers in the figures illustrate:
1 conduit, 2 pressure sensor main body, 21 inner electrode layer, 22 dielectric layer, 23 spacing layer, 24 outer electrode layer, 25 packaging layer and 3 thermal isolation film.
Detailed Description
The drawings in the embodiments of the present invention will be combined; the technical scheme in the embodiment of the utility model is clearly and completely described; obviously; the described embodiments are only some of the embodiments of the present invention; but not all embodiments, are based on the embodiments of the invention; all other embodiments obtained by a person skilled in the art without making any inventive step; all belong to the protection scope of the utility model.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "top/bottom", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "provided", "sleeved/connected", "connected", and the like are to be understood in a broad sense, such as "connected", which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example 1:
referring to fig. 1 and 2, a micro pressure sensor is a ring-shaped pressure sensor body 2 fixedly connected to an outer wall of a head of a catheter 1, the pressure sensor body is a capacitive pressure sensor, and a structure diagram of the pressure sensor body refers to fig. 3. The utility model discloses a pressure sensor main part can also be fixed on the head outer wall that adheres to the seal wire.
The pressure sensor body 2 comprises an inner electrode layer 21, a dielectric layer 22, a spacing layer 23, an outer electrode layer 24 and a packaging layer 25 which are sequentially distributed from inside to outside, wherein the inner electrode layer 21 is tightly attached to the outer wall of the guide pipe 1, the dielectric layer 22 is tightly attached to the outer surface of the inner electrode layer 21, the spacing layer 23 is positioned between the dielectric layer 22 and the outer electrode layer 24, the packaging layer 25 is tightly attached to the outer surface of the outer electrode layer 24, the pressure sensor body 2 further comprises conductive leads respectively connected with the inner electrode layer 21 and the outer electrode layer 24, the conductive leads are respectively led out from certain positions of the inner electrode layer and the outer electrode layer, are made of a biocompatible material or are wrapped by a biocompatible material, and are adhered with the guide pipe and connected with an. The spacer layer 23 can be completely filled with air, or alternatively, the spacer layer can be filled with an incomplete air layer of a support structure intermittently distributed, wherein the support structure is made of a non-conductive material.
The inner electrode layer 21 and the outer electrode layer 24 are both made of a material having both mechanical flexibility and good electronic conductivity, the stretching amplitude is consistent with that of the conduit, the conductivity is good, and the conductivity is high, preferably but not limited to the following materials, such as a metal coating film or a graphene film or a carbon nanotube film or a silver nanowire film; the dielectric layer 22 is made of a material having both mechanical flexibility and good ion conductivity, the stretching range is consistent with that of the conduit, the ions have good mobility in the dielectric solution, similar to conductivity, and strong ability of transferring ions, and the material is preferably, but not limited to, a material such as an ionic gel polymer. The materials of the inner electrode layer 21 and the outer electrode layer 24 may be the same or different.
The utility model forms the pressure sensor main body with the coaxial annular structure on the outer wall of the guide pipe, when the outer electrode layer is deformed by external pressure, the outer electrode layer is attached to the dielectric layer and the inner electrode layer inward to form an electrode/dielectric/electrode capacitor structure, and the butt joint area of the outer electrode layer and the inner electrode layer changes with the change of the external pressure, so that the capacity of forming the capacitor changes, the capacitance detection device obtains the specific change of the electric quantity, deduces and knows the numerical value of the external pressure, realizes the purpose of detecting the change of the external pressure applied to the conduit in real time, and the pressure sensor has small size and thin thickness, the structural material has mechanical flexibility, so that the appearance shape of the catheter can be matched with the symmetrical cylindrical appearance of the catheter under different bending states, can be bent randomly along with the catheter, the utility model discloses but can be applied to but not limited to detect the regional real-time blood pressure of catheter head in the intervention operation process.
The utility model provides a diameter of pipe is about 0.5-3mm, and the whole diameter behind the fixed miniature pressure sensor of pipe head adds thick 0.01-2mm, and length can artificial control around miniature pressure sensor dips in the length of getting when making and controls, and the length of dipping in this embodiment is 3 cm.
Referring to fig. 4, the method for manufacturing the micro pressure sensor includes:
s1, stirring the graphene ink uniformly, inverting the graphite ink into a beaker, plugging a PFA plastic (soluble polytetrafluoroethylene) plug into a pipe orifice at one end of the guide pipe 1, blocking the pipe orifice, vertically immersing one end of the guide pipe 1 with the PFA plastic plug into the graphene ink, vertically pulling out the guide pipe after dipping, forming a film by naturally drying for 10-14 hours to form an inner electrode layer 21, and connecting a conductive lead wire at a certain position of the inner electrode layer 21, wherein the thickness of the conductive lead wire is 0.01-1.00 mm;
the single-layer thickness of the graphene is only 0.335nm, the graphene is also the toughest material, and the breaking strength is 200 times higher than that of the best steel; meanwhile, the catheter has good elasticity, the stretching amplitude is not less than that of the catheter, the stretching amplitude influences the capability of following the deformation of the catheter and can reach 20% of the size of the catheter.
S2, vertically immersing the catheter 1 coated with the inner electrode layer 21 into the ionic gel stock solution, vertically pulling out the ionic gel stock solution after dipping, and naturally drying for 3-4 hours to volatilize most of water in the coated ionic gel stock solution to form the dielectric layer 22 in a gel state.
S3, under the exposure condition, taking enough photoresist in a beaker, vertically placing the catheter 1 with the dielectric layer 22 in the photoresist, vertically pulling out the photoresist after dipping the photoresist, standing for 10-15 minutes, and drying for 2-4 minutes under the temperature of 80-90 ℃ (the temperature is not higher than the failure temperature of the ionic gel, and the capacitance cannot be formed after the failure), so that the photoresist film is solidified; under the drying temperature, the ionic gel can be ensured not to lose efficacy, namely, the dielectric layer does not lose efficacy;
s4, vertically placing the catheter 1 coated with the photoresist film in graphene conductive ink under an exposure condition, wherein the graphene conductive ink is produced by Deyang alkene carbon technology limited, is vertically pulled out after being dipped, and is naturally air-dried for 10-14 hours to form a film so as to form an outer electrode layer 24;
s5, placing the catheter 1 with the outer electrode layer 24 in a sufficient glue removing solution, washing off the whole photoresist film to form a spacer layer 23 with air, connecting a conductive lead at a certain position of the outer electrode layer 24, and then attaching a packaging layer 25 to complete the preparation of the pressure sensor main body 2;
s5, spraying a thermal isolation film 3 outside the packaging layer, and removing the PFA plastic plug to form the miniature pressure sensor.
In step S3, the photoresist is selected to be compatible with the photoresist remover, preferably but not limited to, such as positive photoresist resin, which is a novolac formaldehyde called novolac resin, and has good adhesion and chemical resistance.
The utility model can also adopt other film materials when preparing the inner electrode layer or the outer electrode layer, adopts the electroplating mode to attach on the catheter or the photoresist when selecting the metal coating material as the electrode layer material, and adopts the wrapping mode when selecting the carbon nanotube film as the electrode layer material; the silver nanowire film is obtained by dipping in the same process as the graphene film when being used as an electrode layer material. The catheter or guidewire is made of a polymeric material, preferably, but not limited to, such materials as aminosilicone, polyvinylpyrrolidone, and polyurethane.
The sensitivity of the pressure sensor body 2 is inversely proportional to the thickness of the spacer layer 23, which in this example is 0.3 mm. Under the condition of meeting the measurement requirement, the thickness of the spacing layer 23 should be the minimum value, so the thickness of the formed photoresist film is reduced to the greatest extent, the dipping amount of the photoresist is strictly controlled, the dipping amount of the photoresist is different according to the surface adhesive force of the photoresist, namely the viscosity degree of the photoresist, the photoresist of different types can be adopted, and the surface adhesive force and the viscosity degree of the photoresist of different types are different. Or after the photoresist is dipped, the photoresist is vertically swung up and down to swing the redundant photoresist to control the adhesion amount of the photoresist.
The preparation method of the ionic gel stock solution in the step S2 comprises the following steps: mixing polyvinyl alcohol, water and phosphoric acid according to the proportion of 1: 9: 1, gradually heating to 80-100 ℃ under the stirring condition until the mixed solution becomes clear and transparent, and then naturally cooling to room temperature to obtain the ionic gel stock solution.
The formed dielectric layer 22 is formed by the mutual connection or winding of polymer molecular chains to form a space network structure, the structural gaps are filled with anions and cations serving as dispersion media, and the network structure provides higher tensile strength for the ionic gel and provides channels for the movement of ions.
The formed outer electrode layer 24 is a surface layer coupling driving electrode and senses the change of the environmental pressure; the formed inner electrode layer 21 is a bottom coupling induction electrode, and forms a counter coupling electrode with the outer electrode layer 24 to collect electric signals, when the outer electrode layer 24 is deformed by sensing pressure, the capacitance between the inner electrode layer 21 and the outer electrode layer 24 will be changed.
Referring to fig. 2, a thermal isolation film 3 is fixedly connected to an outer surface of a pressure sensor main body 2, the thermal isolation film 3 is made of a material having both mechanical flexibility and biocompatibility, the stretching range is consistent with that of a catheter, preferably but not limited to a material such as parylene and polytetrafluoroethylene, the thermal isolation film 3 is formed by a spraying method, the thickness is 0.001-0.500mm, a small amount of heat can be generated by the pressure sensor main body 2 in the using process, the thermal isolation film 3 has a temperature isolating function, the generated heat is not prone to act on blood vessels of a human body, damage to the blood vessels is avoided, and meanwhile, the thermal isolation film 3 has good flexibility and is not prone to influence on use of the catheter 1 and the pressure sensor main body 2.
The utility model provides an annular miniature pressure sensor, the response precision is high, and the measuring area wide range does not have the measurement blind area, can regard as the general device of intervention operation treatment, impels the automatic development of injecting equipment of intelligent medicine for improve the intelligent level and the reliability of heart and cerebral vessels and stomach minimal access surgery robot, wide application prospect has.
The above description is only the preferred embodiment of the present invention; however, the scope of protection of the present invention is not limited thereto; any person skilled in the art is within the technical scope of the present disclosure; according to the technical scheme of the utility model and the improvement conception, equivalent substitution or change is carried out; are all covered by the protection scope of the utility model.
The utility model discloses the nothing is mentioned the part and is applicable to prior art.
Claims (5)
1. The miniature pressure sensor is characterized by comprising an annular pressure sensor body fixedly connected to the outer wall of a millimeter-scale conduit, wherein the pressure sensor body is a capacitive pressure sensor and comprises an inner electrode layer with electronic conductivity, a dielectric layer with ionic conductivity, a non-conductive spacing layer, an outer electrode layer with electronic conductivity and a packaging layer which are sequentially distributed from inside to outside, the stretching amplitude of the inner electrode layer, the dielectric layer, the spacing layer, the outer electrode layer and the packaging layer is not less than that of the conduit, and the inner electrode layer and the outer electrode layer are respectively connected with a conductive lead.
2. The miniature pressure sensor of claim 1, wherein: and a biocompatible thermal isolation film with the stretching amplitude consistent with that of the conduit is sprayed on the outer surface of the packaging layer.
3. The miniature pressure sensor of claim 2, wherein: the thickness of the thermal isolation film (3) is 0.001-0.500 mm.
4. The miniature pressure sensor of claim 1, wherein: the inner electrode layer (21) and the outer electrode layer (24) are metal coating films, graphene films, carbon nanotube films or silver nanowire films; the dielectric layer (22) is an ionic gel polymer.
5. The miniature pressure sensor of claim 1, wherein: the diameter of the conduit is 0.5-3mm, the overall diameter of the conduit after the miniature pressure sensor is fixed is increased by 0.01-2mm, and the thickness of the conductive lead is 0.01-1.00 mm.
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| CN201921594346.3U CN211158037U (en) | 2019-09-24 | 2019-09-24 | Miniature pressure sensor |
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| CN201921594346.3U CN211158037U (en) | 2019-09-24 | 2019-09-24 | Miniature pressure sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110575600A (en) * | 2019-09-24 | 2019-12-17 | 河北工业大学 | Be applied to miniature pressure sensor of interventional therapy integration in pipe head outer wall |
| CN113155326A (en) * | 2021-03-09 | 2021-07-23 | 河北工业大学 | Flexible self-supporting fiber woven touch sensor |
| CN117379057A (en) * | 2023-12-13 | 2024-01-12 | 北京北琪医疗科技股份有限公司 | Multi-contact nerve electrode, manufacturing method thereof and nerve electrode monitoring structure |
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2019
- 2019-09-24 CN CN201921594346.3U patent/CN211158037U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110575600A (en) * | 2019-09-24 | 2019-12-17 | 河北工业大学 | Be applied to miniature pressure sensor of interventional therapy integration in pipe head outer wall |
| CN113155326A (en) * | 2021-03-09 | 2021-07-23 | 河北工业大学 | Flexible self-supporting fiber woven touch sensor |
| CN117379057A (en) * | 2023-12-13 | 2024-01-12 | 北京北琪医疗科技股份有限公司 | Multi-contact nerve electrode, manufacturing method thereof and nerve electrode monitoring structure |
| CN117379057B (en) * | 2023-12-13 | 2024-03-08 | 北京北琪医疗科技股份有限公司 | Multi-contact nerve electrode, manufacturing method thereof and nerve electrode monitoring structure |
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