CN210978606U - Interface valve - Google Patents
Interface valve Download PDFInfo
- Publication number
- CN210978606U CN210978606U CN201920958611.5U CN201920958611U CN210978606U CN 210978606 U CN210978606 U CN 210978606U CN 201920958611 U CN201920958611 U CN 201920958611U CN 210978606 U CN210978606 U CN 210978606U
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- Prior art keywords
- diaphragm
- piston diaphragm
- hole
- valve body
- valve
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 56
- 239000007788 liquid Substances 0.000 claims abstract description 27
- 238000007789 sealing Methods 0.000 claims description 27
- 238000012423 maintenance Methods 0.000 abstract description 2
- 239000010865 sewage Substances 0.000 description 20
- 238000000034 method Methods 0.000 description 9
- 239000010410 layer Substances 0.000 description 6
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000013016 damping Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Fluid-Driven Valves (AREA)
Abstract
The utility model discloses an interface valve, have the valve body in flange hole and be located including the top piston diaphragm in the valve body, piston diaphragm encloses into a diaphragm chamber with the roof of valve body, the valve body top is provided with the pneumatic chamber, the pneumatic chamber passes through the flange hole with the diaphragm chamber switches on its characterized in that: piston diaphragm includes first piston diaphragm and suit second piston diaphragm outside first piston diaphragm, the valve body outside is provided with liquid level water tank, and it has water to fill in the liquid level water tank. The utility model discloses make the interface valve can in time be discover at the damage initial stage to initiatively carry out the maintenance measure.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a technical field of valve especially relates to an interface valve.
[ background of the invention ]
In the field of drainage, a stepped valve core or a tapered valve core is adopted in the prior art to slide in a valve body, so that the opening or closing of fluid is realized, but in the field of vacuum drainage, the conventional valve core and the valve body have no ideal effect in the aspects of corresponding speed, sealing performance, reliability and the like.
However, in the vacuum interface valve in the prior art, due to the fast switching speed between the vacuum in the vacuum chamber and the standard atmospheric pressure, the piston diaphragm in the interface valve is strongly impacted when being opened and closed, so that the fatigue damage of the piston diaphragm is very easy to cause.
[ Utility model ] content
The utility model aims at solving the problem among the prior art, provide an interface valve and fault early warning method thereof for the interface valve can in time be discovered at the damage initial stage, thereby initiatively carries out the maintenance measure.
In order to achieve the above object, the utility model provides an interface valve, have the valve body in flange hole and be located including the top piston diaphragm in the valve body, piston diaphragm encloses into a diaphragm chamber with the roof of valve body, the valve body top is provided with the pneumatic chamber, the pneumatic chamber passes through the flange hole with the diaphragm chamber switches on its characterized in that: the piston diaphragm comprises a first piston diaphragm and a second piston diaphragm sleeved outside the first piston diaphragm, the upper edges of the first piston diaphragm and the second piston diaphragm extend outwards to form a ring groove, a sealing ring is embedded in the ring groove, and an intra-ring water inlet hole is formed in the sealing ring; the edge of the top of the inner cavity of the valve body is provided with an annular limiting groove, the top of the valve body is also provided with a water through hole, one end of the water through hole is connected with the limiting groove in the valve body, and the other end of the water through hole is connected to the outside of the valve body; the upper edge of the piston diaphragm and the sealing ring are embedded into the limiting groove together, a liquid level water tank is arranged on the outer side of the valve body, and the liquid level water tank is communicated with a water through hole on the outer side of the valve body; and water is filled in the liquid level water tank, and flows to the limiting groove through the water through hole and reaches the annular groove between the first piston diaphragm and the second piston diaphragm through the in-ring water inlet hole of the sealing ring.
Preferably, the outer edge of the first piston diaphragm and the lower edge of the second piston diaphragm are respectively provided with a first curled edge and a second curled edge, and the second curled edge of the second piston diaphragm positioned at the outer side wraps the first curled edge of the first piston diaphragm positioned at the inner side; and a diaphragm bottom plate is further packaged at the lower edge of the first piston diaphragm.
Preferably, a guide rod is arranged at the center of the diaphragm bottom plate, and the upper end of the guide rod passes through a flange hole at the top of the valve body and then reaches the air pressure chamber.
Preferably, a plug cover is arranged in the flange hole, a vent hole is formed in the plug cover, and the guide rod penetrates through the center of the plug cover and is connected with the plug cover in a sliding mode through a movable sealing ring.
Preferably, the air pressure chamber is provided with an air pressure hole, and both vacuum negative pressure and atmospheric pressure are introduced into the air pressure chamber through the air pressure hole.
Preferably, a first pressure relief hole is formed in the top end of the air pressure chamber, and a second pressure relief hole is formed in the top end of the valve body; and the second pressure relief hole is communicated with the diaphragm cavity through a through hole in the plug cover by the valve body.
Preferably, a buffer spring is arranged between the movable sealing ring and the plug cover, a limiting step is arranged at the middle section of the guide rod, and when the piston diaphragm is retracted upwards, the limiting step impacts the movable sealing ring and then absorbs impact energy by virtue of the buffer spring.
The utility model has the advantages that: the utility model discloses a set up the piston diaphragm to the two-layer structure that comprises first piston diaphragm and second piston diaphragm, and set up the liquid level water tank that communicates with the faying face of two-layer piston diaphragm in the valve body outside, if there is any one or two-layer in first piston diaphragm and second piston diaphragm and all appear when damaged, can be in time through observing the liquid level of liquid level water tank and discover the damage problem of piston diaphragm, therefore can in time maintain the interface valve in the early stage that the piston diaphragm appears damaged, avoid influencing the use; the utility model discloses the interface valve trouble early warning method who takes to simple and easy and ingenious structure is as the basis, thereby makes the method of finding the trouble very convenient, has very high practical value.
The features and advantages of the present invention will be described in detail by embodiments with reference to the accompanying drawings.
[ description of the drawings ]
Fig. 1 is a sectional view of the overall structure of the present invention;
FIG. 2 is an enlarged view of portion B of FIG. 1;
FIG. 3 is an enlarged view of section C of FIG. 1;
FIG. 4 is an enlarged view of section D of FIG. 1;
FIG. 5 is an enlarged view of section E of FIG. 4;
fig. 6 is an enlarged view of a portion F in fig. 1.
In the figure: 1-valve body, 2-piston diaphragm, 3-pneumatic chamber, 4-liquid level water tank, 5-guide rod, 6-plug cover, 7-dynamic sealing ring, 8-flexible throat hoop, 9-sealing ring, 101-sewage outlet, 102-sewage inlet, 103-second pressure relief hole, 104-water through hole, 105-limiting groove, 201-first piston diaphragm, 202-second piston diaphragm, 203-diaphragm bottom plate, 204-ring groove, 205-diaphragm cavity, 301-pneumatic hole, 302-first pressure relief hole, 601-air through hole and 901-in-ring water inlet hole.
[ detailed description ] embodiments
Referring to fig. 1-6, the utility model relates to an interface valve, include that the top has the valve body 1 of flange hole 106 and is located piston diaphragm 2 in the valve body, piston diaphragm encloses into a diaphragm chamber 205 with the roof of valve body, the valve body top is provided with pneumatic chamber 3, pneumatic chamber passes through the flange hole with the diaphragm chamber switches on its characterized in that: the piston diaphragm 2 comprises a first piston diaphragm 201 and a second piston diaphragm 202 sleeved outside the first piston diaphragm, the upper edges of the first piston diaphragm and the second piston diaphragm extend outwards to form a ring groove 204, a sealing ring 9 is embedded in the ring groove, and an in-ring water inlet hole 901 is formed in the sealing ring; the edge of the top of the inner cavity of the valve body is provided with an annular limiting groove 105, the top of the valve body is also provided with a water through hole 104, one end of the water through hole is connected with the limiting groove in the valve body, and the other end of the water through hole is connected to the outside of the valve body; the upper edge of the piston diaphragm 2 and the sealing ring 9 are embedded into the limiting groove 105 together, a liquid level water tank 4 is arranged on the outer side of the valve body 1, and the liquid level water tank is communicated with a water through hole 104 on the outer side of the valve body; the liquid level water tank is filled with water, and the water flows to the limiting groove 105 through the water through hole and reaches the annular groove 204 between the first piston diaphragm 201 and the second piston diaphragm 202 through the in-ring water inlet hole 901 of the sealing ring 9.
The lower edges of the first piston diaphragm outer 201 and the second piston diaphragm 202 are respectively provided with a first curled edge 201a and a second curled edge 202a, and the second curled edge 202a of the second piston diaphragm positioned at the outer side wraps the first curled edge 201a of the first piston diaphragm positioned at the inner side; a diaphragm bottom plate 203 is further packaged at the lower edge of the first piston diaphragm; the packaging mode can be a screw fixing mode, a glue sealing mode or a riveting mode and the like.
The section of the piston diaphragm 2 is of a C-shaped structure, a flexible throat hoop 8 is sleeved at the concave part on the side face of the cylinder, and the elasticity of the flexible throat hoop generates a restraining force on the side wall of the piston diaphragm in the radial direction, so that the piston diaphragm 2 moves more sensitively in the axial direction under the action of air pressure.
The center of the diaphragm bottom plate 203 is provided with a guide rod 5, and the upper end of the guide rod passes through the flange hole 106 at the top of the valve body and then reaches the air pressure chamber 3.
A plug cover 6 is arranged in the flange hole 106, a vent hole 601 is arranged on the plug cover, and the guide rod 5 penetrates through the center of the plug cover 6 and is connected with the plug cover in a sliding mode through a movable sealing ring 7.
The air pressure chamber 3 is provided with an air pressure hole 301, and vacuum negative pressure or atmospheric pressure is introduced into the air pressure chamber 3 through the air pressure hole 301.
A first pressure relief hole 302 is formed in the top end of the air pressure chamber 3, and a second pressure relief hole 103 is formed in the top end of the valve body 1; the second pressure relief hole 103 is communicated with the diaphragm chamber 205 through a vent hole 601 in the plug cover 6 from the valve body 1.
A buffer spring is arranged between the movable sealing ring 7 and the plug cover 6, a limiting step is arranged at the middle section of the guide rod 5, and when the piston diaphragm 2 is upwards retracted, the limiting step impacts the movable sealing ring 7 and then absorbs impact energy by virtue of the buffer spring.
A fault early warning method for an interface valve, comprising the steps of:
a. the first piston diaphragm 201 and the second piston diaphragm 202 are checked to ensure no breakage;
b. recording the initial liquid level of water in the liquid level water tank 4;
c. the real-time liquid level in the liquid level tank 4 is regularly observed, and if the real-time liquid level is reduced, the liquid is lost from an interlayer between the first piston diaphragm 201 and the second piston diaphragm 202, and the piston diaphragm 2 is indirectly damaged.
The process of switching the sewage inlet 102 and the sewage outlet 101 of the valve body 1 from the off state to the on state:
firstly, the air pressure port 301 is communicated with vacuum negative pressure, the diaphragm cavity 205 is vacuumized, the air pressure of the air pressure is smaller than that of the area, outside the piston diaphragm 2, in the valve body 1, so that the piston diaphragm 2 contracts, the diaphragm bottom plate 203 moves upwards, the guide rod 5 moves upwards synchronously, when the limiting step on the guide rod 5 abuts against the movable sealing ring 7, the impact on the movable sealing ring 7 is absorbed by the buffer spring, the piston diaphragm 2 is balanced in stress again under the action of the buffer spring, after the diaphragm bottom plate 203 moves upwards, the sewage inlet 102 is opened, the sewage discharge port 101 is communicated with vacuum negative pressure, and then the sewage passes through the sewage inlet 102 and the interior of the valve body 1 and is discharged from the sewage discharge port 101;
the process of transferring the sewage inlet 102 and the sewage outlet 101 of the valve body 1 from the on state to the off state:
firstly, the air pressure port 301 is communicated with the external atmospheric pressure, the diaphragm cavity 205 is switched from the negative pressure state to the external atmospheric pressure state, and due to the negative pressure effect of the sewage discharging port 101 in the valve body 1, the air pressure in the diaphragm cavity 205 is greater than the air pressure in the area, outside the piston diaphragm 2, in the valve body 1, so that the piston diaphragm 2 expands, the diaphragm bottom plate 203 moves downwards, the guide rod 5 synchronously moves downwards, the diaphragm bottom plate 203 moves downwards to the sewage inlet port 102 (the bottom wall of the valve body), the sewage inlet port 102 is blocked, and then the sewage inlet port 102 and the sewage discharging port 101 are cut off;
and (3) fault early warning process:
under a normal state, joint surfaces of the first piston diaphragm 201 and the second piston diaphragm 202 are attached, or a small amount of water is located between the joint surfaces of the first piston diaphragm 201 and the second piston diaphragm 202 in a water film mode, but no leakage exists, so that the water level in the liquid level water tank 4 is at a stable position, when the piston diaphragm 2 is opened, closed and switched for many times, and the first piston diaphragm 201 and/or the second piston diaphragm 202 are damaged due to fatigue damage, water in the liquid level water tank 4 flows into the joint surfaces of the first piston diaphragm 201 and the second piston diaphragm 202 after sequentially passing through the water through hole 104, the limiting groove 105, the in-ring water inlet hole 901 and the ring groove 204 on the sealing ring 9, and flows out from the damaged position, so that the fault of the interface valve can be judged by observing the water level change in the liquid level water tank 4;
and (3) air pressure fault processing:
the air pressure hole 301 is switched between two air pressure sources of vacuum and external atmospheric pressure, if a vacuum generator fails or an electromagnetic valve for switching the two air pressure sources fails, the air pressure hole 301 loses the switching capability, and at the moment, if the diaphragm cavity 205 is in a vacuum negative pressure state, in order to close the sewage inlet 102 (cut off the sewage inlet 102 and the sewage outlet 101), the diaphragm cavity 205 can be communicated with the external atmospheric pressure through a first pressure relief hole 302 on the air pressure chamber 3 and a second pressure relief hole 103 on the valve body 1, so that the sewage inlet 102 can be closed; first pressure release hole 302 and second pressure release hole 103 are the damping aperture, normally open to external atmosphere, and when atmospheric pressure hole 301 switch-on vacuum negative pressure, for atmospheric pressure hole 301, the air inlet of first pressure release hole 302 and second pressure release hole 103 is neglected, so can not influence the negative pressure characteristic in diaphragm chamber 205.
The utility model discloses a set up the piston diaphragm to the two-layer structure that comprises first piston diaphragm and second piston diaphragm, and set up the liquid level water tank that communicates with the faying face of two-layer piston diaphragm in the valve body outside, if there is any one or two-layer in first piston diaphragm and second piston diaphragm and all appear when damaged, can be in time through observing the liquid level of liquid level water tank and discover the damage problem of piston diaphragm, therefore can in time maintain the interface valve in the early stage that the piston diaphragm appears damaged, avoid influencing the use; the utility model discloses the interface valve trouble early warning method who takes to simple and easy and ingenious structure is as the basis, thereby makes the method of finding the trouble very convenient, has very high practical value.
The above-mentioned embodiment is right the utility model discloses an explanation, it is not right the utility model discloses a limited, any right the scheme after the simple transform of the utility model all belongs to the protection scope of the utility model.
Claims (7)
1. An interface valve, including the valve block that has the flange hole on the top and is located the piston diaphragm in the valve block, a diaphragm chamber is enclosed with the roof of valve block to the piston diaphragm, be provided with the pneumatic chamber above the valve block, the pneumatic chamber passes through the flange hole with the diaphragm chamber switches on, its characterized in that: the piston diaphragm comprises a first piston diaphragm and a second piston diaphragm sleeved outside the first piston diaphragm, the upper edges of the first piston diaphragm and the second piston diaphragm extend outwards to form a ring groove, a sealing ring is embedded in the ring groove, and an intra-ring water inlet hole is formed in the sealing ring; the edge of the top of the inner cavity of the valve body is provided with an annular limiting groove, the top of the valve body is also provided with a water through hole, one end of the water through hole is connected with the limiting groove in the valve body, and the other end of the water through hole is connected to the outside of the valve body; the upper edge of the piston diaphragm and the sealing ring are embedded into the limiting groove together, a liquid level water tank is arranged on the outer side of the valve body, and the liquid level water tank is communicated with a water through hole on the outer side of the valve body; and water is filled in the liquid level water tank, and flows to the limiting groove through the water through hole and reaches the annular groove between the first piston diaphragm and the second piston diaphragm through the in-ring water inlet hole of the sealing ring.
2. The interface valve of claim 1 wherein: the outer side of the first piston diaphragm and the lower edge of the second piston diaphragm are respectively provided with a first curled edge and a second curled edge, and the second curled edge of the second piston diaphragm positioned on the outer side wraps the first curled edge of the first piston diaphragm positioned on the inner side; and a diaphragm bottom plate is further packaged at the lower edge of the first piston diaphragm.
3. The interface valve of claim 2 wherein: the center of the diaphragm bottom plate is provided with a guide rod, and the upper end of the guide rod penetrates through a flange hole in the top of the valve body and then reaches the inside of the air pressure chamber.
4. The interface valve of claim 3 wherein: the flange hole is internally provided with a plug cover, the plug cover is provided with an air vent, and the guide rod penetrates through the center of the plug cover and is connected with the plug cover in a sliding manner through a movable sealing ring.
5. The interface valve of claim 1 wherein: the air pressure chamber is provided with an air pressure hole.
6. The interface valve of claim 5 wherein: the top end of the air pressure chamber is provided with a first pressure relief hole, and the top end of the valve body is provided with a second pressure relief hole; and the second pressure relief hole is communicated with the diaphragm cavity through a through hole in the plug cover by the valve body.
7. The interface valve of claim 4 wherein: and when the piston diaphragm is upwards retracted, the limit step impacts the movable sealing ring and then absorbs impact energy by virtue of the buffer spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920958611.5U CN210978606U (en) | 2019-06-25 | 2019-06-25 | Interface valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920958611.5U CN210978606U (en) | 2019-06-25 | 2019-06-25 | Interface valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210978606U true CN210978606U (en) | 2020-07-10 |
Family
ID=71422946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920958611.5U Expired - Fee Related CN210978606U (en) | 2019-06-25 | 2019-06-25 | Interface valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210978606U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110332333A (en) * | 2019-06-25 | 2019-10-15 | 浙江广播电视大学 | A kind of interface valve and its fault early warning method |
-
2019
- 2019-06-25 CN CN201920958611.5U patent/CN210978606U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110332333A (en) * | 2019-06-25 | 2019-10-15 | 浙江广播电视大学 | A kind of interface valve and its fault early warning method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200710 |