CN211086516U - Chip detection device for extremely low temperature measurement - Google Patents
Chip detection device for extremely low temperature measurement Download PDFInfo
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- CN211086516U CN211086516U CN201921618181.9U CN201921618181U CN211086516U CN 211086516 U CN211086516 U CN 211086516U CN 201921618181 U CN201921618181 U CN 201921618181U CN 211086516 U CN211086516 U CN 211086516U
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- objective table
- probe
- low temperature
- cavity
- detection device
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Abstract
The utility model discloses a chip detection device for extremely low temperature measurement includes objective table, microscope and display module, the microscope is located the objective table top, the microscope is connected with the display module, the objective table includes the pedestal, establishes accommodating cavity, objective table body and a plurality of probe module on the pedestal, accommodating cavity and pedestal an organic whole set up, the objective table body is installed in accommodating the cavity, accommodating cavity upper end cover is equipped with transparent cover, a plurality of probe module with accommodating the cavity intercommunication, probe module includes telescopic guide pin bushing, installs adjusting device on the guide pin bushing and installs the probe on adjusting device, the probe can support the objective table body surface; the utility model discloses a well kenozooecium and through-hole have been seted up on the objective table body to through well kenozooecium and through-hole with liquid nitrogen output, reduce the objective table body in with chip upper surface temperature reduce lead utmost point temperature state, improved the detection precision.
Description
Technical Field
The utility model relates to a semiconductor detects technical field, especially relates to a chip detection device for extremely low temperature measurement.
Background
With the advance of technology, the application of integrated circuits is very wide, and the applied products or chip volumes are smaller and smaller, and the necessary inspection of the circuit portion or surface portion of the chip is an indispensable step. When various performances of the chip are detected, a professional detection instrument is required to detect the performances, and the chip is usually placed on a stage of the detection instrument to detect the performances. The current objective table tests the performance of the chip under the condition of extremely low temperature, and under the condition of re-entering liquid nitrogen, the temperature of the chip is close to the extremely high temperature due to conduction only through the objective table, but the temperature conduction cannot achieve the test purpose under the condition without consideration, and the test precision is not high. Therefore, how to increase the temperature of the chip to an extreme temperature and improve the test accuracy is a technical problem that needs to be solved at present.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a main aim at overcomes prior art's above shortcoming and not enough, provides a chip detection device for extremely low temperature is measured, improves the measuring accuracy.
The utility model provides a chip detection device for extremely low temperature measurement includes objective table, microscope and display module, the microscope is located the objective table top, the microscope is connected with the display module, the objective table includes the pedestal, establishes acceping cavity, objective table body and a plurality of probe module on the pedestal, it sets up with the pedestal is integrative to accept the cavity, the objective table body is installed in acceping the cavity, it is equipped with transparent lid to accept the cavity upper end cover, a plurality of probe module with accept the cavity intercommunication, the probe module includes telescopic guide pin bushing, installs adjusting device on the guide pin bushing and installs probe on the adjusting device, the probe can support against objective table body surface.
In one embodiment, one end of the probe module is communicated with the accommodating cavity, and the other end of the probe module is provided with a closable air pressure balance valve.
In one embodiment, the outer edge of the guide sleeve is in a threaded shape, the guide sleeve is made of aluminum, and the guide sleeve is used for adjusting the front-back distance of the probe.
In one embodiment, the adjustment means comprises a vertical adjustment knob and a horizontal adjustment knob.
In one embodiment, the object stage body comprises a base and a fixing part arranged on the upper surface of the base, a hollow part is arranged in the middle of the base, the fixing part extends downwards to form a plurality of through holes, the through holes are communicated with the hollow part, and a connecting hole is arranged on one side of the base and is communicated with the hollow part.
In one embodiment, the base upper cover is provided with a sealing cover, and the sealing cover is provided with a closable channel.
In one embodiment, the base is cylindrical, the upper surface of the base is provided with a plurality of circular grooves, the centers of the circular grooves coincide with the center of the base, the through holes are distributed at the bottoms of the circular grooves in a circular array, and the fixed portions are defined by the circular grooves.
In one embodiment, the circular grooves include a first circular groove and a second circular groove, the second circular groove having a perimeter greater than a perimeter of the first circular groove, the first circular groove defining the retainer; the through hole at the bottom of the first circular groove is a first through hole, the through hole at the bottom of the second circular groove is a second through hole, and the perimeter of the first through hole is larger than that of the second through hole.
The utility model discloses a chip detection device for extremely low temperature measurement includes objective table, microscope and display module, the microscope is located the objective table top, the microscope is connected with the display module, the objective table includes the pedestal, establishes accommodating cavity, objective table body and a plurality of probe module on the pedestal, accommodating cavity and pedestal an organic whole set up, the objective table body is installed in accommodating the cavity, accommodating cavity upper end cover is equipped with transparent cover, a plurality of probe module with accommodating the cavity intercommunication, probe module includes telescopic guide pin bushing, installs adjusting device on the guide pin bushing and installs the probe on adjusting device, the probe can support the objective table body surface; the utility model discloses a well kenozooecium and through-hole have been seted up on the objective table body to through well kenozooecium and through-hole with the liquid nitrogen output, will paste the chip upper surface temperature who establishes on the fixed part when reducing the objective table body and reduce and lead utmost point temperature state, improved the detection precision, the utility model discloses simple structure is practical, has extensive usage in the detection area.
Drawings
FIG. 1 is a schematic structural diagram of a chip detection device for very low temperature measurement according to the present invention;
FIG. 2 is a partial cross-sectional view of the chip detection device for very low temperature measurements shown in FIG. 1;
FIG. 3 is a schematic view of a part of the chip detection device for very low temperature measurement shown in FIG. 1;
FIG. 4 is a schematic view of a part of the chip detection device for very low temperature measurement shown in FIG. 1;
FIG. 5 is a cross-sectional view of the chip detection device for very low temperature measurement shown in FIG. 3.
Detailed Description
In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. The preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1, the present invention provides a chip detection device for very low temperature measurement, which includes an object stage 1, a microscope 2 and a display module (not shown), wherein the display module is a computer display screen connected with the microscope 2; the microscope 2 is positioned above the objective table 1, the objective table 1 comprises a pedestal 11, an accommodating cavity 12 arranged on the pedestal 11, an objective table body 13 and a plurality of probe modules 14, the accommodating cavity 12 and the pedestal 11 are integrally arranged, the objective table body 13 is arranged in the accommodating cavity 12, a transparent cover body 15 is arranged on the upper end cover of the accommodating cavity 12, and the transparent cover body 15 is used for observation in the detection process; one side of the accommodating cavity 15 is connected with a liquid nitrogen device 3; the plurality of probe modules 14 are communicated with the accommodating cavity 12, the number of the probe modules 14 is not less than two, each probe module 14 comprises a telescopic guide sleeve 141, an adjusting device 142 arranged on the guide sleeve 141 and a probe 143 arranged on the adjusting device 142, the probe 143 can be abutted against the surface of the object stage body 13, and the probe 143 is used for abutting against a chip to be detected.
One end of the probe module 14 is communicated with the receiving cavity 12, and the other end of the probe module 14 is provided with a closable air pressure balance valve 144. Since the detection is performed under vacuum, the pressure equalizing valve 144 is used to maintain the pressure equalization during the filling of liquid nitrogen.
Referring to fig. 2, the outer edge of the guide sleeve 141 is threaded, the guide sleeve 141 is made of aluminum, and the guide sleeve 141 is used for adjusting the front-rear distance of the probe 143.
Wherein the adjusting device 142 comprises a vertical adjusting knob and a horizontal adjusting knob.
Referring to fig. 3, the stage body 13 includes a base 131 and a fixing portion 132 disposed on an upper surface of the base 131, a hollow portion 133 is disposed in a middle portion of the base 131, the fixing portion 132 extends downward to form a plurality of through holes 134, the through holes 134 are communicated with the hollow portion 133, a connection hole 135 is disposed on one side of the base 131, and the connection hole 135 is communicated with the hollow portion 133. The connection hole 135 is used for communicating with the liquid nitrogen device 3.
Referring to fig. 4, in order to ensure the detection effect, nitrogen gas is filled in a smaller range, a sealing cover 136 is covered on the base 131, a closable channel 137 is opened on the sealing cover 136, and the channel 137 is used for emitting nitrogen gas after the detection is finished.
Referring to fig. 5, the base 131 is cylindrical, the upper surface of the base 131 is provided with a plurality of circular grooves 138, the centers of the circular grooves 138 coincide with the center of the base 131, the through holes 134 are distributed at the bottom of the circular grooves 138 in a circular array, and the circular grooves 138 define the fixing portions 132.
Wherein the circular grooves 138 include a first circular groove 1381 and a second circular groove 1382, the second circular groove 1382 having a circumference greater than a circumference of the first circular groove 1381, the first circular groove 1381 defining the fixing portion 132; the through hole at the bottom of the first circular groove 1381 is a first through hole 1341, the through hole at the bottom of the second circular groove 1382 is a second through hole 1342, and the perimeter of the first through hole 1341 is larger than the perimeter of the second through hole 1342. Since the first through hole 1341 is closer to the chip location, the output of all liquid nitrogen needs to be larger.
The utility model discloses a chip detection device for extremely low temperature measurement includes objective table, microscope and display module, the microscope is located the objective table top, the microscope is connected with the display module, the objective table includes the pedestal, establishes accommodating cavity, objective table body and a plurality of probe module on the pedestal, accommodating cavity and pedestal an organic whole set up, the objective table body is installed in accommodating the cavity, accommodating cavity upper end cover is equipped with transparent cover, a plurality of probe module with accommodating the cavity intercommunication, probe module includes telescopic guide pin bushing, installs adjusting device on the guide pin bushing and installs the probe on adjusting device, the probe can support the objective table body surface; the utility model discloses a well kenozooecium and through-hole have been seted up on the objective table body to through well kenozooecium and through-hole with the liquid nitrogen output, will paste the chip upper surface temperature who establishes on the fixed part when reducing the objective table body and reduce and lead utmost point temperature state, improved the detection precision, the utility model discloses simple structure is practical, has extensive usage in the detection area.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (6)
1. The utility model provides a chip detection device for extremely low temperature is measured, a serial communication port, including objective table, microscope and display module, the microscope is located the objective table top, the microscope is connected with display module, the objective table includes the pedestal, establishes acceping cavity, objective table body and a plurality of probe module on the pedestal, it sets up with the pedestal is integrative to accept the cavity, the objective table body is installed in acceping the cavity, it is equipped with transparent lid to accept the cavity upper end cover, a plurality of probe modules with accept the cavity intercommunication, the probe module includes the telescopic guide pin bushing, installs adjusting device on the guide pin bushing and installs probe on the adjusting device, the probe can support and carry objective table body surface.
2. The chip detection device for extremely low temperature measurement according to claim 1, characterized in that: one end of the probe module is communicated with the accommodating cavity, and the other end of the probe module is provided with a closable air pressure balance valve.
3. The chip detection device for extremely low temperature measurement according to claim 1, characterized in that: the outer edge of the guide sleeve is in a threaded shape, the guide sleeve is made of aluminum materials, and the guide sleeve is used for adjusting the front-back distance of the probe.
4. The chip detection device for extremely low temperature measurement according to claim 1, characterized in that: the adjusting device comprises a vertical adjusting knob and a horizontal adjusting knob.
5. The chip detection device for extremely low temperature measurement according to claim 1, characterized in that: the object stage body comprises a base and a fixing portion arranged on the upper surface of the base, a hollow portion is arranged in the middle of the base, the fixing portion extends downwards to form a plurality of through holes, the through holes are communicated with the hollow portion, a connecting hole is formed in one side of the base, and the connecting hole is communicated with the hollow portion.
6. The chip detection device for extremely low temperature measurement according to claim 5, characterized in that: the base upper shield is equipped with the sealed cowling, but set up the passageway of closeable on the sealed cowling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921618181.9U CN211086516U (en) | 2019-09-26 | 2019-09-26 | Chip detection device for extremely low temperature measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921618181.9U CN211086516U (en) | 2019-09-26 | 2019-09-26 | Chip detection device for extremely low temperature measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211086516U true CN211086516U (en) | 2020-07-24 |
Family
ID=71646686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921618181.9U Expired - Fee Related CN211086516U (en) | 2019-09-26 | 2019-09-26 | Chip detection device for extremely low temperature measurement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211086516U (en) |
-
2019
- 2019-09-26 CN CN201921618181.9U patent/CN211086516U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200724 Termination date: 20210926 |