CN210775555U - Ultrahigh vacuum extremely-low temperature four-probe measuring device - Google Patents
Ultrahigh vacuum extremely-low temperature four-probe measuring device Download PDFInfo
- Publication number
- CN210775555U CN210775555U CN201921487258.3U CN201921487258U CN210775555U CN 210775555 U CN210775555 U CN 210775555U CN 201921487258 U CN201921487258 U CN 201921487258U CN 210775555 U CN210775555 U CN 210775555U
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- Prior art keywords
- probe
- ultra
- low temperature
- measuring device
- sample holder
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- 239000000523 sample Substances 0.000 title claims abstract description 122
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052802 copper Inorganic materials 0.000 claims description 9
- 239000010949 copper Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 10
- 239000000243 solution Substances 0.000 description 7
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 239000008151 electrolyte solution Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Abstract
The utility model discloses an ultra-high vacuum extremely-low temperature four-probe measuring device, which comprises a base, wherein the base is provided with a threaded cavity and a supporting part, a screw rod part is arranged in the threaded cavity, and the top of the screw rod is a hemisphere; the probe station is located the upper end of base and the base passes through the supporting part and supports the probe station, the screw rod pass through the hemisphere with the probe station contact and the screw rod makes the hemisphere push up the probe station rotation through the rotation, four probes are installed to the upper end of probe station, the probe is used for the contact electrode and detects the integrity of electrode, the upper end of sample support device with go up grillage fixed connection. The utility model discloses a four probe measuring device of super high vacuum utmost point low temperature, it uses with the microscope cooperation, adds the integrity that leads to direct current and detect the sample.
Description
Technical Field
The utility model belongs to the technical field of the probe is measured, concretely relates to four probe measuring device of super high vacuum utmost point low temperature.
Background
An electrode is a component in an electronic or electrical device or equipment and is used as two ends for inputting or outputting current in a conductive medium (solid, gas, vacuum or electrolyte solution). One pole of the input current is called anode or positive pole, and the other pole of the output current is called cathode or negative pole. The electrodes are of various types, such as cathodes, anodes, welding electrodes, furnace electrodes, and the like.
The electrode needs to be tested after being produced to ensure the integrity of the electrode, but the market currently lacks a testing device for testing the integrity of the electrode in an extremely low-temperature and ultrahigh vacuum environment without damage.
SUMMERY OF THE UTILITY MODEL
A primary object of the present invention is to provide an ultra-high vacuum ultra-low temperature four-probe measuring device, which is used in cooperation with a microscope and added with the integrity of a dc test sample.
Another object of the utility model is to provide a four probe measuring device of super high vacuum utmost point low temperature, it adopts the torsional spring to eliminate the screw thread clearance, has the restoring force.
A primary object of the present invention is to provide an ultra-high vacuum very-low temperature four-probe measuring device, which has a limiting mechanism to limit the rotation angle of a probe table and protect the probe.
The utility model discloses a main aim at provides super a high vacuum utmost point low temperature four probe measuring device, its compatible super high vacuum, ultra-low temperature environment.
In order to achieve the above object, the utility model provides a four probe measuring device of super high vacuum utmost point low temperature, include:
the base is provided with a threaded cavity and a supporting part;
the screw rod part is arranged in the threaded cavity, and the top of the screw rod is a hemisphere;
a probe station which is located at the upper end of the base and supports the probe station through a support part, the screw rod is contacted with the probe station through a hemisphere and rotates the hemisphere against the probe station through rotation, and four probes are installed at the upper end of the probe station and are used for contacting the electrode and detecting the integrity of the electrode;
the lower end of the supporting leg is fixedly connected with the base through a nut, a bearing is arranged at the middle end of the supporting leg, and a side end connecting part of the probe station is embedded in the bearing to enable the probe station to rotate relative to the supporting leg;
the upper ends of the supporting legs are fixedly connected with the upper plate frame through nuts;
and the upper end of the sample supporting device is fixedly connected with the upper plate frame.
As a further preferable technical solution of the above technical solution, a torsion spring is disposed between the probe station and the support leg, the torsion spring is mounted at a side end connecting portion of the probe station, and the torsion spring is used for eliminating a thread gap.
As a further preferable technical solution of the above technical solution, the sample holder device is provided with a first sample holder and a second sample holder, the first sample holder is fixedly connected with the second sample holder, the first sample holder is located below the second sample holder, and the first sample holder is located above the probe.
As a more preferable mode of the above mode, the second sample holder is a sample holder with magnetic force, and the second sample holder is used to increase a magnetic field environment.
As a further preferable technical solution of the above technical solution, the upper plate frame is provided with a copper braid, and the copper braid is used for transferring temperature.
As a more preferable mode of the above mode, the support portion is configured to limit a rotation angle of the probe stage.
As a further preferable technical scheme of the technical scheme, the ultrahigh vacuum extremely-low temperature four-probe measuring device is made of oxygen-free copper materials.
Drawings
Fig. 1 is a schematic structural diagram of the ultra-high vacuum ultra-low temperature four-probe measuring device of the present invention.
Fig. 2 is a schematic structural diagram of the ultra-high vacuum ultra-low temperature four-probe measuring device of the present invention.
Fig. 3 is a schematic structural diagram of the ultra-high vacuum ultra-low temperature four-probe measuring device of the present invention.
Fig. 4 is a schematic structural diagram of the ultra-high vacuum ultra-low temperature four-probe measuring device of the present invention.
Fig. 5 is a schematic structural diagram of the ultra-high vacuum ultra-low temperature four-probe measuring device of the present invention.
The reference numerals include: 10. a base; 11. a support portion; 20. a screw; 30. a probe station; 31. a probe; 32. a side end connection portion; 33. a torsion spring; 40. a support leg; 41. a bearing; 50. an upper plate frame; 60. a sample holder device; 61. a first sample holder; 62 second sample holder.
Detailed Description
The following description is presented to disclose the invention so as to enable any person skilled in the art to practice the invention. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. The basic principles of the invention, as defined in the following description, may be applied to other embodiments, variations, modifications, equivalents and other technical solutions without departing from the spirit and scope of the invention.
Referring to fig. 1 of the drawings, fig. 1 is the structure schematic diagram of the ultra-high vacuum extreme low temperature four-probe measuring device of the present invention, fig. 2 is the structure schematic diagram of the ultra-high vacuum extreme low temperature four-probe measuring device of the present invention, fig. 3 is the structure schematic diagram of the ultra-high vacuum extreme low temperature four-probe measuring device of the present invention, fig. 4 is the structure schematic diagram of the ultra-high vacuum extreme low temperature four-probe measuring device of the present invention, fig. 5 is the structure schematic diagram of the ultra-high vacuum extreme low temperature four-probe measuring device of the present invention.
In the preferred embodiment of the present invention, those skilled in the art should note that the copper braid, torsion spring, etc. to which the present invention relates may be regarded as the prior art.
Preferred embodiments.
The utility model discloses a four probe measuring device of super high vacuum utmost point low temperature for detect electrode grows, include:
a base 10 provided with a threaded cavity and a support 11;
the screw rod 20 is partially arranged in the threaded cavity, and the top of the screw rod is a hemisphere;
a probe stage 30, the probe stage 30 being located at an upper end of the base 10 and the base 10 supporting the probe stage 30 through a support 11, the screw 20 being in contact with the probe stage 30 through a hemisphere and the screw 20 being rotated to rotate the hemisphere against the probe stage 30 by rotation, the probe stage 30 having four probes 31 mounted at an upper end thereof, the probes 31 being for contacting electrodes and detecting integrity of the electrodes;
a support leg 40, the lower end of which is fixedly connected with the base 10 through a nut, the middle end of the support leg 40 is provided with a bearing 41, and the side end connecting part 32 of the probe station 30 is embedded in the bearing 41 so that the probe station 30 rotates relative to the support leg 40;
the upper end of the supporting leg 40 is fixedly connected with the upper plate frame 50 through a nut;
and the upper end of the sample holding device 60 is fixedly connected with the upper plate frame 50.
Further, a torsion spring 33 is arranged between the probe station 30 and the supporting leg 40, the torsion spring 33 is installed at the side end connecting portion 32 of the probe station 30, and the torsion spring 33 is used for eliminating a thread gap.
Furthermore, the sample holder device 60 is provided with a first sample holder 61 and a second sample holder 62, the first sample holder 61 is fixedly connected with the second sample holder 62, the first sample holder 61 is located below the second sample holder 62, and the first sample holder 61 is located above the probe 31.
Preferably, the second sample holder 62 is a magnetic sample holder, and the second sample holder 62 is used for increasing the magnetic field environment.
Preferably, the upper plate frame 50 is provided with copper braids for transferring temperature.
Preferably, the support 11 is used to limit a rotation angle of the probe station 30.
Preferably, the ultrahigh vacuum extremely low temperature four-probe measuring device is made of oxygen-free copper material partially.
It is worth mentioning that the technical features such as copper plait, torsional spring that the utility model discloses the patent application relates to should be regarded as prior art, and the concrete structure of these technical features, theory of operation and the control mode that may involve, spatial arrangement mode adopt the conventional selection in this field can, should not be regarded as the invention point of the utility model discloses a place, the utility model discloses do not further specifically expand the detailing.
It will be apparent to those skilled in the art that modifications and variations can be made in the above-described embodiments, or some features of the invention may be substituted or omitted, and any modification, substitution, or improvement made within the spirit and principle of the present invention shall fall within the protection scope of the present invention.
Claims (7)
1. An ultra-high vacuum extremely-low temperature four-probe measuring device for detecting electrode growth, comprising:
the base is provided with a threaded cavity and a supporting part;
the screw rod part is arranged in the threaded cavity, and the top of the screw rod is a hemisphere;
a probe station which is located at the upper end of the base and supports the probe station through a support part, the screw rod is contacted with the probe station through a hemisphere and rotates the hemisphere against the probe station through rotation, and four probes are installed at the upper end of the probe station and are used for contacting the electrode and detecting the integrity of the electrode;
the lower end of the supporting leg is fixedly connected with the base through a nut, a bearing is arranged at the middle end of the supporting leg, and a side end connecting part of the probe station is embedded in the bearing to enable the probe station to rotate relative to the supporting leg;
the upper ends of the supporting legs are fixedly connected with the upper plate frame through nuts;
and the upper end of the sample supporting device is fixedly connected with the upper plate frame.
2. The ultra-high vacuum ultra-low temperature four-probe measuring device as claimed in claim 1, wherein a torsion spring is arranged between the probe station and the supporting leg, the torsion spring is mounted at the side end connecting part of the probe station, and the torsion spring is used for eliminating thread gaps.
3. The ultra-high vacuum ultra-low temperature four-probe measuring device as claimed in claim 1, wherein the sample holder device is provided with a first sample holder and a second sample holder, the first sample holder is fixedly connected with the second sample holder, the first sample holder is located below the second sample holder, and the first sample holder is located above the probe.
4. The ultra-high vacuum very-low temperature four-probe measuring device according to claim 3, wherein the second sample holder is a magnetic sample holder for increasing magnetic field environment.
5. The ultra-high vacuum ultra-low temperature four-probe measuring device as claimed in claim 1, wherein the upper plate frame is provided with copper braids for transferring temperature.
6. The ultra-high vacuum ultra-low temperature four-probe measuring device as claimed in claim 1, wherein the supporting portion is used for limiting a rotation angle of the probe stage.
7. The ultra-high vacuum ultra-low temperature four-probe measuring device as claimed in claim 1, wherein the ultra-high vacuum ultra-low temperature four-probe measuring device is partially made of oxygen-free copper material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921487258.3U CN210775555U (en) | 2019-09-06 | 2019-09-06 | Ultrahigh vacuum extremely-low temperature four-probe measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921487258.3U CN210775555U (en) | 2019-09-06 | 2019-09-06 | Ultrahigh vacuum extremely-low temperature four-probe measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210775555U true CN210775555U (en) | 2020-06-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921487258.3U Withdrawn - After Issue CN210775555U (en) | 2019-09-06 | 2019-09-06 | Ultrahigh vacuum extremely-low temperature four-probe measuring device |
Country Status (1)
| Country | Link |
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| CN (1) | CN210775555U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110501526A (en) * | 2019-09-06 | 2019-11-26 | 仪晟科学仪器(嘉兴)有限公司 | The extremely low temperature four-point probe measurment devices and methods therefor of ultrahigh vacuum |
| CN113884707A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Heating frame interconnection assembly and transfer vacuum sample holder |
-
2019
- 2019-09-06 CN CN201921487258.3U patent/CN210775555U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110501526A (en) * | 2019-09-06 | 2019-11-26 | 仪晟科学仪器(嘉兴)有限公司 | The extremely low temperature four-point probe measurment devices and methods therefor of ultrahigh vacuum |
| CN110501526B (en) * | 2019-09-06 | 2024-05-07 | 仪晟科学仪器(嘉兴)有限公司 | Ultra-high vacuum ultra-low temperature four-probe measuring device and method thereof |
| CN113884707A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Heating frame interconnection assembly and transfer vacuum sample holder |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20200616 Effective date of abandoning: 20240507 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20200616 Effective date of abandoning: 20240507 |