CN210624931U - Ultra-high temperature oil temperature machine with cooling control - Google Patents
Ultra-high temperature oil temperature machine with cooling control Download PDFInfo
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- CN210624931U CN210624931U CN201921516564.5U CN201921516564U CN210624931U CN 210624931 U CN210624931 U CN 210624931U CN 201921516564 U CN201921516564 U CN 201921516564U CN 210624931 U CN210624931 U CN 210624931U
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Abstract
The utility model discloses a take ultra-high temperature oil temperature machine of cooling control, it is including the circulation pumping installations who forms circulation circuit, organic heat carrier heater, the customer end, organic heat carrier heater's output side is provided with the proportion three-way valve and divides first pipeline and second pipeline two ways to communicate to in the customer end, the conduction oil that is provided with on the second pipeline in heat exchanger and the second pipeline carries out the heat exchange through this heat exchanger and a cooling cycle unit, be provided with the gas collecting tank on the time oil pipe of customer end and circulation pumping installations intercommunication, circulation pumping installations's input is through mending oily union coupling high-order expansion tank, high-order expansion tank connects a low level oil storage tank through first notes oil pipe, be provided with the oiling pump between low level oil storage tank and the first notes oil pipe, the output of oiling pump is provided with and arranges oil pipe and its input and is provided with always to manage. The utility model discloses temperature stability is good, and system control precision is high and can realize the control in the great temperature range.
Description
[ technical field ] A method for producing a semiconductor device
The utility model belongs to the technical field of the temperature control equipment, especially, relate to a take ultra-high temperature oil temperature machine of cooling control.
[ background of the invention ]
The temperature control is widely applied in modern manufacturing industry and applied in the field of temperature control, and an oil circulation temperature control system is an important component of a temperature control system. The temperature control is widely applied in modern manufacturing industry and applied in the field of temperature control, an oil circulation temperature control system is an important component of a temperature control system, the maximum temperature of the existing oil temperature machine is generally 280 ℃, and higher temperature is needed in some special industries. The oil temperature machine in the prior art has the following disadvantages: 1. the temperature is low, and is generally controlled to 280 ℃. 2. The device lacks a cooling function or a separate cooling system for cooling, not communicating with the heating system.
Therefore, a new ultra-high temperature oil temperature machine with cooling control is needed to solve the above problems.
[ Utility model ] content
An object of the utility model is to provide a take ultra-high temperature oil temperature machine of cooling control, temperature stability is good, and the control in the great temperature range is just can be realized to the system control precision height, satisfies more temperature control demands.
The utility model discloses a following technical scheme realizes above-mentioned purpose: an ultrahigh-temperature oil temperature machine with cooling control comprises a circulating pumping device, an organic heat carrier furnace and a client which are connected into a circulating loop through pipelines, wherein a proportional three-way valve is arranged on the output side of the organic heat carrier furnace and is communicated into the client in a first pipeline and a second pipeline in a two-way mode, a heat exchanger is arranged on the second pipeline, heat transfer oil in the second pipeline is subjected to heat exchange with a cooling circulating unit through the heat exchanger, the heat transfer oil in the client returns to the circulating pumping device through an oil return pipe, a gas collecting tank is arranged on the oil return pipe, the input end of the circulating pumping device is connected with a high-position expansion tank through an oil supplementing pipe, the high-position expansion tank is connected with a low-position oil storage tank through a first oil filling pipe, and an oil filling pump for conveying the heat transfer oil into the first oil filling pipe is arranged between the low-position oil storage tank and the first oil filling, the output of oiling pump is provided with always arranges oil pipe and its input is provided with always annotates oil pipe.
Furthermore, the circulating pumping device and the pipeline communicated with the organic heat carrier furnace are provided with a first pressure meter and a first pressure switch, and the organic heat carrier furnace and the proportional three-way valve are provided with a second pressure switch, a second pressure meter and a pressure transmitter on the communication pipeline.
Furthermore, a first stop valve is arranged on a pipeline through which the proportional three-way valve is communicated with the heat exchanger, and is used for controlling the conduction and the blockage of the second pipeline.
Furthermore, the first pipeline and the second pipeline are converged and then input into the client, and a first temperature sensing probe and a second stop valve are arranged on a converging pipeline;
and a third stop valve, a second temperature sensing probe and a pressure gauge are arranged at the output end of the client end on the oil return pipe.
Further, a first exhaust pipe is connected between the gas collection tank and the high-level expansion tank; and the input end of the client is communicated with the high-level expansion tank through a second exhaust pipe.
Further, be provided with level sensor, pressure sensor on the high-order expansion tank, and still be provided with nitrogen gas tube and blast pipe, be provided with first solenoid valve on the nitrogen gas tube and, be provided with the second solenoid valve on the blast pipe.
Furthermore, a drain pipe communicated with the low-position oil storage tank is arranged at the lower end of the high-position expansion tank, and a seventh stop valve is arranged on the drain pipe.
Furthermore, a first oil discharge pipe communicated with the main oil discharge pipe is arranged on the upstream of the circulating pumping device of the oil return pipe, and an eighth stop valve is arranged on the first oil discharge pipe; the second pipeline is located the input of heat exchanger is provided with the intercommunication the second oil extraction pipe of total oil extraction pipe, be provided with the ninth stop valve on the second oil extraction pipe.
Furthermore, the first oil discharge pipe and the second oil discharge pipe are divided into two paths after being gathered, wherein one path is communicated to the main oil discharge pipe through a third pipeline, the other path is communicated to the input end of the oil injection pump through a fourth pipeline, and the lower end of the low-level oil storage tank is communicated with the fourth pipeline through a pipeline; the main oil discharge pipe is provided with a tenth stop valve, the main oil injection pipe is provided with an eleventh stop valve, and the third pipeline is provided with a twelfth stop valve.
Furthermore, the output end of the oil injection pump is provided with a second oil injection pipe communicated with the low-position oil storage tank, and a thirteenth stop valve is arranged on the second oil injection pipe.
Compared with the prior art, the utility model relates to a take ultra-temperature oil temperature machine of cooling control's beneficial effect lies in: the testing temperature is controllable, and the highest temperature reaches 400 ℃; the temperature stability is good.
[ description of the drawings ]
Fig. 1 is a schematic diagram of a system control according to an embodiment of the present invention;
the figures in the drawings represent:
100 ultrahigh temperature oil temperature machines with cooling control; 101, a client;
1 circulating pumping device; 2 an organic heat carrier furnace; 3, a proportional three-way valve; 4 a first conduit; 5 a second conduit; 6, a heat exchanger; 7 an oil return pipe; 8, a gas collection tank; 9, supplementing an oil pipe; 10 high-level expansion tank; 11 a first filler pipe; 12 a low-level oil storage tank; 13 an oil injection pump; 14 circulating pump; 15 a stop valve; 16 a first pressure gauge; 17 a first pressure switch; 18 a second pressure switch; 19 a second pressure gauge; 20 a pressure transmitter; 21 a first stop valve; 22 a first temperature sensitive probe; 23 a second stop valve; 24 a third stop valve; 25 a second temperature sensing probe; 26 pressure gauge; 27 a system bypass line; 28 a fourth stop valve; 29 a first exhaust pipe; 30 a second exhaust pipe; 31 a cooling water inlet pipe; 32 a cooling water outlet pipe; 33 a fifth stop valve; 34 sampling a cooling device; 35 a sixth stop valve; 36 a liquid level sensor; 37 a pressure sensor; 38 a first solenoid valve; 39 a one-way valve; 40 a second solenoid valve; 41 a sewage discharge pipe; 42 a seventh stop valve; 43 general oil drain pipe; 44 main filler pipe; 45 first oil drain pipe; 46 an eighth stop valve; 47 a second oil drain pipe; 48 ninth stop valve; 49 a third conduit; 50 a fourth conduit; 51 tenth stop valve; an eleventh stop valve 52; 53 twelfth stop valve; 54 a second filler pipe; 55 a thirteenth stop valve; 56 a fourteenth stop valve; 57 fifteenth stop valve.
[ detailed description ] embodiments
Example (b):
referring to fig. 1, the present embodiment is an ultra-high temperature oil temperature machine 100 with cooling control, which includes a circulating pumping device 1, an organic heat carrier furnace 2, and a client 101 connected to form a circulating loop through pipes, wherein an output side of the organic heat carrier furnace 2 is provided with a proportional three-way valve 3, the proportional three-way valve is divided into a first pipe 4 and a second pipe 5, the first pipe 4 and the second pipe 5 are communicated to the client 101, the second pipe 5 is provided with a heat exchanger 6, heat transfer oil in the second pipe 5 is subjected to heat exchange with a cooling circulating unit (not identified in the figure) through the heat exchanger 6, heat transfer oil in the client 101 is returned to the circulating pumping device 1 through an oil return pipe 7, the oil return pipe 7 is provided with a gas collecting tank 8, an input end of the circulating pumping device 1 is connected with a high-level expansion tank 10 through an oil supplementing pipe 9, the high-level expansion tank 10 is connected with a low-level oil storage tank 12 through a first oil injection pipe 11, and an oil injection pump.
The first filler pipe 11 is provided with a fifteenth shutoff valve 57.
The circulating pumping device 1 comprises two groups of circulating pumps 14 which are arranged in parallel, and the input end and the output end of each circulating pump 14 are provided with stop valves 15. Two 14 normal use of circulating pump, another as reserve to when the circulating pump breaks down, can start the stand-by pump and work, the normal operating of guarantee system, and close through stop valve 15 around the circulating pump that will break down, conveniently demolish the maintenance to this circulating pump.
A first pressure gauge 16 and a first pressure switch 17 are arranged on a pipeline of the circulating pumping device 1 communicated with the organic heat carrier furnace 2, and a second pressure switch 18, a second pressure gauge 19 and a pressure transmitter 20 are arranged on a pipeline of the organic heat carrier furnace 2 communicated with the proportional three-way valve 3. The pressure transmitter 20 is used for detecting the pressure at the outlet of the system and monitoring the pressure at the outlet of the equipment in real time, because the ultra-high temperature machine type needs to pressurize nitrogen at about 220 ℃ according to the characteristics of high-temperature heat conducting oil, and because the pressure is increased according to the temperature and the nitrogen pressure is continuously increased, the monitoring of the pressure at the outlet is necessary to change in real time.
A first stop valve 21 is arranged on a pipeline for communicating the proportional three-way valve 3 with the heat exchanger 6 and is used for controlling the conduction and the blockage of the second pipeline 5.
The first pipeline 4 and the second pipeline 5 are collected and input into the client 101, and a first temperature sensing probe 22 and a second stop valve 23 are arranged on a collecting pipeline.
The output end of the oil return pipe 7 at the client 101 is provided with a third stop valve 24, a second temperature sensing probe 25 and a pressure gauge 26.
The present embodiment further includes a system bypass pipe 27 directly connecting the collecting pipe and the oil return pipe 7, and a fourth stop valve 28 is disposed on the system bypass pipe 27.
A first exhaust pipe 29 is connected between the gas collecting tank 8 and the high-level expansion tank 10; the input end of the client 101 is communicated with the high-level expansion tank 10 through a second exhaust pipe 30. The fourteenth stop valve 56 is arranged on the second exhaust pipe 30, the second exhaust pipe 30 flows from the fourteenth stop valve 56 to the high-level expansion tank 10, when the outlet temperature reaches 120 ℃, the operation of dehydrating the system heat transfer oil (discharging water vapor in the heat transfer oil) needs to be performed, and when the outlet temperature reaches 180 ℃ and 200 ℃, the effect of removing light components (discharging light distillates in the heat transfer oil) needs to be performed continuously.
The cooling circulation unit comprises a cooling water inlet pipe 31 and a cooling water outlet pipe 32 which flow through the heat exchanger 6, and a fifth stop valve 33 is arranged on the cooling water inlet pipe 31 to control the circulation and the blocking of the cooling water in the cooling circulation unit.
The bottom of the gas collecting tank 8 is also connected with a sampling cooling device 34 through a pipeline, and a sixth stop valve 35 is arranged on the communicating pipeline. The heat transfer oil has the possibility of coking and deterioration after running for a period of time, so a sampling cooling device 34 is needed, and the heat transfer oil of the system can be sampled and detected when needed to confirm whether the heat transfer oil is normal or not.
Be provided with level sensor 36, pressure sensor 37 on the high-order expansion tank 10, and still be provided with nitrogen gas charge pipe and blast pipe, be provided with first solenoid valve 38 and check valve 39 on the nitrogen gas charge pipe, because when the system moves 400 degrees centigrade, the characteristic of conduction oil needs to carry out nitrogen gas pressurization to the conduction oil to make the conduction oil still be liquid state, can not gasify, and this nitrogen pressure can be up to 1.5MPa, and so high pressure, the solenoid valve is reverse can not bear, consequently needs the check valve to hold back pressure. A second solenoid valve 40 is provided on the exhaust pipe. The lower end of the high-level expansion tank 10 is provided with a sewage draining pipe 41 communicated with the low-level oil storage tank 12, and the sewage draining pipe 41 is provided with a seventh stop valve 42.
The present embodiment further includes a main oil discharge pipe 43 provided at the output side of the oil pump 13, and a main oil fill pipe 44 provided at the input side of the oil pump 13. The oil return pipe 7 is provided with a first oil discharge pipe 45 communicated with the main oil discharge pipe 43 at the upstream of the circulating pumping device 1, and the first oil discharge pipe 45 is provided with an eighth stop valve 46. A second oil discharge pipe 47 communicated with the main oil discharge pipe 43 is arranged at the input end of the heat exchanger 6 on the second pipeline 5, and a ninth stop valve 48 is arranged on the second oil discharge pipe 47. The first oil discharge pipe 45 and the second oil discharge pipe 47 are collected and divided into two paths, wherein one path is communicated to the main oil discharge pipe 43 through a third pipeline 49, and the other path is communicated to the input end of the oil injection pump 13 through a fourth pipeline 50. The lower end of the low-level reservoir 12 communicates with the fourth pipe 50 through a pipe.
A tenth shutoff valve 51 is provided in the main oil discharge pipe 43, an eleventh shutoff valve 52 is provided in the main oil feed pipe 44, and a twelfth shutoff valve 53 is provided in the third pipe 49.
The output end of the oil filling pump 13 is provided with a second oil filling pipe 54 communicated with the low-level oil storage tank 12, and the second oil filling pipe 54 is provided with a thirteenth cut-off valve 55. A liquid level sensor is arranged in the low-level oil storage tank 12.
The heat exchanger 6 is a spiral plate heat exchanger with an expansion joint in its housing.
When the ultra-high temperature oil temperature machine 100 with cooling control works, the circulating pump 14 runs to circulate heat conducting oil, the organic heat carrier furnace 2 is used for heating, and the temperature at the outlet of the equipment is controlled through monitoring data of the first temperature sensing probe 22 and the second temperature sensing probe 25; when heating and temperature rising are needed, the proportional three-way valve 3 is normally opened horizontally to carry out circulating heating, when cooling and temperature lowering are needed, the proportional three-way valve 3 is opened vertically, hot oil is indirectly cooled by cooling water through the heat exchanger 6, and a system is cooled circularly; because of the characteristics of the heat conduction oil, the heat conduction oil with the temperature of 400 ℃ can be gasified when being used at high temperature, so that nitrogen pressurization is needed, and the pressure is greater than the steam pressure of the gasification of the heat conduction oil, so that the heat conduction oil is in a liquid state, and the air pressure in a circulating system is reduced; when inflation is required, opening the first electromagnetic valve 38 and the second electromagnetic valve 40, delaying for a period of time, emptying the air in the high-level expansion tank 10, then closing the second electromagnetic valve 40, detecting the pressure in the high-level expansion tank 10 by the pressure sensor 37, and closing the first electromagnetic valve 38 when the required pressure is reached; when the exhaust is needed, the second electromagnetic valve 40 is opened; when oil is needed to be supplemented, heat conduction oil is supplemented to the inlet of the circulating pump through the pipe 9; when oil is needed to be filled, the heat conduction oil in the low-level oil storage tank 12 is supplemented to the high-level expansion tank 10 through the pipe 11 by the oil filling pump 13.
The testing temperature of the ultra-high temperature oil temperature machine 100 with cooling control is controllable, the highest temperature reaches 400 ℃, heat conducting oil in the system is in a liquid state through nitrogen pressurization, the temperature and the pressure are monitored in multiple stages, the system is in a stable state, the pressure and the temperature are stable when the temperature is increased, meanwhile, proper pressure and materials are selected for a pipeline and accessories in the system, and the system cannot have safety problems due to high temperature and high pressure; the process requirements in a larger temperature range can be met; heating and cooling are controlled in the same system, the temperature stability is good, and the temperature can be controlled to be +/-1 ℃; because the cold and hot reactions are violent when the temperature is cooled, the scheme adopts the spiral plate type heat exchanger and the shell is provided with the expansion joint, so that the impact of the cold and hot reactions on the hot oil circulating system is reduced; in order to prevent violent cold and hot reactions during cooling, the scheme adopts a spiral tube type (U-shaped tube type) heat exchanger, and the shell is provided with an expansion joint, so that the impact of the cold and hot reactions on a hot oil circulating system is reduced; in order to prevent violent cold and hot reactions during cooling, the scheme further controls the proportional valve step by step, and controls the opening of the proportional valve during cooling, so that the temperature and the pressure of a part of the cooling water are in a low-temperature and low-pressure controllable range, the gasification danger of high-pressure steam cannot be caused, the temperature reduction rate is controlled, the influence of cold and hot heat exchange on pipeline materials is reduced, and the service life of the pipeline is shortened; the valve controls the output opening at high temperature to slow down the cooling rate.
What has been described above are only some embodiments of the invention. For those skilled in the art, without departing from the inventive concept, several modifications and improvements can be made, which are within the scope of the invention.
Claims (10)
1. The utility model provides a take cooling control's ultra-high temperature oil temperature machine which characterized in that: which comprises a circulating pumping device, an organic heat carrier furnace and a client end which are connected into a circulating loop through pipelines, the output side of the organic heat carrier furnace is provided with a proportional three-way valve which is divided into a first pipeline and a second pipeline which are communicated into the client side, the second pipeline is provided with a heat exchanger, heat conducting oil in the second pipeline exchanges heat with a cooling circulation unit through the heat exchanger, the heat conducting oil in the client returns to the circulating pumping device through an oil return pipe, a gas collecting tank is arranged on the oil return pipe, the input end of the circulating pumping device is connected with a high-level expansion tank through an oil supplementing pipe, the high-level expansion tank is connected with a low-level oil storage tank through a first oil filling pipe, an oil injection pump for conveying heat conduction oil into the first oil injection pipe is arranged between the low-level oil storage tank and the first oil injection pipe, the output of oiling pump is provided with always arranges oil pipe and its input is provided with always annotates oil pipe.
2. The ultra-high temperature oil temperature machine with cooling control as claimed in claim 1, characterized in that: the circulating pumping device and the organic heat carrier furnace are provided with a first pressure gauge and a first pressure switch on a pipeline, and the organic heat carrier furnace and the proportional three-way valve are provided with a second pressure switch, a second pressure gauge and a pressure transmitter on a communicating pipeline.
3. The ultra-high temperature oil temperature machine with cooling control as claimed in claim 1, characterized in that: and a first stop valve is arranged on a pipeline for communicating the proportional three-way valve with the heat exchanger and is used for controlling the conduction and the blockage of the second pipeline.
4. The ultra-high temperature oil temperature machine with cooling control as claimed in claim 1, characterized in that: the first pipeline and the second pipeline are converged and then input into the client, and a first temperature sensing probe and a second stop valve are arranged on a converging pipeline;
and a third stop valve, a second temperature sensing probe and a pressure gauge are arranged at the output end of the client end on the oil return pipe.
5. The ultra-high temperature oil temperature machine with cooling control as claimed in claim 1, characterized in that: a first exhaust pipe is connected between the gas collection tank and the high-level expansion tank; and the input end of the client is communicated with the high-level expansion tank through a second exhaust pipe.
6. The ultra-high temperature oil temperature machine with cooling control as claimed in claim 1, characterized in that: the high-level expansion tank is provided with a liquid level sensor, a pressure sensor, a nitrogen gas inflation tube and an exhaust tube, the nitrogen gas inflation tube is provided with a first electromagnetic valve, and the exhaust tube is provided with a second electromagnetic valve.
7. The ultra-high temperature oil temperature machine with cooling control as claimed in claim 1, characterized in that: and a drain pipe communicated with the low-position oil storage tank is arranged at the lower end of the high-position expansion tank, and a seventh stop valve is arranged on the drain pipe.
8. The ultra-high temperature oil temperature machine with cooling control as claimed in claim 1, characterized in that: a first oil discharge pipe communicated with the main oil discharge pipe is arranged on the upstream of the circulating pumping device of the oil return pipe, and an eighth stop valve is arranged on the first oil discharge pipe; the second pipeline is located the input of heat exchanger is provided with the intercommunication the second oil extraction pipe of total oil extraction pipe, be provided with the ninth stop valve on the second oil extraction pipe.
9. The ultra-high temperature oil temperature machine with cooling control of claim 8, characterized in that: the first oil discharge pipe and the second oil discharge pipe are divided into two paths after being gathered, wherein one path is communicated to the main oil discharge pipe through a third pipeline, the other path is communicated to the input end of the oil injection pump through a fourth pipeline, and the lower end of the low-level oil storage tank is communicated with the fourth pipeline through a pipeline; the main oil discharge pipe is provided with a tenth stop valve, the main oil injection pipe is provided with an eleventh stop valve, and the third pipeline is provided with a twelfth stop valve.
10. The ultra-high temperature oil temperature machine with cooling control of claim 9, characterized in that: the output of oiling pump is provided with the intercommunication the second oiling pipe of low-order oil storage tank, be provided with the thirteenth stop valve on the second oiling pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921516564.5U CN210624931U (en) | 2019-09-12 | 2019-09-12 | Ultra-high temperature oil temperature machine with cooling control |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921516564.5U CN210624931U (en) | 2019-09-12 | 2019-09-12 | Ultra-high temperature oil temperature machine with cooling control |
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| CN210624931U true CN210624931U (en) | 2020-05-26 |
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| CN201921516564.5U Active CN210624931U (en) | 2019-09-12 | 2019-09-12 | Ultra-high temperature oil temperature machine with cooling control |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110542210A (en) * | 2019-09-12 | 2019-12-06 | 苏州奥德机械有限公司 | Ultra-high temperature oil temperature machine with cooling control |
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2019
- 2019-09-12 CN CN201921516564.5U patent/CN210624931U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110542210A (en) * | 2019-09-12 | 2019-12-06 | 苏州奥德机械有限公司 | Ultra-high temperature oil temperature machine with cooling control |
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Address after: Room 3 and 4, 228 Wulian Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Suzhou Aode high end equipment Co.,Ltd. Address before: Room 3 and 4, 228 Wulian Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: SUZHOU AODE MACHINERY Co.,Ltd. |