CN210559414U - Alternating current power supply system of 72-pair-rod polycrystalline silicon reduction furnace - Google Patents
Alternating current power supply system of 72-pair-rod polycrystalline silicon reduction furnace Download PDFInfo
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- CN210559414U CN210559414U CN201921425705.2U CN201921425705U CN210559414U CN 210559414 U CN210559414 U CN 210559414U CN 201921425705 U CN201921425705 U CN 201921425705U CN 210559414 U CN210559414 U CN 210559414U
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- 230000009467 reduction Effects 0.000 title claims abstract description 49
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 136
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 136
- 239000010703 silicon Substances 0.000 claims abstract description 136
- 238000004804 winding Methods 0.000 claims abstract description 39
- 230000001105 regulatory effect Effects 0.000 claims abstract description 8
- 238000012545 processing Methods 0.000 claims description 14
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- 229920005591 polysilicon Polymers 0.000 description 14
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- 230000002159 abnormal effect Effects 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
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Abstract
The utility model discloses an alternating current power supply system of a 72-pair-rod polycrystalline silicon reduction furnace, which is applied to the 72-pair-rod polycrystalline silicon reduction furnace and comprises a power supply, a transformer, a load silicon rod module and a control cabinet, wherein 72 pairs of silicon rods are divided into 6 phases, 12 pairs of silicon rods in each phase are divided into two groups, and 6 pairs of silicon rods in each group are sequentially connected in series; the transformer is 6-phase windings, and each phase of winding corresponds to two load silicon rod modules which are connected in parallel and are respectively grounded; the load silicon rod module comprises a power regulating module and a group of 6 pairs of silicon rods; a silicon rod breaker and a silicon rod load zero sequence current transformer are arranged between each power regulating module and 6 pairs of silicon rods corresponding to loads, and the silicon rod breaker and the silicon rod load zero sequence current transformer are respectively connected with a control cabinet; the silicon rod load zero sequence current transformer converts the current flowing through the silicon rod load zero sequence current transformer into a signal and transmits the signal to the control cabinet. By adding the silicon rod load grounding independent detection device of each phase, the grounding faults of the silicon rod loads of each group are distinguished, and the condition that the grounding of the silicon rod of each group is only jumped by 1 silicon rod load is ensured.
Description
Technical Field
The utility model relates to a polycrystalline silicon production technical field especially relates to a 72 to excellent polycrystalline silicon reduction furnace alternating current power supply system.
Background
Polycrystalline silicon is the most important basic material in industries such as semiconductors, electronic information, solar photovoltaic cells and the like, and is increasingly demanded as the only raw material for preparing monocrystalline silicon and the material for producing solar cells. In order to reduce energy consumption, polysilicon reduction furnaces are increasingly large in design and selection, and the polysilicon reduction furnaces are gradually developed to 36 pairs of rods and 72 pairs of rods or more from the original 12 pairs of rods.
The existing AC power supply system of the largest polysilicon reduction furnace is applied to a 54-pair rod polysilicon reduction furnace, and with the increasingly wide use of a 72-pair rod polysilicon reduction furnace, how to supply power to the 72-pair rod polysilicon reduction furnace becomes a problem to be solved urgently in the polysilicon production industry at present.
Most polysilicon manufacturing enterprises currently supply power to a 72-pair rod polysilicon reduction furnace by combining two existing reduction furnace ac power supply systems, for example, two 36-pair rod polysilicon reduction furnace ac power supply systems, or a 24-pair rod polysilicon reduction furnace ac power supply system and a 48-pair rod polysilicon reduction furnace ac power supply system. In the other scheme, 72 pairs of silicon rods are divided into 6 phases, each phase comprises 12 pairs of silicon rods, and each silicon rod in each phase is connected in series for power supply.
SUMMERY OF THE UTILITY MODEL
The utility model provides a 72 to excellent polycrystalline silicon reduction furnace alternating current power supply system to the above-mentioned not enough that exists among the prior art for solve 72 and frequently lack the looks operation to excellent polycrystalline silicon reduction furnace ground connection, effective operating duration is short, the low high problem of energy consumption of single-furnace output.
In order to solve the technical problem, the utility model discloses the technical scheme who takes as follows:
a kind of 72 pairs of rod polycrystalline silicon reduction furnace alternating current power supply system, apply to 72 pairs of rod polycrystalline silicon reduction furnaces, including power, voltage transformer, load silicon rod module and control cabinet, 72 pairs of silicon rods are divided into 6 phases, 12 pairs of silicon rods of each phase are divided into two groups, 6 pairs of silicon rods of each group are connected in series sequentially;
the transformer is 6-phase windings, and each phase of winding corresponds to two load silicon rod modules connected in parallel; the load silicon rod module comprises a power regulating module and a group of 6 pairs of silicon rods; by reducing the power supply voltage, the current parameter value of each gear of the low-voltage side is increased, and the running requirement of the reduction furnace is met. The grounding current of the polysilicon reduction furnace during normal operation is mainly leakage current formed by an insulating pressure ring between the periphery of an electrode and a furnace chassis at high temperature due to abnormally deposited amorphous silicon and other conductive substances in the furnace. When the conditions of process control abnormal factors, silicon rod wall leaning and the like are eliminated, the magnitude of the leakage current is closely related to the silicon rod operating voltage and the number of silicon rod pairs, and the relationship is that the leakage current is in direct proportion to the product of the silicon rod operating voltage and the number of silicon rod pairs N and in inverse proportion to the grounding resistance.
A silicon rod breaker and a silicon rod load zero sequence current transformer are arranged between each power regulating module and 6 pairs of silicon rods corresponding to loads, and the silicon rod breaker and the silicon rod load zero sequence current transformer are respectively connected with a control cabinet; the silicon rod load zero sequence current transformer converts current flowing through the silicon rod load zero sequence current transformer into signals to be transmitted to the control cabinet, and by adding each phase of silicon rod load grounding independent detection device, grounding faults of each group of silicon rod load are distinguished, and it is ensured that each group of silicon rod is grounded and only 1 group of silicon rod load is jumped independently.
Furthermore, each phase of winding is grounded and provided with a winding grounding current transformer, a corresponding reducing furnace transformer incoming line switch is arranged between the transformer and the power supply, the winding grounding current transformer and the reducing furnace transformer incoming line switch are respectively connected with the control cabinet, and the winding grounding current transformer converts the current flowing through the winding grounding current transformer into a signal to be transmitted into the control cabinet to be used as a backup protection for a power unit and a short circuit in the low-voltage side winding of the transformer.
The control cabinet comprises a data acquisition and processing controller, a DCS upper computer and a PLC controller, wherein the data acquisition and processing controller is respectively connected with a silicon rod load zero sequence current transformer and a winding grounding current transformer; the DCS upper computer and the data acquisition and processing controller are respectively connected with the PLC; and the PLC is respectively connected with the silicon rod breaker and the reduction furnace transformer incoming line switch.
Preferably, a current signal transmitter is arranged between the data acquisition and processing controller and the winding grounding current transformer.
The utility model provides a 72 to excellent polycrystalline silicon reduction furnace AC power supply system, wherein reduction furnace transformer low voltage winding drags two modes, and every winding area 2 silicon rod loads of group to 6 pairs of silicon rod loads of every group, totally 12 silicon rod groups of group constitute 72 to excellent reduction furnace AC power supply system, and this application circuit extends to and uses 4 to the silicon rod as the mould and use 8 to the silicon rod as the mould, and 48 of constitution are to excellent and 96 to excellent reduction furnace AC power supply system.
Has the advantages that:
1. the utility model provides a 72 to excellent polycrystalline silicon reduction furnace alternating current power supply system through optimizing reduction furnace transformer and reduction furnace alternating current voltage regulation power supply combination mode, through reducing every silicon rod logarithm of group to reduce system operation voltage, reduce the emergence of reduction furnace later stage operation ground fault, and then show improvement list stove output.
2. The utility model provides a 72 to excellent polycrystalline silicon reducing furnace alternating current power supply system detects and reduces transformer low pressure side winding leakage current ground connection through the independent zero sequence ground connection of every looks silicon rod load and detects, realizes the superior and inferior grade cooperation mode, selectively amputates a silicon rod load.
Drawings
These and/or other advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings and the following detailed description.
Fig. 1 is a schematic circuit diagram of an ac power supply system of the reduction furnace.
Fig. 2 is a schematic circuit structure diagram of a phase winding a1 of the reducing furnace ac power supply system.
Fig. 3 is a logic diagram of the phase winding ground signal acquisition and control of the reducing furnace ac power supply system a 1.
Fig. 4 is a logic diagram of the grounding protection control of the phase winding of the reducing furnace ac power supply system a 1.
Fig. 5 is a schematic diagram of the grounding current of the phase a1 silicon rod of the reducing furnace ac power supply system.
Wherein each reference numeral represents: 1, a power supply; 2, a transformer; 3A 1-1# load silicon rod module; 31A 1-1# power conditioning module; 32A 1-1# silicon rod; 33A 1-1# silicon rod breaker; the No. 34A 1-1 silicon rod loads a zero sequence current transformer; 4A1-2# load silicon rod module; 41A 1-2# Power Conditioning Module; 42A 1-2# silicon rod; 43A 1-2# silicon rod breaker; the No. 44A 1-2 silicon rod loads a zero sequence current transformer; 5, a reduction furnace transformer incoming line switch; 6, a control cabinet; a 61 KT1 data acquisition and processing controller; 62 DCS upper computer; 63 a PLC controller; 7A 1 phase winding; 8 winding grounding current transformer; 91 Rg leakage equivalent resistance; 92 Ig ground leakage current; 93 electrodes; 94 silicon rod load voltage; 9512 pairs of rod loads.
Detailed Description
The invention will be better understood from the following examples.
The drawings in the specification show the structure, ratio, size, etc. only for the purpose of matching with the content disclosed in the specification, so as to be known and read by those skilled in the art, and not for the purpose of limiting the present invention, so the present invention does not have the essential meaning in the art, and any structure modification, ratio relationship change or size adjustment should still fall within the scope covered by the technical content disclosed in the present invention without affecting the function and achievable purpose of the present invention. Meanwhile, the terms "upper", "lower", "front", "rear", "middle", and the like used in the present specification are for the sake of clarity only, and are not intended to limit the scope of the present invention, and changes or adjustments of the relative relationship thereof are also considered to be the scope of the present invention without substantial changes in the technical content.
As shown in fig. 1, the ac power supply system applied to the 72-pair polysilicon reduction furnace comprises a power supply 1, a transformer 2, a silicon rod loading module and a control cabinet 6, wherein 72 pairs of silicon rods are divided into 6 phases (respectively, a1 phase, a2 phase, B1 phase, B2 phase, C1 phase and C2 phase), 12 pairs of silicon rods of each phase are divided into two groups, and each group of 6 pairs of silicon rods are sequentially connected in series; the transformer 2 is a 6-phase winding (A1R, A2R, B1R, B2R, C1R and C2R, respectively), and each phase of winding corresponds to two load silicon rod modules connected in parallel.
As shown in fig. 2, taking phase a1 as an example, the loaded silicon rod modules are a1-1# loaded silicon rod module 3 and a1-2# loaded silicon rod module 4, which are connected in parallel. The A1-1# loaded silicon rod module 3 comprises an A1-1# power regulating module 31 and a group of 6 pairs of A1-1# silicon rods 32, and the A1-2# loaded silicon rod module 4 comprises an A1-2# power regulating module 41 and a group of 6 pairs of A1-2# silicon rods 42.
The A1 phase 12 silicon rod pairs 95 were serially connected to form a single silicon rod load and the two 6 phase A1 phase load silicon rods were divided into the A1-1# silicon rod 32 and the A1-2# silicon rod 42, which were compared in parallel. As shown in fig. 5, each pair of silicon rod loads of a1-1# silicon rod 32 is fixed on the furnace chassis through 2 electrodes 93, and Ig ground leakage current 92 is mainly formed under the action of U silicon rod load voltage 94 by the electrodes 93 and the furnace chassis due to the existence of Rg leakage equivalent resistance 91; according to the relationship between the Ig grounding leakage current 92 and the silicon rod load voltage 94 and the silicon rod logarithm N
And the load voltage 94 of the 6 pairs of silicon rods is half of the voltage of the 12 pairs of silicon rods, so that the Ig ground leakage current 92 of the 6 pairs of silicon rods A1-1# silicon rod 32 is one fourth of the voltage of the 12 pairs of silicon rods.
By reducing the power supply voltage, the number of pairs of silicon rods in each group is reduced, the current parameter value of each gear on the low-voltage side is increased, the grounding current can be obviously reduced, and meanwhile, the ignition and discharge conditions of an electrode 93 in the reduction furnace to a furnace chassis are reduced due to the reduction of the silicon rod load voltage 94 on the Rg leakage equivalent resistor 91, so that the long-term stable operation of the reduction furnace is ensured.
An A1-1# silicon rod breaker 33 and an A1-1# silicon rod load zero-sequence current transformer 34 are arranged between the A1-1# power adjusting module 31 and an A1-1# silicon rod 32 of the corresponding load, and an A1-2# silicon rod breaker 43 and an A1-2# silicon rod load zero-sequence current transformer 44 are arranged between the A1-2# power adjusting module 41 and an A1-2# silicon rod 42 of the corresponding load. The silicon rod circuit breakers of the two silicon rod loading modules and the silicon rod loading zero sequence current transformer are respectively connected with the control cabinet 6; the silicon rod load zero sequence current transformer converts the current flowing through the silicon rod load zero sequence current transformer into a signal and transmits the signal into the control cabinet 6.
The A1 phase winding 7 is grounded and is provided with a winding grounding current transformer 8, a corresponding reducing furnace transformer incoming line switch 5 is arranged between the transformer 2 and the power supply 1, the winding grounding current transformer 8 and the reducing furnace transformer incoming line switch 5 are respectively connected with the control cabinet 6, and the winding grounding current transformer 8 converts the current flowing through itself into a signal to be transmitted into the control cabinet 6.
The control cabinet 6 comprises a KT1 data acquisition and processing controller 61, a DCS upper computer 62 and a PLC 63, wherein the KT1 data acquisition and processing controller 61 is respectively connected with silicon rod load zero-sequence current transformers and a winding grounding current transformer 8 of two load silicon rod modules; the DCS upper computer 62 and the KT1 data acquisition and processing controller 61 are respectively connected with the PLC 63; the PLC 63 is respectively connected with the silicon rod circuit breakers of the two silicon rod loading modules and the reduction furnace transformer incoming line switch 5.
As shown in FIGS. 3 and 4, the current value I flowing through the A1-1# silicon rod load zero sequence current transformer (CT1SN)341snAnd the current value I flowing through A1-2# silicon rod load zero sequence current transformer (CT2SN)442snThe current feedback is directly acquired by the KT1 data acquisition and processing controller 61 and then converted into a signal to be transmitted to the PLC 63, and the PLC 63 alarms according to a preset grounding current alarm set value Iset.almAnd earth current fault action set value Iset.actFrom the actual I1snAnd I2snA comparison is made. A1 phase winding grounding current value I acquired by winding grounding Current Transformer (CTN)8nThe signal is sent to a KT1 data acquisition and processing controller 61 through a SIC2500 current signal transmitter, and then is converted into a signal to be transmitted to a PLC 63.
If I1sn＞Iset.almThe PLC 63 uploads the signal to a human-computer interface of the DCS upper computer 62 through communication, and an A1-1# silicon rod grounding alarm is triggered to remind an operator; if I2sn＞Iset.almAnd the PLC 63 uploads the signal to a human-computer interface of the DCS upper computer 62 through communication, and an A1-2# silicon rod grounding alarm is triggered to remind an operator.
If I1sn＞Iset.actThe PLC 63 sends a tripping command to the A1-1# silicon rod breaker 33 to trigger the A1-1# silicon rod grounding QF1 to trip; if I2sn＞Iset.actThen, the PLC controller 63 sends a trip command to the a1-2# silicon rod breaker 43 to trigger a trip action of the a1-2# silicon rod ground QF 2.
By adding the silicon rod load grounding independent detection device of each phase, the grounding faults of the silicon rod loads of each group are distinguished, and the condition that the grounding of the silicon rod of each group is only jumped by 1 silicon rod load is ensured.
If In＞2Iset.actWhile I is1sn＜Iset.act，I2sn＜Iset.actAnd if the A1 phase power regulation module or the transformer winding is judged to have a ground fault, a main transformer opening command is sent, the PLC 63 sends a tripping command to the reducing furnace transformer incoming line switch 5, and the reducing furnace transformer incoming line switch QF tripping action is triggered to serve as backup protection of the internal short circuit of the power unit and the transformer low-voltage side winding.
Similarly, the other phases a2, B1, B2, C1, C2 and a1 are the same.
Table 1 shows the operating data for the reduction furnace using the 12 pairs of rod string system and the 2 sets of 6 pairs of rod parallel systems of this application. It can be known from the table that the interlocking stop is triggered by the fact that the grounding current rises greatly when the system is counted and operated for 30-40 hours by adopting the 12-pair rod series system. After 2 groups of 6 pairs of rods are operated in parallel, the grounding current is stable and controllable in the operation period of 80-100 hours, so that the shutdown of the reduction furnace caused by grounding faults is greatly reduced, and the capacity loss is reduced by 40%.
TABLE 1
The utility model provides a 72 to thinking and method of stick polycrystalline silicon reduction furnace alternating current power supply system, the method and the way of specifically realizing this technical scheme are many, it is only the preferred embodiment of the utility model to go up the description, it should be noted, to ordinary technical personnel in this technical field, under the prerequisite that does not deviate from the utility model discloses the principle can also be made a plurality of improvements and moist decorations, these improvements and moist decorations should also regard as the utility model discloses a protection scope. All the components not specified in the present embodiment can be realized by the prior art.
Claims (4)
1. A72-pair rod polycrystalline silicon reduction furnace alternating current power supply system is applied to a 72-pair rod polycrystalline silicon reduction furnace and is characterized by comprising a power supply (1), a transformer (2), load silicon rod modules (3, 4) and a control cabinet (6), wherein 72 pairs of silicon rods are divided into 6 phases, 12 pairs of silicon rods in each phase are divided into two groups, and each group of 6 pairs of silicon rods are sequentially connected in series;
the transformer (2) is a 6-phase winding, and each phase of winding (7) corresponds to two load silicon rod modules (3, 4) connected in parallel; the loaded silicon rod module comprises a power regulating module (31, 41) and a group of 6 pairs of silicon rods (32, 42);
silicon rod circuit breakers (33, 43) and silicon rod load zero sequence current transformers (34, 44) are arranged between each power regulating module and 6 pairs of silicon rods corresponding to loads, and the silicon rod circuit breakers and the silicon rod load zero sequence current transformers are respectively connected with the control cabinet (6); the silicon rod load zero sequence current transformer converts the current flowing through the silicon rod load zero sequence current transformer into a signal and transmits the signal to the control cabinet (6).
2. The alternating current power supply system for the 72-pair rod polycrystalline silicon reduction furnace according to claim 1, wherein each phase of winding (7) is grounded and provided with a winding grounding current transformer (8), a corresponding reduction furnace transformer incoming line switch (5) is arranged between the transformer (2) and the power supply (1), the winding grounding current transformer (8) and the reduction furnace transformer incoming line switch (5) are respectively connected with the control cabinet (6), and the winding grounding current transformer (8) converts current flowing through itself into signals and transmits the signals to the control cabinet (6).
3. The alternating current power supply system of the 72-pair rod polycrystalline silicon reduction furnace according to claim 2, wherein the control cabinet (6) comprises a data acquisition and processing controller (61), a DCS upper computer (62) and a PLC controller (63), and the data acquisition and processing controller (61) is respectively connected with the silicon rod load zero sequence current transformers (34, 44) and the winding grounding current transformer (8); the DCS upper computer (62) and the data acquisition and processing controller (61) are respectively connected with the PLC controller (63); and the PLC (63) is respectively connected with the silicon rod circuit breakers (33, 43) and the reduction furnace transformer incoming line switch (5).
4. The alternating current power supply system for the 72-pair rod polycrystalline silicon reduction furnace according to claim 3, wherein a current signal transmitter is arranged between the data acquisition and processing controller (61) and the winding grounding current transformer (8).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921425705.2U CN210559414U (en) | 2019-08-29 | 2019-08-29 | Alternating current power supply system of 72-pair-rod polycrystalline silicon reduction furnace |
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| CN201921425705.2U CN210559414U (en) | 2019-08-29 | 2019-08-29 | Alternating current power supply system of 72-pair-rod polycrystalline silicon reduction furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110357108A (en) * | 2019-08-29 | 2019-10-22 | 新疆协鑫新能源材料科技有限公司 | A kind of 72 pairs of stick polycrystalline silicon reducing furnace AC power supply systems |
-
2019
- 2019-08-29 CN CN201921425705.2U patent/CN210559414U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110357108A (en) * | 2019-08-29 | 2019-10-22 | 新疆协鑫新能源材料科技有限公司 | A kind of 72 pairs of stick polycrystalline silicon reducing furnace AC power supply systems |
| CN110357108B (en) * | 2019-08-29 | 2024-01-19 | 新疆戈恩斯能源科技有限公司 | 72 pair bar polycrystalline silicon reduction furnace alternating current power supply system |
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Address after: East Section of Hengsi Road, Hongsha Quanbei Industrial Zone, Zhundong Economic and Technological Development Zone, Changji Hui Autonomous Prefecture, Xinjiang Uygur Autonomous Region 831100 (Jijihu Community) Patentee after: Xinjiang Goens Energy Technology Co.,Ltd. Address before: 831100 east section of hengsi Road, hongshaquanbei Industrial Zone, Zhundong economic and Technological Development Zone, Changji Hui Autonomous Prefecture, Xinjiang Uygur Autonomous Region Patentee before: XINJIANG XIXIXIN NEW ENERGY MATERIAL TECHNOLOGY CO.,LTD. |
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Granted publication date: 20200519 Effective date of abandoning: 20240119 |
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