CN210758515U

CN210758515U - Digging head

Info

Publication number: CN210758515U
Application number: CN201921051841.XU
Authority: CN
Inventors: 韩玉秋; 刘双营; 褚洪超; 关树军
Original assignee: Beijing Tianneng Yuntong Crystal Technology Co ltd
Current assignee: Beijing Tianneng Yuntong Crystal Technology Co ltd
Priority date: 2019-07-05
Filing date: 2019-07-05
Publication date: 2020-06-16
Anticipated expiration: 2029-07-05

Abstract

The application relates to a digging head, which comprises a metal cylinder and a fixing part. The metal cylinder is provided with a fixed end and a head material contact end, the fixed end is fixedly arranged on the fixed portion, the head material contact end is provided with a cutting portion, and the cutting portion is suitable for cutting a single crystal material when a single crystal is dug on the single crystal head material. The metal cylinder is of a hollow structure, and the side wall of the metal cylinder is provided with a slag discharge hole for discharging scraps generated in the process of digging out the single crystal. During the process of digging the single crystal by the material digging head, the scraps generated by cutting the head material by the cutting part can be discharged from the slag discharge hole. According to the digging head disclosed by the embodiment of the disclosure, scraps accumulated in the metal cylinder can be effectively discharged, and the problem that the dug single crystal rod is stuck with the digging head and is difficult to take out is effectively prevented.

Description

Digging head

Technical Field

The disclosure relates to the field of semiconductor process, in particular to a digging head.

Background

The diameter of the zone-melting single crystal is gradually enlarged during growth, and the head of the single crystal rod presents a longer conical head material. The conical head material is also a single crystal, the performance parameters of the conical head material are not different from those of the single crystal at the equal-diameter part, and one or more single crystal rods can be dug on the conical head material by using the digging head, so that the utilization of the single crystal is maximized. In the related art, the digging head is generally a straight cylinder structure with a closed side surface, the digging length is short, when the length of the dug single crystal is too long, dug chips can be accumulated in the cylinder, so that the dug single crystal rod is clamped with the digging head and is not easy to take out.

Disclosure of Invention

In view of this, the present disclosure provides a material digging head, which can effectively discharge the chips from the metal cylinder, prevent the chips from accumulating in the cylinder, and prevent the dug single crystal rod from being stuck to the material digging head.

According to one aspect of the present disclosure, there is provided a digging head comprising a metal cylinder and a fixing portion;

the metal cylinder is provided with a fixed end and a head material contact end;

the fixed part is fixedly arranged on the fixed part, the head material contact end is provided with a cutting part, and the cutting part is suitable for cutting the single crystal head material when a single crystal rod is dug on the single crystal head material;

the metal cylinder is of a hollow structure, and a slag discharge hole for discharging scraps generated in the single crystal digging process is formed in the side wall of the metal cylinder.

In one possible implementation mode, a diamond coating layer is coated on the contact surface of the head material contact end; the diamond coating layer is the cutting portion.

In one possible implementation manner, the slag discharge hole is a circular hole;

wherein the diameter range of the slag discharge hole is 6mm-8 mm.

In a possible implementation manner, the number of the slag discharging holes is multiple, and the slag discharging holes are dispersedly formed in the side wall of the metal cylinder; wherein the distance between the slag discharge hole adjacent to the head material contact end and the cutting part is 30-50 mm.

In a possible implementation manner, a plurality of slag discharge holes are arranged on the side wall of the metal cylinder at equal intervals.

In a possible implementation manner, when the plurality of slag discharging holes are arranged on the side wall of the metal cylinder at equal intervals, the plurality of slag discharging holes are arranged in pairs;

each pair of slag discharge holes is symmetrical relative to the central axis of the metal cylinder;

the spacing distance between every two adjacent pairs of slag discharge holes is 30-50 mm;

every two adjacent pairs of the slag discharge holes are in a cross structure.

In a possible realization mode, the spacing distance between every two adjacent pairs of slag discharge holes is 40 mm.

In a possible implementation manner, the plurality of slag discharge holes are spirally arranged on the side wall of the metal cylinder.

In one possible implementation manner, the inner space of the metal cylinder is in a circular truncated cone shape with a wide top and a narrow bottom, and the outer wall of the metal cylinder is in a straight cylinder shape;

wherein the diameter of the head material contact end is smaller than that of the fixed end.

In a possible implementation manner, the difference value between the diameter of the head material contact end and the diameter of the fixed end ranges from 3mm to 5 mm.

The utility model discloses the stub bar that digs of implementing is seted up a plurality of row's cinder holes through the dispersion on the lateral wall at the metal cylinder, when digging the stub bar and dig and get single crystal stick, and the produced piece of cutting portion cutting can be discharged from arranging the cinder hole, can prevent that the crushed aggregates from piling up in the metal cylinder, causes single crystal stick and digs the stub bar card and dies. Moreover, the scheme is simple and efficient to operate and convenient to realize.

Other features and aspects of the present disclosure will become apparent from the following detailed description of exemplary embodiments, which proceeds with reference to the accompanying drawings.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate exemplary embodiments, features, and aspects of the disclosure and, together with the description, serve to explain the principles of the disclosure.

FIG. 1 is a main structure view of a material digging head according to an embodiment of the present disclosure;

FIG. 2 is a main body structure view of a material dredging head according to another embodiment of the disclosure;

FIG. 3 illustrates a bottom view of the material dredging head of an embodiment of the present disclosure.

Detailed Description

Various exemplary embodiments, features and aspects of the present disclosure will be described in detail below with reference to the accompanying drawings. In the drawings, like reference numbers can indicate functionally identical or similar elements. While the various aspects of the embodiments are presented in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.

It should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the invention or for simplicity in description, and do not indicate or imply that the device or element so indicated must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments.

Furthermore, in the following detailed description, numerous specific details are set forth in order to provide a better understanding of the present disclosure. It will be understood by those skilled in the art that the present disclosure may be practiced without some of these specific details. In some instances, methods, means, elements and circuits that are well known to those skilled in the art have not been described in detail so as not to obscure the present disclosure.

Fig. 1 shows a schematic structural view of a main body of a material digging head according to an embodiment of the present disclosure. As shown in fig. 1, the material-excavating head 100 includes: the metal cylinder 110 and the fixed part 120, and the digging head 100 are positioned on digging equipment and used for digging single crystals on the conical head material of the single crystal rod.

The metal cylinder 110 is a straight cylinder (e.g., a cylindrical cylinder) and has a hollow structure therein. The body of the fixing portion 120 may have a disk shape. Also, the cross-sectional area of the fixing part 120 is larger than that of the metal cylinder 110, so that the fixing part 120 can completely cover the metal cylinder 110 when the metal cylinder 110 is connected to the fixing part 120. Meanwhile, the end surface of the fixing portion 120 not connected to the metal cylinder 110 is further provided with a mounting post, which is adapted to be mounted on a material digging device and rotates under the control of the material digging device to drive the fixing portion 120 and the metal cylinder 110 to rotate around the central axis of the metal cylinder 110, thereby realizing the material digging operation.

It should be noted that the fixing portion 120 is fixedly connected to the mounting post. In one possible implementation, the fixing portion 120 and the mounting post may be an integrally formed structure.

Fixed end 113 fixed mounting of metal cylinder 110 is on fixed part 120, and threaded connection can be chooseed for use to the fixed mode, if: in one possible implementation, the outer surface of the fixed end 113 of the metal cylinder 110 is provided with external threads, and the inner surface of the fixed portion 120 is provided with internal threads, so that the fixed end 113 of the metal cylinder 110 is tightly connected with the fixed portion 120 through the internal and external threads. Simple structure and easy realization.

Moreover, the fixed end 113 of the metal cylinder 110 is connected with the fixed part 120 by a screw thread, so that the metal cylinder 110 can be directly taken down for replacement when the metal cylinder 110 is damaged.

Furthermore, the fixed end 113 of the metal cylinder 110 and the fixed portion 120 may be connected by other detachable links (e.g., flat key connection), and the principle and advantages thereof are the same as or similar to those of the aforementioned screw connection, and will not be described herein again.

The scrap contacting end 114 of the metal can 110 has a cutting portion 112 adapted to cut the monocrystalline scrap as the scrap pick 100 picks up the single crystal. The cutting portion 112 may be attached to the contact surface of the tip contact end 114 in a coating manner or may be attached to the contact surface of the tip contact end 114 in a fixed mounting manner.

Such as: in one possible implementation, the head stock contacting end surface 114 of the metal cylinder 110 is coated with a coating, i.e., the cutting portion 112. The coating layer is made of carborundum to greatly improve the hardness and the wear resistance of the cutting part 112.

When the material digging device digs the single crystal, the material digging head 100 is connected with a motor of the material digging device, the cutting part 112 is contacted with the surface of the single crystal head material, the cutting part 112 rotates downwards under the action of the motor, because the hardness of the carborundum is greater than that of the single crystal material, the cutting part 112 continuously cuts the single crystal head material downwards along with the rotation of the metal cylinder 110, and the shape of the cut single crystal rod is consistent with that of the metal cylinder 110; the diameter of the metal tube is the same as that of the metal tube 110, and the cut part enters the metal tube 110 after being cut, and is taken out until the cutting is completely finished.

Referring to fig. 2, in a possible implementation manner, the outer wall of the metal cylinder 110 may also be a straight cylinder, and the inner space may be a truncated cone shape with a wide top and a narrow bottom, that is, the diameter of the head material contact end 114 is smaller than that of the fixed end 113.

In one possible implementation, as shown in fig. 2, the difference between the diameter of the head material contacting end 114 and the diameter of the fixed end 113 is in a range of 3mm to 5mm (e.g., the difference between the diameter of the head material contacting end 114 and the diameter of the fixed end 113 is in a range of 4 mm). Since the diameter of the excavated single crystal rod is the same as that of the head material contact tip 114, the portion of the head material cut into the metal cylinder 110 by the cutting part 112 does not rub against the inner wall of the metal cylinder 110 due to shaking of the apparatus, which greatly improves the surface smoothness of the excavated single crystal rod.

During the process of digging single crystal by the digging head 100, a certain amount of single crystal scraps are generated, the single crystal scraps are accumulated inside the metal cylinder 110, and the scraps generated during digging single crystal can be discharged by arranging a slag discharge hole 111 on the side wall of the metal cylinder. As shown in fig. 1, a slag discharge hole 111 is formed in the side wall of the metal cylinder 110, and chips generated by cutting the crystal head material by the cutting portion 112 can be discharged from the slag discharge hole 111 by water along with the chips through flushing and the like. The operation is simple and the realization is easy. By the method, the dug single crystal rod can be effectively prevented from being stuck with the digging head 100, and the surface smoothness of the dug single crystal rod is greatly improved.

Furthermore, the mode of removing the fragments is not limited to water washing, and the fragments can be discharged without damaging the dug single crystal rod.

In a possible implementation manner, the slag discharge hole 111 is a circular hole, and the diameter of the slag discharge hole ranges from 6mm to 8 mm. Such as: the diameter of the slag discharge hole 111 may be 7 mm. The shape of the slag discharge hole 111 may also be a square hole or a through hole with other shapes, as long as the accumulated debris in the metal cylinder 111 can be discharged through the slag discharge hole 111, and the details are not repeated herein.

Further, the number of the slag discharge holes 111 is plural, and the plural slag discharge holes 111 are dispersedly formed in the side wall of the metal cylinder 110. The distance between the slag discharge hole 111 adjacent to the head material contact end 114 and the cutting part 112 is 30mm-50 mm.

Such as: the distance between the slag discharge hole 111 adjacent to the button end 114 and the cutting portion 112 may be 40 mm. By setting the distance between the slag discharge hole 111 adjacent to the head material contact end 114 and the cutting part 112 to be 40mm, the situation that the side surface of the single crystal dug out is not smooth enough due to the fact that the slag discharge hole 111 is too close to the cutting part 112 in the digging process of the single crystal is avoided, and therefore the reliability of the digging head 100 of the embodiment of the disclosure is further improved.

Further, the plurality of slag discharge holes 111 are arranged on the side wall of the metal cylinder 110 at equal intervals, and the plurality of slag discharge holes 111 are arranged in pairs and spirally arranged on the side wall of the metal cylinder 110. Through setting up a plurality of row's cinder holes 111 and arranging at the lateral wall of metal cylinder 110 with equal interval, guaranteed that the produced piece of digging the material in-process all can be discharged by the row's cinder hole 111 of different positions department.

Meanwhile, when the slag discharging holes 111 are formed, the slag discharging holes are formed in pairs, and a drilling device can be directly adopted to sequentially penetrate through the side walls of the metal cylinder 111 along the direction perpendicular to the central axis of the metal cylinder 110. The operation is simple and the realization is easy.

Further, each pair of slag discharge holes 111 is symmetrical relative to the central axis of the metal cylinder 110, and the spacing distance between every two adjacent slag discharge holes 111 is 30mm-50mm (for example, the spacing distance between every two adjacent slag discharge holes 111 is 40 mm). Referring to fig. 3, from the bottom view, two adjacent pairs of slag discharge holes 111 are in a cross structure in a planar space.

For example, a pair of slag discharge holes 111 is first opened at a position 40mm away from the cutting part 112 in a direction from the cutting part 112 toward the fixed end. And a pair of slag discharging holes 111 are arranged at the positions which rotate 90 degrees and are 40mm away from the slag discharging holes 111 arranged at present. The operation is repeated until the slag discharge hole 111 is opened to the vicinity of the fixed end 113.

It should be noted that the cross-shaped structure presented by the two adjacent pairs of slag discharge holes 111 may also be other cross-shaped structures, that is, the included angle between the connecting line of the two holes of the pair of slag discharge holes 111 and the connecting line of the two holes of the adjacent pair of slag discharge holes 111 is not necessarily 90 degrees, and may be any angle, and only the chips need to be reasonably and effectively discharged out of the metal cylinder 111, which is not described herein again.

It should be noted that, although the present application is described above by taking a material digging head as an example, those skilled in the art will appreciate that the present disclosure should not be limited thereto. In fact, the user can flexibly set the structure of the material digging head according to personal preference and/or practical application scenes as long as the required functional effect can be achieved.

In this way, by improving the excavating head structure, the excavating head according to the above-mentioned embodiments of the present disclosure can accomplish the optimization and improvement of the prior art.

Having described embodiments of the present disclosure, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the disclosed embodiments. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A digging head is characterized by comprising a metal cylinder and a fixing part;

2. The excavating head according to claim 1 wherein the contact surface of said head material contacting end is coated with a diamond coating; the diamond coating layer is the cutting portion.

3. The excavating head according to claim 1 wherein said deslagging aperture is a circular aperture;

wherein the diameter range of the slag discharge hole is 6mm-8 mm.

4. The excavating head according to claim 1 wherein the number of the slag discharge holes is plural, and the plural slag discharge holes are dispersedly formed in the side wall of the metal cylinder;

wherein the distance between the slag discharge hole adjacent to the head material contact end and the cutting part is 30-50 mm.

5. The dredging head as claimed in claim 4, wherein the plurality of slag discharge holes are arranged at equal intervals on the side wall of the metal cylinder.

6. The dredging head as claimed in claim 5, wherein when the plurality of slag discharge holes are arranged on the side wall of the metal cylinder at equal intervals, the plurality of slag discharge holes are arranged in pairs;

every two adjacent pairs of the slag discharge holes are in a cross structure.

7. The excavating head according to claim 6 wherein the spacing between each adjacent pair of said rows of slag holes is 40 mm.

8. The dredging head as claimed in claim 4, wherein the plurality of slag discharge holes are spirally arranged on the side wall of the metal cylinder.

9. The excavating head according to any one of claims 1 to 8 wherein the inner space of the metal cylinder is in the shape of a truncated cone with a wide top and a narrow bottom, and the outer wall of the metal cylinder is in the shape of a straight cylinder;

10. The excavating head according to claim 9 wherein the difference between the diameter of said head engaging end and the diameter of said fixed end is in the range of 3mm to 5 mm.