CN210837695U

CN210837695U - Wafer buffer memory machine

Info

Publication number: CN210837695U
Application number: CN201921805721.4U
Authority: CN
Inventors: 殷雪敏
Original assignee: Dongguan Huixinchen Electronic Technology Co ltd
Current assignee: Dongguan Huixinchen Electronic Technology Co ltd
Priority date: 2019-10-24
Filing date: 2019-10-24
Publication date: 2020-06-23
Anticipated expiration: 2029-10-24

Abstract

The utility model relates to the technical field of wafer caching, and discloses a wafer caching machine, which comprises a conveying structure for conveying a wafer from an upstream device to a downstream device, a transfer structure moving along a transverse reciprocating motion, a cartridge moving along a longitudinal reciprocating motion and a positioning structure moving along the longitudinal reciprocating motion; the cassette is provided with a plurality of buffer cavities which are sequentially distributed along the longitudinal direction, and the buffer cavities are provided with side end openings communicated with the outside. When caching is carried out, the positioning structure moves upwards to limit the movement of the wafers, the conveying structure stops the transmission of the wafers, the transfer structure lifts the wafers in place, then the wafers move transversely and are sent into a caching cavity of the cassette, and the cassette moves longitudinally to realize the caching of a plurality of wafers; the production takt of the upstream equipment and the downstream equipment is adjusted, the wafers are placed temporarily, and the problem that the downstream equipment is abnormal to influence the output of the upstream equipment is effectively avoided, so that the production efficiency is improved.

Description

Wafer buffer memory machine

Technical Field

The patent of the utility model relates to a technical field of wafer buffer memory particularly, relates to wafer buffer memory machine.

Background

Wafers, which are processed from silicon ingots, can be etched into millions of transistors by a special process, and are widely used in the manufacture of integrated circuits.

The wafer is produced and processed by an automatic assembly line, the production rhythm of an upstream device is larger than that of a downstream device, and the production rhythm of the upstream device and the downstream device cannot be adjusted because the production rhythm of the product in the production line cannot be controlled, so that the abnormity of the whole production line is easily caused, and the production efficiency is influenced.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a wafer buffer memory machine aims at solving prior art, and wafer production process can't realize the problem that the wafer kept in.

The utility model is realized in such a way that the wafer caching machine comprises a transmission structure for transmitting the wafer from the upstream equipment to the downstream equipment, a transfer structure moving along the transverse reciprocating motion, a cartridge moving along the longitudinal reciprocating motion and a positioning structure moving along the longitudinal reciprocating motion; the cassette is provided with a plurality of buffer cavities which are sequentially distributed along the longitudinal direction, and the buffer cavities are provided with side end openings communicated with the outside; when the buffer memory is carried out, the positioning structure moves upwards to limit the movement of the wafer, and the transfer structure moves along the transverse direction to transfer the wafer on the transfer structure to the buffer memory cavity.

Further, the transfer structure comprises a manipulator, a transfer motor and a transfer seat, and the transfer motor drives the transfer seat to reciprocate along the transverse direction; the manipulator and the transfer seat are in butt joint arrangement.

Further, along the transverse direction, the manipulator is arranged in a long strip shape and is arranged in a flat shape.

Further, the transfer seat comprises a base and a lifting seat, the lifting seat is provided with a lifting motor, the bottom of the lifting seat is fixedly arranged with the base, a lifting shaft of the lifting motor extends upwards to form a shaft, and the top of the lifting seat is externally butted with the manipulator.

Further, the wafer caching machine comprises a machine body, wherein the machine body is provided with a moving guide rail, and the moving guide rail is arranged in a transverse extending mode; the base is movably butted with the movable guide rail.

Further, location structure includes reference column and location cylinder, the bottom of location cylinder is fixed the arranging, the top of location cylinder with the reference column is the connection and arranges, location cylinder drive the reference column is along longitudinal reciprocating motion.

Further, the positioning structure comprises a stop position sensor, and the stop position sensor is arranged on the positioning column; when caching is carried out, the positioning cylinder drives the positioning column to move upwards to drive the stop position sensor to move to the upper side of the conveying structure, the stop position sensor detects the wafer, and the transfer structure is started to transfer the wafer to the caching cavity.

Furthermore, the conveying structure comprises a plurality of conveying wheels which are arranged in a row, conveying gaps are formed between every two adjacent conveying wheels, and the positioning columns move upwards to penetrate through the conveying gaps to limit the movement of the wafers.

Further, the cartridge comprises a plurality of cartridge columns, and the cartridge columns are arranged longitudinally; the box column is provided with a plurality of clamping grooves which are sequentially arranged at intervals along the longitudinal direction; the clamping grooves of the box columns are arranged in a one-to-one correspondence mode to form the cache cavities.

Further, the cassette comprises at least one correlation sensor having an emission surface arranged towards the buffer chamber.

Compared with the prior art, the utility model provides a wafer buffer memory machine transmits the wafer to low reaches equipment from upstream equipment through transport structure, and when carrying out the buffer memory, location structure moves the restriction wafer removal up, and transport structure stops the transmission of wafer, and the transfer structure lifts up the wafer and puts in place, along lateral shifting again, sends the wafer into the buffer memory intracavity of card casket, and card casket is along longitudinal movement, realizes a plurality of wafer caches; when the downstream equipment needs products, the transfer structure transfers the wafer in the cache cavity to the transfer structure and transmits the wafer to the downstream equipment; therefore, the production beats of the upstream equipment and the downstream equipment in the production line are adjusted, the wafers are placed temporarily, the problem that the downstream equipment is abnormal and the output of the upstream equipment is influenced is effectively avoided, and the production efficiency is improved.

Drawings

Fig. 1 is a schematic perspective view of a wafer buffer memory provided in the present invention;

fig. 2 is a schematic perspective view of a wafer buffer memory provided by the present invention;

fig. 3 is a schematic top view of a wafer buffer provided in the present invention;

fig. 4 is a schematic front view of a wafer buffer provided by the present invention;

fig. 5 is a schematic left view of a wafer buffer memory provided by the present invention;

fig. 6 is a schematic circuit diagram of a wafer buffer according to the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

The following describes the implementation of the present invention in detail with reference to specific embodiments.

The same or similar reference numerals in the drawings of the present embodiment correspond to the same or similar components; in the description of the present invention, it should be understood that if there are the terms "upper", "lower", "left", "right", etc. indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, it is only for convenience of description and simplification of the description, but it is not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore the terms describing the positional relationship in the drawings are only for illustrative purposes and are not to be construed as limitations of the present patent, and those skilled in the art can understand the specific meanings of the terms according to specific situations.

Referring to fig. 1-6, the preferred embodiment of the present invention is shown.

The utility model provides a wafer buffer memory machine for solve wafer production process, the unable problem that realizes the wafer and keep in.

The wafer 40 buffer memory machine comprises a conveying structure 10, a transfer structure 20, a cassette 30 and a positioning structure 60, wherein the conveying structure 10 is used for conveying wafers 40 from an upstream device to a downstream device, the transfer structure 20 can reciprocate along the transverse direction, the cassette 30 can reciprocate along the longitudinal direction, and the positioning structure 60 can reciprocate along the longitudinal direction; the cassette 30 is provided with a plurality of buffer cavities 31 which are distributed in sequence along the longitudinal direction, and the buffer cavities 31 are provided with side end openings communicated with the outside; during the buffering, the positioning structure 60 moves upward to limit the movement of the wafer 40, and the transfer structure 20 moves in the lateral direction to transfer the wafer 40 on the transfer structure 10 to the buffer chamber 31.

In the above-mentioned wafer 40 buffer memory machine, the transfer structure 10 transfers the wafer 40 from the upstream device to the downstream device, when the buffer memory is performed, the positioning structure 60 moves upwards to limit the movement of the wafer 40, the transfer structure 10 stops the transfer of the wafer 40, the transfer structure 20 lifts the wafer 40 to a position, and then moves transversely to send the wafer 40 into the buffer memory cavity 31 of the cassette 30, and the cassette 30 moves longitudinally to realize the buffer memory of a plurality of wafers 40; when the downstream equipment needs the product, the transfer structure 20 transfers the wafer 40 in the buffer chamber 31 to the transfer structure 10, and transmits the wafer to the downstream equipment; therefore, the production beats of the upstream equipment and the downstream equipment in the production line are adjusted, the wafer 40 is placed temporarily, and the product output of the upstream equipment is effectively prevented from being influenced by the abnormality of the downstream equipment, so that the production efficiency is improved.

In this embodiment, the transferring structure 20 includes a manipulator 21, a transferring motor 24 and a transferring seat, and the transferring motor 24 drives the transferring seat to reciprocate along the transverse direction; the manipulator 21 and the transfer seat are in butt joint arrangement; in this way, the transfer base is driven by the transfer motor 24 to reciprocate in the transverse direction, and the robot 21 is driven to reciprocate in the transverse direction, thereby transferring the wafer 40.

Furthermore, in the transverse direction, the manipulator 21 is arranged in a long strip shape and in a flat shape; this arrangement has the advantage of facilitating the extraction of the wafer 40 by the robot 21 and reducing damage to the wafer 40 by the robot 21.

The manipulator 21 includes two mechanical rods, and two mechanical rods are parallel interval arrangement, and when transferring wafer 40, two mechanical rods move and are in the below of two wafer 40, and conflict wafer 40, move up and jack-up wafer 40, realize the transfer of wafer 40.

One end of the mechanical rod is fixedly arranged, and the other end of the mechanical rod is movably arranged, so that the wafer 40 is transferred.

The other end of the mechanical rod is pointed to facilitate the extraction and transfer of the wafer 40.

The transfer seat comprises a base 22 and a lifting seat 23, the lifting seat 23 is provided with a lifting motor, the bottom of the lifting seat 23 is fixedly arranged with the base 22, a lifting shaft of the lifting motor extends upwards to the outside of the top of the shaft lifting seat 23 and is butted with the manipulator 21; therefore, the lifting of the manipulator 21 is realized through the lifting of the lifting shaft, when the buffer memory is carried out, firstly, the lifting shaft drives the manipulator 21 to move downwards, the lifting shaft drives the manipulator 21 to move upwards after transversely moving to the position below the wafer 40, the manipulator 21 lifts the wafer 40, and then transversely moves to transfer the wafer 40 into the buffer memory cavity 31, so that the temporary storage of the wafer 40 is realized, and the damage to the wafer 40 caused by the manipulator 21 when the wafer 40 is transferred is effectively reduced.

The wafer 40 cache machine comprises a machine body 50, wherein the machine body 50 is provided with a moving guide rail 25, and the moving guide rail 25 is arranged in a transverse extending mode; the base 22 is movably butted with a moving guide rail 25; under the action of the movable guide rail 25, the movement stability of the base 22 is enhanced, so that the manipulator 21 moves more stably, and the stability of the wafer 40 transfer is ensured.

The machine body 50 is provided with two moving guide rails 25, the two moving guide rails 25 are arranged side by side at intervals, the base 22 is movably butted with the two moving guide rails 25 respectively, and the transfer motor 24 is arranged between the two moving guide rails 25, so that the whole structure is more uniform.

The positioning structure 60 comprises a positioning column and a positioning cylinder, the bottom end of the positioning cylinder is fixedly arranged, the top end of the positioning cylinder is connected with the positioning column, and the positioning cylinder drives the positioning column to reciprocate longitudinally; the positioning cylinder drives the positioning column to move upwards or downwards, and when the positioning column moves upwards, the positioning column has a limiting effect on the wafer 40, so that the subsequent wafer 40 is positioned and transferred conveniently.

The positioning cylinder converts heat energy into mechanical energy through expansion; the gas is compressed by a piston in a cylinder of the compressor to increase the pressure; and the reciprocating movement of the positioning column is realized.

The positioning structure 60 comprises a stop position sensor, and the stop position sensor is arranged on the positioning column; when caching is performed, the positioning cylinder drives the positioning column to move upwards, the stop position sensor is driven to move to the upper side of the conveying structure 10, the stop position sensor detects the wafer 40, the transferring structure 20 is started, and the wafer 40 is transferred to the caching cavity 31.

Wafer 40 buffer memory includes the PLC program, and the PLC program realizes controlling transport structure 10, transfer structure 20 and location structure 60 through predetermineeing the procedure, and the PLC program does not belong to utility model protection object, does not describe here in detail.

The PLC program is electrically connected to the stop position sensor, and thus the stop position sensor transmits a detection signal to the PLC program, and the PLC program controls the transfer structure 10, the transfer structure 20, and the positioning structure 60 according to the detection signal.

The conveying structure 10 comprises a plurality of conveying wheels 11 which are arranged in a row, a conveying gap is formed between every two adjacent conveying wheels 11, and the positioning columns move upwards to penetrate through the conveying gaps so as to limit the movement of the wafer 40; set up like this, effectively avoid the reference column to influence the transfer gear 11 and rotate, and avoid causing reference column and transfer gear 11 to bump, influence reference column and transfer gear 11's life.

Specifically, the cartridge 30 includes a plurality of cartridge posts 32, the cartridge posts 32 being arranged longitudinally; the magazine column 32 is provided with a plurality of clamping grooves 33, and the clamping grooves 33 are sequentially arranged at intervals along the longitudinal direction; the clamping grooves 33 of the box columns 32 are correspondingly arranged one by one to form a buffer cavity 31; temporary storage of the wafer 40 is realized, materials are saved, and the manufacturing cost is reduced.

The cartridge 30 comprises at least one correlation sensor having an emitting surface arranged facing the buffer chamber 31; through correlation sensor, realize detecting wafer 40 and keep in, guarantee the accurate nature that wafer 40 kept in.

The cassette 30 includes two correlation sensors, the two correlation sensors are arranged at intervals, and the two correlation sensors are arranged on two sides, when the wafer 40 is placed in the buffer cavity 31, the two correlation sensors respectively detect the wafer 40, that is, the wafer 40 is placed completely and accurately.

The correlation sensor and the stop sensor may be infrared sensors using infrared light as a medium to measure the position of the wafer 40.

The cartridge 30 comprises a housing, each cartridge column 32 is fixed on the housing, the body 50 is provided with a longitudinal rail 34, the housing is movably connected with the longitudinal rail 34, and the longitudinal movement of the housing and the longitudinal movement of the cartridge 30 are realized through screw rod driving.

Example (b):

the device is applied to LCOS wafer 40 production, and a wafer 40 with the size of about 8 inches enters a wafer 40 cache machine from an upstream device.

The wafer 40 is sensed by the sensor, and the PLC program controls the motor of the conveying structure 10 to rotate and drive, so that the conveying wheel 11 rotates to drive the wafer 40 to continuously advance.

If the downstream equipment requires product, it is passed directly to the downstream equipment.

If the downstream equipment acts, the positioning cylinder is started to promote the positioning column to ascend, penetrate through the moving gap and limit the movement of the wafer 40, the stop position sensor detects the wafer 40, a signal is transmitted to the PLC program, the PLC program controls the motor to stop, the wafer 40 is lifted to the right position in the ascending process of the manipulator 21, the manipulator 21 transversely moves, and the wafer 40 is conveyed into the cache cavity 31 of the cassette 30;

the cassette 30 is lifted to the set interval data, the correlation sensors at both sides sense the wafers 40, the robot 21 is withdrawn to the initial position, and the cassette 30 can hold about 15 wafers 40 for temporary storage.

When the downstream equipment needs the product, the robot 21 takes the wafer 40 in the cassette 30 out and puts the wafer into the conveying structure 10, and the wafer 40 is transferred to the downstream equipment according to the program control, for example, no product enters the upstream equipment until the wafer 40 in the cassette 30 is transferred; when there is still product in the upstream equipment, the wafer 40 may be transferred or temporarily stored according to the process conditions.

The above description is only exemplary of the present invention and should not be construed as limiting the present invention, and any modifications, equivalents and improvements made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims

1. The wafer buffer memory is characterized by comprising a conveying structure for conveying wafers from an upstream device to a downstream device, a transfer structure moving back and forth along the transverse direction, a cassette moving back and forth along the longitudinal direction and a positioning structure moving back and forth along the longitudinal direction; the cassette is provided with a plurality of buffer cavities which are sequentially distributed along the longitudinal direction, and the buffer cavities are provided with side end openings communicated with the outside; when the buffer memory is carried out, the positioning structure moves upwards to limit the movement of the wafer, and the transfer structure moves along the transverse direction to transfer the wafer on the transfer structure to the buffer memory cavity.

2. The wafer buffer memory machine as claimed in claim 1, wherein the transferring structure comprises a robot arm, a transferring motor and a transferring seat, the transferring motor drives the transferring seat to reciprocate along the transverse direction; the manipulator and the transfer seat are in butt joint arrangement.

3. The wafer buffer memory machine according to claim 2, wherein the robot is arranged in a bar shape and in a flat shape in a lateral direction.

4. The wafer buffer memory of claim 2, wherein the transfer seat comprises a base and a lifting seat, the lifting seat is provided with a lifting motor, the bottom of the lifting seat is fixedly arranged with the base, and the lifting motor lifts a shaft which extends upwards to a shaft outside the top of the lifting seat and is butted with the manipulator.

5. The wafer buffer memory machine as claimed in claim 4, wherein the wafer buffer memory machine comprises a machine body, the machine body is provided with a moving guide rail, and the moving guide rail is arranged along a transverse direction; the base is movably butted with the movable guide rail.

6. The wafer caching machine according to any one of claims 1 to 5, wherein the positioning structure comprises a positioning column and a positioning cylinder, the bottom end of the positioning cylinder is fixedly arranged, the top end of the positioning cylinder is connected with the positioning column, and the positioning cylinder drives the positioning column to reciprocate longitudinally.

7. The wafer buffer memory machine as claimed in claim 6, wherein the positioning structure comprises a stop position sensor disposed on the positioning post; when caching is carried out, the positioning cylinder drives the positioning column to move upwards to drive the stop position sensor to move to the upper side of the conveying structure, the stop position sensor detects the wafer, and the transfer structure is started to transfer the wafer to the caching cavity.

8. The wafer buffer of claim 6, wherein the transfer structure comprises a plurality of transfer wheels arranged in an array, a transfer gap is formed between adjacent transfer wheels, and the positioning posts move upward through the transfer gap to limit the movement of the wafers.

9. The wafer buffer memory of any one of claims 1-5, wherein the cassette comprises a plurality of cassette posts, the cassette posts being arranged in a longitudinal direction; the box column is provided with a plurality of clamping grooves which are sequentially arranged at intervals along the longitudinal direction; the clamping grooves of the box columns are arranged in a one-to-one correspondence mode to form the cache cavities.

10. The wafer buffer memory machine of any one of claims 1 to 5, wherein the cassette comprises at least one correlation sensor having an emitting surface disposed toward the buffer chamber.