CN210514936U - Material detection device and exposure equipment - Google Patents
Material detection device and exposure equipment Download PDFInfo
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- CN210514936U CN210514936U CN201922010343.7U CN201922010343U CN210514936U CN 210514936 U CN210514936 U CN 210514936U CN 201922010343 U CN201922010343 U CN 201922010343U CN 210514936 U CN210514936 U CN 210514936U
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Abstract
The utility model discloses a material detection device and exposure equipment, wherein a plurality of material placing grooves are arranged in a material storage library of the material detection device; the upper surface of the material placing groove is provided with a pressure sensor; this pressure sensor is used for detecting the pressure that the upper surface of material standing groove received to with pressure detection signal of telecommunication output to pressure detection circuit, so that pressure detection circuit can be according to each pressure sensor's pressure detection signal of telecommunication output testing result determines whether to place the material in each material standing groove. The utility model discloses material detection device simple structure, and have higher detection accuracy.
Description
Technical Field
The embodiment of the utility model provides a relate to semiconductor process equipment technical neighborhood, especially relate to a material detection device and exposure equipment.
Background
The material detection is to detect whether a corresponding material exists at a certain position, for example, whether a mask is stored in a mask library or not in an exposure process of a semiconductor manufacturing process, and the position of the mask needs to be detected, so as to ensure the reliability and the efficiency of mask transmission.
The current mask plate transmission process is usually an automatic transmission process, and in order to ensure the safety of the mask plate and the reliability and high efficiency of transmission, whether the mask plate is placed in a mask plate storage library for storing the mask plate and the placement position of the mask plate need to be detected. In the prior art, an opposite-type optical fiber sensor is arranged in a reticle library, and the opposite-type optical fiber sensor comprises an optical receiver and an optical transmitter, wherein the optical receiver and the optical transmitter are respectively arranged at two sides of a reticle slot of the reticle library, an optical signal sent by the optical transmitter is received by the optical receiver, so that when a reticle is provided, part of an optical signal sent by the optical transmitter is shielded by the reticle, and the optical signal received by the optical receiver is weaker; when the mask is not used, the optical signal sent by the optical transmitter can be directly received by the optical receiver, and the optical signal received by the optical receiver is stronger. Thus, when there are a plurality of reticle pods in the reticle library, each reticle pod may be provided with a pair of optical receiver and optical transmitter to detect whether a reticle is placed in each reticle pod.
However, in the correlation optical fiber sensor in the related art, it is necessary to provide an optical receiver and an optical transmitter on both sides of the plate groove, respectively, and the optical receiver and the optical transmitter have high position assembly accuracy, have a complicated structure, and easily cause crosstalk of optical signals when there are a plurality of pairs of optical receivers and optical transmitters, thereby affecting the determination result.
SUMMERY OF THE UTILITY MODEL
An embodiment of the utility model provides a material detection device and exposure equipment to simplify material transmission device's structure, improve the degree of accuracy of judging the material position.
In a first aspect, an embodiment of the present invention provides a material detecting device, include:
the material storage warehouse is provided with a plurality of material placing grooves; the upper surface of the material placing groove is provided with a pressure sensor; the pressure sensor is used for detecting the pressure applied to the upper surface of the material placing groove and outputting a pressure detection electric signal;
the input end of the pressure detection circuit is electrically connected with the output end of the pressure sensor of each material placing groove; the pressure detection circuit receives detection electric signals output by the pressure sensors and outputs detection results.
In a second aspect, the embodiments of the present invention further provide an exposure apparatus, including: the material detection device
The embodiment of the utility model provides a material detection device and exposure equipment sets up pressure sensor respectively through the upper surface at each material standing groove of material storage storehouse, and this pressure sensor can detect the pressure that corresponding material standing groove upper surface received, and according to the corresponding pressure detection signal of telecommunication of pressure detection circuit output is given to the pressure that detects to make pressure detection circuit can be according to the pressure detection signal of telecommunication of pressure sensor output, output testing result, whether corresponding material has been placed to this testing result reflection material standing groove. The embodiment of the utility model provides a whether can realize placing corresponding material in the material standing groove through pressure sensor and detect, this material detection device has simple structure, and has higher material detection degree of accuracy.
Drawings
Fig. 1 is a schematic structural diagram of a material detection device according to an embodiment of the present invention;
fig. 2 is a block diagram of a material detecting device according to an embodiment of the present invention;
fig. 3 is a block diagram of a material detecting device according to another embodiment of the present invention;
fig. 4 is a schematic structural diagram of a pressure detection circuit according to an embodiment of the present invention;
fig. 5 is a schematic circuit diagram of a pressure detection circuit according to an embodiment of the present invention;
fig. 6 is a schematic diagram of a relationship between pressure and voltage output according to an embodiment of the present invention;
fig. 7 is a schematic circuit diagram of a signal conversion unit according to an embodiment of the present invention;
fig. 8 is a schematic diagram of another relationship between pressure and voltage output provided by an embodiment of the present invention;
fig. 9 is a schematic circuit diagram of a signal gating unit according to an embodiment of the present invention;
fig. 10 is a schematic top view of a material placement groove according to an embodiment of the present invention;
fig. 11 is a schematic top view of another material placement trough according to an embodiment of the present invention;
fig. 12 is a schematic top view of another material placement trough according to an embodiment of the present invention;
fig. 13 is a block diagram of an exposure apparatus according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It is also noted that, for the sake of convenience in description, only some structures related to the present invention are shown in the drawings, not all of them, and the same or similar reference numerals are used throughout to refer to the same or similar elements or elements having the same or similar functions.
Fig. 1 is a schematic structural diagram of a material detecting device provided by the embodiment of the present invention, and fig. 2 is a block diagram of a material detecting device provided by the embodiment of the present invention. As shown in fig. 1 and 2, the material detecting apparatus includes a material storage 100, a plurality of material placement grooves 10 provided in the material storage 100, a pressure sensor 20 provided on an upper surface 110 of the material placement groove 10, and a pressure detecting circuit 30 electrically connected to an output end of the pressure sensor 20 of each material placement groove 10. The pressure sensor 20 is used for detecting the pressure applied to the upper surface 110 of the material placing groove 10 and outputting a pressure detection electric signal; the input end of the pressure detection circuit 30 is electrically connected with the output end of the pressure sensor 20 of each material placing groove 10; the pressure detection circuit 30 receives the detection electric signals output from the respective pressure sensors 20 and outputs the detection results.
Specifically, the upper surface 110 of the material placement groove 10 of the material detection device 100 can be used for placing the corresponding material 101. When the material 101 is placed in the material placing groove 10, the upper surface 110 of the material placing groove 10 is subjected to corresponding pressure, and at this time, the pressure sensor 20 disposed on the upper surface 110 of the material placing groove 10 detects the pressure applied to the upper surface of the material placing groove 10, converts the pressure into a pressure detection electrical signal, and inputs the pressure detection electrical signal to the pressure detection circuit 30; the pressure detection circuit 30 can output a corresponding detection result according to the pressure detection electric signal output by the pressure sensor 20, and the detection result may be, for example, a high level signal or a low level signal to indicate that the material placing groove 10 has the material placed therein; on the contrary, when the material 10 is not placed in the material placing groove 10, the pressure sensor 20 does not detect that the upper surface 110 of the material placing groove 10 is under pressure, and the signal that can be output by the pressure detection circuit 30 at this time can be opposite to the signal when the material 10 is placed in the material placing groove 10, so that whether the material is placed in the material placing groove or not can be detected.
For example, the material inspection apparatus may be an apparatus that can be used to access a reticle in a semiconductor manufacturing process, that is, the material 101 placed in the material inspection apparatus is a reticle. In order to ensure safety of taking and placing the mask 101, when the mask 101 is placed in the material placing slot 10 of the material storage 100, it is required to detect whether the material placing slot 10 in which the mask 101 is not placed exists in the material storage 100 and the position of the material placing slot 10 in the material storage 100. The pressure sensor 20 disposed on the upper surface 110 of the material placing groove 10 in the material storage library 100 detects the pressure applied to the upper surface 110 of the material placing groove 10, and converts the detected pressure into an electrical pressure detection signal, which is received by the pressure detection circuit 30, so that the pressure detection circuit 30 can output a detection result according to the electrical pressure detection signal. When the mask plate 101 is not placed in the material placing groove 10, the pressure sensor 20 arranged on the upper surface 110 of the material placing groove 10 does not detect that the upper surface 110 of the material placing groove 10 is subjected to pressure, and the pressure sensor 20 outputs relatively low pressure detection voltage; in contrast, when the pressure sensor 20 on the upper surface 110 of the material placing chute 10 detects that the upper surface 110 of the material placing chute 10 is subjected to pressure, the pressure sensor 20 outputs a relatively high pressure detection voltage, and meanwhile, when the pressure detection circuit 30 receives a relatively low pressure detection voltage output by the pressure sensor 20, the detection result output by the pressure detection circuit 30 is a low-level signal; when the pressure detection circuit 30 receives a relatively high pressure detection voltage output from the pressure sensor 20, the detection result output from the pressure detection circuit 30 is a high-level signal. In this way, whether the mask plate 101 is placed in each material placing slot 10 of the material storage library 100 can be sequentially judged through the high-low level signal output by the pressure detection circuit 30, so as to determine the position of the material placing slot 10 in the material placing library 100, where the mask plate 101 is not placed.
This embodiment sets up pressure sensor through the upper surface at each material standing groove in material placement storehouse, this pressure sensor can receive pressure to the upper surface of corresponding material standing groove and detect, make pressure detection circuit can be according to the detection signal of telecommunication output detection result of each pressure sensor output, with the testing result that can be according to pressure detection circuit output, judge whether placed the material in each material standing groove in material placement storehouse, thereby need not to consider pressure sensor's among the material detection device assembly precision, make material detection device have simple structure. Meanwhile, the pressure sensor detects through pressure, signal crosstalk cannot occur, and therefore the detection accuracy of the material detection device can be improved.
It should be noted that the pressure limit that can be detected by the pressure sensor 20 may be designed according to actual situations, for example, when the size of the reticle 101 is small, the pressure sensor 20 with a small pressure detection range may be selected; when the size of the mask 101 is large, the pressure sensor 20 with a large pressure detection range can be selected, and the embodiment of the present invention is not particularly limited thereto.
Optionally, fig. 3 is a block diagram of a structure of another material detecting device provided in the embodiment of the present invention. As shown in fig. 3, on the basis of the above embodiment, the material detecting apparatus may further include a display 40, and the display 40 may receive and display the detection result output by the pressure detecting circuit 30, so as to visually display whether the upper surface of each material placing groove of the material placing library is subjected to pressure, and thus, the material placing groove where the material is placed and/or not placed may be determined according to the result displayed by the display 40.
Optionally, fig. 4 is a schematic structural diagram of a pressure detection circuit provided in an embodiment of the present invention. As shown in fig. 4, on the basis of the above-described embodiment, the pressure detection circuit 30 may include a logic determination unit 330, a signal gating unit 320, and a plurality of signal conversion units 310 provided in one-to-one correspondence with the pressure sensors 20; wherein, the output end of the pressure sensor 20 is electrically connected with the input end of the signal conversion unit 310; the signal conversion unit 310 receives the pressure detection electric signal output by the pressure sensor 20 and outputs a detection voltage; the signal gating unit 320 includes a plurality of input terminals and an output terminal; each input end of the signal gating unit 320 receives the detection voltage output by each signal conversion unit 310, and outputs the detection voltage of one signal conversion unit 310 through the output end of the signal gating unit 320; the input end of the logic judgment unit 330 is electrically connected with the output end of the signal gating unit 320; the logic judgment unit 330 receives the detection voltage output by the output terminal of the signal gating unit 320 and outputs a logic judgment result.
Specifically, pressure sensor 20 can convert the pressure that detects into the pressure detection signal of telecommunication, and this pressure detection signal of telecommunication can be converted into detection voltage by signal conversion unit 310 to make logic judgement unit 330 can carry out corresponding logic judgement according to the detection voltage of signal conversion unit 310 conversion, thereby output corresponding testing result, realize placing the detection whether corresponding material has been placed to each material standing groove in the storehouse to the material. Because a plurality of material placing grooves are formed in the material placing library, when one pressure sensor 20 is arranged on the upper surface of each material placing groove, a plurality of pressure sensors 20 corresponding to the plurality of material placing grooves one to one exist, for example, when 3 material placing grooves are formed in the material placing library, the pressure sensors 20 corresponding to the material placing grooves are respectively a pressure sensor 21, a pressure sensor 22 and a pressure sensor 23, and the signal conversion units 310 respectively electrically connected with the pressure sensor 21, the pressure sensor 22 and the pressure sensor 23 are respectively a signal conversion unit 31, a signal conversion unit 32 and a signal conversion unit 33. At this time, the logic determination unit 330 needs to perform logic determination on the pressure detection results output by the plurality of pressure sensors 20. By providing the signal gating unit 320 between each signal conversion unit 310 and the logic determination unit 330, the signal gating unit 320 can output the detection voltages inputted from the respective input terminals thereof in a time-division manner, so that the logic determination unit 330 can detect the detection results outputted from the pressure sensor 20, respectively. Meanwhile, when the situation that whether materials are placed in a certain or some material placing grooves is known, or whether materials are placed in a certain or some material placing grooves is detected, the pressure detection result of the pressure sensor 20 corresponding to the certain or some material placing grooves can be selectively output through the signal gating unit 320, so that the logic judgment unit 330 can only perform logic judgment on whether materials are placed in the certain or some material placing grooves, and therefore the material detection efficiency can be improved, and the detection cost can be reduced.
It should be noted that, on the premise that the function of the pressure detection circuit 30 can be realized, the editing and determining unit 330, the signal gating unit 320, and each signal converting unit 310 of the pressure detection circuit 30 may include any electronic component, which is not specifically limited in the embodiment of the present invention.
For example, fig. 5 is a schematic circuit structure diagram of a pressure detection circuit provided in an embodiment of the present invention. As shown in fig. 5, the signal conversion unit 310 of the pressure detecting circuit 30 may include an operational amplifier U1 and a degeneration resistor R1; the inverting input terminal of the operational amplifier U1 is electrically connected to the output terminal of the pressure sensor 20, the non-inverting input terminal of the operational amplifier U1 is grounded, the first reference signal terminal of the operational amplifier U1 is electrically connected to the high level signal source Vr, the second reference signal terminal of the operational amplifier U1 is electrically connected to the low level signal source, and the output terminal of the operational amplifier U1 is electrically connected to one input terminal of the signal gating unit 320; the first end of the negative feedback resistor R1 is electrically connected with the inverting input end of the operational amplifier U1, and the second end of the negative feedback resistor R1 is electrically connected with the output end of the operational amplifier U1.
The pressure sensor 20 may be, for example, a piezoresistive pressure sensor, which changes its resistance when mechanically stressed. When the power supply V1 supplies power to the pressure sensor 20, the pressure sensor 20 may act as a variable resistor. When the pressure sensor 20 is not subjected to any stress, the resistance Rs of the variable resistor of the pressure sensor 20 may be infinite, and the electrical signal output by the output end of the pressure sensor 20 is extremely small; when the pressure sensor 20 senses that the stress exists, the resistance Rs of the variable resistor of the pressure sensor 20 decreases with the increase of the stress, and the electrical signal output by the output end of the pressure sensor 20 increases. When the signal conversion circuit 310 includes the operational amplifier U1 and the degeneration resistor R1, the low signal source electrically connected to the second reference signal terminal of the operational amplifier U1 may be a ground signal, and the power supply V1 of the pressure sensor 20 is-Vr, the voltage V2 output from the output terminal of the operational amplifier U1 is Vr (R1/Rs). Thus, when no material is placed in the material placing groove, the pressure sensor 20 located on the upper surface of the material placing groove does not detect the existence of pressure, the resistance Rs of the variable resistor of the pressure sensor 20 is large, and the voltage V2 output by the output end of the operational amplifier U1 is small; when the material placing groove is used for placing the material, the pressure sensor 20 positioned on the upper surface of the material placing groove detects that the pressure exists, the resistance value Rs of the variable resistor of the pressure sensor 20 is reduced, and the voltage V2 output by the output end of the operational amplifier U1 is increased. At this time, the voltage V2 output from the output terminal of the operational amplifier U1 has a linear relationship with the pressure detected by the pressure sensor 20.
Fig. 6 is a schematic diagram of a relationship between pressure and voltage output according to an embodiment of the present invention. As shown in fig. 5 and 6 in conjunction, since the resistance Rs of the variable resistor of the pressure sensor 20 decreases as the pressure detected by the pressure sensor 20 increases, the voltage V2 output from the output terminal of the operational amplifier U1 increases, so that the voltage V2 output from the output terminal of the operational amplifier U1 can increase linearly as the pressure detected by the pressure sensor 20 increases.
In addition, optionally, fig. 7 is a schematic circuit structure diagram of a signal conversion unit according to an embodiment of the present invention. As shown in fig. 4 and 7, the signal conversion unit 310 may further include a voltage dividing resistor R2, a first end of the voltage dividing resistor R2 is electrically connected to the output end of the pressure sensor 20, and a second end of the voltage dividing resistor R2 is grounded; the first terminal of the voltage dividing resistor R2 is also electrically connected to an input terminal of the signal gating unit 320. When the pressure sensor 20 is equivalent to a variable resistor Rs and the power supply V1 of the pressure sensor is Vr, the voltage V2 output by the signal conversion unit 310 is Vr R2/(Rs + R2). At this time, the voltage V2 output by the signal conversion unit 310 and the pressure sensor have a nonlinear relationship.
Fig. 8 is a schematic diagram of another relationship between pressure and voltage output according to an embodiment of the present invention. Referring to fig. 7 and 8, when a material is placed in the material placing groove, the pressure sensor 20 detects that the upper surface of the material placing groove is subjected to pressure, so that the resistance value of the variable resistor Rs of the pressure sensor 20 decreases, and the voltage V2 output by the signal converting unit 310 increases nonlinearly, thereby enabling the voltage V2 output by the signal converting unit 310 to increase nonlinearly with the increase in the pressure detected by the pressure sensor 20.
Alternatively, referring to fig. 5 in conjunction with the drawing, the signal gating unit 320 may include a multiplexer 321. The multiplexer 321 has a plurality of inputs and an output, and may include 8 inputs and an output from S1 to S8, for example, and each input of the multiplexer 320 may be electrically connected to an output of one of the signal converting units 310. When the voltage V2 input from the input terminal S5 of the multiplexer 320 needs to be detected, the multiplexer 320 can control the input terminal S5 of the multiplexer 320 to be electrically connected to the output terminal Po of the multiplexer 320 through an external logic control signal, so that the voltage V2 input from the input terminal S5 of the multiplexer 320 can be input to the logic control unit 330, so that the logic control unit 330 outputs a corresponding logic detection result, and thus, whether the pressure sensor 20 corresponding to the signal conversion unit 310 electrically connected to the input terminal S5 of the multiplexer 320 detects the existence of pressure is determined.
In addition, fig. 9 is a schematic circuit diagram of a signal gating unit according to an embodiment of the present invention. As shown in fig. 5 and 9, the signal gating unit 320 may also include a plurality of switches; the control end of each switch is electrically connected with each clock control signal end, and the input end of each switch is electrically connected with the output end of each signal conversion unit 310; the output end of each switch is electrically connected to the input end of the logic judgment unit 330.
For example, when the sensor 20 for detecting whether pressure exists is provided in three, the signal gating unit 320 may include three switches T1, T2, and T3, wherein an input terminal of the switch T1 may be electrically connected to an output terminal of the signal converting unit 31, an input terminal of the switch T2 may be electrically connected to an output terminal of the signal converting unit 32, and an input terminal of the switch T3 may be electrically connected to an output terminal of the signal converting unit 33. Wherein the switches T1, T2, and T3 may each be N-type transistors. When the pressure detection condition of the pressure sensor 23 electrically connected to the input terminal of the signal conversion unit 33 needs to be determined, the clock signal providing unit 322 may provide a high-level signal to the switch T3, and at this time, after the pressure detection electrical signal output by the pressure sensor 23 is converted by the signal conversion unit 33, the pressure detection electrical signal may be output to the input terminal of the logic determination unit 330 through the switch T3, so that the logic determination unit 330 may perform logic determination according to the electrical signal V3 output by the output terminal of the open light T3, generate a logic detection result, and thereby may determine whether the material is placed in the material placement groove corresponding to the pressure sensor 23.
It should be noted that fig. 5 exemplarily shows that the multiplexer 321 includes 8 input terminals, but in the implementation of the present invention, the number of the input terminals of the multiplexer 321 may be designed according to actual needs, and the embodiment of the present invention is not limited specifically; meanwhile, when the multiple gating unit 320 includes a plurality of switches, the number of switches in the multiple gating unit 320 may be set according to the number of the pressure sensors 20, that is, each pressure sensor 20 may correspond to one switch, and the embodiment of the present invention is not limited specifically.
Optionally, with continued reference to fig. 5, the logic decision unit 330 may include a comparator U2 and a logic controller 332; the non-inverting input terminal of the comparator U2 is electrically connected with the output terminal of the signal gating unit 320, and the inverting input terminal of the comparator U2 is electrically connected with the reference voltage source Vref; the output of comparator U2 is electrically connected to the input of logic controller 332.
For example, when a plurality of pressure sensors 20 are disposed in the material storage library to detect whether materials are placed in each material placement slot, a signal gating unit 320 may select a detection signal of one of the pressure sensors 20, and store the detection signal of each of the pressure sensors 20 in different registers of the logic controller 332, so as to implement time-sharing and selective detection and save hardware cost.
The voltage output from the pressure sensor 20 after being converted by the signal conversion unit 310 is V2, and the output voltage V2 may increase as the pressure sensor 20 detects an increase in the reaching pressure. The reference voltage source Vref input to the inverting input terminal of the comparator U2 is a reference voltage, and the reference voltage can be adjusted according to actual requirements. The voltage V2 converted by the signal conversion unit 310 is input to the non-inverting input terminal of the comparator U2 through the signal gating unit 320, and when V2 is greater than Vref, the comparator U2 outputs a high level; when V2 is less than Vref, the comparator U2 outputs low level; the signal output by the comparator U2 is logically judged by the logic controller 332, so that a detection result can be obtained, and whether the material is placed in the material placing groove or not is judged.
Further, optionally, with continued reference to fig. 4, the logic determination unit 330 may include a logic controller having digital/analog conversion and comparison determination functions. The logic controller receives the detection voltage output by the signal gating unit 320, and performs digital-to-analog conversion and comparison judgment on the detection voltage to generate a logic judgment result, so that whether the material is placed in the material placing groove can be judged according to the logic judgment result. The logic controller can carry out logic judgment on parameters in different ranges and types, has high compatibility, and can compare and judge detection signals of pressure sensors 20 in different models.
Optionally, fig. 10 is a schematic top view of a material placement groove according to an embodiment of the present invention. As shown in fig. 10, the pressure sensor 20 provided on the upper surface of the material placement chute 10 may have an elongated shape. Wherein, the upper surface of each material placing groove 10 may be provided with two strip-shaped pressure sensors 20, and the pressure sensors 20 of the two strip-shaped devices are respectively located at two opposite sides of the material placing groove 10.
Illustratively, the upper surface of the material placement chute 10 is provided with two pressure sensors 20, the two pressure sensors 20 being located on a first side 111 and a second side 112 of the material placement chute 10, respectively. Wherein, one of two pressure sensor 20 that the upper surface of material standing groove 10 set up detects the upper surface of material standing groove 10 and receives pressure, can judge that this material standing groove 10 has placed material 101 to can prevent to miss and examine by mistake, further improve material detection device's detection accuracy.
Optionally, fig. 11 is a schematic top view of another material placement trough according to an embodiment of the present invention. As shown in fig. 11, at least five pressure sensors 20 are provided on the upper surface of each material placing chute 10; the at least five pressure sensors 20 are evenly distributed on the upper surface of the material placement groove 10.
Illustratively, when the upper surface of the material placing chute 10 is provided with five pressure sensors 20, the five pressure sensors may be respectively provided at four corners of the material placing chute 10 and the center of the material placing chute 10. Wherein, one pressure sensor 20 in five pressure sensors 20 of material standing groove 10 upper surface detects material standing groove 10 upper surface and receives pressure, can judge that to place material 101 in this material standing groove 10 to can prevent to miss and examine by mistake, further improve material detection device's detection accuracy.
Fig. 12 is a schematic top view of another material placement trough according to an embodiment of the present invention. As shown in fig. 12, when the material placing tray 10 is used for placing a material with a large size, such as a reticle with a large size, the material placing tray 10 may include a plurality of cross support plates 11. Because the backup pad 11 of material standing groove 10 can have hollow out construction, whole face sets up pressure sensor 20, can increase unnecessary cost, consequently can evenly set up a plurality of pressure sensor 20 at the upper surface of backup pad 11 of material standing groove 10, for example, the upper surface of material standing groove 10 can evenly set up 9 pressure sensor 20, these 9 pressure sensor 20 can detect the pressure that each position department of upper surface of material standing groove 10 received respectively, one pressure sensor 20 among 9 pressure sensor 20 detects material standing groove 10 upper surface and receives pressure, can judge that the mask version has been placed in this material standing groove 10.
The embodiment of the utility model provides a still provide an exposure equipment, this exposure equipment includes the utility model provides a material detection device, consequently this exposure equipment also possesses the utility model discloses implement the material detection device's that provides characteristic and effect, the same part can refer to the description of the above, no longer gives unnecessary details here.
For example, fig. 13 is a block diagram of an exposure apparatus according to an embodiment of the present invention. As shown in fig. 13, the exposure apparatus 300 includes a material detecting device 200 according to an embodiment of the present invention. The material detection device 200 may be, for example, a transport device used for transporting and storing a reticle in the exposure apparatus 300.
It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.
Claims (11)
1. A material detection device, comprising:
the material storage warehouse is provided with a plurality of material placing grooves; the upper surface of the material placing groove is provided with a pressure sensor; the pressure sensor is used for detecting the pressure applied to the upper surface of the material placing groove and outputting a pressure detection electric signal;
the input end of the pressure detection circuit is electrically connected with the output end of the pressure sensor of each material placing groove; the pressure detection circuit receives detection electric signals output by the pressure sensors and outputs detection results.
2. The material detecting device according to claim 1, wherein the pressure sensor is shaped as an elongated bar;
each upper surface of material standing groove is provided with two rectangular form pressure sensor, and set up in same two of material standing groove pressure sensor is located respectively the relative both sides of material standing groove.
3. The material detecting device according to claim 1, wherein at least five pressure sensors are provided on an upper surface of each of the material placing grooves; at least five pressure sensors are uniformly distributed on the upper surface of the material placing groove.
4. The material detection device according to any one of claims 1 to 3, wherein the pressure detection circuit comprises a logic judgment unit, a signal gating unit and a plurality of signal conversion units arranged in one-to-one correspondence with the pressure sensors;
the output end of the pressure sensor is electrically connected with the input end of the signal conversion unit; the signal conversion unit receives the pressure detection electric signal output by the pressure sensor and outputs detection voltage;
the signal gating unit comprises a plurality of input ends and an output end; each input end of the signal gating unit receives the detection voltage output by each signal conversion unit and outputs the detection voltage of one signal conversion unit through the output end of the signal gating unit;
the input end of the logic judgment unit is electrically connected with the output end of the signal gating unit; and the logic judgment unit receives the detection voltage output by the output end of the signal gating unit and outputs a logic judgment result.
5. The material detection device according to claim 4, wherein the signal conversion unit comprises an operational amplifier and a degeneration resistor;
the inverting input end of the operational amplifier is electrically connected with the output end of the pressure sensor, the non-inverting input end of the operational amplifier is grounded, the first reference signal end of the operational amplifier is electrically connected with a high-level signal source, the second reference signal end of the operational amplifier is electrically connected with a low-level signal source, and the output end of the operational amplifier is electrically connected with one input end of the signal gating unit;
the first end of the negative feedback resistor is electrically connected with the inverting input end of the operational amplifier, and the second end of the negative feedback resistor is electrically connected with the output end of the operational amplifier.
6. The material detection device of claim 4, wherein the signal conversion unit comprises a voltage dividing resistor;
the first end of the divider resistor is electrically connected with the output end of the pressure sensor, and the second end of the divider resistor is grounded; the first end of the divider resistor is also electrically connected with one input end of the signal gating unit.
7. The material detection device as claimed in claim 4, wherein the signal gating unit comprises a multiplexer;
alternatively, the signal gating unit includes a plurality of switches; the control end of the switch is electrically connected with the clock control signal end, and the input end of the switch is electrically connected with the output end of one signal conversion unit; and the output end of each switch is electrically connected with the input end of the logic judgment unit.
8. The material detection device according to claim 4, wherein the logic judgment unit comprises a comparator and a logic controller;
the non-inverting input end of the comparator is electrically connected with the output end of the signal gating unit, and the inverting input end of the comparator is electrically connected with a reference voltage source; and the output end of the comparator is electrically connected with the input end of the logic controller.
9. The material detection device of claim 4, wherein the logic determination unit comprises a logic controller;
and the logic controller receives the detection voltage output by the signal gating unit and performs digital/analog conversion and comparison judgment on the detection voltage.
10. The material detection device according to any one of claims 1 to 3, further comprising: a display;
and the display receives and displays the detection result output by the pressure detection circuit.
11. An exposure apparatus comprising the material detection device according to any one of claims 1 to 10.
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| CN201922010343.7U CN210514936U (en) | 2019-11-20 | 2019-11-20 | Material detection device and exposure equipment |
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| CN201922010343.7U CN210514936U (en) | 2019-11-20 | 2019-11-20 | Material detection device and exposure equipment |
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| CN113636255A (en) * | 2021-08-13 | 2021-11-12 | 广东高标电子科技有限公司 | Material management method and intelligent goods shelf |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113636255A (en) * | 2021-08-13 | 2021-11-12 | 广东高标电子科技有限公司 | Material management method and intelligent goods shelf |
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