CN211053572U

CN211053572U - Vertical quartz tube propeller

Info

Publication number: CN211053572U
Application number: CN201922094977.5U
Authority: CN
Inventors: 刘国富
Original assignee: YANGZHOU GUOYU ELECTRONICS CO Ltd
Current assignee: YANGZHOU GUOYU ELECTRONICS CO Ltd
Priority date: 2019-11-28
Filing date: 2019-11-28
Publication date: 2020-07-21
Anticipated expiration: 2029-11-28

Abstract

The utility model discloses a vertical quartz capsule propeller in the technical field of semiconductor manufacturing. This propeller includes inner tube propeller and outer tube propeller, and the inner tube propeller includes base one and extensible member, and the extensible member can reciprocate for base one, and the extensible member upper end is provided with the supporting part, and the supporting part is used for supporting quartz capsule inner tube bottom, and the outer tube propeller includes base two and a plurality of bracing piece, and the bracing piece can reciprocate for base two, and the bracing piece upper end is used for supporting the flange face of quartz capsule outer tube. The quartz boat can be lifted or lowered by using the propeller, so that the labor can be saved, the stability of the quartz boat in the lifting or lowering process is improved, and the possibility of damage to the quartz boat or personnel in the generating process is reduced; the quartz boat can be integrally lifted by combining the inner tube propeller and the outer tube propeller, and the inner tube propeller and the outer tube propeller are separately and independently used to disassemble and assemble the inner tube and the outer tube of the quartz boat respectively, so that the quartz boat is convenient and flexible.

Description

Vertical quartz tube propeller

Technical Field

The utility model relates to a semiconductor manufacturing technical field, in particular to vertical quartz capsule propeller.

Background

At present, in the processing process of a semiconductor silicon wafer, the silicon wafer needs to be processed for multiple times and different process operations are carried out. In the silicon chip processing production process, need often use the quartz capsule, the quartz capsule includes inner tube and outer tube, and the inner tube is placed in the outer tube, and inner tube and outer tube are all vertical to be placed, and the quartz capsule is arranged in heating furnace body, need wash the regular dismouting of quartz capsule in daily use, and the rising of manual operation quartz capsule and decline have both been laboured, cause the damage to the quartz capsule easily again.

Therefore, a novel vertical furnace quartz tube propeller is needed to solve the problem that the quartz tube is difficult to lift and fall when being disassembled and assembled and is easy to damage.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a make things convenient for propeller of dismouting vertical quartz capsule.

In order to realize the above utility model purpose, the utility model relates to a following technical scheme that vertical quartz capsule propeller adopted:

the utility model provides a vertical quartz capsule propeller, includes inner tube propeller and outer tube propeller, the inner tube propeller includes base one and extensible member, the extensible member can reciprocate for base one, the extensible member lower extreme with a base swing joint, the extensible member upper end is provided with the supporting part, the supporting part is used for supporting quartz capsule inner tube bottom, the outer tube propeller includes base two and a plurality of bracing piece, the bracing piece can reciprocate for base two, the bracing piece lower extreme with two swing joint of base, the upper end of the support bar is used for supporting the flange face of quartz capsule outer tube.

The beneficial effect of this step lies in: compare in artifical direct transport, utilize the propeller to promote the quartz boat and rise or descend the in-process, not only use manpower sparingly stability simultaneously better, operating personnel need not to touch the quartz boat, has avoided the quartz boat to be artificially damaged, inner tube propeller and outer tube propeller detachable independent utility, the inner tube and the outer tube of dismouting quartz capsule respectively.

Further, the lower end of the telescopic piece is in threaded connection with the first base, the first base and the telescopic piece are both cylindrical, internal threads are formed in the inner surface of the base, and external threads matched with the internal threads are formed in the lower end of the telescopic piece. The telescopic piece can be rotated to move up and down relative to the base, so that the quartz boat inner tube supported by the upper end of the telescopic piece is pushed to ascend or descend.

Furthermore, a plurality of hand-operated rods are arranged on the outer peripheral surface of the telescopic piece. The hand rocker is convenient for an operator to rotate the telescopic piece.

Furthermore, the second base is in a ring shape matched with the flange face of the outer tube of the quartz boat, and a plurality of fixing columns are uniformly distributed on the bottom face of the second base. The second base is suspended by the fixing column, so that the flange plate can be conveniently installed below the outer tube after the outer tube of the quartz tube rises to a target height.

Furthermore, the bracing piece is the threaded rod, base two is in a plurality of the fixed column is provided with respectively between the interval with the screw hole that the bracing piece matches, the bracing piece lower extreme with base two threaded connection. The flange face of quartz boat outer tube is evenly supported to a plurality of bracing pieces, and a plurality of bracing pieces rotate simultaneously can rise or descend the quartz boat outer tube, rotate single bracing piece and can finely tune the vertical angle of quartz boat outer tube.

Compared with the prior art, the beneficial effects of the utility model reside in that: the quartz boat is lifted or lowered by using the propeller, so that the labor can be saved, the stability of the quartz boat in the lifting or lowering process is improved, and the possibility of damage to the quartz boat or personnel in the generating process is reduced; the quartz boat can be integrally lifted by combining the inner tube propeller and the outer tube propeller, and the inner tube propeller and the outer tube propeller are separately and independently used to disassemble and assemble the inner tube and the outer tube of the quartz boat respectively, so that the quartz boat is convenient and flexible.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic structural view of an appearance propeller;

FIG. 3 is a schematic view of the structure of the propeller;

fig. 4 is a bottom view of the inline thruster.

Wherein, 1 inner tube propeller, 11 base I, 12 extensible parts, 13 supporting parts, 14 hand rocking bars, 2 outer tube propellers, 21 base II, 22 bracing pieces, 23 fixed columns.

Detailed Description

The present invention will be further explained with reference to the following embodiments, which are to be understood as illustrative only and not as limiting the scope of the invention, and modifications of the various equivalent forms of the present invention by those skilled in the art after reading the present invention fall within the scope of the appended claims.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "vertical" and "outer peripheral surface" are used to indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship that the product of the present invention is usually placed when in use, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element to be referred must have a specific position, be constructed in a specific orientation, and be operated, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

Furthermore, the term "vertical" or the like does not imply that the components are required to be absolutely horizontal or overhanging, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the description of the present invention, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the various embodiments or examples and features of the various embodiments or examples described herein can be combined and combined by those skilled in the art without conflicting aspects.

As shown in figures 1-4, a vertical quartz tube propeller comprises an inner tube propeller 1 and an outer tube propeller 2, the inner tube propeller comprises a first base 11 and a telescopic part 12, the first base and the telescopic part are both cylindrical, the inner surface of the base is provided with an internal thread, the lower end of the telescopic part is provided with an external thread matched with the internal thread, the lower end of the telescopic part is in threaded connection with the first base and can move up and down relative to the first base, the upper end of the telescopic part is provided with a supporting part 13 for supporting the bottom of the inner tube of the quartz tube, the outer peripheral surface of the telescopic part is provided with three hand-operated rods 14, the outer tube propeller comprises a second base 21 and four supporting rods 22, the supporting rods are threaded rods, the second base is in a ring shape matched with the flange surface of the outer tube of a quartz boat, the bottom, the supporting rod is in threaded connection with the second base through the threaded hole and can move up and down relative to the second base, and the upper end of the supporting rod is used for supporting the flange surface of the quartz tube outer tube.

Although embodiments of the present invention have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.

Claims

1. The utility model provides a vertical quartz tube propeller which characterized in that: including inner tube propeller and outer tube propeller, the inner tube propeller includes base one and extensible member, the extensible member can reciprocate for base one, the extensible member lower extreme with a base swing joint, the extensible member upper end is provided with the supporting part, the supporting part is used for supporting quartz capsule inner tube bottom, the outer tube propeller includes base two and a plurality of bracing piece, the bracing piece can reciprocate for base two, the bracing piece lower extreme with two swing joint of base, the upper end of the support bar is used for supporting the flange face of quartz capsule outer tube.

2. The vertical quartz tube thruster of claim 1, wherein: the lower end of the telescopic piece is in threaded connection with the first base, the first base and the telescopic piece are both cylindrical, an internal thread is arranged on the inner surface of the base, and an external thread matched with the internal thread is arranged at the lower end of the telescopic piece.

3. The vertical quartz tube thruster of claim 2, wherein: a plurality of hand-operated rods are arranged on the outer peripheral surface of the telescopic piece.

4. The vertical quartz tube thruster of claim 1, wherein: the second base is in a ring shape matched with the flange face of the outer tube of the quartz boat, and a plurality of fixing columns are uniformly distributed on the bottom face of the second base.

5. The vertical quartz tube thruster of claim 4, wherein: the support rod is a threaded rod, the base II is provided with a plurality of threaded holes matched with the support rod between the fixed columns at intervals, and the lower end of the support rod is in threaded connection with the base II.