CN210607544U - Vacuum ceramic microwave window - Google Patents
Vacuum ceramic microwave window Download PDFInfo
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- CN210607544U CN210607544U CN201921822854.2U CN201921822854U CN210607544U CN 210607544 U CN210607544 U CN 210607544U CN 201921822854 U CN201921822854 U CN 201921822854U CN 210607544 U CN210607544 U CN 210607544U
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- potsherd
- mounting flange
- boss
- microwave window
- vacuum
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Abstract
The utility model discloses a vacuum ceramic microwave window, including the potsherd, mounting flange has been cup jointed to the potsherd outer fringe, mounting flange is close to the inboard of potsherd is close to the protruding boss that forms of direction of potsherd, the potsherd with boss fixed connection, be equipped with in the mounting flange and encircle the cooling water course of potsherd, this application is through at potsherd outer fringe fixedly connected with mounting flange to set up the cooling water course in mounting flange, the circulating cooling water in the cooling water course can effectually take the heat on the potsherd, has avoided the potsherd to pass the emergence that leads to the broken phenomenon of potsherd because of the microwave, in addition, carries out effectual cooling to the potsherd and can also very big reduction potsherd surface gas discharge, has improved microwave.
Description
Technical Field
The utility model relates to a microwave transmission technical field specifically is a vacuum ceramic microwave window.
Background
The microwave window is an important component of a high-power microwave system, separates vacuum from atmosphere, enables microwaves to pass through without reflection, and directly influences the vacuum sealing and microwave feed-in quantity of the system and further directly influences the reliability of the system due to the performance of the microwave window. With the continuous improvement of microwave power, in the microwave transmission process, a microwave feed-in window is more and more easily broken down, so that the transmission line performance such as vacuum sealing is further influenced.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a vacuum ceramic microwave window to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides a vacuum ceramic microwave window, includes the potsherd, mounting flange has been cup jointed to the potsherd outer fringe, mounting flange is close to the inboard lateral approach of potsherd the protruding boss that forms of direction of potsherd, the potsherd with boss fixed connection, be equipped with in the mounting flange and encircle the cooling water course of potsherd.
As a further aspect of the present invention: the mounting flange is of an upper end opening structure, and a water channel cover plate is welded at an upper end opening of the mounting flange in a sealing mode.
As a further aspect of the present invention: the boss is located the middle part of mounting flange thickness direction, the boss with the middle part position fixed connection of potsherd thickness direction.
As a further aspect of the present invention: the thickness of the boss is 0.8-1.2mm, and the width of the boss is 1-2 mm.
As a further aspect of the present invention: the mounting flange is made of kovar alloy.
As a further aspect of the present invention: and the end surface of the ceramic plate, which is close to the mounting flange, is provided with a metallization treatment layer.
As a further aspect of the present invention: the mounting flange is connected with the ceramic chip in a sealing and vacuum brazing mode.
As a further aspect of the present invention: a water inlet and a water outlet are formed in the mounting flange, and the water inlet and the water outlet are hermetically welded with a quick-connection water nozzle.
As a further aspect of the present invention: the water inlet and the water outlet are coaxially arranged, and the axes of the water inlet and the water outlet pass through the circle center of the ceramic chip.
Compared with the prior art, the beneficial effects of the utility model are that:
1. according to the ceramic wafer cooling system, the mounting flange is fixedly connected to the outer edge of the ceramic wafer, and the cooling water channel is arranged in the mounting flange, so that the heat on the ceramic wafer can be effectively taken away by circulating cooling water in the cooling water channel, the phenomenon that the ceramic wafer is broken due to the fact that microwaves penetrate through the ceramic wafer to generate heat is avoided, in addition, the gas discharge on the surface of the ceramic wafer can be greatly reduced by effectively cooling the ceramic wafer, and the safety performance of the system is improved;
2. the mounting flange of this application adopts kovar alloy to carry out metallization processing at the face that the potsherd is connected with the mounting flange, the material thermal expansion coefficient of potsherd and mounting flange is close, and in vacuum brazing's welding cooling process, welding stress is less, has improved the welded yield.
Drawings
FIG. 1 is a sectional view of the present embodiment;
FIG. 2 is a cross-sectional view of the mounting flange of the present embodiment;
fig. 3 is a schematic perspective view of the present embodiment.
In the figure: 1-ceramic chip, 2-mounting flange, 21-cooling water channel, 22-boss, 3-quick-connecting water nozzle and 4-water channel cover plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Example 1
Referring to fig. 1-3, in an embodiment of the present invention, a vacuum ceramic microwave window includes a ceramic plate 1, the ceramic plate 1 is a circular structure, and the ceramic plate 1 is Al2O3The material is that the mounting flange 2 is sleeved on the outer edge of the ceramic wafer 1, the mounting flange 2 is kover alloy (kovar alloy), the circumferential surface of one end of the ceramic wafer 1 close to the mounting flange 2 is metalized, the inner side of the mounting flange 2 close to the ceramic wafer 1 protrudes towards the direction close to the ceramic wafer 1 to form a boss 22, the boss 22 is located at the central position of the thickness direction of the mounting flange 2, the thickness of the boss 22 is 0.8mm, the width of the boss 22 is 1mm, the ceramic wafer 1 is fixedly connected with the boss 22, the boss 22 is connected with the center of the thickness direction of the ceramic wafer 1, because the ring surface of the ceramic wafer 1 close to the boss 22 is metalized, when the boss 22 is in vacuum brazing with the ceramic wafer 1, the expansion coefficient of the kover alloy is close to that of the.
The mounting flange 2 is internally provided with a cooling water channel 21 surrounding the ceramic plate 1, the upper end of the cooling water channel 21 of the mounting flange 2 is of an open structure, the opening is hermetically welded with a water channel cover plate 4, and the water channel cover plate 4 is made of stainless steel and is hermetically welded with the mounting flange 2 through argon arc welding.
The mounting flange 2 is provided with a water inlet and a water outlet, the water inlet and the water outlet are communicated with a cooling water channel 21 in the mounting flange 2, the water inlet and the water outlet are coaxially arranged, the axes of the water inlet and the water outlet penetrate through the circle center of the ceramic wafer 1, namely the water inlet and the water outlet are respectively arranged on two sides of the mounting flange 2, the water inlet and the water outlet are hermetically welded with a quick-connection water nozzle 3, and the cooling water channel 21 of the mounting flange 2 is connected with a circulating water system through the quick-connection water nozzle.
The utility model discloses when using, install the ceramic window of this application in microwave transmission system, the microwave that generally is the vacuum cavity is presented the mouth, water inlet and delivery port on mounting flange 2 are connected through the cooling system who connects water injection well choke 3 with microwave transmission system soon respectively, and then for providing recirculated cooling water in the cooling water course 21, in the use, the microwave passes through potsherd 1, can lead to potsherd 1 temperature to rise, and then form the temperature difference between potsherd 1 and mounting flange 2, then order about down at the temperature difference, the heat takes place the conduction, reach boss 22 from potsherd 1, mounting flange 2, arrive in the cooling water course 21 at last and take out for the recirculated cooling water in the cooling water course 21, the intensification of potsherd 1 has been suppressed, the security performance of potsherd 1 has been improved.
Example 2
Referring to fig. 1-3, in an embodiment of the present invention, a vacuum ceramic microwave window includes a ceramic plate 1, the ceramic plate 1 is a circular structure, and the ceramic plate 1 is Al2O3The material is that the mounting flange 2 is sleeved on the outer edge of the ceramic wafer 1, the mounting flange 2 is kover alloy (kovar alloy), the circumferential surface of one end of the ceramic wafer 1 close to the mounting flange 2 is metalized, the inner side of the mounting flange 2 close to the ceramic wafer 1 protrudes towards the direction close to the ceramic wafer 1 to form a boss 22, the boss 22 is located at the central position of the thickness direction of the mounting flange 2, the thickness of the boss 22 is 1.2mm, the width of the boss 22 is 2mm, the ceramic wafer 1 is fixedly connected with the boss 22, the boss 22 is connected with the center of the thickness direction of the ceramic wafer 1, because the ring surface of the ceramic wafer 1 close to the boss 22 is metalized, the boss 22 is fixedly connected with the ceramic wafer 1 through vacuum brazing, and in the heating process, the kover alloy is close to the expansion coefficient of the ceramic wafer 1, the stress.
The mounting flange 2 is internally provided with a cooling water channel 21 surrounding the ceramic plate 1, the upper end of the cooling water channel 21 of the mounting flange 2 is of an open structure, a water channel cover plate 4 is welded at the opening in a sealing mode, the water channel cover plate 4 is made of stainless steel, and the vacuum brazing welding and the mounting flange are welded in a sealing mode.
The mounting flange 2 is provided with a water inlet and a water outlet, the water inlet and the water outlet are communicated with a cooling water channel 21 in the mounting flange 2, the water inlet and the water outlet are coaxially arranged, the axes of the water inlet and the water outlet penetrate through the circle center of the ceramic wafer 1, namely the water inlet and the water outlet are respectively arranged at two sides of the mounting flange 2, the water inlet and the water outlet can be detachably connected with a quick-connection water nozzle 3, and the cooling water channel 21 of the mounting flange 2 is connected with a circulating water system through the quick-connection.
The utility model discloses when using, install the ceramic window of this application in microwave transmission system, the microwave that is vacuum cavity generally is presented the mouth, water inlet and delivery port on mounting flange 2 take place the cooling system of system through connecing water injection well choke 3 and microwave respectively and are connected, and then can provide recirculated cooling water in the cooling water course 21, in the use, the microwave passes through potsherd 1, lead to potsherd 1 temperature to rise, and then form the temperature difference between potsherd 1 and mounting flange 2, then order about under the temperature difference, the heat takes place the conduction, conduct to boss 22 from potsherd 1, mounting flange 2, arrive in the cooling water course 21 at last and take out for the recirculated cooling water in the cooling water course 21, the intensification of potsherd 1 has been suppressed, the security performance of potsherd 1 has been improved.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (9)
1. The utility model provides a vacuum ceramic microwave window, includes potsherd (1), its characterized in that, potsherd (1) outer fringe has cup jointed mounting flange (2), mounting flange (2) are close to the inboard of potsherd (1) is close to the direction of potsherd (1) is protruding to form boss (22), potsherd (1) with boss (22) fixed connection, be equipped with in mounting flange (2) and encircle the cooling water course (21) of potsherd (1).
2. The vacuum ceramic microwave window according to claim 1, characterized in that the mounting flange (2) is of an open-top structure, and a water channel cover plate (4) is hermetically welded at the open-top of the mounting flange (2).
3. The vacuum ceramic microwave window according to claim 1, characterized in that the boss (22) is located at the middle of the mounting flange (2) in the thickness direction, and the boss (22) is fixedly connected with the ceramic plate (1) at the middle of the ceramic plate in the thickness direction.
4. Vacuum ceramic microwave window according to claim 1, characterized in that the thickness of the boss (22) is 0.8-1.2mm and the width of the boss (22) is 1-2 mm.
5. A vacuum ceramic microwave window as claimed in claim 1, characterized in that the mounting flange (2) is kovar.
6. A vacuum ceramic microwave window as claimed in claim 1, characterized in that the ceramic plate (1) is provided with a metallised layer on its end face near the mounting flange (2).
7. A vacuum ceramic microwave window according to claim 1, characterized in that the mounting flange (2) is hermetically vacuum brazed to the ceramic plate (1).
8. The vacuum ceramic microwave window according to claim 1, characterized in that the mounting flange (2) is provided with a water inlet and a water outlet, and the water inlet and the water outlet are hermetically welded with a quick-connection water nozzle (3).
9. The vacuum ceramic microwave window according to claim 8, characterized in that the water inlet and the water outlet are arranged coaxially, and the axes of the water inlet and the water outlet pass through the center of the ceramic plate (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921822854.2U CN210607544U (en) | 2019-10-28 | 2019-10-28 | Vacuum ceramic microwave window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921822854.2U CN210607544U (en) | 2019-10-28 | 2019-10-28 | Vacuum ceramic microwave window |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210607544U true CN210607544U (en) | 2020-05-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921822854.2U Active CN210607544U (en) | 2019-10-28 | 2019-10-28 | Vacuum ceramic microwave window |
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| CN (1) | CN210607544U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115103504A (en) * | 2022-08-24 | 2022-09-23 | 合肥中科离子医学技术装备有限公司 | Ceramic window, coupler and accelerator |
-
2019
- 2019-10-28 CN CN201921822854.2U patent/CN210607544U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115103504A (en) * | 2022-08-24 | 2022-09-23 | 合肥中科离子医学技术装备有限公司 | Ceramic window, coupler and accelerator |
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