CN211043624U - Radio frequency power supply complete machine testing device - Google Patents
Radio frequency power supply complete machine testing device Download PDFInfo
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- CN211043624U CN211043624U CN201921775999.1U CN201921775999U CN211043624U CN 211043624 U CN211043624 U CN 211043624U CN 201921775999 U CN201921775999 U CN 201921775999U CN 211043624 U CN211043624 U CN 211043624U
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Abstract
The utility model belongs to the technical field of semiconductor manufacturing, a radio frequency power supply complete machine testing arrangement is disclosed, including power supply circuit, control and interface circuit and demonstration and switch block unit of installation in the shell, characterized by, control and interface circuit (5) are electric connection power supply circuit (1), demonstration and switch block unit (2) respectively, demonstration and switch block unit (2) electricity respectively is connected with power value display screen (3) and settlement voltage value display screen (4), control and interface circuit imitate the interface connection through 25 mandrels and have radio frequency power supply equipment, control and interface circuit still connect the monitoring line of dummy load through binding post (6), binding post is used for keeping watch on and fine-tuning radio frequency power's output; the display and switch group unit (2) is respectively and electrically connected with the change-over switch, the control knob W and the indicator lamp. The portable solar water heater has the advantages of stable work, simple operation, intuition, easy understanding, portability, convenience, low power consumption, low cost and the like.
Description
Technical Field
The utility model belongs to the technical field of the semiconductor manufacturing, especially, relate to a radio frequency power supply complete machine testing arrangement.
Background
In recent decades, the microelectronics industry has been rapidly developed, and with the continuous progress of low-temperature plasma technology, plasma devices with various functions, such as radio frequency (or radio frequency magnetron) sputtering, Plasma Etching (PE), Reactive Ion Etching (RIE), plasma deposition (PECVD), etc., have been increasingly emphasized and widely used in many fields. The application of etching silicon nitride, polysilicon, aluminum and depositing silicon nitride in the semiconductor industry is firstly. With the development of other industries, the new technology is actively used, such as the deposition of various optical films and sensitive films, as well as minimally invasive medical treatment, surface modification of chemical fibers and organic substances, and the like.
With the rapid development of the semiconductor industry in China, semiconductor manufacturing (chips) has already been on a rudimentary scale; especially the rapid growth of leading enterprises such as the Shanghai, Beijing, Guangdong and the like, promotes the development of the whole industry. And the country has increased the input to the semiconductor industry for many years, through the continuous effort of these years, have had a major breakthrough as the key spare part (plasma) radio frequency power supply of the high-precision equipment in the semiconductor industry.
In these new fields leading from nanotechnology, many new technologies, new processes and new materials are applied. In order to ensure the quality of products such as semiconductors, the operational stability of the rf power supply, which is a core component of semiconductor manufacturing equipment, is critical. Therefore, in the process of production and test links, the working condition and various states of the device need to be monitored continuously; the indexes of the radio frequency power supply are ensured to meet the design and use requirements.
At present, 2 schemes can realize the operation and monitoring of the radio frequency power supply, and have the following defects:
firstly, a serial port is connected with radio frequency power supply equipment, and special software is developed to realize signal acquisition and processing. However, the development period is long, the interface signaling is not unified, and a background PC is needed; the investment is large and the occupied space is also large.
Secondly, by using an analog interface (I/O) of the radio frequency power supply and adopting an imported P L C system, the system has the defects of large system, complex field programming, complex operation and the like, so the technical requirement is high, the investment is large, the size is large, and the radio frequency power supply is not very suitable.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving this problem, provide a radio frequency power supply 25PIN complete machine testing arrangement, this device possesses job stabilization, directly perceived, easy operation, a great deal of advantage such as with low costs. Not only has low power consumption, is green and environment-friendly, but also has light weight and small volume and is convenient to carry.
In order to realize the purpose of the utility model, the technical proposal of the utility model is that:
a radio frequency power supply complete machine testing device comprises a power supply circuit 1, a control and interface circuit 5 and a display and switch group unit 2 which are arranged in a shell, and is characterized in that the control and interface circuit 5 is respectively and electrically connected with the power supply circuit 1 and the display and switch group unit 2, the display and switch group unit 2 is respectively and electrically connected with a power value display screen 3 and a set voltage value display screen 4 which are arranged on the front side of the shell, the control and interface circuit 5 is connected with radio frequency power supply equipment through a 25-core model simulation interface 7 on the rear side of the shell, the control and interface circuit 5 is also connected with a monitoring line of a dummy load through a wiring terminal 6 on the rear side of the shell, and the wiring terminal 6 is used for monitoring and finely adjusting the output power of a radio frequency power; the display and switch group unit 2 is respectively and electrically connected with a change-over switch, a control knob W and an indicator light on the front side of the shell.
Preferably, the power value display screen 3 and the set voltage value display screen 4 are both L ED display screens.
Preferably, the transfer switches are respectively a forward/reflected power indication transfer switch, a power output mode transfer switch, a power supply transfer switch, a working mode transfer switch, a load lock switch, a power output enable switch, and a set output enable switch; the control knob W is used for adjusting the output power voltage, and the control switch is arranged at different positions as required to control the working state of the radio frequency power supply.
Preferably, the power value display screen 3 displays the forward power and the reflected power value of the radio frequency power supply respectively through a forward/reflected power indication switch.
Preferably, the set voltage value display screen 4 sets and displays the output power of the radio frequency power supply through the control knob W.
Preferably, the indicator light is used for displaying the state of the radio frequency power supply and is a power supply indicator light, a locking external clock indicator light, a cold water plate over-temperature alarm indicator light and a set voltage over-line alarm indicator light respectively.
Preferably, the 25-core analog interface 7 has two sets of output analog signals and one set of input analog signals, and the two sets of output analog signals respectively output voltage signals of 0-10V along with the power change of the radio frequency power supply, which are the magnitudes of the forward power and the reflected power respectively; the input analog signal controls the voltage value through a knob.
Compared with the prior art, the beneficial effects of the utility model are that:
as a practical auxiliary device, the device is put into use for more than 2 years in production and test links. The radio frequency power supply has the advantages of stable work, simple operation, intuition, understandability, portability, convenience, low cost and the like, and plays a very good role in the batch production of the radio frequency power supply; particularly in the production and test links of semiconductors, the working efficiency is greatly improved, and the good effect is played. The energy-saving environment-friendly energy-saving water heater has the advantages of low power consumption, environmental friendliness, light weight and small volume.
Because the device adopts the optimized design, the circuit is practical, the components are cheap, the overall cost is very low, and the estimation cost is less than 1000 yuan (RMB). The price of expensive import instruments is replaced, such as an imported BIRD power meter is more than 1 ten thousand; saving a large amount of capital investment. The power consumption of the device is as follows: about 6.2W; its volume is 280 x 250 x 95mm (length, width, height).
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
Fig. 1 is a logic block diagram of the whole rf power testing apparatus of the present invention.
Fig. 2 is a front view of the whole rf power testing apparatus of the present invention.
Fig. 3 is a rear view of the whole rf power testing apparatus of the present invention.
Fig. 4 is a schematic diagram of the connection of each part of the whole rf power testing apparatus of the present invention.
Fig. 5 is a circuit structure diagram of the whole rf power testing device of the present invention.
Fig. 6 is a schematic circuit diagram of the whole rf power testing apparatus of the present invention.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.
The test device is a 13.56MHz radio frequency power supply 25PIN complete machine test device, is designed according to the field actual use mode of the radio frequency power supply, completely abandons the concept of P L C although an analog interface is also utilized, and well completes signal acquisition, processing and control.
As shown in figures 1-6, a radio frequency power supply complete machine testing device comprises a power supply circuit 1, a control and interface circuit 5 and a display and switch group unit 2 which are arranged in a shell and are respectively connected by cables such as 25 cores and 8 cores, wherein the control and interface circuit 5 is respectively electrically connected with the power supply circuit 1, the display and switch group unit 2 is respectively and electrically connected with a power value display screen 3 and a set voltage value display screen 4 (shown as a table 1) on the front side of the shell, the power value display screen 3 and the set voltage value display screen 4 are both L ED display screens, the power value display screen 3 respectively displays the forward power and the reflected power value of a radio frequency power supply through a forward/reflected power indication change-over switch, the set voltage value display screen 4 sets, fine-adjusts and displays the output power of the radio frequency power supply through a control knob W, the control and interface circuit 5 is connected with a radio frequency power supply device through a 25-core analog interface 7 on the back side of the shell, the control and interface circuit 5 is also connected with a wiring terminal 6 on the back side of the shell, the wiring terminal 6 is used for monitoring the false power supply, if the false power supply is not switched on, the false power supply output signal output of the monitor switch, the monitor switch is not switched on, if the false power supply, the false power supply output power output signal output of the false power supply is not switched on, the false power supply, the monitor switch, the false power supply switch is not switched on, if the false power output protection device is.
The 25-core analog interface 7(J1) is provided with two groups of output analog signals and one group of input analog signals, and the two groups of output analog signals respectively output voltage signals of 0-10V along with the power change of the radio frequency power supply, wherein the two groups of output analog signals respectively output the forward power and the reflected power; the input analog signal controls the voltage value through a control knob W, the voltage is sent to the inside of the radio frequency power supply through a 25-core analog port, and the size of the voltage determines the output power of the radio frequency power supply.
TABLE 1
The display and switch group unit 2 is electrically connected with a transfer switch, a control knob W and an indicator light respectively, the transfer switch (as shown in Table 3) is a forward/reflected power indication transfer switch, a power output mode transfer switch, a power supply transfer switch, a working mode transfer switch, a load locking switch, a power output enabling switch and a set output enabling switch respectively, the control knob W is used for adjusting a potentiometer of output power voltage, the control switch is arranged at different positions according to requirements so as to achieve the working state of controlling the radio frequency power supply, for example, an RF ON is a main switch for starting power, an INTER L OCK is a switch for starting and identifying a false load signal, and an FWD/RF L is a transfer switch for displaying power, and the indicator light is used for displaying the working state of the radio frequency power supply and is respectively a power indicator light, a locked external clock indicator light, a cold water plate over-temperature alarm indicator light and a set voltage over-temperature alarm indicator light (as shown in Table 2).
TABLE 2. indicator light
| Ordinal number | Name (name) | Function of | Remarks for |
| 1 | AC ON | Power indicator lamp | |
| 2 | CEX | Locking external clock indicator light | |
| 3 | Over-temperature | Over-temperature alarm of internal cold water plate (temperature greater than 50 degree) | |
| 4 | Over-setting | Set voltage cross line alarm | Red colour |
TABLE 3 Change-over switch
| Ordinal number | Name (name) | Function of | |
| 1 | FWR/REL | Forward/reflected |
|
| 2 | DC Bias | Power output mode change-over switch | |
| 3 | Inner/outer 15V | Power supply change-over |
|
| 4 | PWD/Load | Working mode change-over |
|
| 5 | INTERLOCK | |
|
| 6 | RF ON | Power output enable |
|
| 7 | SETPOINT | Setting an output enable |
|
| 8 | Control knob W | Regulating voltage of control power |
As shown in FIG. 2, the control switches and indicator lights ON the front panel are also from a 25-pin analog interface, and through these switch signals, the operating status of the RF power source, such as RF ON, INTER L OCK, AC ON, over temperature, etc., can be controlled, switched and displayed (see FIG. 3).
As shown in FIG. 3, the 2 black and white terminals (right side) of the rear INTER L OCK are chain protection signal input ports for protecting a 50 ohm dummy load, when the power supply of the dummy load is turned on, i.e. the dummy load works normally (including cooling water), the test device detects that the circuit is in a short circuit (disconnection) state, the test device identifies the signal after receiving the enabling signal and forwards the signal to the radio frequency power supply through the 25-pin analog interface, so that the output power of the radio frequency power supply can be started, otherwise, if the external signal is in an open circuit state, the test device represents that the dummy load is not ready (faults such as non-power-up or abnormal cooling system and the like) and does not allow the power output of the radio frequency power supply, so as to protect the dummy load from being accidentally burnt out.
The embodiments described above are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Claims (7)
1. A radio frequency power supply complete machine testing device comprises a power supply circuit, a control and interface circuit and a display and switch group unit which are arranged in a shell, and is characterized in that the control and interface circuit (5) is respectively and electrically connected with the power supply circuit (1) and the display and switch group unit (2), the display and switch group unit (2) is respectively and electrically connected with a power value display screen (3) and a set voltage value display screen (4) which are arranged on the front side of the shell, the control and interface circuit (5) is connected with radio frequency power supply equipment through a 25-core model simulation interface (7) on the rear side of the shell, the control and interface circuit (5) is also connected with a monitoring line of a dummy load through a wiring terminal (6) on the rear side of the shell, and the wiring terminal (6) is used for monitoring and finely adjusting the output power of the radio frequency; the display and switch group unit (2) is respectively and electrically connected with a change-over switch, a control knob W and an indicator light on the front side of the shell.
2. The radio frequency power supply complete machine testing device as claimed in claim 1, wherein the power value display screen (3) and the set voltage value display screen (4) are both L ED display screens.
3. The complete radio frequency power supply testing device according to claim 1, wherein the switches are a forward/reflected power indication switch, a power output mode switch, a power supply switch, a working mode switch, a load lock switch, a power output enable switch, and a setting output enable switch, respectively; the control knob W is used for adjusting the output power voltage, and the control switch is arranged at different positions as required to control the working state of the radio frequency power supply.
4. The complete radio frequency power supply testing device according to claim 1, wherein the power value display screen (3) displays the forward power and the reflected power value of the radio frequency power supply respectively through a forward/reflected power indication switch.
5. The complete radio frequency power supply testing device according to claim 1, wherein the set voltage value display screen (4) sets and displays the output power of the radio frequency power supply through a control knob W.
6. The complete radio frequency power supply testing device according to claim 1, wherein the indicator light is used for displaying the state of the radio frequency power supply and is respectively a power supply indicator light, a locking external clock indicator light, a cold water plate over-temperature alarm indicator light and a set voltage over-line alarm indicator light.
7. The complete machine testing device of the radio frequency power supply according to claim 1, wherein the 25-core analog interface (7) has two groups of output analog signals and one group of input analog signals, the two groups of output analog signals respectively output voltage signals of 0-10V along with the power change of the radio frequency power supply, and the two groups of output analog signals respectively have the magnitudes of forward power and reflected power; the input analog signal controls the voltage value through a knob.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921775999.1U CN211043624U (en) | 2019-10-22 | 2019-10-22 | Radio frequency power supply complete machine testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921775999.1U CN211043624U (en) | 2019-10-22 | 2019-10-22 | Radio frequency power supply complete machine testing device |
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| Publication Number | Publication Date |
|---|---|
| CN211043624U true CN211043624U (en) | 2020-07-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921775999.1U Active CN211043624U (en) | 2019-10-22 | 2019-10-22 | Radio frequency power supply complete machine testing device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114509700A (en) * | 2022-01-14 | 2022-05-17 | 苏州浪潮智能科技有限公司 | Device and method for testing CRPS power supply of server |
-
2019
- 2019-10-22 CN CN201921775999.1U patent/CN211043624U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114509700A (en) * | 2022-01-14 | 2022-05-17 | 苏州浪潮智能科技有限公司 | Device and method for testing CRPS power supply of server |
| CN114509700B (en) * | 2022-01-14 | 2024-01-12 | 苏州浪潮智能科技有限公司 | Server CRPS power supply testing device and method |
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