CN210956614U

CN210956614U - Semiconductor core particle sorting device

Info

Publication number: CN210956614U
Application number: CN201922197483.XU
Authority: CN
Inventors: 李忠宁
Original assignee: Nanjing Xinchang Electronic Technology Co ltd
Current assignee: Nanjing Xinchang Electronic Technology Co ltd
Priority date: 2019-12-10
Filing date: 2019-12-10
Publication date: 2020-07-07
Anticipated expiration: 2029-12-10

Abstract

The utility model relates to a chip test technical field specifically discloses a semiconductor core grain sorting unit, include: the device comprises a first conveyor belt, a second conveyor belt, a rotary workbench, a first adsorption assembly, a transfer assembly and a second adsorption assembly; the rotary workbench comprises an inner station and an outer station, a first conveying belt is arranged above the inner station, a second conveying belt is arranged above the outer station, a first adsorption component and a second adsorption component are respectively close to the inner station and the outer station, the second adsorption component is arranged on the transfer component, the second adsorption component is provided with a plurality of adsorption heads, and the edges of the adsorption heads are provided with an inflatable fastening ring. The utility model discloses can accelerate core grain sorting efficiency, with unqualified core grain and qualified product quickly separating, ensure that the core grain presss from both sides tightly rapidly and loosens.

Description

Semiconductor core particle sorting device

Technical Field

The utility model relates to a chip test technical field, specifically speaking relates to a semiconductor core grain sorting unit.

Background

The core particle is a commercial bare chip with functional characteristics, i.e. a chip of which the wafer is not packaged after being subjected to a cutting test. Bare chips become part of semiconductor components, integrated circuits, or more complex circuits after packaging. After the core particles are tested, whether the core particles are qualified or not needs to be detected, and then qualified products and unqualified products are sorted.

In the prior art, core particles are sorted by picking and placing a suction nozzle on a device through a swing arm, adsorbing a single core particle and transferring the core particle to another position, and an abnormal core particle is left on a workbench to finish sorting, but the sorting period is long, and after the suction nozzle sucks the core particle, the core particle is possibly adhered to the suction nozzle and cannot be placed at a corresponding position; meanwhile, the core particles may drop in the transfer process on the suction nozzle, the dropped chips may be damaged, chip loss is caused, and the existing core particle sorting equipment is low in efficiency and cannot meet mass production.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a semiconductor core grain sorting unit can accelerate core grain sorting efficiency, with unqualified core grain and qualified product quickly separating, ensures that the core grain presss from both sides tightly rapidly and loosens.

In order to achieve the above object, the utility model provides a semiconductor core grain sorting unit, include: the device comprises a first conveyor belt, a second conveyor belt, a rotary workbench, a first adsorption assembly, a transfer assembly and a second adsorption assembly; the rotary workbench comprises an inner station and an outer station, a first conveying belt is arranged above the inner station, a second conveying belt is arranged above the outer station, a first adsorption component and a second adsorption component are respectively close to the inner station and the outer station, the second adsorption component is arranged on the transfer component, the second adsorption component is provided with a plurality of adsorption heads, and the edges of the adsorption heads are provided with an inflatable fastening ring.

Furthermore, the discharge ends of the first conveyor belt and the second conveyor belt are inclined downwards and are respectively arranged towards the inner station and the outer station, and the feed ends of the first conveyor belt and the second conveyor belt are connected with the same detection assembly.

Further, the first adsorption assembly includes: the device comprises an adsorption nozzle, a storage box, an air suction pump and a connecting pipe; the connecting pipe intercommunication the adsorption nozzle with store the box, the aspirator pump with store the box and connect, the air inlet orientation of adsorption nozzle interior station setting.

Further, the aspirator pump is provided with the input tube, the input tube penetrates the storage box, the input tube mouth of pipe is provided with separates the net.

Further, the transfer assembly includes: the mechanical arm is fixed on the mounting seat, and the second adsorption component is connected and fixed with the mechanical arm.

Further, the second adsorption assembly further comprises: suction pump, vacuum generator and installation pipe, the installation pipe is fixed transfer assembly is last, the adsorption head is fixed on the installation pipe, the adsorption head orientation outer station setting, vacuum generator with the installation pipe intercommunication, the suction pump with inflatable retainer plate intercommunication.

Further, the adsorption head is provided with a plurality of adsorption holes.

Further, still include: the rotary table comprises a stepping motor and a rotary shaft, wherein one end of the rotary shaft is connected with the rotary table, and the other end of the rotary shaft is connected with an output shaft of the stepping motor.

Compared with the prior art, the beneficial effects of the utility model are as follows:

the utility model discloses a semiconductor core grain sorting unit, carry unqualified core grain and qualified core grain to interior station and outer station of swivel work head respectively through first conveyer belt and second conveyer belt, first adsorption component and second adsorption component are close to interior station and outer station setting respectively, first adsorption component can adsorb unqualified core grain, second adsorption component can adsorb qualified core grain, second adsorption component sets up on the transfer component, the transfer component drives the second adsorption component to move, be provided with a plurality of adsorption heads on the second adsorption component, can adsorb a plurality of core grains simultaneously, the adsorption head border is provided with an inflatable clamping ring, inflatable clamping ring fills with gas before adsorbing, after adsorption head adsorbs core grain, take out gas wherein fast, inflatable clamping ring fixes core grain after exhausting, after arriving the place position, the adsorption head stops adsorbing, and the inflatable fastening ring is quickly filled with gas to extrude the core particles out.

Drawings

Fig. 1 is a schematic structural view of a semiconductor core sorting device according to the present invention;

fig. 2 is a schematic top view of a semiconductor core sorting apparatus according to the present invention;

fig. 3 is a schematic structural diagram of the adsorption head of the present invention.

Detailed Description

Referring to fig. 1 to 3 together, the semiconductor core particle sorting apparatus of the present invention includes: the detection assembly 10, the first conveyor belt 20, the second conveyor belt 30, the rotary table 40, the first adsorption assembly 50, the transfer assembly 60 and the second adsorption assembly 70; the rotary workbench 40 comprises an inner station 42 and an outer station 41, the first conveyor belt 20 is arranged above the inner station 42, the second conveyor belt 30 is arranged above the outer station 41, the first adsorption component 50 and the second adsorption component 70 are respectively arranged close to the inner station 42 and the outer station 41, the second adsorption component 70 is arranged on the transfer component 60, the second adsorption component 70 is provided with a plurality of adsorption heads 71, and an inflatable fastening ring 72 is arranged at the edge of each adsorption head 71.

In this embodiment, the unqualified core particles and the qualified core particles are respectively conveyed to the inner station 42 and the outer station 41 of the rotary table 40 by the first conveyor belt 20 and the second conveyor belt 30, the first adsorption module 50 and the second adsorption module 70 are respectively arranged near the inner station 42 and the outer station 41, the first adsorption module 50 can adsorb the unqualified core particles, the second adsorption module 70 can adsorb the qualified core particles, the second adsorption module 50 is arranged on the transfer module 60, the transfer module 60 drives the second adsorption module 70 to move, the second adsorption module 70 is provided with a plurality of adsorption heads 71 which can adsorb a plurality of core particles simultaneously, an inflatable fastening ring 72 is arranged at the edge of the adsorption head 71, the inflatable fastening ring 72 is filled with gas before adsorption, after the adsorption heads 71 adsorb the core particles, the gas in the inflatable fastening ring 72 is rapidly exhausted, the core particles are fixed after being exhausted, after reaching the placement position, the suction head 71 stops sucking, and the inflatable fastening ring 72 is rapidly filled with gas, pressing out the core pellets.

The discharge ends of the first conveyor belt 20 and the second conveyor belt 30 are inclined downwards and respectively arranged towards the inner station 42 and the outer station 41, and the feed ends of the first conveyor belt 20 and the second conveyor belt 30 are connected with the same detection assembly 10.

Specifically, the end of the first conveyor belt 20 is disposed above the inner station 42 of the rotary table 40, and can convey the unqualified core particles to the inner station 42 through the first conveyor belt 20; the second conveyor 30 terminates above the outer station 41 and transports the acceptable core pellets to the outer station 41 via the second conveyor 30.

Wherein, still include: a stepping motor 43 and a rotating shaft 44, one end of the rotating shaft 44 is connected to the rotary table 40, and the other end of the rotating shaft 44 is connected to an output shaft of the stepping motor 43.

Specifically, an output shaft of the stepping motor 43 is connected to the rotating shaft 44, the other end of the rotating shaft 44 is connected to the rotating table 40, and the stepping motor 43 drives the rotating table 40 to rotate; and because the stepping motor 43 can rotate through different angles according to given pulses, the corresponding pulses can be set for the stepping motor 43 through the angle of the outer station 41 on the rotary worktable 40, so that the rotary worktable 40 can rotate by one station angle, and the first adsorption assembly 50 and the second adsorption assembly 70 can adsorb the core particles conveniently.

In addition, the transmission speeds of the first and

second conveyors

20 and 30 can be adjusted according to the rotation speed of the stepping motor 43, so as to ensure that the transmission speeds of the first and

second conveyors

20 and 30 match the rotation speed of the rotary table 40.

Wherein the first adsorption assembly 50 includes: an adsorption nozzle 51, a storage box 52, a suction pump 53, and a connection pipe 54; the connection pipe 54 connects the suction nozzle 51 and the storage box 52, the suction pump 53 is connected to the storage box 52, and the suction port of the suction nozzle 51 is provided toward the inner station 42.

Specifically, the suction nozzle 51 of the first suction module 50 is disposed above the inner station 42, the connection pipe 54 connects the suction nozzle 51 and the storage box 52, the suction pump 53 is connected to the storage box 52, the connection pipe 54 is hollow and can suck air by the suction pump 53, the air inlet of the suction nozzle 51 is disposed toward the inner station 42, and the unqualified core pellets are introduced into the storage box 52 from the suction nozzle 51 through the connection pipe 54.

Wherein, the air suction pump 53 is provided with an input pipe which penetrates into the storage box 52, and the pipe orifice of the input pipe is provided with a separation net 531.

Specifically, the getter pump 53 is connected to the storage box 52 through an input pipe, and since the storage box 52 contains the sucked core particles, a partition net 531 may be disposed at the mouth of the input pipe to prevent the core particles from entering the getter pump 53 through the input pipe.

Wherein, transfer assembly 60 includes: the mechanical arm 61 is fixed on the mounting seat 62, and the second adsorption assembly 70 is fixedly connected with the mechanical arm 61.

Specifically, the mechanical arm 61 is fixed on the mounting seat 62, the mechanical arm 61 can be formed by hinging three rotary joints, the second adsorption component 70 is fixed on the rotary joint at the front end of the mechanical arm 61, and the mechanical arm 61 can drive the second adsorption component 70 to rotate in any direction, so that the core particle adsorption effect is achieved.

Wherein the second adsorption assembly 70 further comprises: a suction pump 73, a vacuum generator 74 and a mounting tube 75, the mounting tube 75 being fixed to the transfer assembly 60, the suction head 71 being fixed to the mounting tube 75, the suction head 71 being arranged towards the outer station 41, the vacuum generator 74 being in communication with the mounting tube 75, the suction pump 73 being in communication with the inflatable fastening ring 72.

Specifically, the mounting tube 75 is arranged at the front end of the mechanical arm 61, the adsorption head 71 is fixed on the mounting tube 75, the adsorption head 71 is communicated with the mounting tube 75, and the vacuum generator 74 is communicated with the mounting tube 75, so that the vacuum generator 74 can vacuumize the adsorption head 71 through the mounting tube 75, and the adsorption head 71 is arranged close to the outer station 41, thereby achieving the purpose of absorbing the core particles.

Meanwhile, the suction pump 73 is communicated with the inflatable fastening ring 72, so that air in the inflatable fastening ring 72 can be quickly pumped out and filled, after the adsorption head 71 adsorbs the core particles, the air in the inflatable fastening ring 72 is quickly pumped out, and because the inflatable fastening ring 72 is made of plastic materials, the inflatable fastening ring 72 can be deformed and tightly attached to the adsorption head 71 after being pumped out, so that the effect of fastening the core particles is achieved; after the suction head 71 is moved to the target position, the inflatable fastening ring 72 is rapidly filled with the gas, so that the inflatable fastening ring 72 is refilled with the gas to release the core pellet, the vacuum generator 74 stops working, and the suction head 71 releases the core pellet to realize the transfer of the core pellet.

Wherein, the adsorption head 71 is provided with a plurality of adsorption holes 711.

Specifically, the adsorption head 71 is provided with a plurality of adsorption holes 711, and the adsorption holes 711 adsorb the core particles onto the adsorption head 71 by the vacuum generator 74.

To sum up, the unqualified core particles are conveyed to the inner station 42 of the rotary workbench 40 through the first conveyor belt 20, the core particles are adsorbed into the storage box 52 through the adsorption nozzle 51, the storage box 52 is replaced after the storage box 52 is full, the qualified core particles are conveyed to the outer station 41 of the rotary workbench 40 through the second conveyor belt 30, the second adsorption assembly 70 is rotated through the transfer assembly 60, the adsorption head 71 adsorbs the qualified core particles, the core particles are fastened on the adsorption head 71 through the inflatable fastening ring 72, the core particles are loosened after the specified position is reached, namely, the qualified core particles are transferred, the rotary workbench 40 is driven by the stepping motor 43 to rotate to the next station, the core particles are continuously conveyed to the rotary workbench 40 through the first conveyor belt 20 and the second conveyor belt 30, and the core particles are continuously transferred through the first adsorption assembly 50 and the second adsorption assembly 70.

It should be finally noted that the above embodiments are only intended to illustrate the technical solutions of the present invention, and not to limit the scope of the present invention, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the present invention can be modified or replaced with equivalents without departing from the spirit and scope of the technical solutions of the present invention.

Claims

1. A semiconductor core particle sorting apparatus, comprising: a first conveyor belt (20), a second conveyor belt (30), a rotary table (40), a first adsorption assembly (50), a transfer assembly (60) and a second adsorption assembly (70); the rotary workbench (40) comprises an inner station (42) and an outer station (41), the first conveyor belt (20) is arranged above the inner station (42), the second conveyor belt (30) is arranged above the outer station (41), the first adsorption component (50) and the second adsorption component (70) are respectively arranged close to the inner station (42) and the outer station (41), the second adsorption component (70) is arranged on the transfer component (60), the second adsorption component (70) is provided with a plurality of adsorption heads (71), and an inflatable fastening ring (72) is arranged at the edge of each adsorption head (71).

2. The semiconductor core grain sorting apparatus according to claim 1, wherein the discharge ends of the first conveyor belt (20) and the second conveyor belt (30) are both inclined downward and are respectively disposed toward the inner station (42) and the outer station (41), and the same inspection unit (10) is connected to the feed ends of the first conveyor belt (20) and the second conveyor belt (30).

3. The semiconductor core grain sorting apparatus of claim 1, wherein the first adsorption module (50) comprises: an adsorption nozzle (51), a storage box (52), an air suction pump (53) and a connecting pipe (54); the connecting pipe (54) is communicated with the adsorption nozzle (51) and the storage box (52), the air suction pump (53) is connected with the storage box (52), and an air inlet of the adsorption nozzle (51) faces the inner station (42) in arrangement.

4. The semiconductor core particle sorting device according to claim 3, wherein the getter pump (53) is provided with an input pipe penetrating into the storage box (52), and the mouth of the input pipe is provided with a screen (531).

5. The semiconductor core grain sorting apparatus according to claim 1, wherein the transfer unit (60) comprises: the device comprises a mechanical arm (61) and a mounting seat (62), wherein the mechanical arm (61) is fixed on the mounting seat (62), and the second adsorption component (70) is connected and fixed with the mechanical arm (61).

6. The semiconductor core grain sorting apparatus according to claim 1, wherein the second adsorption assembly (70) further comprises: suction pump (73), vacuum generator (74) and installation pipe (75), installation pipe (75) are fixed on transfer assembly (60), adsorption head (71) are fixed on installation pipe (75), adsorption head (71) set up towards outer station (41), vacuum generator (74) with installation pipe (75) intercommunication, suction pump (73) with inflatable clamping ring (72) intercommunication.

7. The semiconductor core particle sorting apparatus according to claim 1, wherein the adsorption head (71) is provided with a plurality of adsorption holes (711).

8. The semiconductor core grain sorting apparatus according to claim 1, further comprising: the device comprises a stepping motor (43) and a rotating shaft (44), wherein one end of the rotating shaft (44) is connected with the rotating workbench (40), and the other end of the rotating shaft (44) is connected with an output shaft of the stepping motor (43).