CN210535628U

CN210535628U - Temperature detecting system in vacuum reaction chamber

Info

Publication number: CN210535628U
Application number: CN201921105573.5U
Authority: CN
Inventors: 王浩明; 陈永萍; 张广德
Original assignee: Suzhou Zishan Semiconductor Technology Co Ltd
Current assignee: Suzhou Zishan Semiconductor Technology Co Ltd
Priority date: 2019-07-15
Filing date: 2019-07-15
Publication date: 2020-05-15
Anticipated expiration: 2029-07-15

Abstract

The utility model discloses a temperature detecting system in vacuum reaction chamber, including transfer chamber pressure module and external logic controller module, the output of transfer chamber pressure module is external logic controller module, the output of Back reaction room temperature controller signal is external logic controller module, the output of watt long temperature controller signal module is external logic controller module, the output of transfer chamber pressure module, Back reaction room temperature controller signal and watt long temperature controller signal module all insert to external logic controller module in, the output of external logic controller module is relay module, the output of relay module is output switch, alarm is carried out according to the temperature standard that Eurotherm temperature controller alarm module and watt long temperature controller alarm module correspond, and such setting carries out the detection that the temperature is too high or too low after detecting the wafer gets into the reaction chamber, the machine leakage detection can not trigger the false alarm in the detection process.

Description

Temperature detecting system in vacuum reaction chamber

Technical Field

The utility model belongs to the technical field of the semiconductor is relevant, concretely relates to temperature detecting system in vacuum reaction chamber.

Background

Semiconductor technology refers to various techniques of semiconductor processing, including wafer production techniques, thin film deposition, photolithography, etching, doping techniques, and process integration.

The existing temperature monitoring technology has the following problems: at present, Eurotherm of a Mattson machine only plays a role of over-temperature alarm, when the temperature is too low, the temperature is not detected, because the machine is cooled when leakage is detected, if the low temperature is detected, false alarm is generated, software is used for detecting, the temperature of a wafer before entering a reaction chamber is set to be within a range of 250 ℃ -5 ℃, the wafer cannot enter the reaction chamber when the temperature is beyond the range, the waiting time is more than twenty minutes, the machine gives an alarm, but once the wafer enters the machine, a system is not blocked, so if the temperature of the wafer after entering the reaction chamber is cooled, the machine does not give an alarm, the etching rate is low, the photoresist is not completely removed, and products are scrapped and pollute other processes.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a temperature detecting system in vacuum reaction chamber, Eurotherm with the present Mattson board of proposing in solving above-mentioned background art only plays the effect of excess temperature warning, it does not detect when the temperature is low excessively, because the board can lower the temperature when surveying the leak, can produce the wrong report police if surveying low temperature, so detect by the software, the software sets for the temperature need be in 250 ℃ plus-5 within range before the wafer advances the reaction chamber, exceed this scope wafer can not advance the reaction chamber, and latency is greater than twenty minutes, the board can send the warning, but in case the wafer gets into after the board, the system will not block the shut again, so if the wafer temperature appears lowering after getting into the reaction chamber, the board can not report to the police, can lead to the etching rate low, it is unclean to strip, the product is scrapped and pollutes other process problems.

In order to achieve the above object, the utility model provides a following technical scheme:

a temperature detecting system in a vacuum reaction chamber comprises a transmission chamber pressure module, a Back reaction chamber temperature controller signal, an external logic controller module, a relay module, an Eurotherm temperature controller alarm module, an output switch, a watt dragon temperature controller alarm module and a Side reaction chamber temperature controller signal, wherein the output end of the transmission chamber pressure module is the external logic controller module, the inside of the transmission chamber pressure module is provided with an Eurotherm signal and a watlow signal, the output end of the Back reaction chamber temperature controller signal is the external logic controller module, the output end of the Side reaction chamber temperature controller signal is the external logic controller module, the output ends of the transmission chamber pressure module, the Back reaction chamber temperature controller signal and the Side reaction chamber temperature controller signal are all connected into the external logic controller module, the output end of the external logic controller module is the relay module, and the output end of the relay module is the output switch, the output switch is provided with two output ends, one output end of the output switch is an Eurotherm temperature controller alarm module, and the other output end of the output switch is a Watson temperature controller alarm module.

Preferably, the transmission chamber pressure module, the Back reaction room temperature controller signal and the Side reaction room temperature controller signal are all inputted through respective connected wires.

Preferably, the output signal of the Eurotherm temperature controller alarm module can be plugged into a safety locking device in the machine table.

Preferably, the temperature monitoring range corresponding to the alarm module of the watt-level long temperature controller is zero to three hundred degrees centigrade.

Preferably, the temperature monitoring range corresponding to the Eurotherm temperature controller alarm module is more than two hundred and seventy-five degrees centigrade.

Preferably, the external logic controller module, the relay module and the output switch are all integrated in an external control.

Compared with the prior art, the utility model provides a temperature detecting system in vacuum reaction chamber possesses following beneficial effect:

collect transfer chamber pressure module, the signal that Back reaction room temperature controller signal and Side reaction room temperature controller signal transmitted, analyze three kinds of signals through outside logic controller module, compare according to the procedure after the analysis, compare the Back, transmit processing signal to output switch department through the relay module, carry out the police dispatch newspaper according to the temperature standard that Eurotherm temperature controller alarm module and watt dragon temperature controller alarm module correspond, such setting, carry out the detection that the temperature is too high or low after detecting the wafer and getting into the reaction chamber, the board leaks and can not trigger the false alarm when detecting.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description, do not constitute a limitation of the invention, in which:

fig. 1 is a schematic view of the overall structure of a temperature detection system in a vacuum chamber according to the present invention;

fig. 2 is a schematic view of the internal operation flow structure of the system in the temperature detection system in the vacuum chamber according to the present invention;

in the figure: 1. a transfer chamber pressure module; 2. back reaction room temperature controller signal; 3. an external logic controller module; 4. a relay module; 5. an alarm module of the Eurotherm temperature controller; 6. an output switch; 7. a wattlon thermostat alarm module; 8. and controlling the temperature of the Side reaction chamber by a controller signal.

Detailed Description

In the following, the technical solutions in the embodiments of the present invention will be clearly and completely described with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-2, the present invention provides a technical solution:

a temperature detection system in a vacuum reaction chamber comprises a transmission chamber pressure module 1, a Back reaction chamber temperature controller signal 2, an external logic controller module 3, a relay module 4, a Eurotherm temperature controller alarm module 5, an output switch 6, a watt-dragon temperature controller alarm module 7 and a Side reaction chamber temperature controller signal 8, wherein when the pressure of the transmission chamber pressure module 1 is larger than 0.8T and the temperature of the reaction chamber is lower than a safety value, an abnormal condition which needs to be monitored really is detected, and an erurotherm signal and a waow tlsignal are arranged in the transmission chamber pressure module 1.

The utility model provides a temperature detecting system in vacuum reaction chamber, the output that includes transfer chamber pressure module 1 is outside logic controller module 3, the output of Back reaction room temperature accuse ware signal 2 is outside logic controller module 3, the output of Side reaction room temperature accuse ware signal 8 is outside logic controller module 3, transfer chamber pressure module 1, the output of Back reaction room temperature accuse ware signal 2 and Side reaction room temperature accuse ware signal 8 all inserts to outside logic controller module 3 in, transfer chamber pressure module 1, Back reaction room temperature accuse ware signal 2 and Side reaction room temperature accuse ware signal 8 all carry out signal input through the wire rod of connecting separately.

A temperature detecting system in a vacuum reaction chamber comprises an output end of an external logic controller module 3 which is a relay module 4, an output end of the relay module 4 is an output switch 6, the output switch 6 is provided with two output ends, one output end of the output switch 6 is an Eurotherm temperature controller alarm module 5,

the temperature monitoring range corresponding to the Eurotherm temperature controller alarm module 5 is more than two hundred seventy five degrees centigrade, the other output end of the output switch 6 is a Watson temperature controller alarm module 7, and the temperature monitoring range corresponding to the Watson temperature controller alarm module 7 is zero to three hundred degrees centigrade.

The utility model discloses a theory of operation and use flow: after the utility model is installed, the signal of the comprehensive transmission chamber pressure module 1, the signal of the eurotherm and the signal transmitted by the signal of the watlow (wherein the watlow is a temperature controller, the independent J-type thermocouple signal input and the direct current transmission output are 0-5V direct current corresponding to 0-300 ℃, the signal of the watlow can be fed back to the CPU of the machine station, the eurotherm does not feed back the signal, the switch is turned off only when the temperature exceeds the standard, the machine station is stopped and alarms, so the signal of the eurotherm is mainly extracted and used for supplementing and detecting the watlow signal collected by the CPU, the signal of the eurotherm is more troublesome, namely, the signal is easy to be mistakenly alarmed when the leakage is detected, the signal of the pressure gauge when the leakage is detected needs to be collected again and logic processing is carried out), the comprehensive analysis is carried out on the three signals through the external logic controller module 3, the comparison is carried out according to the program after the analysis, after the comparison, the processed signal is transmitted to the output switch 6 through the, and alarming according to the temperature standards corresponding to the Eurotherm temperature controller alarming module 5 and the Watson temperature controller alarming module 7.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a temperature detecting system in vacuum reaction chamber, includes transfer chamber pressure module (1), Back reaction room temperature accuse ware signal (2), outside logic controller module (3), relay module (4), Eurotherm temperature controller alarm module (5), output switch (6), watt dragon temperature controller alarm module (7) and Side reaction room temperature accuse ware signal (8), its characterized in that: the output end of the conveying chamber pressure module (1) is an external logic controller module (3), an eruotherm signal and a watlow signal are arranged in the conveying chamber pressure module (1), the output end of the Back reaction chamber temperature controller signal (2) is the external logic controller module (3), the output end of the Side reaction chamber temperature controller signal (8) is the external logic controller module (3), the output ends of the conveying chamber pressure module (1), the Back reaction chamber temperature controller signal (2) and the Side reaction chamber temperature controller signal (8) are connected into the external logic controller module (3), the output end of the external logic controller module (3) is a relay module (4), the output end of the relay module (4) is an output switch (6), the output switch (6) is provided with two output ends, one output end of the output switch (6) is an Eurotherm temperature controller alarm module (5), and the other output end of the output switch (6) is provided with a wattlong temperature controller alarm module (7).

2. The system of claim 1, wherein: and the transmission chamber pressure module (1), the Back reaction room temperature controller signal (2) and the Side reaction room temperature controller signal (8) are all subjected to signal input through wires which are respectively connected.

3. The system of claim 1, wherein: the output signal of the alarm module (5) of the Eurotherm temperature controller can be plugged into a safety locking device in the machine table.

4. The system of claim 1, wherein: the temperature monitoring range corresponding to the alarm module (7) of the watt-level controller is zero to three hundred degrees centigrade.

5. The system of claim 1, wherein: the temperature monitoring range corresponding to the Eurotherm temperature controller alarm module (5) is more than two hundred and seventy five degrees centigrade.

6. The system of claim 1, wherein: and the external logic controller module (3), the relay module (4) and the output switch (6) are integrated into external control.