CN211142160U

CN211142160U - Chamber gas flow choking device of vacuum coating machine

Info

Publication number: CN211142160U
Application number: CN201922307331.0U
Authority: CN
Inventors: 阮志明; 封文炎; 吴敬超; 林敏�; 赖鸿飞; 廖俊峰; 王波; 魏城峰
Original assignee: Shenzhen Zhenghe Zhongxin Co ltd
Current assignee: Shenzhen Zhenghe Zhongxin Co ltd
Priority date: 2019-12-19
Filing date: 2019-12-19
Publication date: 2020-07-31
Anticipated expiration: 2029-12-19

Abstract

The utility model relates to a vacuum coating equipment technical field just discloses a gaseous choked flow device of vacuum coating machine's cavity, including the vacuum cavity, the both sides of vacuum cavity communicate respectively has material loading chamber and unloading chamber, the opening is all seted up to one side that the vacuum cavity was kept away from to material loading chamber and unloading chamber, and material loading chamber and unloading chamber are close to open-ended position rotation and are connected with sealed lid, one side lateral wall in material loading chamber and unloading chamber all has the vacuum pump through the trachea intercommunication, and material loading chamber and unloading chamber are close to one side of vacuum cavity and all rotate and be connected with the baffle. This kind of gaseous choked flow device of vacuum coating machine's cavity through setting up rubber membrane cooperation touching ball, can open the baffle again under the unanimous condition of vacuum and vacuum cavity in material loading chamber and unloading chamber, and the outside air gets into the vacuum cavity when avoiding material from top to bottom, avoids repeatedly carrying out the evacuation operation to the vacuum cavity, improves production efficiency, avoids outside dust and impurity to get into the vacuum cavity simultaneously, improves the coating film quality.

Description

Chamber gas flow choking device of vacuum coating machine

Technical Field

The utility model relates to the technical field of vacuum coating equipment, in particular to a chamber gas flow blocking device of a vacuum coating machine.

Background

Vacuum coating is an important aspect in the field of vacuum application, and provides a new process for preparing a film for scientific research and practical production by using a physical or chemical method based on a vacuum technology and absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like. Briefly, a method of evaporating or sputtering a metal, an alloy or a compound in a vacuum to solidify and deposit it on an object to be coated is called vacuum coating.

In the prior art, in the process of loading and unloading, a valve of a cavity needs to be opened and closed to communicate the vacuum cavity with the outside, so that air enters the vacuum cavity, vacuumizing operation needs to be repeated, production efficiency is affected, dust and impurities in the air easily enter the vacuum cavity, and coating quality is affected.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model provides a vacuum coating machine's gaseous choked flow device of cavity possesses the gas tightness good, avoid relapseing evacuation operation, convenient to use easy operation, dust gets into advantages such as coating machine in when avoiding the pressure release, has solved the problem that the background art provided.

(II) technical scheme

For the purpose that realizes that above-mentioned gas tightness is good, avoid relapseing evacuation operation, convenient to use easy operation, dust entering coating machine when avoiding the pressure release, the utility model provides a following technical scheme: a chamber gas flow choking device of a vacuum coating machine comprises a vacuum chamber, wherein a feeding chamber and a discharging chamber are respectively communicated with two sides of the vacuum chamber, openings are respectively arranged on one sides of the feeding chamber and the discharging chamber far away from the vacuum chamber, the positions of the feeding cavity and the blanking cavity close to the opening are rotationally connected with sealing covers, the side walls of one side of the feeding cavity and one side of the blanking cavity are both communicated with a vacuum pump through air pipes, and one sides of the feeding cavity and the discharging cavity close to the vacuum cavity are both rotatably connected with a baffle plate, the side wall of the upper end of the side wall of the baffle plate is embedded with a rubber film, and the side wall of the rubber membrane far away from the vacuum cavity is fixedly connected with a touch ball, the inner walls of the feeding cavity and the discharging cavity are both fixedly connected with pressure sensing switches, and the pressure sensing switch is abutted to the touch ball, the inner walls of the feeding cavity and the discharging cavity are fixedly connected with a hydraulic push rod, and the side wall of the hydraulic push rod is fixedly connected with the baffle.

Preferably, the upper end inner wall in material loading chamber, vacuum cavity and unloading chamber has all seted up the spout, and sliding connection has the horizontal pole that three levels set up in the spout, the vertical material support that sets up of lower extreme fixedly connected with of horizontal pole, and the equal fixedly connected with permanent magnet in both ends of horizontal pole.

Preferably, the side wall of the sealing cover is wrapped by a rubber sealing gasket, and a pressure release valve is embedded in the side wall of the sealing cover.

Preferably, tooth grooves are formed in the upper surfaces of the three cross rods, and gears meshed with the tooth grooves are rotationally connected to the upper surface of the feeding cavity.

Preferably, the periphery of the baffle is sleeved with a sealing gasket, and the baffle is made of non-magnetic metal.

Preferably, the side wall that material loading chamber and unloading chamber are close to the spout has all been seted up and has been stepped down the groove, and the groove of stepping down and baffle be interference fit.

(III) advantageous effects

Compared with the prior art, the utility model discloses possess following beneficial effect:

1. this kind of gaseous choked flow device of vacuum coating machine's cavity through setting up rubber membrane cooperation touching ball, can be in material loading chamber and unloading chamber under the unanimous condition of vacuum and vacuum chamber, and the touching ball touches pressure sensing switch and opens the baffle, and the outside air gets into the vacuum chamber when avoiding material from top to bottom, avoids repeatedly carrying out the evacuation operation to the vacuum chamber, improves production efficiency, avoids outside dust and impurity to get into the vacuum chamber in the while, improves the coating film quality.

2. This kind of gaseous choked flow device of vacuum coating machine's cavity through the cooperation that sets up a plurality of permanent magnets, can utilize the horizontal pole to go up the operation of unloading under the sealed circumstances of baffle not hindering, reduces sealed degree of difficulty, improves sealed effect, can better hold the coating film material of treating through setting up the material support, loads the material on the material support in advance and can reduce down time, improves production efficiency.

Drawings

Fig. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic view of the internal structure of the present invention;

FIG. 3 is a schematic sectional view of the present invention;

fig. 4 is a schematic structural view of the cross bar of the present invention;

fig. 5 is a schematic structural view of the middle baffle of the present invention.

In the figure: 1. a vacuum chamber; 2. a feeding cavity; 3. a blanking cavity; 4. a sealing cover; 5. a vacuum pump; 6. a baffle plate; 7. a rubber film; 8. touching the ball; 9. a pressure sensitive switch; 10. a hydraulic push rod; 11. a cross bar; 12. a material support; 13. a permanent magnet; 14. a tooth socket; 15. a gear; 16. a yielding groove.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, other embodiments obtained by a person of ordinary skill in the art without creative work all belong to the protection scope of the present invention.

Example 1

Referring to fig. 1-5, a chamber gas flow choking device of a vacuum coating machine comprises a vacuum chamber 1, two sides of the vacuum chamber 1 are respectively communicated with a feeding chamber 2 and a discharging chamber 3, one sides of the feeding chamber 2 and the discharging chamber 3 far away from the vacuum chamber 1 are respectively provided with an opening, the positions of the feeding chamber 2 and the discharging chamber 3 close to the openings are rotatably connected with a sealing cover 4, the side wall of the sealing cover 4 is wrapped with a rubber sealing gasket, the side wall of the sealing cover 4 is embedded with a pressure release valve, the sealing performance of the sealing cover 4 can be improved by arranging the rubber sealing gasket, external air can be conveyed into the feeding chamber 2 and the discharging chamber 3 through the pressure release valve before the sealing cover 4 is opened, the sealing cover 4 is prevented from being opened, the side wall of one side of the feeding chamber 2 and the discharging chamber 3 is respectively communicated with a vacuum pump 5 through an air pipe, and one sides of the feeding chamber 2 and the discharging chamber 3, the cover is equipped with sealed the pad all around of baffle 6, and the material of baffle 6 is non-magnetic metal, the upper end of baffle 6 is 45 inclined planes, and the lower surface of horizontal pole 11 also is 45 inclined planes, can drive horizontal pole 11 to remove suitable position when baffle 6 rises, supplementary material support 12 location, the lateral wall upper end lateral wall of baffle 6 inlays and is equipped with rubber membrane 7, rubber membrane 7 is natural rubber, the thickness of rubber membrane is greater than 5mm, and rubber membrane 7 keeps away from vacuum cavity 1's lateral wall fixedly connected with touching ball 8, the equal fixedly connected with pressure-sensitive switch 9 of the inner wall in material loading cavity 2 and unloading cavity 3, and pressure-sensitive switch 9 offsets with touching ball 8 and sets up, pressure-sensitive switch 9 and hydraulic push rod 10 electric connection, the equal fixedly connected with hydraulic push rod 10 of the inner wall in material loading cavity 2 and unloading cavity 3, and hydraulic push rod 10's lateral wall and baffle 6 fixed connection.

Example 2

Based on embodiment 1, as shown in fig. 2-4, the inner walls of the upper ends of the feeding cavity 2, the vacuum cavity 1 and the discharging cavity 3 are all provided with sliding grooves, and the sliding grooves are connected with three horizontally arranged cross bars 11 in a sliding manner, the lower ends of the cross bars 11 are fixedly connected with vertically arranged material supports 12, and both ends of the cross bars 11 are fixedly connected with permanent magnets 13, two adjacent permanent magnets 13 are in a repulsive state, the cross bars 11 can be driven to move by using the repulsive force of the permanent magnets 13, and the cross bars 11 are prevented from interfering the sealing of the feeding cavity 2 and the discharging cavity 3 by the baffle 6, the upper surfaces of the three cross bars 11 are provided with tooth sockets 14, the upper surface of the feeding cavity 2 is rotatably connected with a gear 15 meshed with the tooth sockets 14, a driving motor is fixedly connected in the feeding cavity 2, the driving end of the driving motor is fixedly connected with the gear 15, and the side walls of the feeding, and the yielding groove 16 and the baffle 6 are in interference fit, the yielding groove 16 is a strip-shaped groove, and the yielding groove 16 is perpendicular to the sliding groove.

The working principle is as follows: when vacuum coating is carried out, firstly, the same worker who carries out coating operation in the vacuum cavity 1 can place materials on the material support 12, then the relief valve is opened to inject air into the material cavity 2, so that the air pressure in the material cavity 2 is raised, the sealing cover 4 can be opened, the material support 12 is placed into the material cavity 2, at the moment, the cross rod 11 is clamped in a sliding groove, the tooth groove 14 is meshed with the gear 15, then the material cavity 2 and the material cavity 3 are closed, the vacuum pumping operation is carried out on the material cavity 2 and the material cavity 3 by starting the vacuum pump 5, because the air pressure in the vacuum cavity 1 is low, the rubber sleeve 7 is sunken towards the vacuum cavity 1 under the action of the air pressure, the air pressure of the material cavity 2 and the material cavity 3 is gradually reduced under the vacuum pumping operation of the vacuum pump 5, when the vacuum degrees in the material cavity 2 and the material cavity 3 are the same as the vacuum degree in the vacuum cavity 1, the rubber film 7 rebounds under the action of self elasticity and drives the touch ball 8 to press the, thus, the pressure induction switch 9 is activated and controls the hydraulic push rod 10 to drive the baffle 6 to move downwards, so that the feeding cavity 2, the vacuum cavity 1 and the discharging cavity 3 are communicated, then the driving motor is started, the gear 15 rotates and drives the cross rod 11 in the feeding cavity 2 to move towards the vacuum cavity 1 through the tooth spaces 14, and the permanent magnets 13 are fixed at both ends of the cross rod 11, so that the cross rod 11 in the vacuum cavity 1 drives the material support 12 to enter the discharging cavity 3 under the action of mutual repulsion force of the permanent magnets 13, the cross rod 11 in the feeding cavity 2 enters the vacuum cavity 1, then the hydraulic push rod 10 is controlled to move upwards, the baffle 6 assists the cross rod 11 in the vacuum cavity 1 to be positioned while moving upwards, and the baffle 6 seals the vacuum cavity 1 again, so that the vacuum coating machine can be started to perform vacuum coating operation, and a worker opens the relief valve again at the moment and then opens the sealing cover 4, and putting the loaded material support 12 into the feeding cavity 2, and taking out the material after the coating in the discharging cavity 3 is finished.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A chamber gas flow resisting device of a vacuum coating machine comprises a vacuum chamber (1);

the method is characterized in that:

the vacuum feeding device is characterized in that two sides of the vacuum cavity (1) are respectively communicated with a feeding cavity (2) and a discharging cavity (3), openings are respectively formed in one sides of the feeding cavity (2) and the discharging cavity (3) far away from the vacuum cavity (1), a sealing cover (4) is rotatably connected to the positions, close to the openings, of the feeding cavity (2) and the discharging cavity (3), the side walls of one sides of the feeding cavity (2) and the discharging cavity (3) are respectively communicated with a vacuum pump (5) through air pipes, a baffle (6) is rotatably connected to one side, close to the vacuum cavity (1), of the feeding cavity (2) and the discharging cavity (3), a rubber film (7) is embedded into the side wall at the upper end of the side wall of the baffle (6), a touch ball (8) is fixedly connected to the side wall, far away from the vacuum cavity (1), of the rubber film (7), a pressure sensing switch (9) is fixedly connected to the inner walls of the feeding cavity (2) and the discharging cavity (3), and the pressure, the inner walls of the feeding cavity (2) and the discharging cavity (3) are fixedly connected with a hydraulic push rod (10), and the side wall of the hydraulic push rod (10) is fixedly connected with the baffle (6).

2. The chamber gas flow resisting device of the vacuum coating machine as claimed in claim 1, wherein: the material loading device is characterized in that chutes are formed in the inner walls of the upper ends of the material loading cavity (2), the vacuum cavity (1) and the material unloading cavity (3), the chutes are internally connected with three horizontal rods (11) which are horizontally arranged in the chutes in a sliding mode, the lower end of each horizontal rod (11) is fixedly connected with a material support (12) which is vertically arranged, and the two ends of each horizontal rod (11) are fixedly connected with permanent magnets (13).

3. The chamber gas flow resisting device of the vacuum coating machine as claimed in claim 1, wherein: the side wall of the sealing cover (4) is wrapped by a rubber sealing gasket, and a pressure release valve is embedded in the side wall of the sealing cover (4).

4. The chamber gas flow resisting device of the vacuum coating machine as claimed in claim 2, wherein: tooth grooves (14) are formed in the upper surfaces of the three cross rods (11), and gears (15) meshed with the tooth grooves (14) are rotatably connected to the upper surface of the feeding cavity (2).

5. The chamber gas flow resisting device of the vacuum coating machine as claimed in claim 1, wherein: the periphery of the baffle (6) is sleeved with a sealing gasket, and the baffle (6) is made of non-magnetic metal.

6. The chamber gas flow resisting device of the vacuum coating machine as claimed in claim 2, wherein: the side wall that material loading chamber (2) and unloading chamber (3) are close to the spout has all been seted up and has been stepped down groove (16), and step down groove (16) and baffle (6) and be interference fit.