CN210953877U - A carry thing appearance for in situ scanning electron microscope test - Google Patents
A carry thing appearance for in situ scanning electron microscope test Download PDFInfo
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- CN210953877U CN210953877U CN201921668414.6U CN201921668414U CN210953877U CN 210953877 U CN210953877 U CN 210953877U CN 201921668414 U CN201921668414 U CN 201921668414U CN 210953877 U CN210953877 U CN 210953877U
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Abstract
The utility model relates to a sample platform field, in particular to an objective apparatus for normal position scanning electron microscope test, it includes the cabin body, first sealing washer, objective table, apron, string, the portion of bleeding, sealed lid, battery, controller and motor, and the objective table is installed in the cabin body, and the sample is put on the objective table, and the apron can carry out vacuum seal to the space at sample place with the portion of bleeding, and the remote controller is used for controlling opening of apron. The utility model discloses the time of opening of apron is controllable, can ensure to open the apron again after reaching the vacuum in the electron microscope sample cabin, guarantees that the sample does not receive the pollution, realizes vacuum normal position test sample in the electron microscope, and the apron also can be opened in the arbitrary vacuum of electron microscope sample cabin lower remote control, makes the sample expose under specific atmospheric pressure environment to accomplish the observation experiment under certain specific environment.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a sample platform field, in particular to a carry thing appearance that is used for normal position scanning electron microscope to test.
[ background of the invention ]
In order to find the root cause of low specific capacity and short cycle life of the lithium ion battery, the method is an important means for detecting the performance of the lithium ion battery, and the in-situ electron microscope test of the performance of the battery pole piece has great significance for the research of the charging and discharging process of the battery. In order to research the deposition of lithium ions in a negative electrode in a discharging process, an in-situ electron microscope test is needed, but the chemical property of lithium is very active, and in the process of placing a sample into a scanning electron microscope from a sample preparation room, the lithium can be oxidized in the air and can cause great damage to the surface of the sample, so that the observation result of the electron microscope cannot directly display the real situation which people want to see.
In order to solve the problem that the sample is polluted by air in the process of transporting and putting in an electron microscope, the Chinese utility model with the authorization notice number of CN 207843890U discloses a sealing transfer device. However, the sealing transfer device is not provided with an active power system, the cover plate is opened by pressure difference formed by negative pressure, before the sample chamber of the electron microscope does not reach vacuum, the cover plate can be opened in advance due to acting force generated by the pressure difference, the sample is still possibly polluted, the cover plate can not be opened under manual control under any vacuum degree of the sample chamber of the electron microscope, and an observation test under a specific air pressure environment can not be completed; in addition, because the cover plate and the cabin body of the sealing and transferring device are in surface contact and are sealed by vacuum silica gel, the vacuum silica gel has larger adhesive force, and the condition that the cover plate cannot be pushed away by gas in the shaft hole is easy to occur.
[ Utility model ] content
In order to solve the problem, an object of the utility model is to provide an it carries thing appearance for normal position scanning electron microscope test, opportunity that can the active control apron open can guarantee again that the apron can open smoothly.
An object carrying instrument for in-situ scanning electron microscope testing comprises a cabin body, a first sealing ring, an object carrying table, a cover plate, a string, an air exhaust part, a sealing cover, a battery, a controller and a motor; the cabin body is in a step shape and comprises a first step, a second step and a third step, the first step, the second step and the third step are all in a cuboid shape, the front side surface of the second step is overlapped with the rear side surface of the first step, and the rear side surface of the second step is overlapped with the front side surface of the third step; in order to facilitate production and processing and minimize the volume of the cabin body under the condition of meeting the use condition, the second ladder is preferably arranged at the middle position between the first ladder and the third ladder, and the left side surface, the right side surface and the lower bottom surface of the second ladder respectively correspond to the left side surface, the right side surface and the lower bottom surface of the other two ladders on the same plane; the upper surface of the first ladder is provided with a first circular groove and a second circular groove which are overlapped by axes in the height direction of the first ladder, the diameter of the first circular groove is larger than that of the second circular groove, the depth of the second circular groove is larger than that of the first circular groove, and a first sealing ring is fixedly arranged on the bottom surface of the first circular groove; the front side surface of the first step is provided with a circular table, a through cavity is arranged in the axis direction of the circular table and is communicated with the second circular groove, the air exhaust part is in airtight connection with the circular table, and the air exhaust part can seal the through cavity at one end of the circular table after vacuum pumping operation; the object stage is placed in the second circular groove, the height of the object stage is smaller than the depth of the second circular groove, the cover plate is placed above the first sealing ring, the cover plate is attached to the sealing ring, and after the air exhaust part is sealed, the cover plate and the sealing ring can ensure the airtight sealing of the first step inner cavity; a third circular groove is formed in the left side face or the right side face of the second step in the width direction of the second step, the battery is installed in the third circular groove, a first thread is arranged in the third circular groove from the initial opening face, the sealing cover is provided with a second thread, the first thread is matched with the second thread, and the third circular groove can be hermetically sealed by screwing the sealing cover; wires are arranged in the third circular groove and the sealing cover and lead the anode and the cathode of the battery out of the second step; the motor is fixedly arranged on the upper surface of the third step, the outer rotating shaft of the motor shell is fixedly provided with a winder, and two ends of the thin rope are respectively connected with the cover plate and the winder; the remote controller comprises a battery and a wireless signal output module; the controller comprises a wireless signal receiving module and a motor control module, the battery, the wireless signal receiving module and the motor control module form a parallel circuit, and the motor is connected with the control module.
Furthermore, the second ladder is arranged between the first ladder and the third ladder, and the left side surface, the right side surface and the lower bottom surface of the second ladder are respectively corresponding to the left side surface, the right side surface and the lower bottom surface of the other two ladders on the same plane.
Furthermore, the cover plate is cuboid, the upper surface of the first step is provided with a bulge and two limiting buckles which have the same size and shape and are opposite to each other in direction, the distance between the two limiting buckles is equal to or slightly larger than the width of the cover plate, the two limiting buckles limit the cover plate to move only along the length direction of the cabin body in the horizontal direction, and the moving range in the height direction does not contact with the probe of the electron microscope; the height of the bulge is greater than the height of the first sealing ring higher than the upper surface of the first step; when the cover plate is hermetically sealed with the first sealing ring, one side of the cover plate is contacted with the bulge but is not lifted by the bulge.
Further, the cross section of the bottom surface of the first circular groove in the vertical direction is semicircular, and the bottom surface of the first circular groove is attached to the surface of the first sealing ring.
Further, the controller also comprises a plastic shell, and the wireless signal receiving module and the motor control module are installed in the plastic shell.
Furthermore, the sealing cover is provided with a straight groove or a cross groove.
Further, still include the second sealing washer, the second sealing washer cup joints on the closing cap.
Further, the object stage is a cylinder with a diameter smaller than that of the second circular groove.
Furthermore, the air exhaust part comprises a one-way valve and a hose, and two ends of the hose are respectively connected with the round table and the one-way valve in an airtight mode.
Furthermore, the through cavity is communicated with the second circular groove after bypassing 340 degrees in the first step.
To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:
1. the cover plate can be opened by actively controlling the opening time of the cover plate, the cover plate is opened after the sample chamber of the electron microscope is vacuumized, the sample is ensured not to be polluted, the vacuum in-situ test sample is realized in the electron microscope, and the cover plate can also be opened remotely under any vacuum degree of the sample chamber of the electron microscope, so that the sample is exposed in a specific atmospheric pressure environment, and the observation test under certain specific environments is completed.
2. The protruding one end that can lift up the apron when the apron is pulled reduces the contact surface of apron and first sealing washer, reduces adhesion, guarantees that the apron can open smoothly.
[ description of the drawings ]
Fig. 1 is a perspective view of the structures of the parts of the loading instrument for in-situ scanning electron microscope testing according to the embodiment of the present invention.
Fig. 2 is a perspective view of a closed cover plate of an objective device for in-situ sem tests according to an embodiment of the present invention.
Fig. 3 is a perspective view of an opened cover plate of an objective device for in-situ sem tests according to an embodiment of the present invention.
Fig. 4 is a schematic circuit diagram of an objective apparatus for in-situ sem tests according to an embodiment of the present invention.
Fig. 5 is an enlarged view of a chamber of a loading instrument for in-situ sem tests according to an embodiment of the present invention.
Fig. 6 is a cross-sectional view of a cabin body of another embodiment of a loading instrument for in-situ sem tests according to an embodiment of the present invention at a through cavity position.
Wherein: 1-cabin, 11-first step, 111-second circular groove, 112-first circular groove, 113-annular groove, 114-circular table, 115-through cavity, 116-limiting buckle, 117-protrusion, 12-second step, 121-third circular groove, 122-first thread, 13-third step, 131-reinforcing rib, 2-cover plate, 21-protrusion, 3-objective table, 4-first sealing ring, 5-air exhaust part, 51-one-way valve, 52-hose, 6-battery, 7-sealing cover, 71-second thread, 72-second sealing ring, 8-controller, 81-wireless signal receiving module, 82-motor control module, 9-motor, 91-winder, 92-thin rope.
[ detailed description ] embodiments
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The accompanying drawings are only for illustrative purposes and are only schematic drawings rather than actual drawings, which are not intended to limit the present disclosure, and in order to better illustrate the embodiments of the present disclosure, some components of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product.
Referring to fig. 1 to 5, an objective apparatus for in-situ sem tests includes a cabin 1, a first sealing ring 4, an objective table 3, a cover plate 2, a string 92, an air pumping part 5, a sealing cover 7, a battery 6, a controller 8, and a motor 9; the cabin body 1 is in a step shape and comprises a first step 11, a second step 12 and a third step 13, the first step 11, the second step 12 and the third step 13 are all in a cuboid shape, the front side surface of the second step 12 is overlapped with the rear side surface of the first step 11, and the rear side surface of the second step 12 is overlapped with the front side surface of the third step 13; a first circular groove 112 and a second circular groove 111 with coincident axes are formed in the upper surface of the first step 11 in the height direction of the first step 11, the diameter of the first circular groove 112 is larger than that of the second circular groove 111, and the depth of the second circular groove 111 is larger than that of the first circular groove 112; the first sealing ring 4 is fixedly arranged on the bottom surface of the first circular groove 112, and the first sealing ring 4 can be ensured to be 0.4-0.6mm higher than the upper surface of the first step 11 after being arranged, the first sealing ring 4 can be bonded by glue, and a VMQ circular ring-shaped sealing ring with the outer diameter of 31mm and the cross-section diameter of 3.1mm can be selected as the first sealing ring 4; in order to enable the sealing ring to be installed and fixed more stably, preferably, an annular groove 113 is arranged at the bottom of the first circular groove 112, the surface of the annular groove 113 is attached to the surface of the first sealing ring 4, namely, the section of the annular groove 113 is semicircular, the diameter of the semicircular groove is 3.1mm, and the depth of the first circular groove 112 is about 1 mm; in order to make the volume of the cabin 1 as small as possible under the premise of satisfying the use requirement, the diameter of the first circular groove 112 is preferably equal to the outer diameter of the first sealing ring 4; the front side surface of the first step 11 is provided with a circular truncated cone 114, the axial direction of the circular truncated cone 114 is provided with a through cavity 115, the through cavity 115 is communicated with the second circular groove 111, the air suction part 5 is in airtight connection with the circular truncated cone 114, the air suction part 5 can seal one end of the through cavity 115 at the circular truncated cone 114 after vacuum pumping operation, the air suction part 5 can select a one-way valve 51 and a hose 52, and two ends of the hose 52 are respectively in airtight connection with the circular truncated cone 114 and the one-way valve 51; the first sealing ring 4 is fixedly arranged on the bottom surface of the first circular groove 112, the objective table 3 is placed in the second circular groove 111, the height of the objective table 3 is smaller than the depth of the second circular groove 111, the cover plate 2 is placed above the first sealing ring 4, the cover plate 2 is attached to the sealing ring, and after the air exhaust part 5 is sealed, the cover plate 2 and the sealing ring can ensure the airtight sealing of the inner cavity of the first step 11; a third circular groove 121 is formed in the left side face or the right side face of the second step 12 in the width direction of the second step 12, the battery 6 is installed in the third circular groove 121, a first thread 122 is formed in the third circular groove 121 from the initial opening face to the inside, a second thread 71 is formed in the sealing cover 7, the first thread 122 is matched with the second thread 71, and the third circular groove 121 can be hermetically sealed by screwing the sealing cover 7; wires (not shown) are arranged in the third circular groove 121 and the sealing cover 7, the positive and negative electrodes of the battery 6 are led out of the second step by the wires (not shown), the smaller the hole needed for leading out the wires is on the premise that the lead is led out, the better the hole is, and the holes and the wires are sealed by insulating sealing glue; the motor 9 is welded on the upper surface of the third step, a bobbin 91 is welded on an outer rotating shaft of a shell of the motor 9, two ends of a thin rope 92 are respectively connected with the cover plate 2 and the bobbin 91, the bobbin 91 rotates to roll up the thin rope 92, and the thin rope 92 pulls the cover plate 2; the remote controller (not shown) includes a battery and a wireless signal output module; the controller 8 comprises a wireless signal receiving module 81 and a motor control module 82, the battery 6, the wireless signal receiving module 81 and the motor control module 82 form a parallel circuit, and the motor 9 is connected with the motor control module 82; after wireless signal receiving module 81 receives the signal that remote controller (not shown) sent, with signal transmission to motor control module 82, motor control module 82 control motor 9 rotates certain angle, through spooler 91 and string 92, makes apron 2 not cover second circular slot 111 on the horizontal projection face, does not break away from first ladder 11 completely again, avoids motor 9 to rotate excessively, makes apron 2 skew pulling direction and touch other parts in the electron microscope and lead to the electron microscope to damage or influence the observation.
Preferably, in order to make the cabin 1 as small as possible and facilitate the use in the narrow space of the electron microscope sample cabin, the second step 12 is disposed between the first step 11 and the third step 13, and the left side, the right side and the bottom of the second step 12 correspond to the left side, the right side and the bottom of the other two steps on the same plane.
Preferably, the controller 8 further includes a plastic housing, and the wireless signal receiving module 81 and the motor control module 82 are installed in the plastic housing, and the plastic housing does not affect transmission of wireless models, and can play a role in protecting and fixing the controller 8.
Preferably, the sealing cover 7 is provided with a straight groove or a cross groove, so that the sealing cover 7 can be closed or opened by a screwdriver, and the problem that the sealing cover 7 is small in size and difficult to directly screw by hand is solved.
Preferably, in order to facilitate the installation and use of the stage 3, the stage 3 is a cylinder having a diameter smaller than that of the second circular groove 111, and the axis of the stage 3 is aligned with the axis of the second circular groove 111 after being loaded into the second circular groove 111.
In this embodiment, the cabin 1, the object stage 3 and the sealing cover 7 are made of brass, the length of the cabin 1 is controlled within 90mm, the width is controlled within 40mm, and the height is 22.2 mm; the height of the third step 13 is not more than 2mm, and reinforcing ribs 131 are arranged on the left side and the right side of the third step; the second step 12 and the sealing cover 7 are matched to form an airtight sealed battery compartment, and the battery 6 is placed in the battery compartment, so that the vacuum environment of the electron microscope sample compartment does not influence the use of the battery 6, and the situation that the battery 6 bursts or leaks in the vacuum environment is avoided; in order to better ensure the air tightness of the battery compartment, a second sealing ring is preferably additionally arranged on the sealing cover 7; the battery 6 can be a 23A12V cylindrical battery, the motor 9 can be a 28BYJ-48 stepping motor, the motor control module 82 can be an ULN2003 module, and the wireless signal output module and the wireless signal receiving module 81 can be an NRF24L01 module.
In other embodiments, in order to solve the problem that the adhesion force existing between the cover plate 2 and the first sealing ring 4 causes the cover plate 2 to bounce when being pulled so as to damage the electron microscope probe and the adhesion force is too large so that the cover plate 2 cannot be pulled, the cover plate 2 is designed to be flat and rectangular, one end of the cover plate 2 facing the motor 9 is provided with a convex part 21 with a through hole, and one end of the string 92 is tied at the convex part 21; the upper surface of the first step 11 is provided with a bulge 117 and two limit buckles 116 which have the same size and shape and are opposite to each other in direction, the distance between the two limit buckles 116 is equal to or slightly larger than the width of the cover plate 2, the two limit buckles 116 limit the cover plate 2 to move only along the length direction of the cabin 1 in the horizontal direction, and the moving range in the height direction does not contact with the probe of the electron microscope; the height of the bulge 117 is greater than the height of the first sealing ring 4 higher than the upper surface of the first step 11; when the cover plate 2 is hermetically sealed with the first seal ring 4, one side of the cover plate contacts with the protrusion 117, but is not lifted by the protrusion 117; after the cover plate 2 is pulled by the string 92, one end of the cover plate 2 is lifted by the protrusion 117, so that the line contact between the cover plate 2 and the first sealing ring 4 is changed into point contact, the actual contact area is reduced, the adhesion is reduced, and the possibility of the cover plate 2 bouncing is greatly reduced; the height difference is formed between the limiting buckles 116 and the protrusions 117 on the vertical projection plane, the height difference is larger than the thickness of the cover plate 2, and the cover plate 2 can be pulled by the strings 92 within the limiting range of the protrusions 117 and the limiting buckles 116; in order to ensure that the cover plate can be lifted smoothly, the protrusion 117 is preferably designed in the shape of a right triangular prism, and two right-angled surfaces of the protrusion coincide with the upper surface and the rear side surface of the first step 11, respectively; in order to avoid friction of the protrusion 117 against the string 92 and thus reduce the service life of the string 92, the protrusion 117 may be designed in two, and a space for the movement of the string 92 is left between the two protrusions 117.
In other embodiments, referring to fig. 6, the through cavity 115 is communicated with the second circular groove 111 after going around the first step 11 for 340 °, and in the sample transferring process of the embodiment, once the air leakage occurs in the air exhaust portion 5, the elongated through cavity 115 can form a certain air resistance, so as to slow down the speed of air entering the second circular groove 111, reduce the amount of air entering the second circular groove 111 in the same time, and reduce the degree of sample influence.
The utility model discloses an use step as follows:
1. the utility model is placed in a glove box; 2. placing the sample on the stage 3; 3. the stage 3 is loaded into the second circular groove 111 at an intermediate position; 4. covering the cover plate 2 to close the cover plate 2 and the first sealing ring 4; 5. connecting an air extracting part 5 by using a vacuum extractor to vacuumize the cavity of the second circular groove 111; 6. the utility model is moved out of the glove box and transferred into the sample cabin of the electron microscope; 7. vacuumizing the sample cabin of the electron microscope; 8. use the remote controller right the utility model discloses signals, motor 9 pass through spooler 91 pulling string 92, and string 92 pulls open apron 2, makes the sample expose at electron microscope sample under-deck.
The above description is for the detailed description of the preferred possible embodiments of the present invention, but the embodiments are not intended to limit the scope of the present invention, and all equivalent changes or modifications made within the technical spirit of the present invention should fall within the scope of the present invention.
Claims (10)
1. The utility model provides a carry thing appearance for normal position scanning electron microscope test which characterized in that: comprises a cabin body, a first sealing ring, an objective table, a cover plate, a string, an air exhaust part, a sealing cover, a battery, a controller, a motor and a remote controller; the cabin body is in a step shape and comprises a first step, a second step and a third step, the first step, the second step and the third step are all in a cuboid shape, the front side face of the second step is overlapped with the rear side face of the first step, and the rear side face of the second step is overlapped with the front side face of the third step; a first circular groove and a second circular groove which are overlapped in axial line are formed in the upper surface of the first step in the height direction of the first step, the diameter of the first circular groove is larger than that of the second circular groove, the depth of the second circular groove is larger than that of the first circular groove, and the first sealing ring is fixedly installed on the bottom surface of the first circular groove; the front side surface of the first step is provided with a circular truncated cone, a through cavity is formed in the axis direction of the circular truncated cone, the through cavity is communicated with the second circular groove, the air exhaust part is in airtight connection with the circular truncated cone, and the air exhaust part can seal one end, at the circular truncated cone, of the through cavity after vacuum pumping operation; the object stage is placed in the second circular groove, the height of the object stage is smaller than the depth of the second circular groove, the cover plate is placed above the first sealing ring, the cover plate is attached to the sealing ring, and after the air exhaust part is closed, the cover plate and the sealing ring can ensure the airtight sealing of the first step inner cavity; a third circular groove is formed in the left side face or the right side face of the second step in the width direction of the second step, the battery is installed in the third circular groove, a first thread is arranged in the third circular groove from the initial opening face, a second thread is arranged on the sealing cover, the first thread is matched with the second thread, and the third circular groove can be hermetically sealed by screwing the sealing cover; wires are arranged in the third circular groove and the sealing cover and lead the anode and the cathode of the battery out of the second step; the motor is fixedly arranged on the upper surface of the third step, a winder is fixedly arranged on the outer rotating shaft of the motor shell, and two ends of the thin rope are respectively connected with the cover plate and the winder; the remote controller comprises a battery and a wireless signal output module; the controller comprises a wireless signal receiving module and a motor control module, the battery, the wireless signal receiving module and the motor control module form a parallel circuit, and the motor is connected with the control module.
2. The carrier for in-situ scanning electron microscope testing according to claim 1, characterized in that: the second ladder is arranged between the first ladder and the third ladder, and the left side surface, the right side surface and the lower bottom surface of the second ladder correspond to the left side surface, the right side surface and the lower bottom surface of the other two ladders on the same plane respectively.
3. The carrier for in-situ scanning electron microscope testing according to claim 1, characterized in that: the cover plate is cuboid, the upper surface of the first step is provided with a bulge and two limiting buckles which have the same size and shape and are opposite to each other in direction, the distance between the two limiting buckles is equal to or slightly larger than the width of the cover plate, the two limiting buckles limit the cover plate to move only along the length direction of the cabin body in the horizontal direction, and the moving range in the height direction does not contact with an electron microscope probe; the height of the bulge is greater than the height of the first sealing ring higher than the upper surface of the first step; when the cover plate is hermetically sealed with the first sealing ring, one side of the cover plate is in contact with the protrusion, but is not lifted by the protrusion.
4. The carrier for in-situ scanning electron microscope testing according to claim 1, characterized in that: the cross section of the bottom surface of the first circular groove in the vertical direction is semicircular, and the bottom surface of the first circular groove is attached to the surface of the first sealing ring.
5. The carrier for in-situ scanning electron microscope testing according to claim 1, characterized in that: the controller also comprises a plastic shell, and the wireless signal receiving module and the motor control module are installed in the plastic shell.
6. The carrier for in-situ scanning electron microscope testing according to claim 1, characterized in that: the sealing cover is provided with a straight groove or a cross groove.
7. The carrier for in-situ scanning electron microscope testing according to claim 1, characterized in that: the sealing cover further comprises a second sealing ring which is sleeved on the sealing cover.
8. The carrier for in-situ scanning electron microscope testing according to claim 1, characterized in that: the objective table is a cylinder with the diameter smaller than that of the second circular groove.
9. The carrier for in-situ scanning electron microscope testing according to claim 1, characterized in that: the air exhaust part comprises a one-way valve and a hose, and two ends of the hose are respectively connected with the round table and the one-way valve in an airtight mode.
10. The carrier for in-situ scanning electron microscope testing according to claim 1, characterized in that: the through cavity is communicated with the second circular groove after bypassing 340 degrees in the first step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921668414.6U CN210953877U (en) | 2019-09-29 | 2019-09-29 | A carry thing appearance for in situ scanning electron microscope test |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921668414.6U CN210953877U (en) | 2019-09-29 | 2019-09-29 | A carry thing appearance for in situ scanning electron microscope test |
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| Publication Number | Publication Date |
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| CN210953877U true CN210953877U (en) | 2020-07-07 |
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| CN201921668414.6U Active CN210953877U (en) | 2019-09-29 | 2019-09-29 | A carry thing appearance for in situ scanning electron microscope test |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110514685A (en) * | 2019-09-29 | 2019-11-29 | 广西师范大学 | A kind of loading instrument for the test of in-situ scanning Electronic Speculum |
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2019
- 2019-09-29 CN CN201921668414.6U patent/CN210953877U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110514685A (en) * | 2019-09-29 | 2019-11-29 | 广西师范大学 | A kind of loading instrument for the test of in-situ scanning Electronic Speculum |
| CN110514685B (en) * | 2019-09-29 | 2024-09-27 | 广西师范大学 | Object carrying instrument for in-situ scanning electron microscope test |
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