CN210692494U - Activation disk surface - Google Patents
Activation disk surface Download PDFInfo
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- CN210692494U CN210692494U CN201921804789.0U CN201921804789U CN210692494U CN 210692494 U CN210692494 U CN 210692494U CN 201921804789 U CN201921804789 U CN 201921804789U CN 210692494 U CN210692494 U CN 210692494U
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- pipeline
- communicated
- air inlet
- purifier body
- activation
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Abstract
The utility model discloses an activation quotation belongs to semiconductor technology field. It includes the base and the fixed plate of fixing mutually with base top one side, fixed mounting has the intake pipe on the fixed plate, and the intercommunication has the admission valve in the intake pipe, there is first pipeline through the three-way pipe intercommunication in the intake pipe, first pipeline one end tip intercommunication has the manometer, first pipeline other end tip communicates respectively through the four-way pipe has three second pipeline, the tip of every second pipeline communicates respectively has manual valve, the other end of every manual valve communicates respectively has the hose, fixed mounting has the clarifier body on the base. The utility model discloses mainly adopt the mode of a plurality of parallelly connected activations, replace current single activation mode to make the activation efficiency of the inside material of whole GC series purifier obtain improving, every purifier still disposes regeneration exhaust apparatus alone in addition, guaranteed the activation effect.
Description
Technical Field
The utility model relates to an activation quotation belongs to semiconductor technology field.
Background
In the semiconductor industry, substances inside a GC series purifier need to be activated, but the activation operation in the prior art is mainly performed in a single activation mode, and in the single activation mode, once instruments in the activation mode are damaged and cannot be repaired in time, the activation efficiency of the substances inside the whole GC series purifier is reduced.
Disclosure of Invention
The utility model discloses the technical problem that will solve lies in: the provision of an activation panel solves the problem of a reduction in the efficiency of activation of the material within the entire GC series purifier due to the fact that the single activation mode is the only way and, consequently, if the instrumentation in that activation mode is damaged, no timely maintenance is available.
The utility model discloses the technical problem that will solve takes following technical scheme to realize:
an activation plate surface, which comprises a base and a fixed plate fixed with one side of the top of the base, wherein the fixed plate is fixedly provided with an air inlet pipe, and the air inlet pipe is communicated with an air inlet valve, the air inlet pipe is communicated with a first pipeline through a three-way pipe, one end part of the first pipeline is communicated with a pressure gauge, the other end part of the first pipeline is respectively communicated with three second pipelines through a four-way pipe, the end part of each second pipeline is respectively communicated with a manual valve, the other end of each manual valve is respectively communicated with a hose, the base is fixedly provided with a purifier body, one end of each hose positioned at one end of the manual valve is communicated with the air inlet end of the purifier body, still fixedly connected with diaphragm on the fixed plate, fixed mounting has a plurality of flowmeters on the diaphragm, the flowmeter inlet end also gives vent to anger through hose and purifier body and holds the intercommunication.
As a preferred example, the purifier body inlet end and outlet end are both located at the top of the purifier body.
As a preferable example, one end part of the air inlet pipe is communicated with a joint, and the joint is communicated with an external air source.
As a preferred example, each of the hoses is also communicated with a joint, and the joint on each hose is communicated with a joint on the air inlet end or the air outlet end of the purifier body.
As a preferable example, the base is provided with a plurality of placement grooves, and each purifier body is placed in the placement groove.
The utility model has the advantages that: the utility model discloses mainly adopt the mode of a plurality of parallelly connected activations, replace current single activation mode to make the activation efficiency of the inside material of whole GC series purifier obtain improving, every purifier still disposes regeneration exhaust apparatus alone in addition, guaranteed the activation effect.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of a portion a in fig. 1.
In the figure: the device comprises a base 1, a fixing plate 2, an air inlet pipe 3, a first pipeline 4, a pressure gauge 5, a second pipeline 6, a manual valve 7, an air inlet valve 8, a hose 9, a purifier body 10, a transverse plate 11, a flowmeter 12 and a placing groove 13.
Detailed Description
In order to make the technical means, the creation features, the achievement purposes and the functions of the present invention easy to understand and understand, the present invention is further explained by combining the following specific drawings.
As shown in fig. 1-2, the activating plate comprises a base 1 and a fixing plate 2 fixed on one side of the top of the base 1, an air inlet pipe 3 is fixed on the fixing plate 2, an air inlet valve 8 is communicated with the air inlet pipe 3, the air inlet pipe 3 is communicated with a first pipeline 4 through a three-way pipe, one end of the first pipeline 4 is communicated with a pressure gauge 5, the other end of the first pipeline 4 is respectively communicated with three second pipelines 6 through four-way pipes, the end of each second pipeline 6 is respectively communicated with a manual valve 7, the other end of each manual valve 7 is respectively communicated with a hose 9, a purifier body 10 is fixedly installed on the base 1, one end of each hose 9 located at one end of each manual valve 7 is communicated with the air inlet end of the purifier body 10, a transverse plate 11 is further fixedly connected to the fixed plate 2, a plurality of flow meters 12 are fixedly installed on the transverse plate 11, and the air inlet ends of the flow meters 12 are also communicated with the air outlet end of the purifier body 10 through.
The purifier body 10 has an inlet end and an outlet end at the top of the purifier body 10.
One end of the air inlet pipe 3 is communicated with a joint which is communicated with an external air source.
Each hose 9 is also connected with a joint, and the joint on each hose 9 is connected with a joint on the air inlet end or the air outlet end of the purifier body 10.
The base 1 is provided with a plurality of placement grooves 13, and each purifier body 10 is placed in the placement groove 13.
The flow meter 12 is a float flow meter with a needle valve, and a use line is connected to one end of the flow meter 12, and the next step is performed using gas discharged from the end of the use line.
The working principle is as follows: firstly, an air inlet valve 8 is opened, so that air enters a first pipeline 4 through an air inlet pipe 3, at the moment, a pressure gauge 5 displays pressure, then a manual valve 7 on one second pipeline 6 is opened, small-flow air sequentially passes through the first pipeline 4, a four-way pipe, the second pipeline 6, the manual valve 7 and a hose 9, then enters a purifier body 10 from an air inlet end of the purifier body 10 for activation, after activation is completed, the activated air sequentially passes through an air outlet end of the purifier body 10, the hose 9 and a flowmeter 12, then a needle valve on the flowmeter 12 is opened, the air is guaranteed to be discharged from the flowmeter 12, the needle valve on the flowmeter 12 is adjusted, activation flow is guaranteed, and therefore the condition that each purifier can be fully activated is improved.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that various changes and modifications may be made without departing from the spirit and scope of the invention, and such changes and modifications fall within the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (5)
1. The activation quotation, including the base and with base top one side fixed plate mutually, its characterized in that: the purifier comprises a fixed plate and is characterized in that an air inlet pipe is fixedly mounted on the fixed plate and is communicated with an air inlet valve, the air inlet pipe is communicated with a first pipeline through a three-way pipe, one end of the first pipeline is communicated with a pressure gauge, the other end of the first pipeline is respectively communicated with three second pipelines through four-way pipes, the end of each second pipeline is respectively communicated with a manual valve, the other end of each manual valve is respectively communicated with a hose, a purifier body is fixedly mounted on the base, one end of each hose positioned at one end of each manual valve is communicated with the air inlet end of the purifier body, a transverse plate is fixedly connected to the fixed plate, a plurality of flowmeters are fixedly mounted on the transverse plate, and the air inlet end of each flowmeter is also communicated with the air outlet end of the purifier body through.
2. An active panel surface as claimed in claim 1, wherein: the purifier body is characterized in that the gas inlet end and the gas outlet end of the purifier body are both positioned at the top of the purifier body.
3. An active panel surface as claimed in claim 1, wherein: and the end part of one end of the air inlet pipe is communicated with a joint, and the joint is communicated with an external air source.
4. An active panel surface as claimed in claim 1, wherein: and each hose is also communicated with a joint, and the joint on each hose is communicated with the joint on the air inlet end or the air outlet end of the purifier body.
5. An active panel surface as claimed in claim 1, wherein: the base is provided with a plurality of placing grooves, and each purifier body is placed in the placing groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921804789.0U CN210692494U (en) | 2019-10-25 | 2019-10-25 | Activation disk surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921804789.0U CN210692494U (en) | 2019-10-25 | 2019-10-25 | Activation disk surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210692494U true CN210692494U (en) | 2020-06-05 |
Family
ID=70884759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921804789.0U Active CN210692494U (en) | 2019-10-25 | 2019-10-25 | Activation disk surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210692494U (en) |
-
2019
- 2019-10-25 CN CN201921804789.0U patent/CN210692494U/en active Active
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