CN211070921U - Instrument appearance detection device based on 3D scanning method - Google Patents
Instrument appearance detection device based on 3D scanning method Download PDFInfo
- Publication number
- CN211070921U CN211070921U CN201921468083.1U CN201921468083U CN211070921U CN 211070921 U CN211070921 U CN 211070921U CN 201921468083 U CN201921468083 U CN 201921468083U CN 211070921 U CN211070921 U CN 211070921U
- Authority
- CN
- China
- Prior art keywords
- instrument
- appearance
- controller
- transparent
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses an instrument appearance detection device based on 3D scanning method, the conveying component and the detection box of the instrument appearance detection device are respectively arranged on the frame, the conveying component comprises a driving motor and a transparent conveyor belt, and the driving motor is used for driving the transparent conveyor belt to run; be equipped with a plurality of cameras on the detection case, a plurality of light sources and distance sensor, transparent conveyer belt runs through the detection case, distance sensor is used for detecting the position of instrument on the transparent conveyer belt and output position signal to controller, the controller is used for receiving position signal and control driving motor and opens and stop, a plurality of cameras are used for shooing the outward appearance of instrument, and transmit outward appearance data to data processing module, data processing module is used for making comparison and discerning instrument outward appearance serial number information with outward appearance data and instrument standard data, and transmit the comparison result to the controller.
Description
Technical Field
The utility model relates to an instrument outward appearance detects technical field, in particular to instrument outward appearance detection device based on 3D scanning method.
Background
The appearance of the surface of the instrument is detected as an indispensable link in the production process, the production quality and the production efficiency development of products are directly influenced by the efficiency and the accuracy of the appearance detection, at present, domestic parts are various in types, the structure is complex, the appearance quality of the instrument is often detected by means of an artificial detector and the appearance number information of the instrument is identified, the efficiency is low, and the judgment result is greatly influenced by subjectivity.
The existing appearance detection in the market only aims at appearance defects of the instrument and does not include identification of serial number information of the instrument, and the method is divided into two types: contact scanning and non-contact scanning. The contact scanning uses a probe connected to a measuring device to directly touch a measured point, the coordinate of the probe is obtained according to the space geometric structure of the measuring device, the three-dimensional coordinate of the surface is obtained by scanning and analyzing the geometric outline of the surface, the contact scanning has higher measuring expense, the probe is easy to wear and scratch the surface of a measured object, the measuring speed is slow, the detection of some internal elements has congenital limitation, and when the contact probe is used for measuring, the force of the contact probe can cause the local deformation between the tip part of the probe and the measured object to influence the actual reading of the measured value. The probe is overrun due to inertia and time delay of the probe trigger mechanism, and dynamic error is generated due to approaching speed.
Non-contact scanning is represented by machine vision, surface features are judged by shooting gray values of pictures, information of scanned objects is collected by means of laser or radiation (such as X-rays or ultrasonic waves), for example, a handheld three-dimensional scanner is used, but data scanned by the handheld three-dimensional scanner is not fine and smooth scanned by the shooting three-dimensional scanner, the industrial application is limited, and the price is not very high.
Therefore, it is urgently needed to design a generally adaptive appearance detection device and detection method which have efficiency and accuracy.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome prior art's is not enough, provides an instrument outward appearance detection device based on 3D scanning method, through the 3D scanning device that shoots from system non-contact, can shoot and compare the outward appearance of instrument fast, rejects unqualified instrument, preserves its outward appearance serial number information to qualified instrument, and the degree of accuracy is high and can be ensured to work efficiency.
The technical scheme of the utility model is that: A3D scanning method-based instrument appearance detection device comprises a rack, a transmission assembly, a manipulator, a controller and a data processing module, wherein the transmission assembly and a detection box are respectively arranged on the rack;
the detection box is provided with a plurality of cameras, a plurality of light sources and a distance sensor, the transparent conveying belt penetrates through the detection box, the distance sensor is used for detecting the position of an instrument on the transparent conveying belt and outputting a position signal to the controller, the controller is used for receiving the position signal and controlling the driving motor to start and stop, the cameras are used for photographing the appearance of the instrument and transmitting appearance data to the data processing module, the data processing module is used for comparing the appearance data with instrument standard data and identifying instrument appearance number information and transmitting a comparison result to the controller, the controller receives the comparison result and outputs an operation signal to the driving motor, the controller controls the driving motor to operate so that the detected instrument is conveyed out of the detection box, the comparison result is unqualified, the controller outputs the operation signal to the mechanical arm, and the mechanical arm picks up the unqualified instrument and places the unqualified instrument to the corresponding position, and if the comparison is qualified, the controller stores the appearance number information of the instrument. The instrument is conveyed into the detection box through the transparent conveying belt, the distance sensor outputs position information to the controller after detecting that the instrument reaches a designated position, the controller controls the driving motor to stop running, and the plurality of cameras in the detection box simultaneously carry out multi-directional high-density sampling on the appearance of the instrument under the irradiation of the light source, so that the data information such as shooting time, structural images and the like has consistency, the integration error is effectively controlled, and the transparent conveying belt ensures that the contact surface of the instrument and the transparent conveying belt cannot be shielded; meanwhile, the camera is fixed on the detection box, so that the shooting angle and the shooting freedom are fixed, and the data complexity caused by subjective factors such as different shooting angles and distances during manual image shooting is eliminated.
Further, the detection case runs through the setting entry and the export along transparent conveyer belt's direction of transfer, and every face of detection case is equipped with camera and light source, and a plurality of cameras in the detection case carry out diversified high density sampling to the instrument outward appearance simultaneously under the shining of light source for shoot time, data information such as structural image have the uniformity, effectual control the integration error.
Furthermore, there is the interval between transparent conveyer belt and entry and the export respectively, ensures that the instrument on the transparent conveyer belt can not produce the scraping with the detection case or collide and cause the instrument damage.
Furthermore, the detection box is square, the detection box is made of light-tight materials, each face of the detection box is provided with two light sources and a camera, the detection box is light-tight and provides a relatively closed space, fixed light sources are provided in the space, the problems of weak light, complex reflection, complex light reflection and the like caused by illumination under most natural environments are solved, complexity and non-identifiability of data when information is collected are solved, and shot product information is clearer.
Furthermore, the transparent conveying belt is provided with a positioning hole, at least part of the instrument is embedded into the positioning hole, and the instrument is positioned by the positioning hole, so that the instrument cannot be displaced due to irregular shape.
Furthermore, an SIFT image matching algorithm and a Mask textSpotter deep learning algorithm are built in the data processing module and used for comparing the appearance data with the standard data of the instrument and identifying the appearance number information of the instrument. Comparing the input image with the instrument standard image by using an SIFT image matching algorithm through a 3D image acquired by a built-in camera of the detection box to obtain a comparison result; the method comprises the steps of obtaining an image of a character-containing surface of an instrument through a camera arranged in a detection box, inputting the image into a trained Mask textpointer deep learning network, and performing instance segmentation and semantic segmentation of each character on a text region so as to achieve end-to-end recognition.
Further, instrument outward appearance detection device still includes positioning mechanism, and positioning mechanism is used for carrying out the centre gripping location to the instrument, carries out the centre gripping to the instrument through setting up positioning mechanism, prevents that the instrument from shaking in the data send process, can fix a position the irregularly shaped instrument simultaneously.
Further, positioning mechanism includes the locating rack, two location guide rails and adjusting screw, adjusting screw locates on the locating rack, one of two location guide rails is fixed in the locating rack, another one and adjusting screw fixed connection, two location guide rails are located the both sides of transparent conveyer belt respectively and run through entry and export along the direction of transfer of transparent conveyer belt, length through control adjusting screw in locating rack, adjust the distance between two location guide rails, the location guide rail adopts transparent material to make, avoid the location guide rail to cause the instrument to shelter from, ensure the accuracy that the camera was gathered to instrument outward appearance. The positioning mechanism is suitable for instruments of various shapes, and the instrument is clamped by adjusting the distance between the two positioning guide rails.
Further, instrument outward appearance detection device still includes the storage tank, and the level of storage tank is unanimous with the level of transparent conveyer belt, and the manipulator snatchs unqualified instrument and puts to the storage tank in. The height of storage tank is highly unanimous with transparent conveyer belt, saves the manipulator and snatchs the time that unqualified instrument put to the storage tank, improves work efficiency, sets up the convenient artifical reinspection of storage tank.
The working method of the instrument appearance detection device comprises the steps that an instrument is conveyed into a detection box through a transparent conveyor belt, after the distance sensor detects that the instrument reaches a specified position, the distance sensor transmits a position signal to a controller, the controller receives the position signal and controls a driving motor to stop running, a plurality of cameras take pictures of the appearance of the instrument and transmit appearance data to a data processing module, the data processing module is used for comparing the appearance data with standard instrument data and identifying instrument appearance number information and transmitting a comparison result to a controller, the controller receives the comparison result and outputs an operation signal to the driving motor, the controller controls the driving motor to run so that the detected instrument is conveyed out of the detection box, the comparison result is unqualified, the controller outputs an operation signal to a manipulator, the manipulator grabs the unqualified instrument and places the unqualified instrument at the corresponding position, and if the comparison is qualified, the controller stores the appearance number information of the instrument.
Compared with the prior art, the utility model, following beneficial effect has:
the utility model discloses an instrument outward appearance detection device based on 3D scanning method can carry out diversified high density sampling to the outward appearance surface of instrument fast, can guarantee the sampling precision simultaneously, detects qualified instrument and can save its instrument outward appearance information and continue to advance inspection on next step, detects unqualified instrument and then snatchs to the storage tank through the manipulator, is reexamined by the manual work again, has guaranteed the accuracy of instrument outward appearance detection work, improves work efficiency.
The utility model discloses an instrument outward appearance detection device based on 3D scanning method, adopt and combine optical technology, phase place measurement technique and computer vision technique, at first with L ED light projection on the testee, secondly use six cameras in different position to get for the instrument in step and get for the picture, later decode the image of getting, calculation such as phase place operation, finally calculate the three-dimensional coordinate of each pixel of object.
Drawings
Fig. 1 is a schematic diagram of the instrument appearance detection device of the present invention.
Fig. 2 is a schematic view of a positioning mechanism and a conveying assembly in embodiment 2 of the present invention.
Fig. 3 is a schematic structural view of a transparent conveyor belt according to embodiment 3 of the present invention.
Fig. 4 is a schematic view of a positioning mechanism and a conveying assembly in embodiment 4 of the present invention.
Detailed Description
The present invention will be described in further detail with reference to examples, but the present invention is not limited thereto.
Example 1
As shown in fig. 1, the present embodiment provides an instrument appearance detection device based on a 3D scanning method, which includes a rack 1, a conveying assembly, a manipulator 2, a detection box 3, a controller 4, a data processing module 5, and a storage box 6, where the conveying assembly and the detection box are respectively disposed on the rack.
As shown in fig. 1, the conveying assembly comprises a driving motor 7 and a transparent conveying belt 8, wherein the driving motor is used for driving the transparent conveying belt to operate, and the transparent conveying belt ensures that the contact surface of the meter and the transparent conveying belt is not shielded.
As shown in fig. 1, the detection box is made of opaque material, the detection box is square, the detection box penetrates through the inlet and the outlet along the transmission direction of the transparent conveyor belt, the transparent conveyor belt penetrates through the detection box through the inlet and the outlet, the transparent conveyor belt and the inlet and the outlet have intervals respectively, and each surface of the detection box is provided with a camera 10 and a light source 11. The detection box is also provided with a distance sensor 12, the distance sensor is used for detecting the position of the instrument on the transparent conveyor belt and outputting a position signal to the controller, and the controller is used for receiving the position signal and controlling the start and stop of the driving motor.
The camera is used for photographing the appearance of the instrument and transmitting appearance data to the data processing module, an SIFT image matching algorithm and a Mask textSpoter deep learning algorithm are built in the data processing module, a 3D image acquired by the built-in camera of the detection box is used for comparing an input image with an instrument standard image by using the SIFT image matching algorithm to obtain a comparison result, an instrument image containing a character surface is acquired by the built-in camera of the detection box, and the image is input into a trained MaskTextSpoter deep learning network, so that example segmentation and semantic segmentation of each character can be carried out on a text region, and end-to-end recognition is achieved, the quality of model prediction is measured by a loss function, wherein the loss function of the Mask textSpot is a multitask L oss function, and the formula of a L oss function is as follows:
L＝Lrpn+α1Lrcnn+α2Lmask(1)
α1and α2L as balance factorrpnAnd LrcnnLoss functions for the RPN and Fast R-CNN networks, respectively, are:
L(p,u,tu,v)＝Lcls(p,u)+λ[u≥1]Lloc(tu,v) (2)
Lmaskincluding global text instance segmentation loss LglobalAnd character segmentation loss LcharThe formulas are respectively as follows:
the comparison result is transmitted to the controller, the controller receives the comparison result and outputs an operation signal to the driving motor, the controller controls the driving motor to operate so that the detected instrument is conveyed out of the detection box, the comparison result is unqualified, the controller outputs the operation signal to the mechanical arm, the mechanical arm picks the unqualified instrument and places the unqualified instrument in the storage box, the horizontal height of the storage box is consistent with the horizontal height of the transparent conveying belt, the time for the mechanical arm to pick the unqualified instrument and place the unqualified instrument in the storage box is saved, the working efficiency is improved, the storage box is arranged so that manual rechecking is facilitated, the comparison is qualified, the controller stores the instrument appearance serial number information and continues to.
The working method of the instrument appearance detection device comprises the steps that an instrument is conveyed into a detection box through a transparent conveyor belt, after the distance sensor detects that the instrument reaches a specified position, the distance sensor transmits a position signal to a controller, the controller receives the position signal and controls a driving motor to stop running, a plurality of cameras take pictures of the appearance of the instrument and transmit appearance data to a data processing module, the data processing module is used for comparing the appearance data with standard instrument data and identifying instrument appearance number information and transmitting a comparison result to the controller, the controller receives the comparison result and outputs an operation signal to the driving motor, the controller controls the driving motor to run so that the detected instrument is conveyed out of the detection box, the comparison result is unqualified, the controller outputs an operation signal to a manipulator, the manipulator picks up the unqualified instrument and places the unqualified instrument in a storage box, and if the comparison is qualified, the controller stores the appearance number information of the instrument, and the process is circulated.
Example 2
The difference between this embodiment and embodiment 1 is that, as shown in fig. 2, the instrument appearance detection device further includes a positioning mechanism, the positioning mechanism includes a positioning frame 13, two positioning guide rails 14 and an adjusting screw 15, the adjusting screw is disposed on the positioning frame, one of the two positioning guide rails is fixed to the positioning frame, the other one is fixedly connected to the adjusting screw, the two positioning guide rails are respectively disposed on two sides of the transparent conveyor belt and penetrate through the inlet and the outlet along the conveying direction of the transparent conveyor belt, and the distance between the two positioning guide rails is adjusted by controlling the adjusting screw to be screwed into the positioning frame. The adjustable positioning guide rail is suitable for instruments in various shapes, the instrument is clamped by adjusting the distance between the two positioning guide rails, the instrument is further positioned, the instrument is prevented from vibrating in the conveying process, and meanwhile, the instrument in an irregular shape can be positioned. The positioning guide rail is made of transparent materials, so that the instrument is prevented from being shielded by the positioning guide rail, and the accuracy of camera acquisition on the appearance of the instrument is ensured.
Example 3
The difference between this embodiment and embodiment 1 is that, as shown in fig. 3, a positioning hole 16 is provided on the transparent conveyor belt, the meter is at least partially embedded in the positioning hole, the meter is positioned by the positioning hole, so that the meter does not displace due to irregular shape, the positioning hole can be designed according to the appearance of the meter, and when the meter is spherical, the positioning hole is a circular through hole.
Example 4
The difference between this embodiment and embodiment 1 is that, as shown in fig. 4, a sliding groove 17 is provided on the transparent conveyor belt, the opening direction of the sliding groove is perpendicular to the axial direction, the positioning mechanism includes a plurality of positioning fixtures 18, the positioning fixtures are L type, two positioning fixtures form a square frame, the instrument is clamped between the two positioning fixtures, a sliding block is provided at the bottom of the positioning fixture, the sliding block is embedded into the sliding groove and can slide in the sliding groove, the positioning fixture is pushed to clamp and position the instrument, the instrument is prevented from vibrating during the conveying process, and the positioning mechanism is suitable for instruments of various sizes.
As described above, the present invention can be realized well, and the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention; all equivalent changes and modifications made according to the present invention are intended to be covered by the scope of the claims of the present invention.
Claims (8)
1. The instrument appearance detection device based on the 3D scanning method is characterized by comprising a rack, a conveying assembly, a mechanical arm, a controller and a data processing module, wherein the conveying assembly and a detection box are respectively arranged on the rack;
the detection box is provided with a plurality of cameras, a plurality of light sources and a distance sensor, the transparent conveying belt penetrates through the detection box, the distance sensor is used for detecting the position of an instrument on the transparent conveying belt and outputting a position signal to the controller, the controller is used for receiving the position signal and controlling the driving motor to start and stop, the cameras are used for photographing the appearance of the instrument and transmitting appearance data to the data processing module, the data processing module is used for comparing the appearance data with instrument standard data and identifying instrument appearance number information and transmitting a comparison result to the controller, the controller receives the comparison result and outputs an operation signal to the driving motor, the controller controls the driving motor to operate so that the detected instrument is conveyed out of the detection box, the comparison result is unqualified, the controller outputs the operation signal to the mechanical arm, and the mechanical arm picks up the unqualified instrument and places the unqualified instrument to the corresponding position, and if the comparison is qualified, the controller stores the appearance number information of the instrument.
2. The apparatus of claim 1, wherein the inspection box is provided with an inlet and an outlet along a conveying direction of the transparent conveyor belt, and each surface of the inspection box is provided with a camera and a light source.
3. The meter appearance detecting device based on the 3D scanning method according to claim 2, wherein a distance exists between the transparent conveyor belt and the inlet and the outlet, respectively.
4. The apparatus for detecting appearance of instrument based on 3D scanning method as claimed in claim 2, wherein the detection box is square, the detection box is made of opaque material, and each surface of the detection box is provided with two light sources and one camera.
5. The appearance detection device of a meter based on a 3D scanning method according to claim 1, characterized in that the transparent conveyor belt is provided with positioning holes, and the meter is at least partially embedded in the positioning holes.
6. The appearance detection device of a meter based on a 3D scanning method according to claim 2, characterized by further comprising a positioning mechanism for clamping and positioning the meter.
7. The instrument appearance detection device based on the 3D scanning method according to claim 6, wherein the positioning mechanism comprises a positioning frame, two positioning guide rails and an adjusting screw, the adjusting screw is arranged on the positioning frame, one of the two positioning guide rails is fixed on the positioning frame, the other positioning guide rail is fixedly connected with the adjusting screw, the two positioning guide rails are respectively arranged on two sides of the transparent conveyor belt and penetrate through the inlet and the outlet along the conveying direction of the transparent conveyor belt, the distance between the two positioning guide rails is adjusted by controlling the length of the adjusting screw screwed into the positioning frame, and the positioning guide rails are made of transparent materials.
8. The appearance detection device of the instrument based on the 3D scanning method is characterized by further comprising a storage box, the horizontal height of the storage box is consistent with that of the transparent conveyor belt, and the manipulator grabs the unqualified instrument and puts the unqualified instrument into the storage box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921468083.1U CN211070921U (en) | 2019-09-03 | 2019-09-03 | Instrument appearance detection device based on 3D scanning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921468083.1U CN211070921U (en) | 2019-09-03 | 2019-09-03 | Instrument appearance detection device based on 3D scanning method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211070921U true CN211070921U (en) | 2020-07-24 |
Family
ID=71632844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921468083.1U Active CN211070921U (en) | 2019-09-03 | 2019-09-03 | Instrument appearance detection device based on 3D scanning method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211070921U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110523657A (en) * | 2019-09-03 | 2019-12-03 | 广州能源检测研究院 | A kind of instrument appearance delection device and its working method based on 3D scanning method |
| CN111994376A (en) * | 2020-09-07 | 2020-11-27 | 重庆电子工程职业学院 | Packaging bag thickness abnormity finding working system and working method for industrial production line |
| CN113909132A (en) * | 2021-10-27 | 2022-01-11 | 山东东辰瑞森新材料科技有限公司 | Material detecting table |
| CN114160434A (en) * | 2021-12-09 | 2022-03-11 | 中通服供应链管理有限公司江西分公司 | Automatic dynamic sorting and carrying system |
-
2019
- 2019-09-03 CN CN201921468083.1U patent/CN211070921U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110523657A (en) * | 2019-09-03 | 2019-12-03 | 广州能源检测研究院 | A kind of instrument appearance delection device and its working method based on 3D scanning method |
| CN111994376A (en) * | 2020-09-07 | 2020-11-27 | 重庆电子工程职业学院 | Packaging bag thickness abnormity finding working system and working method for industrial production line |
| CN111994376B (en) * | 2020-09-07 | 2022-03-18 | 重庆电子工程职业学院 | Packaging bag thickness abnormity finding working system and working method for industrial production line |
| CN113909132A (en) * | 2021-10-27 | 2022-01-11 | 山东东辰瑞森新材料科技有限公司 | Material detecting table |
| CN114160434A (en) * | 2021-12-09 | 2022-03-11 | 中通服供应链管理有限公司江西分公司 | Automatic dynamic sorting and carrying system |
| CN114160434B (en) * | 2021-12-09 | 2023-08-15 | 中通服供应链管理有限公司江西分公司 | Automatic system for dynamic sorting and carrying |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211070921U (en) | Instrument appearance detection device based on 3D scanning method | |
| US10782248B2 (en) | Automatic detection device and method for detecting surface detects of large caliber cambered optical element | |
| CN110523657A (en) | A kind of instrument appearance delection device and its working method based on 3D scanning method | |
| CN101539533B (en) | Automatic detecting device and method for battery internal defect | |
| CN102135236B (en) | Automatic non-destructive testing method for internal wall of binocular vision pipeline | |
| CN106017325B (en) | Improved non-contact optical measurement method for complex surface and irregular object volume | |
| CN104063873B (en) | A kind of Model For The Bush-axle Type Parts surface defect online test method based on compressed sensing | |
| CN110102511A (en) | A kind of vision detection system and method for product appearance | |
| CN103901040A (en) | Three-dimensional online network defect detection system based on machine vision | |
| CN109765240B (en) | Device and method for detecting stitch defects of industrial parts | |
| CN210071686U (en) | Fruit grading plant based on orthogonal binocular machine vision | |
| US9486840B2 (en) | High-speed, triangulation-based, 3-D method and system for inspecting manufactured parts and sorting the inspected parts | |
| US4678920A (en) | Machine vision method and apparatus | |
| CN110146516B (en) | Fruit grading device based on orthogonal binocular machine vision | |
| CN106052586A (en) | Stone big board surface contour dimension obtaining system and method based on machine vision | |
| CN107891012B (en) | Pearl size and circularity sorting device based on equivalent algorithm | |
| CN105269403A (en) | Detecting system and detecting method | |
| CN113847881A (en) | Free-form surface profile tolerance detection method based on machine vision | |
| CN113418933B (en) | Flying shooting visual imaging detection system and method for detecting large-size object | |
| CN109115805A (en) | Transparent component defect detecting device and method based on ultrasound and the double imagings of optics | |
| CN208155258U (en) | A kind of online dimensional measurement of phone housing and surface defects detection system | |
| CN109590231A (en) | A kind of non-regular shape material image measurement measuring and controlling device and method | |
| CN109900719A (en) | A kind of visible detection method of blade surface knife mark | |
| CN209148563U (en) | A kind of double imaging type transparent component defect detecting devices | |
| CN104655646A (en) | Glass substrate internal defect checking system and checking method for height position of internal defect |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |