CN211084791U

CN211084791U - Continuous horizontal vacuum sintering furnace

Info

Publication number: CN211084791U
Application number: CN201922287223.1U
Authority: CN
Inventors: 刘红星; 王玉洁
Original assignee: Suzhou Chuhan Vacuum Technology Co ltd
Current assignee: Suzhou Chuhan Vacuum Technology Co ltd
Priority date: 2019-12-18
Filing date: 2019-12-18
Publication date: 2020-07-24
Anticipated expiration: 2029-12-18

Abstract

The utility model discloses a horizontal vacuum sintering stove of continuous type, including horizontal mounting bracket, horizontal mounting bracket up end from left to right installs in proper order and is provided with first evacuation stove, second evacuation stove, heating furnace, sealing-in furnace and cooling furnace, be provided with the material frame on the horizontal mounting bracket, second evacuation stove, heating furnace and sealing-in furnace dispose mechanical diffusion pump unit outside, first evacuation stove, cooling furnace dispose the mechanical pump outside, simple structure, the structure is clear understandable, and the work piece is by the stove outside to the stove in, evacuation, heating, sealing-in, the cooling, and full automatic operation can be realized to going out the stove to realize continuous sintering, easy operation, degree of automation is high, and production efficiency is high, and the cost of labor is low, is worth promoting.

Description

Continuous horizontal vacuum sintering furnace

Technical Field

The utility model relates to a vacuum sintering stove technical field specifically is a horizontal vacuum sintering stove of continuous type.

Background

Sintering furnaces refer to specialized equipment that allows powder compacts to be sintered to achieve desired physical, mechanical properties, and microstructures. The sintering furnace is used for drying slurry on the silicon wafer, removing organic components in the slurry and completing sintering of the aluminum back surface field and the grid line. The traditional sintering furnace is manually used for taking workpieces, a group of workpieces are sintered at each time, the efficiency is extremely low, the labor cost is high, and potential safety hazards exist, so that a continuous horizontal vacuum sintering furnace is needed.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a horizontal vacuum sintering stove of continuous type to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

a continuous horizontal vacuum sintering furnace comprises a horizontal mounting frame, wherein a first vacuumizing furnace, a second vacuumizing furnace, a heating furnace, a sealing furnace and a cooling furnace are sequentially arranged on the upper end face of the horizontal mounting frame from left to right, a material frame is arranged on the horizontal mounting frame, a mechanical diffusion pump unit is arranged outside the second vacuumizing furnace, the heating furnace and the sealing furnace, and a mechanical pump is arranged outside the first vacuumizing furnace and the cooling furnace.

Preferably, a feeding door is arranged on the left side of the first vacuumizing furnace, a discharging door is arranged on the right side of the cooling furnace, and air cylinders are arranged outside the feeding door and the discharging door.

Preferably, the first vacuum-pumping furnace, the second vacuum-pumping furnace, the heating furnace, the sealing furnace and the cooling furnace are provided with a partition plate, and the partition plate is provided with a gate valve.

Preferably, the bottom of the horizontal mounting frame is connected and provided with a plurality of supporting upright posts, a discharge inclined plate is arranged below the horizontal mounting frame and is obliquely and downwards arranged at the left end, the left end of the discharge inclined plate is arranged below the left side of the horizontal mounting frame, and the right end of the discharge inclined plate is arranged below the right side of the horizontal mounting frame.

Preferably, the left side and the right side of the inside of the first vacuumizing furnace, the inside of the second vacuumizing furnace, the inside of the heating furnace, the inside of the sealing furnace and the inside of the cooling furnace are respectively provided with a chain wheel set, the outside of the first vacuumizing furnace, the outside of the second vacuumizing furnace, the inside of the heating furnace, the outside of the sealing furnace and the outside of the cooling furnace are respectively provided with a motor, the output end of the motor is in driving connection with the chain wheel set through a speed reducer, and the outside of the chain wheel set is provided.

Preferably, the mechanical diffusion pump unit comprises a connecting pipe, one end of the connecting pipe is respectively connected with the first vacuumizing furnace, the second vacuumizing furnace, the heating furnace, the sealing furnace and the cooling furnace, the other end of the connecting pipe is connected with a diffusion pump, and a valve group is connected between the diffusion pump and the mechanical pump.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses simple structure, the structure is clear and understandable, and the work piece is by the stove outside to the stove in, the evacuation, the heating, and the sealing-in, the cooling is gone out of the stove, can realize full automatic operation to realize continuous sintering, easy operation, degree of automation is high, and production efficiency is high, and the cost of labor is low, is worth promoting.

Drawings

FIG. 1 is a schematic view showing the overall structure of a continuous horizontal vacuum sintering furnace;

FIG. 2 is a schematic structural diagram of a mechanical diffusion pump unit of a continuous horizontal vacuum sintering furnace.

In the figure: 1-discharge inclined plate, 2-continuous conveying chain plate, 3-horizontal mounting rack, 4-material frame, 5-feeding gate, 6-first vacuum furnace, 7-second vacuum furnace, 8-heating furnace, 9-gate valve, 10-partition plate, 11-sealing furnace, 12-cooling furnace, 13-air cylinder, 14-discharge gate, 15-chain wheel set, 16-motor, 17-connecting pipe, 18-diffusion pump, 19-valve set, 20-mechanical diffusion pump set, 21-mechanical pump, 22-supporting upright column.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-2, the present invention provides a technical solution: a continuous horizontal vacuum sintering furnace comprises a horizontal mounting frame 3, wherein a first vacuumizing furnace 6, a second vacuumizing furnace 7, a heating furnace 8, a sealing furnace 11 and a cooling furnace 12 are sequentially arranged on the upper end face of the horizontal mounting frame 3 from left to right, a material frame 4 is arranged on the horizontal mounting frame 3, a mechanical diffusion pump unit 20 is arranged outside the second vacuumizing furnace 7, the heating furnace 8 and the sealing furnace 11, a mechanical pump 21 is arranged outside the first vacuumizing furnace 6 and the cooling furnace 12, a feeding door 5 is arranged on the left side of the first vacuumizing furnace 6, a discharging door 14 is arranged on the right side of the cooling furnace 12, cylinders 13 are arranged outside the feeding door 5 and the discharging door 14, partition plates 10 are arranged among the first vacuumizing furnace 6, the second vacuumizing furnace 7, the heating furnace 8, the sealing furnace 11 and the cooling furnace 12, a gate valve 9 is arranged on the partition plates 10, the bottom of the horizontal mounting frame 3 is connected and is provided with a plurality of supporting columns 22, the lower part of the horizontal mounting frame 3 is provided with a discharge inclined plate 1, the discharge inclined plate 1 is inclined downwards at the left end, the left end of the discharge inclined plate 1 is arranged below the left side of the horizontal mounting frame 3, the right end of the discharge inclined plate 1 is arranged below the right side of the horizontal mounting frame 3, a chain wheel set 15 is arranged at the left side and the right side of the first vacuum furnace 6, the second vacuum furnace 7, the heating furnace 8, the sealing furnace 11 and the cooling furnace 12, a motor 16 is respectively arranged outside the first vacuum furnace 6, the second vacuum furnace 7, the heating furnace 8, the sealing furnace 11 and the cooling furnace 12, the output end of the motor 16 is in driving connection with the chain wheel set 15 through a speed reducer, a continuous transmission chain plate 2 is arranged outside the chain wheel set 15, the mechanical diffusion pump set 20 comprises a connecting pipe 17, and one end of the connecting pipe 17, The second vacuumizing furnace 7, the heating furnace 8, the sealing furnace 11 and the cooling furnace 12 are connected, the other end of the connecting pipe 17 is connected with a diffusion pump 18, and a valve group 19 is connected between the diffusion pump 18 and a mechanical pump 21.

The cylinder 13 pushes the feeding gate 5 to open, the material frame 4 enters the first vacuum-pumping furnace 6 from the feeding gate 5, the mechanical pump 21 is arranged outside the first vacuum-pumping furnace 6, and the low vacuum 5-5X 10 is pumped^-1Pa, vacuumizing in the furnace bodyThen, the surface of the workpiece blank is subjected to vacuum cleaning, and the gate valve 9 can be opened to enter the second vacuum-pumping furnace 7 after the surface reaches the vacuum degree; the second vacuum-pumping furnace 7 is externally provided with a mechanical diffusion pump unit 20, and the vacuum degree can reach 5X10^-3—6X10^-4Pa, belonging to high vacuum, being beneficial to the melting of solder and removing a large amount of gas, obtaining high vacuum after the workpiece enters, simultaneously heating the workpiece to about 400 ℃ by high temperature in the furnace, and fully discharging the workpiece to about 400 ℃ through high temperature heating; opening a gate valve 9, feeding the material frame 4 into a heating furnace 8, configuring a mechanical diffusion pump unit 20 outside the heating furnace 8, and vacuumizing to 5X10^-3—6X10^-4Pa, belonging to high vacuum, is beneficial to melting the solder, reaches the final temperature of about 540 ℃, and ensures that the interior of the workpiece blank obtains high vacuum through a large amount of exhaust gas; when the solder is completely melted, the gate valve 9 is opened and the sealing furnace 11 is provided with the mechanical diffusion pump unit 20, and the vacuum degree can reach 5X10^-3—6X10^-4Pa, belonging to high vacuum, the side wall of the sealing furnace 11 is a double-layer jacket, which is beneficial to cooling, when the final temperature is about 400 ℃, the solder of the workpiece blank is sealed, the heat is transferred out through the inner wall of the furnace, and the workpiece blank enters the cooling furnace 12 after the solder is completely solidified; the mechanical pump 21 is arranged outside the cooling furnace 12 to pump low vacuum 5-5X 10^-1Pa, a water cooling jacket is arranged in the cooling furnace 12, the surface of the workpiece blank is rapidly cooled to reach a certain temperature, the discharge door 14 can be opened, the workpiece blank is sent out of the furnace, and the material frame 4 slides downwards along the discharge inclined plate 1 to realize discharge.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides a horizontal vacuum sintering furnace of continuous type, includes horizontal mounting bracket (3), its characterized in that: horizontal mounting bracket (3) up end from left to right installs in proper order and is provided with first evacuation stove (6), second evacuation stove (7), heating furnace (8), sealing-in furnace (11) and cooling furnace (12), be provided with material frame (4) on horizontal mounting bracket (3), second evacuation stove (7), heating furnace (8) and sealing-in furnace (11) dispose mechanical diffusion pump unit (20) outward, first evacuation stove (6), cooling furnace (12) dispose mechanical pump (21) outward.

2. The continuous horizontal vacuum sintering furnace according to claim 1, wherein: the vacuum furnace is characterized in that a feeding door (5) is arranged on the left side of the first vacuum furnace (6), a discharging door (14) is arranged on the right side of the cooling furnace (12), and a cylinder (13) is arranged outside the feeding door (5) and the discharging door (14).

3. The continuous horizontal vacuum sintering furnace according to claim 2, wherein: the device is characterized in that a partition plate (10) is arranged between the first vacuum-pumping furnace (6), the second vacuum-pumping furnace (7), the heating furnace (8), the sealing furnace (11) and the cooling furnace (12), and a gate valve (9) is arranged on the partition plate (10).

4. The continuous horizontal vacuum sintering furnace according to claim 3, wherein: the bottom of the horizontal mounting rack (3) is connected and provided with a plurality of supporting upright posts (22), a discharging inclined plate (1) is arranged below the horizontal mounting rack (3), the discharging inclined plate (1) is obliquely and downwards arranged at the left end, the left end of the discharging inclined plate (1) is arranged below the left side of the horizontal mounting rack (3), and the right end of the discharging inclined plate (1) is arranged below the right side of the horizontal mounting rack (3).

5. The continuous horizontal vacuum sintering furnace according to claim 4, wherein: the chain wheel set (15) is installed in the left and right sides setting in first evacuation stove (6), second evacuation stove (7), heating furnace (8), sealing-in furnace (11) and cooling furnace (12), motor (16) is installed respectively outward in first evacuation stove (6), second evacuation stove (7), heating furnace (8), sealing-in furnace (11) and cooling furnace (12), motor (16) output passes through the speed reducer and is connected with chain wheel set (15) drive, chain wheel set (15) overcoat is installed and is had even defeated chain board (2).

6. The continuous horizontal vacuum sintering furnace according to claim 5, wherein: the mechanical diffusion pump unit (20) comprises a connecting pipe (17), one end of the connecting pipe (17) is connected with a first vacuumizing furnace (6), a second vacuumizing furnace (7), a heating furnace (8), a sealing furnace (11) and a cooling furnace (12) respectively, the other end of the connecting pipe (17) is connected with a diffusion pump (18), and a valve set (19) is connected between the diffusion pump (18) and the mechanical pump (21).