CN210689875U - Flexible capacitive sensor and pressure measuring device - Google Patents
Flexible capacitive sensor and pressure measuring device Download PDFInfo
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- CN210689875U CN210689875U CN201922293520.7U CN201922293520U CN210689875U CN 210689875 U CN210689875 U CN 210689875U CN 201922293520 U CN201922293520 U CN 201922293520U CN 210689875 U CN210689875 U CN 210689875U
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Abstract
The application discloses a flexible capacitance sensor and a pressure measuring device, wherein the flexible capacitance sensor comprises a first flexible electrode layer, a flexible insulating layer and a second flexible electrode layer which are sequentially stacked; the first flexible electrode layer and the second flexible electrode layer are of single structures; the flexible insulating layer is provided with a plurality of apertures for increasing the flexibility of the flexible insulating layer. Above-mentioned scheme, first flexible electrode layer and second flexible electrode layer are monomer structure, adopt compound lamellar structure among the prior art, do not have because of environmental factor, drop or destroy between the different layers such as temperature, humidity cause, cause the problem that flexible capacitive sensor became invalid.
Description
Technical Field
The utility model relates to a sensor technical field, concretely relates to flexible capacitance sensor and pressure measurement device.
Background
At present, flexible electrodes of flexible capacitive sensors generally adopt a composite multilayer structure, for example, the flexible electrodes adopt a plastic film as a substrate, and then a metal film is formed on the substrate to form the flexible electrodes. For plastics, their thermal stability is a great challenge. Most plastics are prone to volume expansion in the environment, which causes the metal film formed on the plastic to peel off or break during the manufacturing process of the flexible capacitive sensor, and the flexible capacitive sensor fails.
SUMMERY OF THE UTILITY MODEL
The application expects to provide a flexible capacitive sensor and pressure measurement device for overcome among the prior art because of metal film and substrate emergence drop or destroy, make the problem of flexible capacitive sensor inefficacy.
In a first aspect, the present invention provides a flexible capacitive sensor, which includes a first flexible electrode layer, a flexible insulating layer and a second flexible electrode layer stacked in sequence;
the first flexible electrode layer and the second flexible electrode layer are of single structures;
the flexible insulating layer is provided with a plurality of apertures for increasing the flexibility of the flexible insulating layer.
As an implementation manner, the flexible insulating layer includes at least one layer of flexible substrate, two sides of the flexible substrate facing away from each other are provided with a plurality of flexible protrusions spaced from each other, and a gap between the flexible protrusions disposed on the same side is the aperture.
As an achievable way, the flexible protrusions between different faces are staggered; and/or the presence of a gas in the gas,
the flexible bulges in different rows or different columns on the same surface are arranged in a staggered way.
As an realizable manner, the flexible protrusion is at least any one of a cube, a cuboid, a cylinder, a polygonal prism, a circular truncated cone, a spherical cap, and a frustum.
As an achievable mode, the first flexible electrode layer is any one of a conductive rubber layer, a conductive silica gel layer and conductive paper; and/or the presence of a gas in the gas,
the second flexible electrode layer is any one of a conductive rubber layer, a conductive silica gel layer and conductive paper.
As an implementable manner, the flexible insulating layer is any one of a rubber layer, a silicone rubber layer, and a polydimethylsiloxane layer.
In a practical manner, the thickness of the flexible projections is 5-10 μm.
As a practical way, the thickness of the flexible substrate is 10-20 μm.
As a practical matter, the flexible projections are formed by screen printing or stamping.
In a second aspect, the present invention provides a pressure measuring device, including the above-mentioned flexible capacitance sensor.
Above-mentioned scheme, first flexible electrode layer and second flexible electrode layer are monomer structure, adopt compound lamellar structure among the prior art, do not have because of environmental factor, drop or destroy between the different layers such as temperature, humidity cause, cause the problem that flexible capacitive sensor became invalid.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:
fig. 1 is a schematic view of a usage state of a flexible capacitive sensor according to an embodiment of the present invention;
fig. 2 is a top view of a flexible insulating layer provided by an embodiment of the present invention;
fig. 3 is a top view of a flexible insulating layer according to another embodiment of the present invention.
Detailed Description
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and are not limiting of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
Fig. 1 and fig. 2 show a flexible capacitive sensor according to an embodiment of the present invention, which includes a first flexible electrode layer 1, a flexible insulating layer, and a second flexible electrode layer 4 stacked in sequence; the first flexible electrode layer 1 and the second flexible electrode layer 4 are both of a single structure; the flexible insulating layer is provided with a plurality of apertures 5 for increasing the flexibility of said flexible insulating layer.
The single structure referred to herein means that the first flexible electrode layer 1 and the second flexible electrode layer 4 are each an independent layered structure, rather than a structure in which a plurality of layers of different materials are stacked and combined, and the single structure does not fall off from each other due to changes in conditions such as temperature and humidity.
Above-mentioned scheme because first flexible electrode layer 1 and second flexible electrode layer 4 are monomer structure, adopts compound lamellar structure among the prior art, does not exist because of environmental factor, drop or destroy between the different layers that lead to the fact such as temperature, humidity, etc. causes the problem that flexible capacitive sensor became invalid.
Furthermore, since the flexible insulating layer is provided with a plurality of apertures 5 for improving the flexibility of the flexible insulating layer, the flexible insulating layer is prone to deform after pressure is applied on the first flexible electrode layer 1 and/or the second flexible electrode layer 4, i.e. the flexible capacitive sensor is more easily compressed. However, the capacitance value of the flexible capacitance sensor is determined by the distance between the first flexible electrode layer 1 and the second flexible electrode layer 4 and the dielectric constant of the flexible insulating layer, after pressure is applied, the distance between the first flexible electrode layer 1 and the second flexible electrode layer 4 at the stress part is reduced, meanwhile, air in the pores 5 at the stress part of the flexible insulating layer is squeezed out, the dielectric constant of the flexible insulating layer is increased, and the capacitance value of the flexible capacitance sensor is changed more easily. In particular, the following formula can be seen:
C＝εS/d；
wherein C is the capacitance of the flexible capacitive sensor, epsilon is the dielectric constant of the flexible insulating layer, S is the equivalent area between the first flexible electrode layer 1 and the second flexible electrode layer 4, and d is the distance between the first flexible electrode layer 1 and the second flexible electrode layer 4.
As can be seen from the above, the flexible capacitive sensor has high sensitivity because the flexible capacitive sensor is more easily compressed and the dielectric constant becomes large when compressed, and the capacitance value is more easily changed.
As an implementation manner, the flexible insulating layer includes at least one layer of flexible substrate 3, two sides of the flexible substrate 3 facing away from each other are provided with a plurality of flexible protrusions 2 spaced from each other, and a gap between the flexible protrusions 2 disposed on the same side is the aperture 5.
Under the condition that the thickness of the flexible insulating layer is the same, the flexible insulating layer provided with the flexible protrusions 2 is more easily deformed under the condition that the stress is the same so as to improve the sensitivity of the flexible capacitive sensor compared with a solid structure. Meanwhile, the flexible bulges 2 are arranged, so that the holes 5 are formed between the adjacent flexible bulges 2, and under the condition of the same stress, air in the holes 5 is extruded out, so that the dielectric constant of the flexible insulating layer is changed, and the sensitivity of the flexible capacitance sensor is improved.
As a realizable way, in order to increase the amount of deformation of the flexible insulating layer when subjected to the same force, to further increase the sensitivity of the flexible capacitive sensor, the flexible protrusions 2 between the different faces are staggered.
The staggered arrangement means that the flexible protrusions 2 on both sides of the flexible substrate 3 are offset, i.e. the flexible protrusions 2 on one side correspond to the apertures 5 on the other side. In addition to the flexible protrusions 2 on different sides being offset, the flexible protrusions 2 on different rows or columns on the same side may also be offset.
As realizable manner, the flexible projection 2 is at least any one of a cube, a rectangular parallelepiped, a cylinder, a polygonal prism, a circular truncated cone, a spherical cap, and a truncated cone.
For example, in the embodiment shown in fig. 2, the flexible protrusions 2 provided on the flexible substrate 3 are cubic, and in the embodiment shown in fig. 3, the flexible protrusions 2 provided on the flexible substrate 3 are cylindrical.
As an realizable manner, the first flexible electrode layer 1 is any one of a conductive rubber layer, a conductive silicone layer, and a conductive paper; and/or the presence of a gas in the gas,
the second flexible electrode layer 4 is any one of a conductive rubber layer, a conductive silicone layer, and conductive paper.
The conductive rubber layer is a conductive rubber film made of conductive rubber through a film forming process, and the conductive rubber is formed by doping a certain amount of metal powder into the rubber so that the metal powder is changed from an insulator into a conductor, and the resistivity of the conductive rubber can be changed by changing the amount of the added metal powder.
The conductive silica gel layer is a conductive silica gel film made of conductive silica gel through a film forming process, and the conductive silica gel is formed by doping a certain amount of metal powder into silica gel so that the silica gel is changed from an insulator into a conductor, and the resistivity of the conductive silica gel layer can be changed by changing the amount of the added metal powder.
The conductive paper contains nano silver, carbon nano tube and other materials in base paper, so that the base paper has conductivity. The conductive paper is prepared, for example, but not limited to, by providing two filter membranes, for example, PVDF (Polyvinylidene Fluoride) filter membranes, pouring a Nano Fibrillated Cellulose (NFC) dispersion and tetramethylpiperidine nitroxide (TEMPO) onto one of the PVDF filter membranes in sequence, filtering through the PVDF filter membrane to form a thin layer structure on the PVDF filter membrane, filtering through the other PVDF filter membrane to form a nano silver thin layer structure, attaching the two PVDF filter membranes to each other to attach the two filtered thin layer structures together, and then performing a drying process, wherein the two thin layer structures are diffused and fused together during the drying process to form the single-structure conductive paper.
As an implementable manner, the flexible insulating layer is any one of a rubber layer, a silicone rubber layer, and a polydimethylsiloxane layer.
In a practical manner, the thickness of the flexible protrusions 2 is 5-10 μm.
As a practical matter, the thickness of the flexible substrate 3 is 10 to 20 μm.
As a practical way, the flexible protrusions 2 are formed by screen printing or embossing.
In a preferred implementation, the flexible insulating layer is made of polydimethylsiloxane, for example, but not limited to, the flexible insulating layer can be formed by screen printing. Polydimethylsiloxane has good flexibility and elasticity.
Firstly, preparing polydimethylsiloxane liquid according to a certain mass ratio of a precursor to a cross-linking agent, for example, the mass ratio is 10: 1; then vacuuming for a certain time (such as 10min) at room temperature to remove air bubbles in the polydimethylsiloxane liquid; then printing the polydimethylsiloxane liquid on the conductive paper through silk screen printing, heating for a certain time (such as heating for 10s at 150 ℃), then cooling to solidify and removing the silk screen template at room temperature to form the flexible bump 2, and in addition, forming the flexible substrate by coating, printing and the like by adopting the polydimethylsiloxane liquid. After the flexible bumps 2 are formed on the conductive paper, the surfaces of the two pieces of conductive paper on which the flexible bumps 2 are formed are attached to each other in an opposite manner, and the flexible substrate is sandwiched between the two layers of flexible bumps 2.
In a second aspect, the present invention provides a pressure measuring device, including the above-mentioned flexible capacitance sensor.
The first flexible electrode layer 1 and the second flexible electrode layer 4 of the flexible capacitance sensor are respectively connected with a lead and other components to form a pressure measuring device. The principle of pressure measurement is to determine different pressures based on the difference in capacitance values. For example, a mapping relation between a calibrated capacitance value and pressure is preselected, and the magnitude of the pressure is determined through the capacitance change of the flexible capacitance sensor.
It will be understood that any reference to the above orientation or positional relationship as indicated by the terms "central," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," etc., is intended to be based on the orientation or positional relationship shown in the drawings and is for convenience in describing and simplifying the invention, and does not indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and is therefore not to be considered as limiting. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be understood by those skilled in the art that the scope of the present invention is not limited to the specific combination of the above-mentioned features, but also covers other embodiments formed by any combination of the above-mentioned features or their equivalents without departing from the spirit of the present invention. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.
Claims (10)
1. A flexible capacitance sensor is characterized by comprising a first flexible electrode layer, a flexible insulating layer and a second flexible electrode layer which are sequentially stacked;
the first flexible electrode layer and the second flexible electrode layer are of single structures;
the flexible insulating layer is provided with a plurality of apertures for increasing the flexibility of the flexible insulating layer.
2. The flexible capacitive sensor of claim 1, wherein the flexible insulating layer comprises at least one flexible substrate, a plurality of flexible protrusions are disposed on two sides of the flexible substrate, the flexible protrusions are spaced apart from each other, and the gaps between the flexible protrusions disposed on the same side are the apertures.
3. The flexible capacitive sensor of claim 2, wherein the flexible projections between different faces are staggered; and/or the presence of a gas in the gas,
the flexible bulges in different rows or different columns on the same surface are arranged in a staggered way.
4. The flexible capacitive sensor of claim 2 or 3 wherein the flexible projections are at least any one of cubes, cuboids, cylinders, polygonal prisms, truncated cones, spherical caps and truncated cones.
5. The flexible capacitive sensor of any of claims 1-3, wherein the first flexible electrode layer is any of a conductive rubber layer, a conductive silicone layer, and a conductive paper; and/or the presence of a gas in the gas,
the second flexible electrode layer is any one of a conductive rubber layer, a conductive silica gel layer and conductive paper.
6. The flexible capacitive sensor of any of claims 1-3, wherein the flexible insulating layer is any of a rubber layer, a silicone layer, and a polydimethylsiloxane layer.
7. A flexible capacitive sensor according to claim 2 or 3, wherein the flexible projections have a thickness of 5-10 μm.
8. The flexible capacitive sensor of claim 2 or 3, wherein the flexible substrate has a thickness of 10-20 μm.
9. The flexible capacitive sensor of claim 2 or 3, wherein the flexible projections are formed by screen printing or stamping.
10. A pressure measuring device comprising a flexible capacitive sensor according to any one of claims 1 to 9.
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| CN201922293520.7U CN210689875U (en) | 2019-12-18 | 2019-12-18 | Flexible capacitive sensor and pressure measuring device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112556896A (en) * | 2020-12-10 | 2021-03-26 | 中国空间技术研究院 | Flexible pressure sensitive layer, pressure sensor, wearable electronic device and preparation method |
| CN112904247A (en) * | 2021-01-15 | 2021-06-04 | 维沃移动通信有限公司 | Alternating magnetic field sensor and electronic device |
| CN113280955A (en) * | 2021-05-11 | 2021-08-20 | 华中科技大学 | Flexible sensor with tangential force anisotropic response and preparation method thereof |
| US20210278300A1 (en) * | 2018-07-10 | 2021-09-09 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive and tactile sensors and related sensing methods |
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2019
- 2019-12-18 CN CN201922293520.7U patent/CN210689875U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20210278300A1 (en) * | 2018-07-10 | 2021-09-09 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive and tactile sensors and related sensing methods |
| US11946821B2 (en) * | 2018-07-10 | 2024-04-02 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive and tactile sensors and related sensing methods |
| CN112556896A (en) * | 2020-12-10 | 2021-03-26 | 中国空间技术研究院 | Flexible pressure sensitive layer, pressure sensor, wearable electronic device and preparation method |
| CN112904247A (en) * | 2021-01-15 | 2021-06-04 | 维沃移动通信有限公司 | Alternating magnetic field sensor and electronic device |
| CN113280955A (en) * | 2021-05-11 | 2021-08-20 | 华中科技大学 | Flexible sensor with tangential force anisotropic response and preparation method thereof |
| CN113280955B (en) * | 2021-05-11 | 2022-07-05 | 华中科技大学 | Flexible sensor with tangential force anisotropic response and preparation method thereof |
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