CN210919497U - Oil circuit system of molecular pump - Google Patents
Oil circuit system of molecular pump Download PDFInfo
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- CN210919497U CN210919497U CN201920844868.8U CN201920844868U CN210919497U CN 210919497 U CN210919497 U CN 210919497U CN 201920844868 U CN201920844868 U CN 201920844868U CN 210919497 U CN210919497 U CN 210919497U
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Abstract
The utility model relates to an oil circuit system of a molecular pump, a central oil suction channel of a main shaft, the bottom of the main shaft is connected with an oil pool, a bearing is arranged on the outer ring of the top of the main shaft, a bearing lock nut is arranged above the bearing, a circle of oil throwing hole is arranged at the center of the bearing lock nut, an oil outlet corresponding to the oil throwing hole is arranged on the main shaft, an inner bearing seat and an outer bearing seat are sequentially arranged outside the bearing lock nut, an oil baffle ring is vertically arranged at one end of the inner bearing seat close to the bearing lock nut, an oil passing seam is reserved between the oil baffle ring and the bearing lock nut, an oil control hole is arranged at the bottom of the oil baffle ring, an oil storage pool is formed between the oil baffle ring and the inner wall of the outer bearing seat, an oil discharge pool is formed between an oil supply boss and the outer wall of the inner bearing seat, an oil discharge hole is arranged at the bottom of the oil discharge pool, the structure of the utility model, the time of the bearing without oil friction in the starting process is shortened.
Description
Technical Field
The utility model relates to a vacuum pump technical field, concretely relates to oil piping system of molecular pump.
Background
A molecular pump is a vacuum pump used to obtain high vacuum and ultra-high vacuum. The principle is that gas molecules are hit by a rotor blade rotating at a high speed, so that the gas molecules are compressed step by step, and the exhaust function is realized. The molecular pump chassis is used as an important part for bearing a main shaft and a rotor of the molecular pump, and is a complex part in the molecular pump, wherein the important part is provided with an exhaust interface on one hand and is used for driving the rotor to rotate at a high speed on the other hand.
The main shaft of the molecular pump rotates, the oil absorption taper hole is under the liquid level of lubricating oil, and oil moves upwards along the taper hole due to centrifugal force. Is thrown out at the oil throwing hole at the top end of the shaft. The higher the main shaft rotating speed is, the faster the oil outlet speed is.
When the molecular pump is stopped, all the lubricating oil gradually flows back into the oil pool. The bearing is in the state of lacking oil, and after the molecular pump starts, the main shaft needs to rotate to a certain rotating speed to effectively absorb oil. If the angle and the length of the oil absorption taper hole are adjusted, the main shaft can absorb oil at a lower rotating speed, so that the lubrication of the bearing is facilitated, but when the main shaft reaches a rated rotating speed, a large amount of lubricating oil is caused to scour the bearing, on one hand, the stirring efficiency loss is caused, on the other hand, the lubricating oil splashes out of the shaft head, and the vacuum part of the pump is polluted.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem, the utility model aims at providing an oil piping system of molecular pump is equipped with the oil storage pond and arranges the oil bath, reduces gradually when the main shaft rotational speed, no longer after the oil, can also remain some lubricating oil in the oil storage pond, through the slow release of accuse oil pocket, maintains the lubricating oil film of bearing for a long time.
The utility model aims at realizing through the following technical scheme: the oil absorption device comprises a base, a main bearing seat and a main shaft, wherein the main shaft is vertically arranged in the main bearing seat, an oil absorption channel with an opening at the bottom is vertically arranged at the center of the main shaft, the oil absorption channel extends from the bottom of the main shaft to the top of the main shaft, the bottom of the main shaft is connected with an oil pool on the base through an oil absorption cone, a bearing is arranged on the outer ring at the top of the main shaft, an oil inlet groove and an oil outlet groove are respectively arranged at the top and the bottom of the bearing, a bearing lock nut is arranged above the bearing, a circle of oil throwing holes horizontally arranged are uniformly arranged at the center of the bearing lock nut, an oil outlet hole corresponding to the oil throwing holes is arranged on the main shaft, an inner bearing seat and an outer bearing seat are sequentially arranged on the outer side of the bearing lock nut, an oil retainer ring is vertically arranged at one end of the inner, the oil retainer is characterized in that an oil control hole connected with an oil passing seam is formed in the bottom of the oil retainer, an oil storage pool is formed between the oil retainer and the inner wall of the outer bearing seat, a boss is arranged at the top of the outer bearing seat, an oil discharge pool is formed between the boss and the outer wall of the inner bearing seat, an oil discharge hole is formed in the bottom of the oil discharge pool, an oil retaining cover is arranged below the oil discharge hole, a circle of oil return hole is uniformly formed in the outer ring of the oil retaining cover, and the oil return hole is communicated with the oil pool.
In a preferred embodiment, the oil baffle cover is annular, and a drainage plate with one end inclined towards the oil baffle cover is arranged above the oil baffle cover.
In a preferred embodiment, the inner ring edge of the oil deflector cover is vertically provided with a baffle.
In a preferred embodiment, the top of the slinger is higher than the bottom end of the slinger.
In a preferred embodiment, the inner wall of the outer housing is higher than the outer wall of the inner housing.
In a preferred embodiment, an oil cup is arranged in the oil pool, and the bottom of the oil suction cone is positioned in the oil cup.
The utility model has the advantages that: the oil storage tank and the oil discharge tank are arranged, when the rotating speed of the main shaft is gradually reduced and oil does not flow out any more, a part of lubricating oil can be reserved in the oil storage tank and is slowly released through the oil control hole, and a lubricating oil film of the bearing is maintained for a long time. The structure can ensure that the oil supply amount of the oil suction taper hole is designed by supplying oil at the lowest rotating speed instead of supplying oil at the highest rotating speed, and the oil-free friction time of the bearing in the starting process is shortened. Meanwhile, because the oil circulation is accelerated, the cooling of the main shaft is more facilitated, the temperature of the main shaft can be better controlled, and the service life of the molecular pump is prolonged.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings.
FIG. 1 is a schematic diagram of the internal structure of a molecular pump according to an embodiment of the present invention;
fig. 2 is an internal structure diagram of an oil path system of a molecular pump according to an embodiment of the present invention.
In the figure:
1. a base; 2. a main bearing housing; 3. a main shaft; 4. an oil suction passage; 5. an oil sump; 6. an oil cup; 7. an oil absorption cone; 8. an oil outlet hole; 9. an oil throwing hole; 10. a bearing; 11. a bearing lock nut; 12. an oil slinger; 13. an inner bearing seat; 14. an outer bearing seat; 15. a drainage plate; 16. a baffle plate; 17. an oil blocking cover; 18. an oil return hole; 19. an oil inlet groove; 20. an oil outlet groove; 21. oil seam passing; 22. an oil control hole; 23. an oil storage pool; 24. an oil drainage pool; 25. an oil drain hole; 26. and (4) a boss.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention. Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.
The invention will be further described with reference to the drawings and specific examples.
As shown in fig. 1-2, the utility model discloses an oil piping system of molecular pump, including base 1, main bearing seat 2 and main shaft 3, the vertical setting of main shaft 3 is in main bearing seat 2, the vertical bottom open-ended oil absorption passageway 4 that is equipped with in center of main shaft 3, oil absorption passageway 4 extends to the top of main shaft 3 from the bottom of main shaft 3, the bottom of main shaft 3 links to each other with oil bath 5 that is located base 1 through oil absorption awl 7, the center of oil absorption awl 7 is equipped with the through-hole, the upper portion of oil absorption awl 7 and the 4 bottom open-ended plug sealing connection of oil absorption passageway of main shaft 3, the bottom of oil absorption awl 7 is under the lubricating oil liquid level, oil is because of centrifugal force along the taper hole rebound, by throwing away in 3 top oil outlet 8 departments of main shaft, the main shaft 3 rotational speed is higher, then it. The bearing 10 is arranged on the outer ring of the top of the main shaft 3, the oil inlet groove 19 and the oil outlet groove 20 are respectively arranged on the top and the bottom of the bearing 10, lubricating oil enters the bearing 10 from the oil inlet groove 19 to lubricate the bearing 10, and flows out from the oil outlet groove 20.
The bearing lock nut 11 is arranged above the bearing 10, the center of the bearing lock nut 11 is a groove, the upper part and the lower part are both convex, a circle of oil throwing holes 9 which are horizontally arranged are uniformly arranged in the center of the bearing lock nut 11, an oil outlet 8 corresponding to the oil throwing holes 9 is arranged on the main shaft 3, lubricating oil enters the oil throwing holes 9 from the oil outlet 8 and is thrown out under the action of centrifugal force, an inner bearing seat 13 and an outer bearing seat 14 are sequentially arranged on the outer side of the bearing lock nut 11, an oil baffle ring 12 is vertically arranged at one end, close to the bearing lock nut 11, of the inner bearing seat 13, an oil passing seam 21 connected with an oil inlet groove 19 is reserved between the oil baffle ring 12 and the bearing lock nut 11, the top of the oil baffle ring 12 is higher than the bottom end of the oil throwing holes 9, when the rotating speed of the main shaft 3 is low, the oil outlet amount is small, the oil outlet speed is low. The bottom of the oil slinger 12 is provided with an oil control hole 22 connected with the oil passing seam 21, an oil storage pool 23 is formed between the oil slinger 12 and the inner wall of the outer bearing seat 14, the top of the outer bearing seat 14 is provided with a boss 26, an oil discharge pool 24 is formed between the boss 26 and the outer wall of the inner bearing seat 13, the oil storage pool 23 is deeper than the oil discharge pool 24, the bottom of the oil discharge pool 24 is provided with an oil discharge hole 25, an oil slinger cover 17 is arranged below the oil discharge hole 25, the outer ring of the oil slinger cover 17 is uniformly provided with a circle of oil return hole 18, and the oil return hole 18 is communicated with the. The oil discharged from the oil discharge hole 25 falls on the oil baffle cover 17 and flows back to the oil pool 5 along the oil return hole 18, and an oil return passage is arranged between the oil return hole 18 and the oil pool 5.
When the rotating speed of the main shaft 3 is gradually increased, the oil output amount is increased, and the oil output speed is increased, only a part of oil is blocked by the oil retainer ring 12 and flows into the bearing 10 along the wall for lubrication, the rest of oil is thrown into the oil storage tank 23 and the oil discharge tank 24, the deeper oil storage tank 23 is positioned in the inner ring, and if oil exists in the tanks, the oil can flow into the bearing through the oil control hole 22 on the side wall, so that lubrication is realized. The shallow oil drain pool 24 is positioned at the outer ring, and the bottom of the oil drain pool 24 is provided with an oil drain hole 25 for directly discharging the redundant lubricating oil. When the main shaft 10 reaches full speed, the oil outlet speed is maximum, almost all oil is thrown into the oil storage tank 23 and the oil discharge tank 24, and the amount of lubricating oil is controlled through the oil control hole 22. When the rotation speed of the main shaft 3 is gradually reduced and oil does not flow out, a part of lubricating oil can be reserved in the oil storage tank 23 and is slowly released through the oil control hole 22, and a lubricating oil film of the bearing 10 is maintained for a long time.
The oil blocking cover 17 is annular, and a drainage plate 15 with one end inclined to the oil blocking cover 17 is arranged above the oil blocking cover 17. One end of the drainage plate 15 is connected with the main shaft 3, the other end of the drainage plate is inclined downwards, and oil falls on the drainage plate 15 after flowing out of the oil outlet groove 20 of the bearing 10 and then flows into the oil blocking cover 17 along the drainage plate 15.
The inner ring edge of the oil baffle cover 17 is vertically provided with a baffle 16. Oil is prevented from flowing out of the oil deflector 17.
The inner wall of the outer housing 14 is higher than the outer wall of the inner housing 13. I.e. the drain sump 24 is higher than the reservoir 23, so that the reservoir 23 has a certain depth for oil storage.
An oil cup 6 is arranged in the oil pool 5, and the bottom of the oil absorption cone 7 is positioned in the oil cup 6. The bottom of the oil cup 6 is communicated with the oil pool 5, so that the oil absorption cone 7 can absorb oil conveniently.
Finally, it should be noted that: the above-mentioned embodiments are only used for illustrating the technical solution of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.
Claims (6)
1. The utility model provides an oil piping system of molecular pump, includes base, main bearing seat and main shaft, the vertical setting of main shaft is in main bearing seat, its characterized in that: an oil suction channel with an opening at the bottom is vertically arranged at the center of the main shaft, the oil suction channel extends from the bottom of the main shaft to the top of the main shaft, the bottom of the main shaft is connected with an oil pool on a base through an oil suction cone, a bearing is arranged on the outer ring of the top of the main shaft, an oil inlet groove and an oil outlet groove are respectively arranged at the top and the bottom of the bearing, a bearing lock nut is arranged above the bearing, a circle of oil throwing holes which are horizontally arranged are uniformly arranged at the center of the bearing lock nut, an oil outlet hole corresponding to the oil throwing holes is arranged on the main shaft, an inner bearing seat and an outer bearing seat are sequentially arranged on the outer side of the bearing lock nut, an oil baffle ring is vertically arranged at one end of the inner bearing seat close to the bearing lock nut, an oil passing seam connected with the oil inlet groove is reserved between the oil baffle ring and the bearing lock nut, an oil control hole connected with the oil, the oil drain device is characterized in that a boss is arranged at the top of the outer bearing seat, an oil drain pool is formed between the boss and the outer wall of the inner bearing seat, an oil drain hole is formed in the bottom of the oil drain pool, an oil blocking cover is arranged below the oil drain hole, a circle of oil return hole is uniformly formed in the outer ring of the oil blocking cover, and the oil return hole is communicated with the oil pool.
2. The oil passage system of a molecular pump according to claim 1, characterized in that: the oil blocking cover is annular, and a drainage plate with one end inclined to the oil blocking cover is arranged above the oil blocking cover.
3. The oil passage system of a molecular pump according to claim 2, characterized in that: and a baffle is vertically arranged at the edge of the inner ring of the oil baffle cover.
4. The oil passage system of a molecular pump according to claim 1, characterized in that: the top of the oil slinger is higher than the bottom end of the oil slinger.
5. The oil passage system of a molecular pump according to claim 1, characterized in that: the inner wall of the outer bearing seat is higher than the outer wall of the inner bearing seat.
6. The oil passage system of a molecular pump according to claim 1, characterized in that: an oil cup is arranged in the oil pool, and the bottom of the oil absorption cone is positioned in the oil cup.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920844868.8U CN210919497U (en) | 2019-06-06 | 2019-06-06 | Oil circuit system of molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920844868.8U CN210919497U (en) | 2019-06-06 | 2019-06-06 | Oil circuit system of molecular pump |
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| Publication Number | Publication Date |
|---|---|
| CN210919497U true CN210919497U (en) | 2020-07-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920844868.8U Active CN210919497U (en) | 2019-06-06 | 2019-06-06 | Oil circuit system of molecular pump |
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| Country | Link |
|---|---|
| CN (1) | CN210919497U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112343853A (en) * | 2020-11-09 | 2021-02-09 | 上海裕达实业有限公司 | Molecular pump high-speed bearing oil lubrication structure |
-
2019
- 2019-06-06 CN CN201920844868.8U patent/CN210919497U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112343853A (en) * | 2020-11-09 | 2021-02-09 | 上海裕达实业有限公司 | Molecular pump high-speed bearing oil lubrication structure |
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