CN211045409U - Multifunctional wafer clamp - Google Patents

Abstract

The utility model discloses a multifunctional wafer anchor clamps belongs to chip processing technology field, including rotating first box body and the second box body of connecting, all be equipped with the storage chamber in first box body and the second box body and install in a pair of wafer clamp hook in the storage chamber, wafer clamp hook can follow stretch out in the storage chamber, wafer clamp hook includes the coupler body that the direction can be adjusted. The utility model discloses can press from both sides the wafer of getting vertical or level and placing, be convenient for deposit the wafer clip hook that does not use, conveniently carry, the function is various.

Description

Multifunctional wafer clamp

Technical Field

The utility model belongs to the technical field of the chip processing, concretely relates to multifunctional wafer anchor clamps.

Background

In semiconductor manufacturing processes, wafer processing is an important part. The wafer processing process involves numerous processes, and the processes include wafer taking, cleaning, gluing, drying, photoetching and the like. In the process, the wafers are adsorbed on the operation table from a plurality of vertically placed wafer boxes to a single wafer box or a single culture dish. In the processing process, the wafer is clamped by using flat tweezers, but the problem that the wafer slides and is broken easily occurs; in order to prevent the wafer from slipping off, the clamping of the wafer is vertically and horizontally placed by adopting a mode of matching a plurality of clamps, but the number of the used clamps is increased, and the wafer is inconvenient to carry and switch.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to overcome not enough among the prior art, provide a multifunctional wafer anchor clamps, can press from both sides the wafer of getting vertical or level and placing, be convenient for deposit the wafer clamp hook that does not use, conveniently carry, the function is various.

The utility model provides a following technical scheme:

The utility model provides a multifunctional wafer anchor clamps, includes first box body and the second box body that rotates the connection, all be equipped with the storage chamber in first box body and the second box body and install in a pair of wafer clamping hook in the storage chamber, the wafer clamping hook can be followed stretch out in the storage chamber, the wafer clamping hook includes the coupler body that the direction can be adjusted.

Preferably, the storage cavity is open, and the wafer chuck hook further comprises a first connecting rod rotatably connected with the hook body and a connecting rod rotatably connected with the first connecting rod.

Preferably, the connecting column is installed in the storage cavity through a rotating column, and the rotating angle of the rotating column is 0-30 degrees.

Preferably, the center of the connecting column is provided with a through hole, the first connecting rod is fixedly connected with a concave rotating support, the rotating support is provided with a central shaft penetrating through the through hole, and the outer diameter of the central shaft is smaller than the diameter of the through hole.

Preferably, the storage cavity is arranged inside the first box body and the second box body, the end parts of the storage cavity are open, and sliding grooves are formed in the surfaces of the first box body and the second box body; the wafer clamping hook further comprises a second connecting rod and a sliding assembly, wherein the second connecting rod is connected with the hook body in a rotating mode, the sliding assembly is fixedly connected with the second connecting rod, and the sliding assembly can slide along the sliding groove.

Preferably, the sliding assembly comprises a sliding block, a limiting column penetrating through the sliding block and a pushing block fixedly connected with the limiting column, the pushing block is located outside the sliding groove, the limiting column penetrates through the sliding groove and can slide relative to the sliding groove, and the sliding block is arranged in the storage cavity.

Preferably, the limiting column can move relative to the sliding block, two limiting grooves capable of clamping the limiting column are formed in the inner wall of one side of the storage cavity, opposite to the sliding groove, and the two limiting grooves correspond to the two ends of the sliding groove.

Preferably, the storage cavity is arranged in the first box body and the second box body, two side faces of the storage cavity are provided with openings, and a pair of upright posts are arranged at the end part of the storage cavity; the wafer clamping hook further comprises a third connecting rod and a sleeve, wherein the third connecting rod is connected with the hook body in a rotating mode, the sleeve is fixedly connected with the third connecting rod, and the sleeve is sleeved outside the upright column and can rotate relative to the upright column.

Preferably, the first box body and the second box body are relatively fixed through a locking assembly, and the locking assembly comprises a locking shell and a locking block which are respectively and rotatably connected with the first box body and the second box body through rotating shafts; the locking shell comprises a locking cavity and clamping grooves which are located on two sides of the locking cavity and distributed periodically, the locking block can slide in the locking cavity, and elastic clamping blocks which can be clamped with the clamping grooves are arranged at the end portions of the locking block.

Preferably, a blade storage cavity is formed in the side face of the first box body, and a blade capable of rotating and extending out is installed in the blade storage cavity.

Compared with the prior art, the beneficial effects of the utility model are that:

(1) The first box body and the second box body provided with the wafer clamping hooks can rotate relatively, when the first box body and the second box body rotate to form an included angle of 180 degrees, two wafer clamping hooks in one box body are adopted, and vertically placed wafers can be clamped; when the first box body and the second box body rotate to form an included angle smaller than 180 degrees, the horizontally placed wafers can be clamped by the cooperation of the four wafer clamping hooks in the two box bodies, and the functions are diversified;

(2) The wafer clamping hook comprises a hook body with adjustable direction, so that the wafer clamping hook is suitable for clamping wafers with different sizes;

(3) The wafer clamping hook extends out of the storage cavity when in use and is stored in the storage cavity when not in use, so that the wafer clamping hook can be protected from being damaged and is convenient to carry;

(4) The utility model discloses it is good to press from both sides and get wafer stability, and the wafer is difficult for droing and is broken into pieces, also need not to use with other instrument cooperations, the simple operation.

Drawings

Fig. 1 is a schematic structural view of the present invention in embodiment 1;

FIG. 2 is a schematic structural view of the connecting column of FIG. 1;

FIG. 3 is a schematic structural diagram of the first connecting rod in FIG. 1;

FIG. 4 is a schematic view of the hook body;

Fig. 5 is a schematic structural view of the present invention in embodiment 1, wherein the wafer is vertically placed;

Fig. 6 is a schematic structural view of the present invention in embodiment 1, wherein the wafer is horizontally placed;

FIG. 7 is a schematic structural view of a second container and a hook in embodiment 2;

FIG. 8 is a schematic structural view of the second container in FIG. 7;

FIG. 9 is a schematic view of the slide assembly of FIG. 7 during sliding movement;

FIG. 10 is a schematic view of the slide assembly of FIG. 7 in a stationary configuration;

FIG. 11 is a schematic structural view of a second container and a hook according to embodiment 3;

FIG. 12 is a schematic view of the second container in FIG. 11;

FIG. 13 is a schematic view of the structure of the column of FIG. 11;

FIG. 14 is a schematic structural view of the lock housing;

FIG. 15 is a schematic view of the locking block;

Labeled as: 1. a first case; 2. a second box body; 3. connecting columns; 4. a first connecting rod; 5. a hook body; 6. a blade; 7. a locking assembly; 71. a locking housing; 72. a locking block; 73. a locking cavity; 74. a card slot; 75. an elastic clamping block; 76. a rotating shaft; 8. a sliding assembly; 81. a push block; 82. a limiting column; 83. a slider; 9. a column; 10. a storage chamber; 11. a blade storage chamber; 12. a spin column; 13. a through hole; 14. rotating the bracket; 15. a central shaft; 16. a chute; 17. a limiting groove; 18. a second connecting rod; 19. a third connecting rod; 20. a sleeve.

Detailed Description

The present invention will be further described with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.

It should be noted that, in the description of the present invention, the terms "front", "rear", "left", "right", "upper", "lower", "inner", "outer", etc. indicate the directions or positional relationships based on the directions or positional relationships shown in the drawings, and are only for convenience of description of the present invention but do not require the present invention to be constructed and operated in a specific direction, and thus, should not be construed as limiting the present invention.

Example 1

As shown in fig. 1, a multifunctional wafer clamp includes a first box 1 and a second box 2 which are rotatably connected, an included angle range which can be formed between the first box 1 and the second box 2 is 60-180 °, a storage chamber 10 and a pair of wafer clamping hooks which are installed in the storage chamber 10 are both arranged in the first box 1 and the second box 2, the wafer clamping hooks can extend out of the storage chamber 10, the wafer clamping hooks include hook bodies 5 whose directions can be adjusted, and a rotation angle range of the hook bodies 5 is 0-90 degrees.

As shown in fig. 1 and 2, the storage chamber 10 is open, and the wafer chuck further includes a first connecting rod 4 rotatably connected to the hook body 5 and a connecting rod 3 rotatably connected to the first connecting rod 4. The connecting column 3 is mounted in the storage chamber 10 by means of a rotating column 12, the rotating angle of the rotating column 12 being 0-30 °.

As shown in fig. 2-4, a through hole 13 is formed in the center of the connecting column 3, the first connecting rod 4 is fixedly connected with a concave rotating bracket 14, a central shaft 15 penetrating through the through hole 13 is arranged on the rotating bracket 14, the outer diameter of the central shaft 15 is smaller than the diameter of the through hole 13, so that the first connecting rod 4 can rotate around the central shaft 15, the rotating angle range is 0-180 degrees, and the hook body 5 can extend out of the storage cavity 10.

As shown in fig. 1, 14 and 15, the first container 1 and the second container 2 are relatively fixed by a locking assembly 7, and the locking assembly 7 includes a locking housing 71 and a locking block 72 rotatably coupled to the first container 1 and the second container 2 by a rotating shaft 76, respectively; the locking shell 71 comprises a locking cavity 73 and clamping grooves 74 which are located on two sides of the locking cavity 73 and are distributed periodically, the locking block 72 can slide in the locking cavity 73, elastic clamping blocks 75 which can be clamped with the clamping grooves 74 are arranged at the end portions of the locking block 72, the elastic clamping blocks 75 are T-shaped, the elastic clamping blocks 75 can be compressed by pressing the elastic clamping blocks 75, sliding of the locking block 72 in the locking cavity 73 is achieved, when no external force is applied to the elastic clamping blocks 75, the elastic clamping blocks 75 are clamped in the clamping grooves 74, relative fixing of the first box body 1 and the second box body 2 is achieved, and wafer sliding caused by looseness in a clamping process is prevented.

As shown in fig. 1, a blade storage cavity 11 is formed in the side surface of the first box body 1, a blade 6 capable of rotating and extending out is installed in the blade storage cavity 11, the rotation angle range of the blade 6 is 0-180 degrees, the blade 6 can be used for tilting a wafer adsorbed on a platform, additional tools do not need to be carried, and meanwhile, the functionality of the wafer clamp in the embodiment can be improved.

As shown in fig. 5, the first box 1 and the second box 2 are rotated to an included angle of 180 ° to fix the positions of the two by the locking assembly 7; the first connecting rod 4 in the first box body 1 rotates by taking the central shaft 15 (the connecting column 3) as a center, so that the hook bodies 5 extend out of the storage cavity 10, the connecting column 3 is rotated to adjust an included angle between the two hook bodies 5, then the hook bodies 5 are rotated to a proper direction, and at the moment, vertically placed wafers can be clamped.

As shown in fig. 6, in the same manner as in the previous section, the wafer hooks in the first box 1 and the second box 2 are rotated out of the storage chamber 10 and adjusted to a proper position; then the first box body 1 and the second box body 2 are rotated to an included angle smaller than 180 degrees, and the locking component 7 is used for fixing the two positions; after the direction of the hook body 5 is adjusted, the wafer which is horizontally placed can be stably clamped.

As shown in fig. 1, the wafer closely adhered to the stage is first rotated and extended by the blade 6, and then picked up after being tilted. After use, the wafer chuck can be stored in the storage chamber 10 by rotating the hook body 5, the connection post 3 and the first connection rod 4.

Example 2

As shown in fig. 7, a multifunctional wafer clamp includes a first box body and a second box body 2 which are rotatably connected, an included angle range which can be formed between the first box body and the second box body is 60-180 °, the first box body and the second box body 2 are relatively fixed through a locking component, a storage cavity 10 and a pair of wafer clamping hooks which are installed in the storage cavity 10 are arranged in the first box body and the second box body 2, the wafer clamping hooks can extend out of the storage cavity 10, each wafer clamping hook includes a hook body 5 whose direction can be adjusted, and a rotation angle range of the hook body 5 is 0-90 °.

As shown in fig. 7 and 8, the storage chamber 10 is arranged inside the first box body and the second box body 2 and is open at the end, and the surfaces of the first box body and the second box body 2 are both provided with sliding chutes 16; the wafer clamping hook further comprises a second connecting rod 18 rotatably connected with the hook body 5 and a sliding component 8 fixedly connected with the second connecting rod 18, and the sliding component 8 can slide along the sliding groove 16.

As shown in fig. 8 and 9, the sliding assembly 8 includes a sliding block 83, a limiting post 82 penetrating through the sliding block 83, and a pushing block 81 fixedly connected to the limiting post 82, the pushing block 81 is located outside the sliding groove 16, the limiting post 82 penetrates through the sliding groove 16 and can slide relative to the sliding groove 16, and the sliding block 83 is disposed in the storage chamber 10. Spacing post 82 can remove relative slider 83, and one side inner wall that storage chamber 10 is relative spout 16 is equipped with two spacing grooves 17 that can block spacing post 82, and two spacing grooves 17 correspond the both ends of spout 16.

As shown in fig. 7-8, the first box body and the second box body 2 are rotated to form an included angle of 180 degrees, and the locking assembly is used for fixing the two positions; in an initial state, the limiting post 82 is clamped in the limiting groove on the inner side (as shown in fig. 10), the pushing block 81 on the second box body 2 is pulled at the moment, so that the limiting post 82 is separated from the limiting groove (as shown in fig. 9), the pushing block 81 is pushed, the sliding component 8 drives the hook body 5 to move out of the storage cavity 10, when the sliding groove 16 is moved to the tail end, the pushing block 81 is pressed, the limiting post 82 is clamped in the limiting groove 17 at the opening of the storage cavity 10, then the pushing block 81 is rotated to enable the two hook bodies 5 to form a proper included angle, the hook bodies 5 are rotated to a proper direction, and at the moment, the vertically placed wafers can be clamped. Pushing the wafer clamping hooks in the first box body and the second box body 2 out of the storage cavity 10 in the same way; then the first box body and the second box body 2 are rotated to an included angle smaller than 180 degrees, and the locking assembly is used for fixing the two positions; after the direction of the hook body 5 is adjusted, the wafer which is horizontally placed can be stably clamped. After use, the hook body 5 can be retracted into the storage cavity 10 to be stored by pushing the sliding assembly 8.

Example 3

As shown in fig. 11, a multifunctional wafer clamp includes a first box body and a second box body 2 which are rotatably connected, an included angle range which can be formed between the first box body and the second box body is 60-180 °, the first box body and the second box body 2 are relatively fixed through a locking component, a storage cavity 10 and a pair of wafer clamping hooks which are installed in the storage cavity 10 are arranged in the first box body and the second box body 2, the wafer clamping hooks can extend out of the storage cavity 10, each wafer clamping hook includes a hook body 5 whose direction can be adjusted, and a rotation angle range of the hook body 5 is 0-90 °.

As shown in fig. 11-13, the storage chamber 10 is arranged inside the first box body and the second box body 2, two side surfaces of the storage chamber are opened, and a pair of upright posts 9 are arranged at the end part of the storage chamber 10; the wafer clamping hook further comprises a third connecting rod 19 connected with the hook body 5 in a rotating mode and a sleeve 20 fixedly connected with the third connecting rod 19, the sleeve 20 is sleeved outside the upright post 9 and can rotate relative to the upright post 9, and the rotating angle range is 0-150 degrees.

As shown in fig. 11-13, the first box body and the second box body 2 are rotated to form an included angle of 180 degrees, and the locking assembly is used for fixing the two positions; the wafer clamping hook in the second box body 2 is rotated, so that the sleeve 20 rotates by taking the upright post 9 as a center, the hook body 5 is rotated out of the storage cavity 10 to form a proper included angle, then the hook body 5 is rotated to a proper direction, and the vertically placed wafer can be clamped at the moment. Rotating the wafer clamping hooks in the first box body and the second box body 2 out of the storage cavity 10 in the same way; then the first box body and the second box body 2 are rotated to an included angle smaller than 180 degrees, and the locking assembly is used for fixing the two positions; after the direction of the hook body 5 is adjusted, the wafer which is horizontally placed can be stably clamped. After use, the hook body 5 can be retracted into the storage cavity 10 for storage by rotating.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be considered as the protection scope of the present invention.

Claims (10)

1. The utility model provides a multifunctional wafer anchor clamps, its characterized in that, is including rotating first box body and the second box body of connecting, all be equipped with the storage chamber in first box body and the second box body and install in a pair of wafer clamp hook in the storage chamber, wafer clamp hook can follow stretch out in the storage chamber, wafer clamp hook includes the coupler body that the direction can be adjusted.

2. The multi-function wafer chuck as claimed in claim 1, wherein the storage chamber is open, the wafer chuck further comprising a first connecting rod rotatably connected to the body and a connecting rod rotatably connected to the first connecting rod.

3. The multi-function wafer chuck as claimed in claim 2, wherein the connecting posts are mounted in the storage chamber by a rotating post, the rotating post having a rotation angle of 0-30 °.

4. The multi-function wafer chuck as claimed in claim 3, wherein a through hole is formed at the center of the connecting column, a concave rotating frame is fixed to the first connecting column, a central shaft is formed on the rotating frame and penetrates through the through hole, and the outer diameter of the central shaft is smaller than the diameter of the through hole.

5. The multifunctional wafer clamp of claim 1, wherein the storage chamber is disposed inside the first box and the second box and has an open end, and the first box and the second box are both provided with sliding grooves on the surface; the wafer clamping hook further comprises a second connecting rod and a sliding assembly, wherein the second connecting rod is connected with the hook body in a rotating mode, the sliding assembly is fixedly connected with the second connecting rod, and the sliding assembly can slide along the sliding groove.

6. The multifunctional wafer chuck according to claim 5, wherein the sliding assembly comprises a sliding block, a position-limiting post penetrating the sliding block, and a pushing block fixedly connected to the position-limiting post, the pushing block is located outside the sliding groove, the position-limiting post penetrates the sliding groove and can slide relative to the sliding groove, and the sliding block is disposed in the storage cavity.

7. The multi-functional wafer chuck as claimed in claim 6, wherein the retaining posts are movable relative to the slide block, two retaining grooves are disposed on an inner wall of the storage chamber opposite to the slide grooves, the two retaining grooves can engage with the retaining posts, and the two retaining grooves correspond to two ends of the slide grooves.

8. The multi-function wafer chuck as claimed in claim 1, wherein the storage chamber is disposed inside the first and second cases and has two open sides, and a pair of posts are disposed at ends of the storage chamber; the wafer clamping hook further comprises a third connecting rod and a sleeve, wherein the third connecting rod is connected with the hook body in a rotating mode, the sleeve is fixedly connected with the third connecting rod, and the sleeve is sleeved outside the upright column and can rotate relative to the upright column.

9. The multifunctional wafer chuck according to any one of claims 1 to 8, wherein the first and second cases are relatively fixed by a locking assembly, the locking assembly comprising a locking housing and a locking block rotatably connected to the first and second cases by a shaft, respectively; the locking shell comprises a locking cavity and clamping grooves which are located on two sides of the locking cavity and distributed periodically, the locking block can slide in the locking cavity, and elastic clamping blocks which can be clamped with the clamping grooves are arranged at the end portions of the locking block.

10. The multifunctional wafer chuck according to any one of claims 1 to 8, wherein the first box body is provided with a blade storage cavity at a side surface, and a blade capable of rotating and extending out is installed in the blade storage cavity.

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