CN210833864U - Power feedback detection device and laser equipment - Google Patents

Power feedback detection device and laser equipment Download PDF

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Publication number
CN210833864U
CN210833864U CN201921704295.5U CN201921704295U CN210833864U CN 210833864 U CN210833864 U CN 210833864U CN 201921704295 U CN201921704295 U CN 201921704295U CN 210833864 U CN210833864 U CN 210833864U
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China
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light
detection
power
light beam
hole
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李金平
曹洪涛
刘亮
葛一丰
梁华亮
胡述旭
姚瑶
杨柯
吕启涛
高云峰
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Han s Laser Technology Industry Group Co Ltd
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Han s Laser Technology Industry Group Co Ltd
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Abstract

The utility model provides a power feedback detection device, which comprises a spectroscope component and a detection component; the detection component is fixed on the beam splitter component; the beam splitting mirror assembly is used for receiving an incident light beam and splitting the incident light beam to form a refracted light beam and a reflected light beam; the detecting element, it is right to be used for the refraction light beam or the reflected beam focuses on formation detection facula, and detects and exports the power of detection facula, the utility model also provides a pair of laser equipment reaches the production degree of difficulty that reduces power feedback detection device.

Description

Power feedback detection device and laser equipment
Technical Field
The utility model belongs to the technical field of laser, more specifically say, relate to a power feedback detection device and laser equipment.
Background
The power of the laser device may vary during use of the laser device. If the laser device processes the product at this time, and the product is sensitive to the power variation of the laser device, the influence will occur after the product is processed. The condition is generally discovered after a batch of products are processed, which indirectly causes the increase of the reject ratio of the products and causes certain loss to customers. In the prior art, there is a light source optical power detection device, which includes a light converging module, a light splitting module and a detection module, wherein the light converging module is used for receiving incident light, converging the incident light and transmitting the converged incident light to the light splitting module; the light splitting module is used for splitting the converged incident light to form a first split light beam and a second split light beam; the first split light beam is emitted from a first exit port of the light splitting module, and the second split light beam is emitted from a second exit port of the light splitting module; the ratio of the luminous flux of the first split light beam to the luminous flux of the incident light is a preset value, and the preset value is greater than or equal to 90%; the detection module is used for processing the second split light beam to obtain a detection light beam, and determining the optical power of the incident light according to the detection light beam and a preset value. The detection module comprises a scattering sheet, an attenuation sheet and a photosensitive sensor. However, the light spot of the second split light beam becomes larger after passing through the scattering sheet, and the requirements on the size and the installation of the attenuation sheet and the photosensitive sensor are higher, so that the production requirement of the light source optical power detection device is higher.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a power feedback detection device to the facula meeting grow after solving the second beam splitting light beam that exists among the prior art through the scattering piece, it is higher to attenuator and photosensitive sensor's size and installation requirement, lead to the higher technical problem of light source light power detection device's production requirement.
In order to realize one of the above purposes, the utility model adopts the technical scheme that: the power feedback detection device comprises a spectroscope component and a detection component;
the detection component is fixed on the beam splitter component;
the beam splitting mirror assembly is used for receiving an incident light beam and splitting the incident light beam to form a refracted light beam and a reflected light beam;
the detection component is used for focusing the refracted light beam or the reflected light beam to form a detection light spot, and detecting and outputting the power of the detection light spot.
The utility model provides a pair of power feedback detection device's beneficial effect lies in: compared with the prior art, the detection component focuses the refracted light beam or the reflected light beam to form a detection light spot, power detection is carried out on the detection light spot, energy loss of the refracted light beam or the reflected light beam in the detection process is reduced, and accurate detection of the power of the detection light spot is facilitated. The detection light spots are concentrated relative to scattered light beams, so that the size of the detection assembly is favorably reduced, and the whole size of the power feedback detection device is reduced.
Further, the spectroscope assembly comprises a spectroscope cylinder, a spectroscope and a fixing assembly; the spectroscope is fixed in the spectroscope cylinder through the fixing component;
the light splitting barrel is provided with a light inlet hole, a refraction hole and a reflection hole, the light inlet hole is used for introducing an incident light beam, the incident light beam is formed into the reflected light beam and the refracted light beam by the light splitting barrel, the reflection hole penetrates the reflected light beam, and the refraction hole penetrates the refracted light beam;
the detection component is arranged outside the refraction hole or the reflection hole to receive the refraction light beam or the reflection light beam.
Further, the fixing assembly comprises a lens holder, a first pressing plate and a second pressing plate; the first pressing plate is fixed on the lens seat, the second pressing plate is detachably connected to the first pressing plate, and the spectroscope is clamped between the first pressing plate and the second pressing plate; the lens seat is detachably connected to the light splitting barrel through a mounting hole.
Further, the detecting element includes that power detects a light section of thick bamboo, focus lens and light sensitive probe, power detects a light section of thick bamboo and connects on the beam split section of thick bamboo, power detects the both ends of crossing a light section of thick bamboo and is equipped with first hole and second hole respectively, the focus lens is fixed power detects in crossing a light section of thick bamboo and is located first hole department, light sensitive probe fixes second hole department, light sensitive probe's sense terminal orientation focus lens's outgoing side.
Further, the detection component further comprises a sealing ring, the sealing ring is fixed on the power detection light passing cylinder, the sealing ring is annularly arranged on the first hole, and the sealing ring is clamped between the light splitting cylinder and the power detection light passing cylinder.
Further, the determine module still includes the probe clamp plate, the probe clamp plate can be dismantled the connection and be in on the optical cylinder is crossed in the power detection, photosensitive probe's connecting wire is worn to locate the probe clamp plate, the second hole is established to T shape hole, T shape hole has big port and port, photosensitive probe's sense terminal is located the port, photosensitive probe's bead joint is in big port, works as the probe clamp plate is connected when the optical cylinder is crossed in the power detection, the probe clamp plate cover in big port.
Further, the included angle between the incident light beam and the reflected light beam ranges from 20 degrees to 30 degrees.
Further, the deviation range of the light beam of the detection light spot and the central axis of the power detection light passing cylinder is as follows: -10mm to +10 mm.
The second purpose of the present invention is to provide a laser device, which is a second purpose of the present invention, the present invention adopts the following technical scheme: the power feedback detection device is fixed between the laser and the square head, output light of the laser is set as the incident light beam, and the refracted light beam or the reflected light beam is input into the square head.
Furthermore, laser equipment still includes a light cavity and a beam expander, roll over the light cavity with the beam expander is located the laser with between the power feedback detection device, roll over the light cavity and fix on the laser, the beam expander is connected roll over the light cavity on with on the power feedback detection device.
The utility model provides a pair of laser equipment's beneficial effect lies in: compared with the prior art, the utility model discloses a detection that laser equipment can be convenient goes out the luminous power of laser instrument, carries out periodic test to the luminous power of laser instrument, prevents that the abnormal conditions from appearing in the luminous power of laser instrument, has also avoided a large amount of appearances of defective products simultaneously, has improved the stability and the reliability of equipment, has brought potential economic benefits.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments or the prior art descriptions will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive labor.
Fig. 1 is a schematic structural diagram of a power feedback detection apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram ii of a power feedback detection apparatus according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a detection assembly of the power feedback detection apparatus according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a laser device according to an embodiment of the present invention.
Wherein, in the figures, the respective reference numerals:
1. a beam splitter assembly; 11. a light splitting cylinder; 111. a light entrance hole; 112. mounting holes; 12. a beam splitter; 13. A lens holder; 14. a first platen; 15. a second platen; 16. a through hole; 2. a detection component; 21. a power detection light passing cylinder; 211. a first hole; 212. a second hole; 22. a focusing lens; 23. a photosensitive probe; 231. A rib; 24. a seal ring; 25. pressing a probe plate; 26. perforating; 31. an incident beam; 32. refracting the light beam; 33. reflecting the light beam; 4. a laser; 5. a square head; 6. an optical cavity; 7. a beam expander.
Detailed Description
In order to make the technical problem, technical solution and advantageous effects to be solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to illustrate the present invention in further detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 1 to fig. 3, a power feedback detection apparatus according to the present invention will now be described. A power feedback detection device comprises a spectroscope component 1 and a detection component 2;
the detection component 2 is fixed on the spectroscope component 1;
a beam splitter assembly 1 for receiving an incident beam 31 and splitting the incident beam 31 to form a refracted beam 32 and a reflected beam 33;
the detecting component 2 is used for focusing the refracted light beam 32 or the reflected light beam 33 to form a detecting light spot (not shown), and detecting and outputting the power of the detecting light spot.
The using method comprises the following steps: if the light quantity of the refracted light beam 32 is smaller than that of the reflected light beam 33, the detection element 2 measures the power of the refracted light beam 32, and the reflected light beam 33 is used for laser processing; the detection assembly 2 and the beam splitter assembly 1 are assembled together, the detection assembly 2 receives the refracted light beam 32 and transmits the power of the refracted light beam 32 to a computer system (not shown), and the computer system calculates the total power of the incident light beam 31 according to the power of the refracted light beam 32 and the ratio of the light quantity of the refracted light beam 32 in the incident light beam 31. The refracted light beam 32 has a light amount of 10% in the incident light beam 31.
If the amount of reflected beam 33 is smaller than the amount of refracted beam 32, the power of reflected beam 33 is measured by the detecting element 2, the refracted beam 32 is used for laser processing, the detecting element 2 and the spectroscope assembly 1 are assembled together, the detecting element 2 receives the reflected beam 33 and transmits the power of the reflected beam 33 to a computer system (not shown), and the computer system calculates the total power of the incident beam 31 based on the ratio of the power of the reflected beam 33 to the amount of reflected beam 33 in the incident beam 31. The reflected beam 33 had a light amount of 10% in the incident beam 31.
The utility model provides a pair of power feedback detection device compares with prior art, and detecting element 2 carries out power detection with refraction light beam 32 or reflected light beam 33 focusing formation detection facula to detection facula, has reduced refraction light beam 32 or reflected light beam 33 loss of energy in the testing process, the accurate power that detects detection facula of being convenient for. The detection light spots are concentrated relative to scattered light beams, so that the size of the detection assembly 2 is favorably reduced, and the whole size of the power feedback detection device is reduced.
Specifically, the material and coating of the beam splitter 12 determine the amount of light in the refracted beam 32 and the amount of light in the reflected beam 33. The coating of the beam splitter 12 determines the angle between the refracted light beam 32 and the incident light beam 31, and the angle between the incident light beam 31 and the reflected light beam 33.
Further, please refer to fig. 1 and fig. 2 together, as a specific embodiment of the power feedback detection apparatus provided by the present invention, the spectroscope assembly 1 includes a spectroscope barrel 11, a spectroscope 12 and a fixing assembly; the spectroscope 12 is fixed in the spectroscope barrel 11 through a fixing component;
the light splitting barrel 11 is provided with a light inlet 111, a refraction hole (not shown) and a reflection hole (not shown), the light inlet 111 is used for introducing an incident light beam 31, the light splitting barrel 12 enables the incident light beam 31 to form a reflected light beam 33 and a refracted light beam 32, the reflection hole transmits the reflected light beam 33, and the refraction hole transmits the refracted light beam 32;
the detection assembly 2 is disposed outside the refraction or reflection aperture to receive the refracted or reflected light beam 32, 33.
The light splitting cylinder 11 is convenient for installing the fixing component and the detection component 2, and the convenience for assembling the light splitting mirror 12 and the detection component 2 is improved.
Further, referring to fig. 1 and 2, as a specific embodiment of the power feedback detection apparatus provided by the present invention, the fixing assembly includes a lens holder 13, a first pressing plate 14 and a second pressing plate 15; the first pressing plate 14 is fixed on the lens base 13, the second pressing plate 15 is detachably connected on the first pressing plate 14, and the spectroscope 12 is clamped between the first pressing plate 14 and the second pressing plate 15; the lens holder 13 is detachably attached to the spectroscopic cylinder 11 through the mounting hole 112.
When the spectroscope 12 is installed, the spectroscope 12 is placed between the first pressing plate 14 and the second pressing plate 15, the spectroscope 12 is clamped by the first pressing plate 14 and the second pressing plate 15, then the first pressing plate 14, the second pressing plate 15 and the spectroscope 12 enter the spectroscope barrel 11 together from the installation hole 112, the spectroscope 12 is installed in the spectroscope barrel 11, and the installation convenience of the spectroscope 12 is improved. When the spectroscope 12 is disassembled, the lens base 13 is directly disassembled from the spectroscope barrel 11, then the first pressing plate 14, the second pressing plate 15 and the spectroscope 12 are taken out from the spectroscope barrel 11, and then the second pressing plate 15 is disassembled from the first pressing plate 14, so that the spectroscope 12 can be replaced, and the convenience of replacing the spectroscope 12 is improved.
Specifically, the first pressing plate 14 and the second pressing plate 15 are both provided with through holes 16, the incident light beam 31 and the reflected light beam 33 pass through the through holes 16 of the second pressing plate 15, the refracted light beam 32 passes through the through holes 16 of the first pressing plate 14, and the edge of the beam splitter 12 is located between the first pressing plate 14 and the second pressing plate 15, so that the edge of the beam splitter 12 is protected.
Further, please refer to fig. 1 and fig. 3, as the utility model provides a specific implementation of a power feedback detection device, the detection component 2 includes that the optical tube 21, focus lens 22 and light sensitive probe 23 are crossed in the power detection, the optical tube 21 is crossed in the power detection and is connected on beam splitter 11, the both ends that the optical tube 21 was crossed in the power detection are equipped with first hole 211 and second hole 212 respectively, focus lens 22 is fixed and is located first hole 211 department in the optical tube 21 is crossed in the power detection, light sensitive probe 23 is fixed in second hole 212 department, the sense terminal of light sensitive probe 23 is towards the outgoing side of focus lens 22.
The refracted light beam 32 or the reflected light beam 33 is transmitted in the power detection light barrel 21, so that the energy loss of the refracted light beam 32 or the reflected light beam 33 in the detection process is reduced, and the accuracy of the detection of the power of the refracted light beam 32 or the reflected light beam 33 is ensured. Focusing lens 22 and photosensitive probe 23 set up in power detection crosses light section of thick bamboo 21, and when power detection crossed light section of thick bamboo 21 and connect on beam splitter section of thick bamboo 11, just realize focusing lens 22 and photosensitive probe 23 and connect on beam splitter subassembly 1, improve the installation convenience of detecting element 2.
When the detecting unit 2 detects the reflected light beam 33, an actual angle between the reflected light beam 33 and the incident light beam 31 may be different from a preset angle between the reflected light beam 33 and the incident light beam 31 during assembly of the detecting unit 2 and the beam splitting drum 11 because an error may occur in assembly of the beam splitter 12 in the beam splitting drum 11. When the detection assembly 2 is installed, the photosensitive probe 23 is firstly detached from the power detection light passing cylinder 21, then the first hole 211 is aligned with the reflection hole, a piece of white paper is placed at the second hole 212, the detection light spot is positioned on the white paper, whether the detection light spot is positioned in the middle of the second hole 212 is observed, and if the detection light spot is not positioned in the middle of the second hole 212, the power detection light passing cylinder 21 is moved on the light splitting cylinder 11 until the detection light spot is positioned in the middle of the second hole 212; when the detection light spot is located in the middle of the second hole 212, the power detection light passing cylinder 21 is glued or screwed on the light splitting cylinder 11, so that the detection assembly 2 is adjusted on the light splitting cylinder 11.
When the detection assembly 2 detects the refracted light beam 32, an actual angle between the refracted light beam 32 and the incident light beam 31 may be different with respect to a preset angle between the refracted light beam 32 and the incident light beam 31 in assembling the detection assembly 2 and the beam splitting drum 11 since an error may occur in assembling the beam splitter 12 in the beam splitting drum 11. When the detection assembly 2 is installed, the photosensitive probe 23 is detached from the power detection light passing cylinder 21, then the first hole 211 is aligned with the folding hole, a piece of white paper is placed at the second hole 212, the detection light spot is positioned on the white paper, whether the detection light spot is positioned in the middle of the second hole 212 is observed, and if the detection light spot is not positioned in the middle of the second hole 212, the power detection light passing cylinder 21 is moved on the light splitting cylinder 11 until the detection light spot is positioned in the middle of the second hole 212; when the detection light spot is located in the middle of the second hole 212, the power detection light passing cylinder 21 is glued or screwed on the light splitting cylinder 11, so that the detection assembly 2 is adjusted on the light splitting cylinder 11.
Specifically, the output of the photosensitive probe 23 is electrically connected to a computer system.
Specifically, when the power detection light-passing cylinder 21 is screwed to the light-splitting cylinder 11 (not shown), the power detection light-passing cylinder 21 is provided with a through hole 26, and the aperture of the through hole 26 is larger than the radius of the end of the screw. The screw directly passes through the through hole 26, the screw is in threaded connection with the light splitting barrel 11, and the head of the screw is matched with the light splitting barrel 11 to clamp the power detection light passing barrel 21.
Further, please refer to fig. 1 and fig. 3, as a specific embodiment of the power feedback detection apparatus provided by the present invention, the detection assembly 2 further includes a sealing ring 24, the sealing ring 24 is fixed on the power detection light passing cylinder 21, the sealing ring 24 is annularly disposed in the first hole 211, and the sealing ring 24 is clamped between the light splitting cylinder 11 and the power detection light passing cylinder 21.
The sealing ring 24 makes external light not easily enter between the spectroscope component 1 and the power detection light passing cylinder 21, and the accuracy of the power of the detection light spot detected by the detection component 2 is ensured. Meanwhile, the sealing ring 24 prevents external dust from entering between the light splitting cylinder 11 and the power detection light passing cylinder 21, and reduces the influence of the dust on the detection of the detection assembly 2.
Further, refer to fig. 1 and fig. 3, as the utility model provides a pair of a power feedback detection device's a specific implementation, determine module 2 still includes probe clamp plate 25, probe clamp plate 25 can be dismantled and connect on power detection crosses a light section of thick bamboo 21, probe clamp plate 25 is worn to locate by photosensitive probe 23's connecting wire, second hole 212 establishes to T shape hole, T shape hole has big port and port, photosensitive probe 23's sense terminal is located the port, photosensitive probe 23's bead 231 joint is at big port, when probe clamp plate 25 connects on power detection crosses a light section of thick bamboo 21, probe clamp plate 25 covers in big port.
The detection end joint of light sensitive probe 23 is in the miniport, and the bead 231 joint of light sensitive probe 23 is at the main aspects simultaneously to in-process that detecting component 2 used, light sensitive probe 23 is difficult for taking place not hard up, guarantees the stability of light sensitive probe 23 installation. The probe pressure plate 25 prevents external dust from entering the power detection light passing tube 21, thereby reducing the influence of dust on the detection of the detection assembly 2.
Further, as a specific embodiment of the power feedback detection apparatus provided in the present invention, the included angle between the incident light beam 31 and the reflected light beam 33 ranges from 20 degrees to 30 degrees.
When the included angle between the incident light beam 31 and the reflected light beam 33 is 20 degrees to 30 degrees, the spectroscope 12 is convenient to produce and manufacture, and the production cost of the power feedback detection device is favorably reduced.
Further, as the utility model provides a pair of a power feedback detection device's a specific implementation way, the light beam that detects the facula and the skew scope of the center pin of a light section of thick bamboo 21 are crossed in power detection: -10mm to +10 mm.
The optical axis of the detection light spot and the central axis of the power detection light passing cylinder 21 have good coaxiality, so that the detection light spot is not easy to be overlarge, the detection light spot is ensured to be totally irradiated on the photosensitive probe 23, and the accuracy of power detection is improved. The diameter of the detection spot formed by the focusing lens 22 is first reduced and then increased as the transmission distance is increased. The focused energy is the largest when the diameter of the detection spot is the smallest. After the photosensitive probe 23 is installed on the power detection light cylinder 21, the central point of the photosensitive probe 23 is located on the central axis of the photosensitive probe 23. When the length of the power detection optical cylinder 21 is fixed, namely the detection end of the photosensitive probe 23 is positioned at one time of the focal length of the focusing lens 22, and the optical axis of the detection light spot has no offset distance with the central axis of the power detection optical cylinder 21, the diameter of the detection light spot is minimum; if the deviation range of the optical axis of the detection light spot and the central axis of the power detection light passing cylinder 21 exceeds-10 mm- +10mm, the transmission distance of the detection light spot in the power detection light passing cylinder 21 is large, the diameter of the detection light spot is large at the moment, the focused energy in the detection light spot is large at the moment, and the detection light spot is not positioned on the central point of the photosensitive probe 23, which is not beneficial to the power feedback detection device to accurately measure the maximum power of the detection light spot.
Referring to fig. 1 and 4, the present invention further provides a laser device, which includes a laser 4, a square head 5 and the power feedback detection device of any of the foregoing embodiments, the power feedback detection device is fixed between the laser 4 and the square head 5, the output light of the laser 4 is set as an incident light beam 31, and a refracted light beam 32 or a reflected light beam 33 is input into the square head 5.
The utility model provides a pair of laser equipment compares with prior art, and the detection that laser equipment can be convenient goes out laser instrument 4's luminous power, carries out periodic test to laser instrument 4's luminous power, prevents that laser instrument 4's luminous power from the abnormal conditions appearing, has also avoided a large amount of appearances of defective products simultaneously, has improved the stability and the reliability of equipment, has brought potential economic benefits.
Further, refer to fig. 1 and 4, as the utility model provides a pair of a specific implementation of laser equipment, laser equipment still includes a refraction chamber 6 and beam expander 7, and refraction chamber 6 and beam expander 7 are located between laser instrument 4 and power feedback detection device, and refraction chamber 6 is fixed on laser instrument 4, and beam expander 7 is connected on a refraction chamber 6 and power feedback detection device.
Laser that laser instrument 4 produced incides to beam expander 7 through refraction 6 collimation of chamber to reach power feedback detection device after beam is maintained to beam expander 7, make laser transmission in-process not receive mechanical vibration's influence, and carry out laser transmission in accomplishing confined space, can avoid the phenomenon of lens pollution.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims (10)

1. The power feedback detection device is characterized by comprising a spectroscope component and a detection component;
the detection component is fixed on the beam splitter component;
the beam splitting mirror assembly is used for receiving an incident light beam and splitting the incident light beam to form a refracted light beam and a reflected light beam;
the detection component is used for focusing the refracted light beam or the reflected light beam to form a detection light spot, and detecting and outputting the power of the detection light spot.
2. The power feedback detection device of claim 1, wherein said beam splitter assembly comprises a beam splitter cylinder, a beam splitter and a fixing assembly; the spectroscope is fixed in the spectroscope cylinder through the fixing component;
the light splitting barrel is provided with a light inlet hole, a refraction hole and a reflection hole, the light inlet hole is used for introducing an incident light beam, the incident light beam is formed into the reflected light beam and the refracted light beam by the light splitting barrel, the reflection hole penetrates the reflected light beam, and the refraction hole penetrates the refracted light beam;
the detection component is arranged outside the refraction hole or the reflection hole to receive the refraction light beam or the reflection light beam.
3. A power feedback sensing device as claimed in claim 2, wherein said mounting assembly comprises a lens holder, a first pressure plate and a second pressure plate; the first pressing plate is fixed on the lens seat, the second pressing plate is detachably connected to the first pressing plate, and the spectroscope is clamped between the first pressing plate and the second pressing plate; the lens seat is detachably connected to the light splitting barrel through a mounting hole.
4. The power feedback detecting device as claimed in claim 2, wherein the detecting assembly includes a power detecting light cylinder, a focusing lens and a photosensitive probe, the power detecting light cylinder is connected to the beam splitter cylinder, a first hole and a second hole are respectively formed at two ends of the power detecting light cylinder, the focusing lens is fixed in the power detecting light cylinder and located at the first hole, the photosensitive probe is fixed at the second hole, and a detecting end of the photosensitive probe faces to an exit side of the focusing lens.
5. A power feedback detection device as claimed in claim 4, wherein said detection assembly further comprises a sealing ring, said sealing ring is fixed on said power detection light passing cylinder, said sealing ring is disposed around said first hole, and said sealing ring is clamped between said light splitting cylinder and said power detection light passing cylinder.
6. The power feedback detecting device according to claim 5, wherein the detecting assembly further includes a probe pressing plate, the probe pressing plate is detachably connected to the power detecting light passing cylinder, the connecting line of the photosensitive probe penetrates through the probe pressing plate, the second hole is a T-shaped hole, the T-shaped hole has a large port and a small port, the detecting end of the photosensitive probe is located at the small port, the rib of the photosensitive probe is clamped at the large port, and when the probe pressing plate is connected to the power detecting light passing cylinder, the probe pressing plate covers the large port.
7. The apparatus of claim 1, wherein the angle between the incident beam and the reflected beam is in the range of 20 degrees to 30 degrees.
8. A power feedback detection device as claimed in claim 6, wherein the beam of the detection spot is offset from the central axis of the power detection light cylinder by: -10mm to +10 mm.
9. A laser apparatus comprising a laser and a square head, further comprising a power feedback detection device according to any one of claims 1 to 8, said power feedback detection device being fixed between said laser and said square head, an output light of said laser being set as said incident light beam, and said refracted light beam or said reflected light beam being input into said square head.
10. The laser device as claimed in claim 9, wherein the laser device further comprises a folding cavity and a beam expander, the folding cavity and the beam expander are located between the laser and the power feedback detection device, the folding cavity is fixed on the laser, and the beam expander is connected to the folding cavity and the power feedback detection device.
CN201921704295.5U 2019-10-11 2019-10-11 Power feedback detection device and laser equipment Active CN210833864U (en)

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Application Number Priority Date Filing Date Title
CN201921704295.5U CN210833864U (en) 2019-10-11 2019-10-11 Power feedback detection device and laser equipment

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Application Number Priority Date Filing Date Title
CN201921704295.5U CN210833864U (en) 2019-10-11 2019-10-11 Power feedback detection device and laser equipment

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113193912A (en) * 2021-04-16 2021-07-30 南京光通光电技术有限公司 Light emitter detection device
CN114543988A (en) * 2022-02-23 2022-05-27 武汉锐科光纤激光技术股份有限公司 Laser power meter

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113193912A (en) * 2021-04-16 2021-07-30 南京光通光电技术有限公司 Light emitter detection device
CN113193912B (en) * 2021-04-16 2023-02-21 南京光通光电技术有限公司 Light emitter detection device
CN114543988A (en) * 2022-02-23 2022-05-27 武汉锐科光纤激光技术股份有限公司 Laser power meter
CN114543988B (en) * 2022-02-23 2023-11-21 武汉锐科光纤激光技术股份有限公司 Laser power meter

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