CN210589981U

CN210589981U - Automatic liquid feeding device of scribing machine cutting water washing liquid

Info

Publication number: CN210589981U
Application number: CN201921049448.7U
Authority: CN
Inventors: 吴斌; 吴家乐; 杭丹丹; 杭琪琪
Original assignee: Nantong Xinjing Electronic Technology Co Ltd
Current assignee: Nantong Xinjing Electronic Technology Co Ltd
Priority date: 2019-07-05
Filing date: 2019-07-05
Publication date: 2020-05-22
Anticipated expiration: 2029-07-05

Abstract

The utility model discloses an automatic liquid adding device for cutting water cleaning liquid of a scribing machine, which relates to the technical field of liquid adding of wafer scribing machines and aims to solve the technical problem that the scribing machine can only be sprayed one-to-one through an automatic liquid spraying device in the prior art, and the efficiency is lower; the box body is provided with mixed liquid in the mixed liquid area, the partition plate is provided with a plurality of liquid supply holes, the top wall of the box body is provided with a liquid supply port in the mixed liquid area, and the box body is provided with a liquid supply cover in the liquid supply port; the box is located and is provided with a plurality of driving pumps in the drive area, and the one end pipe connection of driving pump is on supplying liquid hole, and the box is located and is provided with a plurality of liquid outlets on supplying the regional lateral wall of liquid, and the other end of driving pump is connected with the drain pipe, and the drain pipe runs through the liquid outlet and extends to the box outside, is provided with water flow sensor in the drain pipe, has reached the effect that has improved the efficiency to the scribing machine liquid feeding.

Description

Automatic liquid feeding device of scribing machine cutting water washing liquid

Technical Field

The utility model relates to a wafer scriber liquid feeding technical field, more specifically says, it relates to an automatic liquid feeding device of scriber cutting water washing liquid.

Background

The scribing machine is a precise numerical control device which integrates the technologies of water, gas and electricity, air static pressure high-speed main shaft, precise mechanical transmission, sensors, automatic control and the like.

The traditional Chinese patent with the application number of CN2017208484736 provides an automatic liquid spraying device for chip scribing, which comprises a lower supporting plate, a protective frame, a scribing machine, a liquid spraying mechanism, a guide rod, an upper supporting plate, a cylinder and a travel switch, wherein the upper supporting plate is fixed, the cylinder pushes the lower supporting plate to move downwards, the travel switch is triggered, protective liquid is pumped into a buffer box through a liquid inlet pipe and then enters an atomizing nozzle through a liquid separating block, so that the protective liquid is sprayed out through the atomizing nozzle, the liquid mist is sprayed to the contact part of the scribing machine and a chip to be processed, the scribing area is protected, and the chip is prevented from being oxidized.

However, when the dicing saw cuts the wafer adsorbed on the vacuum base plate by rotating the diamond blade fixed on the main shaft tool rest at a high speed, the main shaft cooling water and the wafer surface cleaning water are needed during cutting, silicon powder falling from the cut wafer in water can be adhered to the surface of the wafer chip to affect the cleanliness of the chip surface and greatly affect the subsequent working procedure operation due to the fact that the wafer is soaked in the cutting water for a long time, cleaning liquid with a proper proportion needs to be added into the cutting water to adsorb the silicon powder adhered to the surface of the wafer during cutting, and the proportion and the adding amount of the cleaning liquid are difficult to control; the automatic liquid spraying device in the prior art can only spray liquid to the dicing saw one to one, so that the efficiency is low, and improvement is needed.

SUMMERY OF THE UTILITY MODEL

Not enough to prior art exists, the utility model aims to provide an automatic liquid feeding device of scriber cutting water washing liquid, it has the advantage that has improved the efficiency to the scriber liquid feeding.

In order to achieve the above purpose, the utility model provides a following technical scheme:

an automatic liquid adding device for cutting water cleaning liquid of a dicing saw comprises a box body, wherein a partition plate is arranged in the box body, and the box body is divided into a liquid mixing area and a driving area by the partition plate; the box body is provided with a mixed liquid in the mixed liquid area, the partition plate is provided with a plurality of liquid supply holes, the top wall of the box body is provided with a liquid supply port in the mixed liquid area, and the box body is provided with a liquid supply cover at the liquid supply port; the utility model discloses a liquid storage tank, including box, driving area, drain pipe, liquid outlet, box, the box is located and is provided with a plurality of driving pumps in the driving area, the one end of driving pump corresponds the pipe connection on supplying liquid hole, a plurality of liquid outlets have been seted up on the lateral wall that the box is located the liquid supply area, the other end of driving pump is connected with the drain pipe, the drain pipe runs through the liquid outlet and extends to the box outside, the tip that the liquid outlet direction was kept away from to the drain pipe is provided with water.

By adopting the technical scheme, when the dicing saws start to work, the water flow sensor senses a water flow signal and sends an electric signal, and the pump is driven to transport the mixed liquid prepared in the liquid mixing area of the box body to each dicing saw through different liquid supply pipes; the liquid feeding efficiency of the scribing machine is improved by conveying the mixed liquid to the scribing machines working simultaneously through the driving pumps.

Furthermore, a first observation port is formed in the side wall, located at the liquid mixing area, of the box body, and a first observation plate is arranged at the position, located at the first observation port, of the box body.

Through adopting above-mentioned technical scheme, operating personnel can the in-box service behavior of mixed liquid of naked eye observation, when the liquid level reduces to minimum liquid level soon, can pour the mixed liquid of preparing in advance into the box.

Further, a conveying control switch is arranged on the surface of the box body, and the conveying control switch is connected with the driving pump through an electric signal.

Through adopting above-mentioned technical scheme, when the scribing machine was out of work, operating personnel closed the driving pump through carrying control switch, reduced when the scribing machine was out of work in case water flow sensor breaks down, the driving pump took place to the condition of scribing machine department supply with mixed liquid.

Furthermore, a reserve tank is arranged on the top wall of the tank body, a water supply pump is arranged in the driving area, a water supply pipe is connected between one end of the water supply pump and the reserve tank through a pipeline, the other end of the water supply pump is connected with a clear water pipe, a liquid filling opening is formed in the top wall of the reserve tank, a liquid filling cover is arranged at the position, located at the liquid filling opening, of the reserve tank, an electromagnetic valve is arranged on the bottom wall of the reserve tank, one end of the electromagnetic valve is communicated into the liquid mixing area, the other end of the electromagnetic valve is connected with the reserve tank through a pipeline, a reserve control switch is arranged on the outer side wall of the reserve tank.

By adopting the technical scheme, an operator can invert the cleaning solution into the spare box and turn on the switch of the water supply pump, the water supply pump can convey high-pressure water flow into the spare box through the water supply pipe, and the high-pressure water flow can flow through the water supply pipe and spray clean water with impact force into the spare box; the cleaning liquid in the standby box is dispersed by the water flow with high impact force, so that the effects of mixing and stirring are achieved; meanwhile, when an operator observes that the mixed liquid in the mixed liquid area of the box body is lower than the lowest water level line through the first observation plate, the electromagnetic valve is controlled to be opened through the standby control switch by the operator, so that the mixed liquid stirred in the standby box flows into the mixed liquid area of the box body.

Further, the port of the water supply pipe far away from the direction of the water supply pump is vertically communicated with the lubricator.

Through adopting above-mentioned technical scheme, because the delivery pipe is vertical ascending jet stream, rivers are easy to be outside through filling opening seepage to reserve tank, so through with delivery pipe vertically lubricator with the delivery pipe jet down impact water stream and go out, improve the stirring to washing liquid and clear water.

Furthermore, a second observation port is formed in the side wall of the reserve tank, and a second observation plate is arranged at the position, located at the second observation port, of the reserve tank.

Through adopting above-mentioned technical scheme, operating personnel observes the liquid level condition of mixed liquid in the reserve tank through the second and observes the board, and when reacing appointed position, operating personnel closes the working shaft, obtains the mixed liquid of fixed proportion.

Furthermore, a first liquid level height sensor is placed inside the reserve tank, and the first liquid level height sensor is connected with the water supply pump through an electric signal.

By adopting the technical scheme, when an operator does not check the liquid level height of the mixed liquid for a while, the water supply pump cannot be closed in time after the liquid level height of the mixed liquid reaches the designated position, and the first liquid level height sensor sends an electric signal for stopping working to the water supply pump in time after sensing the liquid level height of the mixed liquid; provides double insurance for preparing mixed liquid with fixed proportion.

Further, be provided with second liquid level height sensor on the roof in the reserve tank, be electric signal connection between second liquid level height sensor and the working shaft.

Through adopting above-mentioned technical scheme, in case first liquid level height sensor breaks down and operating personnel fails in time to observe the liquid level condition of the mixed liquid in the reserve tank, second liquid level height sensor can send the signal of telecommunication of stop work at the appointed liquid level height of setting for the working shaft, has also reduced simultaneously because the working shaft works always, and the mixed liquid spills over the condition emergence of reserve tank.

To sum up, the utility model discloses following beneficial effect has:

1. the mixed liquid is conveyed to a plurality of dicing saws working simultaneously through a plurality of driving pumps, so that the liquid adding efficiency of the dicing saws is improved;

2. can mix the mixed liquid in advance through the reserve tank, improve the work efficiency of automatic liquid feeding device.

Drawings

FIG. 1 is a schematic structural diagram of the present embodiment;

fig. 2 is a schematic structural diagram for showing a positional relationship between the partition plate and the drive pump in this embodiment.

In the figure: 1. a box body; 11. a partition plate; 111. a liquid supply hole; 12. a liquid supply port; 13. a liquid supply cover; 14. driving the pump; 15. a liquid outlet; 151. a liquid outlet pipe; 152. a water flow sensor; 16. repairing the cover; 17. a first viewing port; 171. a first viewing plate; 18. a delivery control switch; 19. a water supply pump; 191. a water supply pipe; 192. a clear water pipe; 193. a lubricator; 2. a spare box; 21. a liquid filling port; 211. a liquid feeding cover; 22. an electromagnetic valve; 23. a standby control switch; 24. a first liquid level height sensor; 25. a second liquid level height sensor; 26. a second viewing port; 261. a second viewing plate.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Example (b):

an automatic liquid adding device for a dicing saw cutting water cleaning liquid refers to fig. 1 and 2 and comprises a box body 1, wherein a partition plate 11 is welded in the box body 1, and the box body 1 is divided into a liquid mixing area and a driving area by the partition plate 11; the box body 1 is positioned in the liquid mixing area and is filled with mixed liquid uniformly mixed by water and cleaning liquid, the partition plate 11 is provided with a plurality of liquid supply holes 111, the top wall of the box body 1 is positioned in the liquid mixing area and is provided with a liquid supply port 12, the box body 1 is positioned at the liquid supply port 12 and is provided with a liquid supply cover 13, and the liquid supply cover 13 is directly covered on the box body 1.

Referring to fig. 1 and 2, a plurality of driving pumps 14 are placed in a driving area of a box body 1, the driving pumps 14 are preferably water pumps, one end of each driving pump 14 is connected to a liquid supply hole 111 corresponding to a pipeline, a plurality of liquid outlets 15 are formed in the side wall of the box body 1 in the liquid supply area, the other end of each driving pump 14 is connected with a liquid outlet pipe 151, the liquid outlet pipes 151 are preferably plastic hoses, the liquid outlet pipes 151 penetrate through the liquid outlets 15 and extend to the outside of the box body 1, a water flow sensor 152 is sleeved at the end part, far away from the liquid outlets 15, of each liquid outlet pipe 151, and the side wall of the box; when the dicing saw starts to work, water flows through the water flow sensor 152, the water flow gives an electric signal to the driving pump 14, the driving pump 14 presses out a mixed solution to the liquid outlet pipe 151, and the mixed solution is conveyed to the dicing saw; a conveying control switch 18 is adhered to the surface of the box body 1, the conveying control switch 18 is in electrical signal connection with the driving pump 14, and when the dicing saw does not work, an operator turns off the driving pump 14 through the conveying control switch 18.

Referring to fig. 1 and 2, a spare tank 2 is welded on the top wall of a tank body 1, a water supply pump 19 is placed in a driving area of the tank body 1, a water supply pipe 191 is connected between one end of the water supply pump 19 and the spare tank 2 through a pipeline, the water supply pipe 191 is preferably a plastic pipe, the other end of the water supply pump 19 is connected with a clean water pipe 192, the clean water pipe 192 is preferably a plastic hose, and the clean water pipe 192 is embedded in the tank body 1; a liquid filling opening 21 is formed in the top wall of the reserve tank 2, a liquid filling cover 211 is arranged at the position, located at the liquid filling opening 21, of the reserve tank 2, and the liquid filling cover 211 is directly covered on the reserve tank 2; when the cleaning liquid is added into the reserve tank 2, the water supply pump 19 is turned on, and the clear water is ejected from the water supply pipe 191 to the reserve tank 2 by the pressure of the water supply pump 19, thereby dripping into the cleaning liquid from the high position and dispersing all around to complete the stirring.

Referring to fig. 1 and 2, a solenoid valve 22 is fixed on the bottom wall of the reserve tank 2 through threads, one end of the solenoid valve 22 is communicated to the liquid mixing area, and the other end of the solenoid valve 22 is connected with the reserve tank 2 through a pipeline; a standby control switch 23 is adhered to the outer side wall of the standby box 2, the standby control switch 23 is in electrical signal connection with the electromagnetic valve 22, and the switch of the electromagnetic valve 22 can be controlled through the standby control switch 23, so that standby mixed liquid in the standby box 2 flows to a liquid mixing area or is stored in the standby box 2.

Referring to fig. 1 and 2, the port of the water supply pipe 191 far from the water supply pump 19 is vertically screwed into the lubricator 193, and the lubricator 193 is preferably a plastic pipe, and since the water supply pipe 191 vertically sprays upwards on the liquid adding cover 211, the liquid adding cover 211 blocks the impacting water flow, so that the impact force of the impacting water flow is reduced, and the self-stirring capability of the clean water and the cleaning liquid is reduced.

Referring to fig. 1 and 2, a first liquid level height sensor 24 is provided on a side wall of the reserve tank 2, the first liquid level height sensor 24 is electrically connected to the water supply pump 19, and when the liquid level reaches a predetermined height, the first liquid level height sensor 24 sends a signal for stopping water supply to the water supply pump 19; be fixed with second liquid level height sensor 25 on the roof in reserve tank 2, be electric signal connection between second liquid level height sensor 25 and the working pump 19, photoelectric type level sensor is all preferred to first liquid level height sensor 24 and second liquid level height sensor 25, and when first liquid level height sensor 24 broke down, delivery pipe 191 lasted to pour into the clear water into in reserve tank 2, and accessible second liquid level height sensor 25 avoids liquid to spill over reserve tank 2.

Referring to fig. 1 and 2, a first observation port 17 is formed in a side wall of the box body 1 at the liquid mixing region, and a first observation plate 171 is adhered to the box body 1 at the first observation port 17; a second observation port 26 is formed in the side wall of the reserve tank 2, and a second observation plate 261 is adhered to the reserve tank 2 at the second observation port 26; both the first viewing plate 171 and the second viewing plate 261 are preferably transparent plastic; the liquid level can be observed conveniently by operators.

The working principle is as follows:

when the dicing saws start to work, the water flow sensor 152 senses a water flow signal and sends an electric signal, and the driving pump 14 transports the mixed liquid prepared in the mixed liquid area of the box body 1 to each dicing saw through different liquid supply pipes; the mixed liquid is conveyed to a plurality of dicing saws working simultaneously through a plurality of driving pumps 14, and the liquid adding efficiency of the dicing saws is improved.

An operator puts cleaning liquid in the standby tank 2 upside down, and turns on the switch of the water supply pump 19, the water supply pump 19 supplies high-pressure water flow into the standby tank 2 through the water supply pipe 191, the high-pressure water flow flows through the water supply pipe 191 and sprays clean water with impact force into the standby tank 2 through the blowout prevention pipe 193, when the water level in the standby tank 2 reaches a specified position, the first liquid level height sensor 24 sends an electric signal, and the water supply pump 19 stops working; if the first level sensor 24 fails, the second level sensor 25 sends an electric signal to the water supply pump 19 to stop supplying water to prevent the liquid from overflowing the reserve tank 2.

When operating personnel observes through first observation board that the box is located the mixed liquid that mixes in the liquid region and is less than minimum water level line, operating personnel accessible standby control switch goes up the control and opens the solenoid valve for the mixed liquid stream that the storage stirred in the reserve tank is to the mixed liquid region of box in.

The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications to the present embodiment without inventive contribution as required after reading the present specification, but all of them are protected by patent laws within the scope of the claims of the present invention.

Claims

1. The utility model provides an automatic liquid feeding device of scriber cutting water washing liquid, includes box (1), its characterized in that: a partition plate (11) is arranged in the box body (1), and the box body (1) is divided into a liquid mixing area and a driving area by the partition plate (11); the box body (1) is positioned in the liquid mixing area and filled with mixed liquid, the partition plate (11) is provided with a plurality of liquid supply holes (111), the top wall of the box body (1) is positioned in the liquid mixing area and provided with a liquid supply port (12), and the box body (1) is positioned at the liquid supply port (12) and provided with a liquid supply cover (13); box (1) is located the drive region and is provided with a plurality of driving pump (14), the one end of driving pump (14) corresponds the pipeline and connects on supplying liquid hole (111), box (1) is located and has offered a plurality of liquid outlets (15) on supplying the regional lateral wall, the other end of driving pump (14) is connected with drain pipe (151), drain pipe (151) run through liquid outlet (15) and extend to box (1) outside, the tip that liquid outlet (15) direction was kept away from in drain pipe (151) is provided with water flow sensor (152), the lateral wall that box (1) is located the drive region is provided with repairs lid (16).

2. The automatic liquid adding device for the dicing saw cutting water cleaning liquid of claim 1, characterized in that: first observation port (17) have been seted up on the lateral wall that box (1) is located mixed liquid region department, box (1) is located first observation port (17) department and is provided with first observation board (171).

3. The automatic liquid adding device for the dicing saw cutting water cleaning liquid of claim 1, characterized in that: the surface of the box body (1) is provided with a conveying control switch (18), and the conveying control switch (18) is connected with the driving pump (14) through an electric signal.

4. The automatic liquid adding device for the dicing saw cutting water cleaning liquid of claim 1, characterized in that: the automatic liquid filling device is characterized in that a spare box (2) is arranged on the top wall of the box body (1), a water supply pump (19) is arranged in the driving area, a water supply pipe (191) is connected between one end of the water supply pump (19) and the spare box (2) through a pipeline, a clear water pipe (192) is connected to the other end of the water supply pump (19), a liquid filling opening (21) is formed in the top wall of the spare box (2), a liquid filling cover (211) is arranged at the position, located at the liquid filling opening (21), of the spare box (2), an electromagnetic valve (22) is arranged on the bottom wall of the spare box (2), one end of the electromagnetic valve (22) is communicated into the liquid mixing area, the other end of the electromagnetic valve (22) is connected with the spare box (2) through a pipeline, a spare control switch (23) is arranged on the.

5. The automatic liquid adding device for the dicing saw cutting water cleaning liquid of claim 4, characterized in that: and the water supply pipe (191) is provided with a lubricator (193) which is vertically communicated with the port far away from the water supply pump (19).

6. The automatic liquid adding device for the dicing saw cutting water cleaning liquid of claim 4, characterized in that: second observation port (26) have been seted up to reserve tank (2) lateral wall, reserve tank (2) are located second observation port (26) department and are provided with second observation board (261).

7. The automatic liquid adding device for the dicing saw cutting water cleaning liquid of claim 4, characterized in that: a first liquid level height sensor (24) is placed inside the reserve tank (2), and the first liquid level height sensor (24) is connected with the water supply pump (19) through an electric signal.

8. The automatic liquid adding device for the dicing saw cutting water cleaning liquid of claim 7, characterized in that: be provided with second liquid level height sensor (25) on reserve tank (2) interior roof, be electric signal connection between second liquid level height sensor (25) and working shaft (19).