CN210978543U - Turnover vacuum valve and vapor deposition equipment - Google Patents

Abstract

The utility model discloses a convertible vacuum valve and vapor deposition equipment, be formed with the valve body of valve port on having inner chamber and at least first curb plate, be provided with the case in the valve body, have on the case with the sealing washer that the valve port corresponds, the case is connected and can be driven its court the actuating mechanism that the valve port removed, actuating mechanism is including the terminal surface fine setting that makes the case to the fine-tuning parallel with the inner wall of the first curb plate of valve body. This scheme design is exquisite, simple structure, and through the fine setting structure that makes valve plate swing arm pivoted structure and spring constitute relatively, the terminal surface that makes the valve plate is parallel with the valve body inner wall in valve port place region to can guarantee that sealing washer and valve body inner wall closely laminate, the effectual leakproofness that has improved has guaranteed the vacuum.

Description

Turnover vacuum valve and vapor deposition equipment

Technical Field

The utility model belongs to the technical field of vapor deposition equipment and specifically relates to convertible vacuum valve and vapor deposition equipment.

Background

Vapor deposition techniques utilize physical and chemical processes that occur in the vapor phase to form functional or decorative metallic, non-metallic, or compound coatings on the surface of a workpiece.

The vapor deposition equipment is a main place for deposition, and needs to be performed in a certain vacuum environment during deposition, so that various deposition equipment performs vacuum cavity sealing or partition between different cavities through valves, but conventional valve bodies such as various gate valves, flap valves and the like.

At present, a flap valve commonly seen in the market mainly comprises a turnover shaft, a ball nut, a pressing plate, a locking plate, a sealing ring, a valve body and other parts, wherein the turnover shaft is fixed on a swing cylinder outside a cavity body, the pressing plate is welded on the turnover shaft, and the pressing plate and the locking plate are connected together through the ball nut and a stud; however, such flap valves have the following problems:

the sealing performance is poor, and the rubber ring is easy to damage due to the fact that two surfaces are not parallel at the position close to the joint between the sealing plate of the flap valve and the sealing surface of the cavity, and the rubber ring is rubbed with the hands, so that the sealing performance is reduced.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a convertible vacuum valve and vapor deposition equipment in order to solve the above-mentioned problem that exists among the prior art.

The purpose of the utility model is realized through the following technical scheme:

the turnover vacuum valve comprises a valve body, wherein the valve body is provided with an inner cavity and at least a first side plate is provided with a valve port, a valve core is arranged in the valve body, a sealing ring corresponding to the valve port is arranged on the valve core, the valve core is connected with a driving mechanism capable of driving the valve core to move towards the valve port, and the driving mechanism comprises a fine adjustment mechanism capable of finely adjusting the end surface of the valve core to be parallel to the inner wall of the first side plate of the valve body.

Preferably, in the turnover vacuum valve, the valve body includes a groove body and a cover body, and a sealing member surrounding the valve port is formed on an outer surface of a side plate where the valve port is located.

Preferably, in the turnover vacuum valve, the sealing ring is a silica gel sealing ring.

Preferably, in the convertible vacuum valve, actuating mechanism includes a pivot of a rigidity and rotation, the pivot is connected the power unit of its rotation of drive and is provided with the swing arm on it, the pivot of swing arm is connected the pivot connecting seat on the second curb plate of case, be located its one end of connecting spring with the pivot connecting seat's below position on the swing arm, the other end of spring is fixed on the second curb plate.

Preferably, in the turnover vacuum valve, the power mechanism comprises a first bevel gear fixed on the rotating shaft, the first bevel gear is engaged with a second bevel gear, the second bevel gear is connected with a transmission shaft, the transmission shaft is rotatably inserted into a shaft sleeve fixed in one position and is connected with one end of a transmission rod, a kidney-shaped hole is formed in the transmission rod, a connecting piece is slidably connected in the kidney-shaped hole, and the connecting piece is connected with the cylinder.

Preferably, in the turnover vacuum valve, a guide shaft is clamped on the connecting piece, the guide shaft is parallel to the extending direction of the cylinder shaft of the cylinder, and the guide shaft is slidably inserted into the two guide seats.

Preferably, in the turnover vacuum valve, the cylinder is located outside the valve body.

Preferably, in the turnover vacuum valve, a limiting rod penetrating through the swing arm is arranged above a connecting point of the pivot connecting seat of the swing arm.

Preferably, in the turnover vacuum valve, a guide pin inserted in the spring is arranged on the swing arm, and the length of the guide pin extending out of the swing arm is smaller than the length of the spring extending out of the swing arm in a natural state.

Vapor deposition equipment comprising a roll-over vacuum valve as described in any one of the above.

The utility model discloses technical scheme's advantage mainly embodies:

this scheme design is exquisite, simple structure, and through the fine setting structure that makes valve plate swing arm pivoted structure and spring constitute relatively, the terminal surface that makes the valve plate is parallel with the valve body inner wall in valve port place region to can guarantee that sealing washer and valve body inner wall closely laminate, the effectual leakproofness that has improved has guaranteed the vacuum.

The drive structure of this scheme adopts the cylinder as the power supply, through bevel gear transmission structure, and the transmission is more accurate with control, makes the upset of valve plate, targets in place more accurate, and is efficient, and control is simple, and sealed effect is better.

The telescopic shaft of the cylinder is limited by the guide shaft, so that the motion stability of the cylinder can be effectively guaranteed, and the operation effectiveness of the whole power mechanism is improved.

Adopt the silica gel sealing washer, the texture is softer, guarantee leakproofness that can be better for fluororubber.

Drawings

Fig. 1 is a cross-sectional view of a roll-over vacuum valve of the present invention;

fig. 2 is a perspective view of the turnover vacuum valve of the present invention;

fig. 3 is a front view of the turnover vacuum valve of the present invention with the valve body hidden;

fig. 4 is a top view of the turnover vacuum valve of the present invention with the valve body hidden;

fig. 5 is a side view of the turnover vacuum valve of the present invention with the valve body hidden;

fig. 6 is a rear view of the turnover vacuum valve of the present invention with the valve body hidden;

figure 7 is a perspective view of the locking disk of the present invention.

Detailed Description

Objects, advantages and features of the present invention will be illustrated and explained by the following non-limiting description of preferred embodiments. These embodiments are merely exemplary embodiments for applying the technical solutions of the present invention, and all technical solutions formed by adopting equivalent substitutions or equivalent transformations fall within the scope of the present invention.

In the description of the embodiments, it should be noted that the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the embodiment, the operator is used as a reference, and the direction close to the operator is a proximal end, and the direction away from the operator is a distal end.

The following description is made in conjunction with the accompanying drawings, as shown in fig. 1 and fig. 2, the turnover vacuum valve disclosed in the present invention includes a valve body 1 having an inner cavity 11 and at least a first side plate 12, wherein the valve body 1 includes a tank body 15 having a rectangular cavity and a cover 16, a rounded rectangle valve port 13 is formed on a first side plate 14 of the tank body 15, and a sealing member is disposed in the sealing groove 111 at the periphery of the valve port 13 and formed on the outer surface of the first side plate 14. A sealing ring fixing groove 151 is formed in the end face of the notch of the tank body 15, a sealing ring is arranged in the sealing ring fixing groove, and the cover body 16 is rectangular and covers the notch of the tank body, so that the tank body 15 and the cover body 16 are sealed through the sealing ring.

As shown in fig. 1, a valve core 2 is arranged in the valve body 1, the valve core includes a valve plate 22, in a normal state, the valve plate 22 is inclined toward an end surface 21 of the first side plate 14, a distance from an upper end of the valve plate 22 to the first side plate 14 is smaller than a distance from a lower end of the valve plate to the first side plate 14, and a sealing ring installation groove 23 is formed in the end surface 21 of the valve plate 22, as shown in fig. 3, a sealing ring 3 is fixed in the sealing ring installation groove 23, the sealing ring 3 is opposite to the valve port 13, and the sealing ring 3 is preferably a silica gel sealing ring, which is softer in texture and can be better deformed than conventional fluororubber, so as to.

As shown in fig. 1, the valve core 2 is connected to a driving mechanism 4 capable of driving the valve core 2 to move toward the valve port 13, specifically, the driving mechanism 4 drives the valve core 2 to swing, and the driving mechanism 4 includes a fine adjustment mechanism for finely adjusting the end surface 21 of the valve core 2 after the valve core 2 swings to be parallel to the inner wall of the first side plate 12 of the valve body 1.

Specifically, as shown in fig. 3, the driving mechanism 4 includes a rotating shaft 41 with a fixed position and capable of rotating, the rotating shaft 41 is rotatably suspended on two supporting seats 410 at the bottom of the cover 16, the supporting seats 410 include a bottom plate 4101 and supporting plates 4102, 4103 arranged on the bottom plate 4101 with a gap therebetween, bearings 440 are coaxially arranged on the supporting plates 4102, 4103, and the rotating shaft 41 is inserted into inner holes of the bearings 440.

As shown in fig. 3, the rotating shaft 41 is connected with a power mechanism 42 for driving the rotating shaft to rotate, the power mechanism 42 includes a first bevel gear 421 coaxially fixed on the rotating shaft 41, the first bevel gear 421 is engaged with a second bevel gear 422, the second bevel gear 422 is connected with a transmission shaft 423, the transmission shaft 423 vertically passes through the cover 16 of the valve body, the transmission shaft 423 is rotatably inserted into a shaft sleeve 424 fixed on the cover 16, one end of the transmission shaft 423 extending to the outside of the cover 16 is connected with one end of a transmission rod 425, a kidney-shaped hole 4251 is formed on the transmission rod 425, a connecting member 426 is slidably connected in the kidney-shaped hole 4251, the connecting member 426 includes a U-shaped seat 4261, bearings 4262 are coaxially arranged on two side plates of the U-shaped seat 4261, a sliding pin 4263 is inserted in an inner ring of the bearings 4262, the sliding pin (not shown) passes through the kidney-shaped hole 4251, the U-shaped seat 4261 of the connecting piece 426 is connected with the cylinder shaft 4271 of the cylinder 427, and the cylinder 427 is fixed on the cover body 1 and positioned outside the valve body 1.

Further, in order to avoid the swinging of the cylinder shaft during the extension and retraction, as shown in fig. 4, a clip 4263 is provided on a U-shaped seat 4261 of the connecting member 426, the clip 4263 is U-shaped, a guide shaft 428 is clipped on the clip 4263, the guide shaft 428 is parallel to the extending direction of the cylinder shaft 4271 of the cylinder 427, a circular groove 4281 clipped with the clip 4263 is concavely provided on the guide shaft 428, the guide shaft 428 is slidably inserted on two guide seats 429, and the guide seats 429 are fixed on the cover 16 and have through holes (not shown in the figure) for the guide shaft 428 to pass through.

Of course, in other embodiments, the transmission shaft 423 may also be driven by a motor or the like as a power source, which is a known technology and is not described herein.

Further, as shown in fig. 3 and 5, two swing arms 43 are disposed on the rotating shaft 41, the two swing arms 43 are respectively located between the two supporting plates 4102, 4103 of the supporting seat 410, the rotating shaft 41 has a plane 411 for connecting the swing arms 43, a connecting hole 412 is disposed at the plane 411, the swing arms 43 are L-shaped, the shorter part of the swing arms 43 is connected to the plane 411, the longer part of the swing arms extends below the rotating shaft 41, and the rotating shaft 41 rotates and drives the swing arms 43 to rotate.

As shown in fig. 5 and 6, the two swing arms 43 are respectively pivotally connected to the pivot connection seats 44 on the outer wall of the second side plate 17 of the valve core 1, specifically, a kidney-shaped hole 431 is formed on the swing arm 43, the pivot connection seats 44 are T-shaped, the longitudinal plate 441 thereof is inserted into the kidney-shaped hole 431, the longitudinal plate 441 is connected to the swing arm 43 through a connection pin 420 and a locking disc 430 which vertically penetrate through the longitudinal plate 441, and a slot 4201 for engaging with the locking disc 430 is formed at one end of the connection pin 420.

As shown in fig. 7, the locking disk 430 has a notch 4301 with a large opening and a small inner end and a plurality of, preferably three, locking parts 4302 arranged at intervals, the inner surface of the locking part 4302 is a partial arc surface of a circumferential surface, and the diameter of the circumferential surface does not exceed the diameter of the groove bottom circle of the locking groove 4201.

Further, as shown in fig. 1, one end of a spring 45 is connected to the swing arm 43 at a position below the connection point with the pivot connection base 44, the other end of the spring 45 is fixed to the second side plate 17 below the pivot connection base 44 and has an axis perpendicular to the inner end surface of the valve plate, and the spring 45 keeps the valve plate 22 in a tilting state in a normal state; in addition, in order to guide the spring 45 and avoid irregular deformation of the spring, the swing arm 43 is further provided with a guide pin 47 inserted in the spring 45, and the length of the guide pin 47 extending out of the swing arm 43 is smaller than the length of the spring 45 extending out of the swing arm in a natural state, that is, in a normal state, a gap is maintained between the guide pin 47 and the inner wall of the valve plate 22.

In addition, as shown in fig. 1, a limiting rod 46 is arranged on the swing arm 43 above the connection point of the pivot connection seat, and the limiting rod 46 can limit the clockwise rotation stroke of the valve plate 22 when the valve plate swings, so that the valve plate is prevented from being overturned excessively.

When the turnover vacuum valve works, the cylinder 427 drives the transmission rod 425 to transmit, so as to drive the transmission shaft 423 to rotate, the rotation of the transmission shaft 423 is converted into rotation motion of the rotating shaft 41 through the first bevel gear 421 and the second bevel gear 422, so as to drive the swing arm 43 to rotate, the swing arm 43 drives the valve plate 22 to move towards the valve port, when the valve plate 22 or the sealing ring 3 thereon contacts with the inner wall of the first side plate of the valve body, under the resistance of the inner wall, the valve plate 22 rotates around the connecting pin 20 connected with the swing arm until the end surface 21 of the valve plate is parallel to the inner wall of the first side plate, so that the sealing ring 3 thereon is tightly attached to the inner wall of the first side plate.

This scheme further discloses a vapor deposition equipment, including the convertible vacuum valve of above-mentioned embodiment, the opening part at the cavity is connected to convertible vacuum valve's first curb plate 12.

The utility model has a plurality of implementation modes, and all technical schemes formed by adopting equivalent transformation or equivalent transformation all fall within the protection scope of the utility model.

Claims (10)

1. Convertible vacuum valve, its characterized in that: the valve comprises a valve body which is provided with an inner cavity and at least a first side plate is provided with a valve port, a valve core is arranged in the valve body, a sealing ring corresponding to the valve port is arranged on the end surface of the valve core, the valve core is connected with a driving mechanism which can drive the valve core to move towards the valve port, and the driving mechanism comprises a fine adjustment mechanism which enables the end surface of the valve core to be fine adjusted to be parallel to the inner wall of the first side plate of the valve body.

2. The roll over vacuum valve of claim 1 wherein: the valve body comprises a groove body and a cover body, and a sealing element arranged around the periphery of the valve port is formed on the outer surface of the side plate where the valve port is located.

3. The roll over vacuum valve of claim 1 wherein: the sealing ring is a silica gel sealing ring.

4. The roll over vacuum valve of claim 1 wherein: the driving mechanism comprises a rotating shaft which is fixed in position and can rotate, the rotating shaft is connected with a power mechanism for driving the rotating shaft to rotate, a swing arm is arranged on the rotating shaft, the swing arm is in pivot connection with a pivot connection seat on the second side plate of the valve core, one end of a spring is connected to the position, below a connection point of the swing arm and the pivot connection seat, of the swing arm, and the other end of the spring is fixed on the second side plate.

5. The roll over vacuum valve of claim 4 wherein: the power mechanism comprises a first bevel gear fixed on the rotating shaft, the first bevel gear is meshed with a second bevel gear, the second bevel gear is connected with a transmission shaft, the transmission shaft is rotatably inserted into a shaft sleeve fixed in one position and is connected with one end of a transmission rod, a waist-shaped hole is formed in the transmission rod, a connecting piece is slidably connected into the waist-shaped hole, and the connecting piece is connected with the air cylinder.

6. The roll over vacuum valve of claim 5 wherein: a guide shaft is clamped on the connecting piece, is parallel to the extending direction of a cylinder shaft of the cylinder and can be inserted on the two guide seats in a sliding mode.

7. The roll over vacuum valve of claim 5 wherein: the cylinder is located outside the valve body.

8. The roll over vacuum valve according to any one of claims 4 to 7, wherein: and a limiting rod penetrating through the swing arm is arranged above a connecting point of the pivot connecting seat of the swing arm.

9. The roll over vacuum valve according to any one of claims 4 to 7, wherein: the swing arm is provided with a guide pin inserted in the spring, and the length of the guide pin extending out of the swing arm is smaller than the length of the spring extending out of the swing arm in a natural state.

10. A vapor deposition apparatus, characterized by: comprising the roll-over vacuum valve of any one of claims 1-9.

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