CN211120211U - Cooling circulation structure for vacuum ion coating machine - Google Patents
Cooling circulation structure for vacuum ion coating machine Download PDFInfo
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- CN211120211U CN211120211U CN201922112053.3U CN201922112053U CN211120211U CN 211120211 U CN211120211 U CN 211120211U CN 201922112053 U CN201922112053 U CN 201922112053U CN 211120211 U CN211120211 U CN 211120211U
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- jar
- cooling
- fixed mounting
- vacuum ion
- tank body
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Abstract
The utility model discloses a cooling cycle structure for vacuum ion coating machine, including the cooler bin, the last surface rear side fixed mounting of cooler bin has the back jar of body, the front side of the back jar of body articulates there is the preceding jar of body, the internally mounted of the back jar of body and the preceding jar of body has the cooling shell, the cooling shell includes the working chamber, the even fixed mounting of circumference surface of working chamber has the fin, the outside fixed mounting of fin is at the circumference internal surface of the back jar of body and the preceding jar of body, the internal fixed surface of the back jar of body and the preceding jar of body installs the heat preservation, the feed liquor hole has been seted up with the upper surface of the preceding jar of the back jar of body, the back jar of body. Compared with the prior art, the cooling device can make the cooling liquid fully contact with the working cavities of the rear tank body and the front tank body through the cooling shell and other structures, and has good cooling effect and high efficiency.
Description
Technical Field
The utility model relates to a vacuum ion coating machine technical field specifically is a cooling cycle structure for vacuum ion coating machine.
Background
The vacuum coating machine mainly refers to a kind of coating film which needs to be carried out under higher vacuum degree, the material which needs to be coated is called a substrate, the material which is coated is called a target material, the substrate and the target material are in a vacuum chamber, the evaporation coating is generally to heat the target material, so that the surface component is evaporated in the form of atomic group or ion and is deposited on the surface of the substrate, and a film is formed through the film forming process (scattered point-island structure-labyrinth structure-layered growth).
Vacuum coating machine can produce a large amount of heats in the work, need timely effectual cooling to ensure its normal work, present common cooling device is at vacuum coating machine cavity outside surface welding pipe, leads to the cooling water at the pipe and cools off, this kind of structure, cooling water and the inside cavity direct contact of vacuum coating machine, it is slow to lead to cooling rate, inefficiency, in order to solve above-mentioned problem, we provide a cooling cycle structure for vacuum ion coating machine.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a cooling cycle structure for vacuum ion plating machine to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a cooling cycle structure for vacuum ion coating machine, includes the cooler bin, the upper surface rear side fixed mounting of cooler bin has the back jar of body, the front side of the back jar of body articulates there is the preceding jar of body, the internally mounted of the back jar of body and the preceding jar of body has the cooling shell, the cooling shell includes the working chamber, the even fixed mounting in circumference surface of working chamber has the fin, the outside fixed mounting of fin is at the circumference internal surface of the back jar of body and the preceding jar of body, the internal fixed mounting of the back jar of body and the preceding jar of body has the heat preservation, the feed liquor hole has been seted up with the upper surface of the preceding jar of body to the back jar of body, the back jar of body has been.
Preferably, the cooling box comprises a box body, a refrigerator is fixedly mounted on the right side inside the box body, a water storage tank is fixedly mounted on the left side of the refrigerator, and pumps are fixedly mounted at the front end and the rear end of the left side of the water storage tank.
Preferably, the rear side of the liquid outlet hole is fixedly provided with an electromagnetic valve.
Preferably, the electromagnetic valve is fixedly assembled with the water storage tank through a hose, the liquid inlet hole in the rear side of the front tank body is fixedly assembled with the water outlet of the front side pump through a hose, and the liquid inlet hole in the rear side of the rear tank body is fixedly assembled with the water outlet of the rear side pump through a hose.
Preferably, the pump, the refrigerator and the electromagnetic valve are electrically connected with an external control box through leads.
Compared with the prior art, the beneficial effects of the utility model are that: this a cooling cycle structure for vacuum ion coating machine can make coolant liquid fully contact with the working chamber of the back jar of body, the preceding jar of body through cooling shell isotructure, and the cooling effect is good, efficient.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic sectional view of the structure of the cooling shell of the present invention.
In the figure: 1 cooling box, 11 pumps, 12 boxes, 13 water storage boxes, 14 refrigerators, 2 cooling shells, 21 liquid inlet holes, 22 working cavities, 23 cooling fins, 24 heat preservation layers, 25 liquid outlet holes, 3 rear tank bodies, 4 front tank bodies and 5 electromagnetic valves.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1 and fig. 2, the present invention provides a technical solution: the utility model provides a cooling cycle structure for vacuum ion coating machine, including cooler bin 1, the upper surface rear side fixed mounting of cooler bin 1 has the back jar of body 3, the front side of the back jar of body 3 articulates there is preceding jar of body 4, the internally mounted of the back jar of body 3 and preceding jar of body 4 has cooling shell 2, cooling shell 2 includes working chamber 22, the even fixed mounting of circumference surface of working chamber 22 has fin 23, the outside fixed mounting of fin 23 is at the circumference internal surface of the back jar of body 3 with preceding jar of body 4, the internal surface fixed mounting of the back jar of body 3 with preceding jar of body 4 has heat preservation 24, feed liquor hole 21 has been seted up with the upper surface of preceding jar of body 4 to the back jar of body 3, the back jar of body 3 has seted up out liquid hole.
The back jar of body 3 of handing-over installation is conveniently opened with preceding jar of body 4, can absorb the heat on the working chamber 22 through the inside fin 23 of cooling shell 2, the coolant liquid passes through feed liquor hole 21 and gets into the working chamber 22 respectively with the back jar of body 3, preceding jar of body 4 within a definite time the space that forms, after absorbing the heat on working chamber 22, the fin 23, through going out liquid hole 25 discharge, heat preservation 24 can prevent that the temperature of coolant liquid from the side loss of the back jar of body 3 and preceding jar of body 4, influence the cooling effect.
The cooling tank 1 comprises a tank body 12, a refrigerator 14 is fixedly mounted on the right side inside the tank body 12, a water storage tank 13 is fixedly mounted on the left side of the refrigerator 14, and pumps 11 are fixedly mounted at the front end and the rear end of the left side of the water storage tank 13.
The cooling liquid can be stored in the water storage tank 13 in the cooling tank 1, the refrigerating machine 14 can cool the cooling liquid in the water storage tank 13, and the pumps 11 on the front and rear sides can respectively convey the cooling liquid in the water storage tank 13 to the cooling shell 2 in the rear tank 3 and the front tank 4.
The back side of the liquid outlet 25 is fixedly provided with an electromagnetic valve 5.
The residence endothermic time of the cooling liquid in the cooling shell 2 can be controlled by the electromagnetic valve 5.
The electromagnetic valve 5 is fixedly assembled with the water storage tank 13 through a hose, the liquid inlet hole 21 at the rear side of the front tank body 4 is fixedly assembled with the water outlet of the front side pump 11 through a hose, and the liquid inlet hole 21 at the rear side of the rear tank body 3 is fixedly assembled with the water outlet of the rear side pump 11 through a hose.
The electromagnetic valve 5 is fixedly assembled with the water storage tank 13 through a hose, and can discharge the heat-absorbed cooling liquid back to the water storage tank 13 through the hose for continuous cooling; the cooling water can be pumped out of the water storage tank 13 by the pump 11 and conveyed into the cooling shell 2 through the hose through the liquid inlet holes 21 at the rear sides of the front tank 4 and the rear tank 3 for cooling.
The pump 11, the refrigerator 14 and the electromagnetic valve 5 are electrically connected with an external control box through leads.
The external control box can supply power and control the working states of the pump 11, the refrigerator 14 and the electromagnetic valve 5.
The working principle is as follows:
the external control box controls the refrigerator 14 to cool the cooling liquid in the water storage tank 13 for standby storage, when cooling is needed, the electromagnetic valve 5 is in a closed state, the pumps 11 on the front side and the rear side can respectively convey the cooling liquid in the water storage tank 13 to the working cavity 22 through the hose and the liquid inlet hole 21 to form a gap between the working cavity 22 and the rear tank body 3 and the front tank body 4, the electromagnetic valve 5 is opened after heat on the working cavity 22 and the radiating fins 23 is absorbed for a period of time, the heat-absorbing cooling liquid is discharged back to the water storage tank 13 through the hose, and the cooling is continued for standby through the refrigerator 14.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (5)
1. The utility model provides a cooling cycle structure for vacuum ion coating machine which characterized in that: the cooling device comprises a cooling box (1), wherein a rear tank body (3) is fixedly arranged on the rear side of the upper surface of the cooling box (1), a front tank body (4) is hinged to the front side of the rear tank body (3), and cooling shells (2) are arranged inside the rear tank body (3) and the front tank body (4);
cooling shell (2) include working chamber (22), the even fixed mounting of circumference surface of working chamber (22) has fin (23), the outside fixed mounting of fin (23) is at the circumference internal surface of the back jar of body (3) and the preceding jar of body (4), the internal fixed mounting of the back jar of body (3) and the preceding jar of body (4) has heat preservation (24), feed liquor hole (21) have been seted up with the upper surface of the preceding jar of body (4) to the back jar of body (3), liquid hole (25) have been seted up with the rear surface lower extreme of the preceding jar of body (4) to the back jar of body (3).
2. The cooling circulation structure for vacuum ion plating machine as claimed in claim 1, wherein: the cooling box (1) comprises a box body (12), a refrigerator (14) is fixedly mounted on the right side inside the box body (12), a water storage tank (13) is fixedly mounted on the left side of the refrigerator (14), and pumps (11) are fixedly mounted at the front end and the rear end of the left side of the water storage tank (13).
3. The cooling circulation structure for vacuum ion plating machine as claimed in claim 1, wherein: the rear side of the liquid outlet hole (25) is fixedly provided with an electromagnetic valve (5).
4. The cooling circulation structure for vacuum ion plating machine as claimed in claim 3, wherein: the electromagnetic valve (5) is fixedly assembled with the water storage tank (13) through a hose, the liquid inlet hole (21) at the rear side of the front tank body (4) is fixedly assembled with the water outlet of the front side pump (11) through a hose, and the liquid inlet hole (21) at the rear side of the rear tank body (3) is fixedly assembled with the water outlet of the rear side pump (11) through a hose.
5. The cooling circulation structure for vacuum ion plating machine as claimed in claim 2, wherein: the pump (11), the refrigerator (14) and the electromagnetic valve (5) are electrically connected with an external control box through leads.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922112053.3U CN211120211U (en) | 2019-12-01 | 2019-12-01 | Cooling circulation structure for vacuum ion coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922112053.3U CN211120211U (en) | 2019-12-01 | 2019-12-01 | Cooling circulation structure for vacuum ion coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211120211U true CN211120211U (en) | 2020-07-28 |
Family
ID=71700550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922112053.3U Active CN211120211U (en) | 2019-12-01 | 2019-12-01 | Cooling circulation structure for vacuum ion coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211120211U (en) |
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2019
- 2019-12-01 CN CN201922112053.3U patent/CN211120211U/en active Active
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