CN210977819U - Ultrahigh vacuum pump set device based on mechanical pump and molecular pump - Google Patents
Ultrahigh vacuum pump set device based on mechanical pump and molecular pump Download PDFInfo
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- CN210977819U CN210977819U CN201921913593.5U CN201921913593U CN210977819U CN 210977819 U CN210977819 U CN 210977819U CN 201921913593 U CN201921913593 U CN 201921913593U CN 210977819 U CN210977819 U CN 210977819U
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Abstract
The utility model discloses a based on mechanical pump and molecular pump ultrahigh vacuum pump set device, the on-line screen storage device comprises a base, be equipped with the bar chamber in the base, the bar intracavity is equipped with interval adjustment mechanism, the top of base is equipped with two mounting panels, the lower extreme of mounting panel is equipped with the bar groove, the bar inslot is equipped with the height control mechanism who is connected with interval adjustment mechanism, two the lateral wall that the mounting panel is relative all is equipped with firm mechanism, two be provided with supporting mechanism between the bottom lateral wall of mounting panel. The utility model discloses it is rational in infrastructure, can carry on spacingly to the pump body of combination, make its work more stable.
Description
Technical Field
The utility model relates to an ultrahigh vacuum pump technical field especially relates to a based on mechanical pump and molecular pump ultrahigh vacuum pump package device.
Background
The ultra-high vacuum pump is generally formed by combining a mechanical pump and a molecular pump, wherein the molecular pump is a vacuum pump which utilizes a rotor rotating at a high speed to transmit momentum to gas molecules so as to obtain a directional speed, and then the gas molecules are compressed and driven to an exhaust port and then are pumped away by a backing stage, the rotating speed of the rotor reaches 20000r/min, so that the starting time of the molecular pump is longer, the backing pump needs to be equipped, and the mechanical pump is generally used as the backing pump.
The ultrahigh vacuum pump composed of the mechanical pump and the molecular pump at present can not stably work only by depending on the ultrahigh vacuum pump because the rotating speed is high and the pump body shakes seriously.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the shortcoming that exists among the prior art, and the super high vacuum pump package device based on mechanical pump and molecular pump that proposes, it can carry on spacingly to the pump body of combination, makes its work more stable.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a based on mechanical pump and molecular pump ultrahigh vacuum pump set device, includes the base, be equipped with the bar chamber in the base, be equipped with interval adjustment mechanism in the bar chamber, the top of base is equipped with two mounting panels, the lower extreme of mounting panel is equipped with the bar groove, the bar inslot is equipped with the height control mechanism who is connected with interval adjustment mechanism, two the lateral wall that the mounting panel is relative all is equipped with firm mechanism, two be provided with supporting mechanism between the bottom lateral wall of mounting panel.
Preferably, interval adjustment mechanism is including installing the driving motor on the base lateral wall, the bar intracavity rotates and is connected with double threaded rod, driving motor's output shaft end extend to the bar intracavity and with double threaded rod's one end fixed connection.
Preferably, height adjusting mechanism is including setting up the support column in the bar inslot, the upper end of base is equipped with two bar mouths with bar chamber intercommunication, the lower extreme of support column run through the bar mouth and with double threaded rod threaded connection, the interior bottom in bar inslot is equipped with the screw hole, screw hole internal thread is connected with first screw rod, the lower extreme of first screw rod is rotated with the upper end of support column and is connected.
Preferably, a handle is fixed to the upper end of the first screw rod.
Preferably, stabilizing mean includes the second screw rod of running through threaded connection on the lateral wall of mounting panel upper end, the end of second screw rod is rotated and is connected with arc splint, the lateral wall of mounting panel run through be equipped with arc splint fixed connection's guide bar.
Preferably, the supporting mechanism comprises a supporting plate arranged above the base, the bottom side walls of the two mounting plates are respectively fixed with an extending plate, and two sides of the supporting plate are respectively provided with a placing groove corresponding to the two extending plates.
Compared with the prior art, the utility model, its beneficial effect does:
1. through setting up interval adjustment mechanism and firm mechanism, the pump body is lived to centre gripping that can be quick, can adapt to the not pump body of unidimensional, makes pump body work more stable.
2. Through setting up height adjusting mechanism, when needs use the pump package at a take the altitude, only need rotate two first screw rods, can drive whole pump body and rise when stabilizing the centre gripping, satisfy the operation requirement, easy operation is convenient.
Drawings
Fig. 1 is a schematic structural view of an ultra-high vacuum pump set device based on a mechanical pump and a molecular pump, which is provided by the present invention;
fig. 2 is a schematic front view of an ultra-high vacuum pump set device based on a mechanical pump and a molecular pump according to the present invention;
fig. 3 is the utility model provides a lifting state schematic diagram based on mechanical pump and molecular pump ultrahigh vacuum pump group device.
In the figure: 1 base, 2 double-end threaded rods, 3 bar-shaped cavities, 4 driving motors, 5 support columns, 6 guide rods, 7 threaded holes, 8 handles, 9 first screw rods, 10 second screw rods, 11 bar-shaped grooves, 12 mounting plates, 13 support plates, 14 extension plates and 15 arc-shaped clamping plates.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention can be embodied in many different forms other than those specifically described herein, and it will be apparent to those skilled in the art that similar modifications can be made without departing from the spirit and scope of the invention, and it is therefore not to be limited to the specific embodiments disclosed below.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.
Referring to fig. 1-3, a based on mechanical pump and molecular pump ultrahigh vacuum pump package device, including base 1, be equipped with bar chamber 3 in the base 1, be equipped with interval adjustment mechanism in the bar chamber 3, interval adjustment mechanism is including installing driving motor 4 on the base 1 lateral wall, 3 internal rotations in bar chamber are connected with double threaded rod 2, driving motor 4's output shaft end extend to bar chamber 3 in and with double threaded rod 2's one end fixed connection, start driving motor 4, drive double threaded rod 2 and rotate, because the screw direction of 2 both sides of double threaded rod is opposite, thereby drive two support column 5 relative movement.
Two mounting plates 12 are arranged above the base 1, a strip-shaped groove 11 is arranged at the lower end of each mounting plate 12, a height adjusting mechanism connected with an interval adjusting mechanism is arranged in each strip-shaped groove 11, each height adjusting mechanism comprises a support pillar 5 arranged in each strip-shaped groove 11, two strip-shaped openings communicated with the strip-shaped cavities 3 are arranged at the upper end of the base 1, the lower ends of the support pillars 5 penetrate through the strip-shaped openings and are in threaded connection with the double-threaded rods 2, threaded holes 7 are formed in the inner bottom of each strip-shaped groove 11, first screw rods 9 are connected with the threaded holes 7 in a threaded manner, the lower ends, when the pump group needs to be lifted, only the first screw 9 needs to be rotated, the part of the first screw 9 screwed into the strip-shaped groove 11 is increased, therefore, the mounting plate 12 ascends along the support column 5 to complete the adjustment of the whole height, and the handle 8 is fixed at the upper end of the first screw rod 9 and is convenient to rotate.
The opposite side walls of the two mounting plates 12 are respectively provided with a stabilizing mechanism, the stabilizing mechanism comprises a second screw rod 10 which penetrates through the screw thread and is connected onto the side wall of the upper end of the mounting plate 12, the tail end of the second screw rod 10 is rotatably connected with an arc-shaped clamping plate 15, the side wall of the mounting plate 12 is provided with a guide rod 6 fixedly connected with the arc-shaped clamping plate 15 in a penetrating way, the second screw rod 10 is rotated to drive the arc-shaped clamping plate 15 to move relatively, two sides of the pump group are clamped tightly, so that the whole body is more stable, a supporting mechanism is arranged between the side walls of the bottoms of the two mounting plates 12 and comprises a supporting plate 13 arranged above the base 1, the side walls of the bottoms of the two mounting plates 12 are respectively fixed with an extending plate 14, two sides of the supporting plate 13 are respectively provided with a placing groove corresponding to the two extending plates 14, when the, the extension plate 14 does not come off the support plate 13.
The utility model discloses in, place the pump package in backup pad 13 upper end, according to the size of pump package, start driving motor 4, it rotates to drive double threaded rod 2, because the screw thread opposite direction of 2 both sides of double threaded rod, thereby drive two support column 5 relative movement, mounting panel 12 removes along with it, accomplish on a large scale the back of adjusting, rotate second screw rod 10, drive arc splint 15 relative movement, press from both sides the both sides of pump package tightly, thereby make wholly more firm, when needs rising pump package, only need to rotate first screw rod 9, the part of first screw rod 9 precession bar inslot 11 increases, thereby make mounting panel 12 along the ascending regulation of accomplishing overall height of support column 5, and is simple in operation convenient.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (6)
1. The utility model provides a based on mechanical pump and molecular pump ultrahigh vacuum pump package device, includes base (1), its characterized in that, be equipped with strip chamber (3) in base (1), be equipped with interval adjustment mechanism in strip chamber (3), the top of base (1) is equipped with two mounting panels (12), the lower extreme of mounting panel (12) is equipped with bar groove (11), be equipped with the height control mechanism who is connected with interval adjustment mechanism in bar groove (11), two the relative lateral wall of mounting panel (12) all is equipped with stabilizing mean, two be provided with supporting mechanism between the bottom side wall of mounting panel (12).
2. Ultra-high vacuum pump group device based on mechanical pump and molecular pump according to claim 1, characterized in that the spacing adjustment mechanism comprises a driving motor (4) installed on the side wall of the base (1), a double-end threaded rod (2) is rotationally connected in the strip-shaped cavity (3), and the end of the output shaft of the driving motor (4) extends into the strip-shaped cavity (3) and is fixedly connected with one end of the double-end threaded rod (2).
3. The ultra-high vacuum pump group device based on the mechanical pump and the molecular pump is characterized in that the height adjusting mechanism comprises a support column (5) arranged in a strip-shaped groove (11), the upper end of the base (1) is provided with two strip-shaped openings communicated with the strip-shaped cavity (3), the lower end of the support column (5) penetrates through the strip-shaped openings and is in threaded connection with the double-threaded rod (2), the inner bottom of the strip-shaped groove (11) is provided with a threaded hole (7), the threaded hole (7) is in threaded connection with a first screw rod (9), and the lower end of the first screw rod (9) is rotatably connected with the upper end of the support column (5).
4. Ultra-high vacuum pump group unit based on mechanical and molecular pumps, according to claim 3, characterized in that the upper end of the first screw (9) is fixed with a handle (8).
5. Ultra-high vacuum pump group device based on mechanical pump and molecular pump according to claim 1, characterized in that the stabilizing mechanism comprises a second screw (10) threaded through the side wall of the upper end of the mounting plate (12), the end of the second screw (10) is rotatably connected with an arc-shaped clamping plate (15), the side wall of the mounting plate (12) is provided with a guide rod (6) fixedly connected with the arc-shaped clamping plate (15) in a penetrating way.
6. Ultra-high vacuum pump group device based on mechanical pump and molecular pump, according to claim 1, characterized in that the supporting mechanism comprises a supporting plate (13) disposed above the base (1), the bottom side walls of the two mounting plates (12) are fixed with extending plates (14), and two sides of the supporting plate (13) are provided with placing grooves corresponding to the two extending plates (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921913593.5U CN210977819U (en) | 2019-11-07 | 2019-11-07 | Ultrahigh vacuum pump set device based on mechanical pump and molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921913593.5U CN210977819U (en) | 2019-11-07 | 2019-11-07 | Ultrahigh vacuum pump set device based on mechanical pump and molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210977819U true CN210977819U (en) | 2020-07-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921913593.5U Active CN210977819U (en) | 2019-11-07 | 2019-11-07 | Ultrahigh vacuum pump set device based on mechanical pump and molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210977819U (en) |
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2019
- 2019-11-07 CN CN201921913593.5U patent/CN210977819U/en active Active
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