CN210692509U - Micro-displacement amplifying device - Google Patents

Micro-displacement amplifying device Download PDF

Info

Publication number
CN210692509U
CN210692509U CN201921818366.4U CN201921818366U CN210692509U CN 210692509 U CN210692509 U CN 210692509U CN 201921818366 U CN201921818366 U CN 201921818366U CN 210692509 U CN210692509 U CN 210692509U
Authority
CN
China
Prior art keywords
triangular
lever
block
micro
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201921818366.4U
Other languages
Chinese (zh)
Inventor
傅雨晨
范伟
金花雪
王寅
占炜
杨建红
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huaqiao University
Original Assignee
Huaqiao University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huaqiao University filed Critical Huaqiao University
Priority to CN201921818366.4U priority Critical patent/CN210692509U/en
Application granted granted Critical
Publication of CN210692509U publication Critical patent/CN210692509U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The utility model provides a micro-displacement amplifying device, which comprises a support piece and a piezoelectric element, wherein the piezoelectric element comprises a steering block, two groups of triangular components and a lever component; the triangular assembly comprises a triangular input block and a triangular output block, the triangular input block is provided with a middle part and two connecting parts, two triangular output blocks are arranged in the same triangular assembly, one ends of the two triangular output blocks are respectively flexibly hinged on the corresponding connecting parts, one end of one triangular output block, which is not connected with the connecting parts, is flexibly hinged on the supporting part, and the other end of the other triangular output block, which is not connected with the connecting parts, is flexibly hinged on the steering block; the lever assembly comprises a first lever and a second lever. Through setting up the triangle subassembly, can change the direction of displacement when realizing displacement amplification, the test platform that can use is relatively wider, and simultaneously through setting up lever assembly of asymmetric structure, the magnification is relatively great.

Description

Micro-displacement amplifying device
Technical Field
The utility model relates to an amplification device, especially a micro displacement amplification device.
Background
In recent years, with the development of microelectronic technology, piezoelectric ceramics are widely applied to the fields of micro-displacement driving and precision positioning due to the excellent precision driving and positioning performance of the piezoelectric ceramics, but because the micron-sized displacement output of the piezoelectric ceramics cannot meet the requirements of practical application, a displacement amplification device is generally required to be designed for carrying out displacement amplification on the piezoelectric ceramics.
The chinese patent of the invention with publication number CN104900573B is a symmetric differential lever micro-displacement amplifying device designed in the early stage by the applicant, which includes a base, a substrate fixed on the base, and a piezoelectric block located on the same plane as the substrate, where the piezoelectric block has a top pressing portion and two transmission portions located at two ends of the top pressing portion respectively and symmetrically placed with the perpendicular bisector of the top pressing portion as the center, the two transmission portions are connected with a set of lever assemblies located on the same plane as the substrate respectively, and the two sets of lever assemblies are symmetrically placed with the perpendicular bisector of the top pressing portion as the center, and a piezoelectric ceramic driver abutting against the top pressing portion is placed between the two transmission portions; the micro-displacement device realizes larger displacement amplification factor by arranging the lever assembly and utilizing the principle of differential lever amplification, has larger stroke, and simultaneously can reduce errors and has higher precision because the flexible hinged mode is adopted for connection, and the clearance and the friction force between the rod pieces are smaller. However, in the micro-displacement amplifying device, the displacement direction of the piezoelectric ceramic driver is the same as the amplified displacement direction, so that the whole device has a relatively large volume, and a test platform capable of being applied is limited; in addition, although the micro-displacement amplifying device can realize larger displacement amplification factor by using the differential lever, the micro-displacement amplifying device can only amplify the differential lever once, and the displacement amplification factor is still more limited.
In view of this, the present invention provides a micro-displacement amplifier, which is a novel and effective research.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a test platform that can use is relatively wider and the relatively great micrometric displacement amplification device of magnification.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a micro-displacement amplifying device comprises a support piece and a piezoelectric element which are positioned on the same plane, wherein the piezoelectric element comprises a steering block, two groups of triangular components and more than two groups of lever components which are sequentially connected in series;
the triangular component comprises a triangular input block and a triangular output block, the triangular input block is provided with a middle part and two connecting parts which are respectively connected with the middle part integrally and are arranged symmetrically with the middle part as the center, in the same triangular component, two triangular output blocks are arranged, the two triangular output blocks are mutually and symmetrically arranged by taking the middle part as a center, one end of each of the two triangular output blocks is flexibly hinged on the corresponding connecting part, one end of one of the triangular output blocks, which is not connected with the connecting part, is flexibly hinged on the supporting part, and the other end of the other triangular output block, which is not connected with the connecting part, is flexibly hinged on the steering block, and the hinge points at the two ends of the triangular output block are arranged in a staggered way, the two groups of triangular components are arranged symmetrically, a driving space for placing a piezoelectric ceramic driver is formed between the middle parts of the two groups of triangular components;
the lever assembly comprises one end and a first rod piece and one end of the first rod piece are flexibly hinged to the second rod piece at the middle position of the first rod piece, the first rod piece is not hinged to one end, connected with the supporting piece, of the first rod piece to form a lever output end, the second rod piece is not hinged to one end, connected with the first rod piece, of the first rod piece to form a lever input end, adjacent two lever assemblies are close to the head ends, the lever output end of the lever assembly is flexibly hinged to the other lever input end of the lever assembly, and the lever assembly is located at the head end, and the lever input end of the lever assembly is flexibly hinged to the steering block.
As an improvement of the utility model, the turning block is located two sets of with the pin joint that corresponds between the lever subassembly on the centre of symmetry line of triangle subassembly.
As an improvement of the present invention, the first member and the hinge point of the support member and the hinge point between the first member and the second member are located at the same side of the first member.
As an improvement of the present invention, each of the flexible hinges is hinged by a flexible hinge.
As an improvement of the present invention, the first rod and the flexible hinge between the supporting members are straight beam type hinges, and other flexible hinges are all straight circular type hinges.
As an improvement of the utility model, the support piece is provided with a positioning hole.
Adopt above-mentioned technical scheme, the utility model discloses following beneficial effect has:
1. through setting up the triangle subassembly, can change the direction of displacement when realizing displacement amplification, the test platform that can use is relatively wider, and simultaneously through setting up lever assembly of asymmetric structure, the magnification is relatively great.
2. The characteristics that the straight circular hinge is sensitive to stretching displacement and the straight beam hinge is sensitive to twisting displacement are utilized, and the amplification factor of the displacement amplification mechanism is further increased.
3. The input displacement is amplified in multiple stages by combining a triangular principle and a lever principle, and the output end of the triangular component part is directly connected with the input end of the lever component through the flexible hinge, so that the energy loss is reduced to a certain extent, namely the displacement loss is small.
Drawings
FIG. 1 is a schematic structural view of a micro-displacement amplifier of the present invention;
fig. 2 is a schematic view of the working principle of the micro-displacement amplifier of the present invention.
The designations in the figures correspond to the following:
100-a support; 110-positioning holes;
200-a piezoelectric element; 210-a turning block;
220-a triangular component; 221-triangle input block;
221 a-middle section; 221 b-connecting part;
222-a triangle output block; 230-a lever assembly;
231-a first bar; 232-second bar.
Detailed Description
The invention will be further described with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, the micro-displacement amplifying device provided in this embodiment includes a supporting member 100 and a piezoelectric member 200 located on the same plane, wherein the structure of the supporting member 100 can be designed according to actual requirements, in this embodiment, the supporting member 100 is an integrated rigid frame structure, and the supporting member 100 is provided with a positioning hole 110, so as to facilitate accurate fixed mounting of the supporting member 100 at a designated position of a testing platform or an experimental platform.
The piezoelectric element 200 includes a turning block 210, two sets of triangle components 220, and more than two sets of lever components 230 connected in series in sequence, in this embodiment, two sets of lever components 230 are taken as an example for description. Preferably, the piezoelectric element 200 is an integrally formed part, that is, the steering block 210, the triangular component 220 and the lever component 230 are integrally formed, and the piezoelectric element 200 and the support member 100 are integrally connected, specifically, the micro-displacement amplifying device provided by the embodiment forms the integrally connected piezoelectric element 200 and the support member 100 by a wire cut electrical discharge machining method, so that the machining precision is relatively high, and error superposition in the cutting and assembling processes is effectively avoided.
The turning block 210 is a central symmetrical part, that is, the turning block 210 has a center line (the center line is a virtual line, and the center line is not drawn on the actual part), and the parts of the turning block 210 located at both sides of the center line are symmetrically arranged with the center line as the center.
The triangle component 220 includes a triangle input block 221 and a triangle output block 222, wherein the triangle input block 221 has a middle portion 221a and two connection portions 221b fixedly connected to the middle portion 221a integrally and respectively and symmetrically arranged with respect to the middle portion 221a, i.e., the triangle input block 221 is also a central symmetric part. In the same triangular component 220, there are two triangular output blocks 222, the two triangular output blocks 222 are symmetrically arranged with the middle part 221a as the center, so that the triangular output block 222 and the connecting part 221b located on the same side of the middle part 221a can be matched with each other, specifically, one end of each of the two triangular output blocks 222 is flexibly hinged on the corresponding connecting part 221b, in addition, one end of one of the two triangular output blocks 222, which is not connected with the connecting part 221b, is flexibly hinged on the supporting member 100, one end of the other triangular output block 222, which is not connected with the connecting part 221b, is flexibly hinged on the steering block 210, and the hinge points at the two ends of each triangular output block 222 are arranged in a staggered manner, that is, the direction of the connecting line between the hinge points at the two ends of the same triangular output block 222 is different from the length direction of.
The two sets of the triangular components 220 are symmetrically arranged, symmetrical axes of the two sets of the triangular components 220 are located on the same straight line with the central line of the steering block 210, middle parts 221a of the two sets of the triangular components 220 are oppositely arranged, a driving space for placing a piezoelectric ceramic driver is formed between the middle parts 221a of the two sets of the triangular components 220, and namely, one opposite ends of the two middle parts 221a are displacement input ends matched with the piezoelectric ceramic driver. Thus, the shearing force generated during working is avoided, and the displacement precision is effectively improved. It should be noted that the piezoceramic driver is not part of the micro-displacement amplifying device in the present embodiment, and needs to be placed in use, and is mainly used for providing displacement input.
The lever assembly 230 includes a first lever 231 having one end flexibly hinged to the support member 100, and a second lever 232 having one end flexibly hinged to a middle portion of the first lever 231, wherein an end of the first lever 231 not connected to the support member 100 forms a lever output end, and an end of the second lever 232 not connected to the first lever 231 forms a lever input end. It should be noted that the reference to one end or the other end of each rod in the above description is a general description of the relative position, and does not only refer to the end position of the rod, but also includes the shaft portion of the corresponding rod near the end position.
Each lever assembly 230 is flexibly hinged to the lever input end of the next lever assembly 230 in sequence to realize series connection by the lever output end of the previous lever assembly 230 in sequence, the lever input end of the first lever assembly 230 is used as the head end of each lever assembly 230 in sequence in series, and the lever output end of the last lever assembly 230 is used as the tail end of each lever assembly 230 in sequence in series. In this way, in two adjacent lever assemblies 230, the lever output end of the lever assembly 230 near the head end is flexibly hinged to the lever input end of the other lever assembly 230, and the lever input end of the lever assembly 230 at the head end is flexibly hinged to the turning block 210, and in addition, the hinge point between the turning block 210 and the corresponding lever assembly 230 is located on the symmetry center line of the two sets of triangular assemblies 220.
Preferably, in the embodiment, the hinge point between the first rod 231 and the supporting member 100 and the hinge point between the first rod 231 and the corresponding second rod 232 are located on the same side of the first rod 231, so as to avoid generating a shear force to affect the precision of the amplifying device.
The flexible hinges are hinged by flexible hinges, wherein the flexible hinge between the first rod 231 and the support 100 is a straight beam type hinge relatively sensitive to torsional displacement, and the other flexible hinges are straight circular type hinges relatively sensitive to tensile displacement.
The micro-displacement amplification device provided by the embodiment can realize the purpose of amplifying a small range into a large range through the micro-displacement amplification device in a small processing space, and the theoretical amplification factor of the device is 27.24 times, wherein the amplification factor of the triangular component 220 is 4.54 times, and the amplification factor of the lever component 230 is 6 times. Specifically, as shown in FIG. 2 and with reference to FIG. 1, in use, a small displacement output by the piezo ceramic actuator is applied to the displacement inputs of the two triangular members 220, the displacement inputs andthe triangular output blocks 222 can form a triangular structure to amplify displacement, wherein L1 and L2 shown in fig. 2 are adjacent sides of the triangle, α is an included angle, since two triangular output blocks 222 in the same triangular component 220 are symmetrically arranged, and one of the triangular output blocks 222 is flexibly hinged with the support member 100, according to the stacking theorem, the amplification ratio of the triangular component 220 is K1Since the steering block 210 is directly connected to the triangle assembly 220 and the lever assembly 230, respectively, 2/tan α, the input displacement of the lever rigid body assembly 230 is approximately Δ y1=Δy·K1. Since the lever assembly 230 has two groups, which can be divided into a primary lever structure and a secondary lever structure, in fig. 2, L6-2L 5-2L 4-2L 3, the amplification factor of the primary lever structure is K according to the lever principle2(L4+ L3)/L3, the magnification of the secondary lever structure is K2The output end of the first-level lever structure is the input end of the second-level lever structure, and according to the superposition principle, the total amplification factor of the rigid body part of the second-level lever is K3=K1·K2Since (L4+ L3)/L3 · (L6+ L5)/L5 ═ 6, the total magnification of the entire micro-displacement amplification device is approximately K ═ K1·K2·K3=12/tanα。
The micro-displacement amplifying device provided by the embodiment can convert the transverse input displacement of the piezoelectric ceramic driver into the longitudinal output displacement and realize multi-stage amplification, has the advantages of novel structure, relatively small parasitic displacement, high precision and the like, and is suitable for the technical fields of micro-displacement measurement, micro-precision positioning platforms and micro-nano driving.
The present invention has been described in detail with reference to the accompanying drawings, but the embodiments of the present invention are not limited to the above embodiments, and those skilled in the art can make various modifications to the present invention according to the prior art, and these all belong to the protection scope of the present invention.

Claims (6)

1. A micro-displacement amplifying device is characterized by comprising a support piece and a piezoelectric piece which are positioned on the same plane, wherein the piezoelectric piece comprises a steering block, two groups of triangular components and more than two groups of lever components which are sequentially connected in series;
the triangular component comprises a triangular input block and a triangular output block, the triangular input block is provided with a middle part and two connecting parts which are respectively connected with the middle part integrally and are arranged symmetrically with the middle part as the center, in the same triangular component, two triangular output blocks are arranged, the two triangular output blocks are mutually and symmetrically arranged by taking the middle part as a center, one end of each of the two triangular output blocks is flexibly hinged on the corresponding connecting part, one end of one of the triangular output blocks, which is not connected with the connecting part, is flexibly hinged on the supporting part, and the other end of the other triangular output block, which is not connected with the connecting part, is flexibly hinged on the steering block, and the hinge points at the two ends of the triangular output block are arranged in a staggered way, the two groups of triangular components are arranged symmetrically, a driving space for placing a piezoelectric ceramic driver is formed between the middle parts of the two groups of triangular components;
the lever assembly comprises one end and a first rod piece and one end of the first rod piece are flexibly hinged to the second rod piece at the middle position of the first rod piece, the first rod piece is not hinged to one end, connected with the supporting piece, of the first rod piece to form a lever output end, the second rod piece is not hinged to one end, connected with the first rod piece, of the first rod piece to form a lever input end, adjacent two lever assemblies are close to the head ends, the lever output end of the lever assembly is flexibly hinged to the other lever input end of the lever assembly, and the lever assembly is located at the head end, and the lever input end of the lever assembly is flexibly hinged to the steering block.
2. The micro-displacement amplifying device as claimed in claim 1, wherein the hinge point between the turning block and the corresponding lever assembly is located on the symmetry center line of the two sets of the triangular assemblies.
3. The micro-displacement amplifying device according to claim 1, wherein the hinge point of the first rod and the support member and the hinge point between the first rod and the corresponding second rod are located on the same side of the first rod.
4. The micro-displacement amplifying device according to claim 1, wherein each of the flexible hinges is hinged by a flexible hinge.
5. The micro-displacement amplifying device according to claim 4, wherein the flexible hinges between the first rod and the support member are straight beam type hinges, and the other flexible hinges are straight circular type hinges.
6. The micro-displacement amplification device of any one of claims 1 to 5, wherein the support member has a positioning hole.
CN201921818366.4U 2019-10-28 2019-10-28 Micro-displacement amplifying device Expired - Fee Related CN210692509U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921818366.4U CN210692509U (en) 2019-10-28 2019-10-28 Micro-displacement amplifying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921818366.4U CN210692509U (en) 2019-10-28 2019-10-28 Micro-displacement amplifying device

Publications (1)

Publication Number Publication Date
CN210692509U true CN210692509U (en) 2020-06-05

Family

ID=70901735

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921818366.4U Expired - Fee Related CN210692509U (en) 2019-10-28 2019-10-28 Micro-displacement amplifying device

Country Status (1)

Country Link
CN (1) CN210692509U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110739256A (en) * 2019-10-28 2020-01-31 华侨大学 micro-displacement amplifying devices
CN113938052A (en) * 2021-09-29 2022-01-14 东北电力大学 Piezoelectric stick-slip driver based on two-stage lever amplification mechanism

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110739256A (en) * 2019-10-28 2020-01-31 华侨大学 micro-displacement amplifying devices
CN110739256B (en) * 2019-10-28 2024-06-18 华侨大学 Micro-displacement amplifying device
CN113938052A (en) * 2021-09-29 2022-01-14 东北电力大学 Piezoelectric stick-slip driver based on two-stage lever amplification mechanism
CN113938052B (en) * 2021-09-29 2023-09-08 东北电力大学 Piezoelectric stick-slip driver based on two-stage lever amplifying mechanism

Similar Documents

Publication Publication Date Title
CN210692509U (en) Micro-displacement amplifying device
CN108561700B (en) Three-degree-of-freedom ultrasonic vibration auxiliary machining precision positioning platform
Ervin et al. Recurve piezoelectric-strain-amplifying actuator architecture
CN109650327B (en) Flat plate type three-dimensional large-stroke nano operating platform
CN105619377B (en) Space micro-gripper based on compliant mechanism
CN103022339A (en) Orthogonal piezoelectric displacement amplifying mechanism
CN109176420A (en) Linear joint formula flexibility decoupling precision positioning structure is set in one kind
CN109713937A (en) A kind of micro displacement amplifier based on uniaxial oval flexible hinge
CN110739256B (en) Micro-displacement amplifying device
CN109215730B (en) Displacement reversing amplifying mechanism based on flexible hinge
CN105174210B (en) Three Degree Of Freedom mini positioning platform based on the double submissive hinges of symmetric form
CN106782674A (en) A kind of micro displacement amplifier and nanometer positioning device
CN116455264A (en) Series-parallel combined piezoelectric translational micro-clamp and method
CN109654333A (en) A kind of space multistory formula three-dimensional large-stroke nanometer operating platform
CN106514278B (en) 2-dimensional high-frequency micro-amplitude vibrator based on flexible parallel mechanism
CN100432491C (en) Multifunction microdriving interface module
CN207522638U (en) A kind of gain is with the submissive orthogonal translation enlarger of the increased compact of input power
CN114107023B (en) Piezoelectric driving cell microinjection device and self-adaptive compliant control method thereof
CN1590966A (en) Displacement amplifying mechanism
JP2003062773A (en) Micromanipulator
CN211828135U (en) Displacement reversing amplification mechanism based on flexible hinge
CN112447262B (en) Three-translation decoupling micro positioner based on rotary lever half-bridge amplifier
CN204946549U (en) One kind planar monolithic Grazing condition nano-positioning stage in parallel
CN211413668U (en) Two-degree-of-freedom servo tool rest with large-stroke high-frequency response
JP2892632B2 (en) Torsional actuator and flap drive

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20200605