CN210514694U

CN210514694U - 2 XN's MEMS photoswitch

Info

Publication number: CN210514694U
Application number: CN201921489418.8U
Authority: CN
Inventors: 郑洁; 黄菁华; 武琦
Original assignee: Accelink Technologies Co Ltd
Current assignee: Accelink Technologies Co Ltd
Priority date: 2019-09-09
Filing date: 2019-09-09
Publication date: 2020-05-12
Anticipated expiration: 2029-09-09

Abstract

The utility model relates to the technical field of optical communication and optical sensing, in particular to a 2XN MEMS optical switch, which comprises a two-dimensional optical fiber array, a collimating lens group and a two-dimensional MEMS reflector group which are arranged in sequence; the two-dimensional optical fiber array is composed of N optical fibers which are arranged in a two-dimensional mode, wherein two optical fibers are input ports, and the rest are output ports; the collimating lens group comprises one or more collimating lenses, and the two-dimensional MEMS reflector group comprises one or more reflectors capable of rotating in two dimensions; after entering from any input port, the optical signal is converged by the collimating lens to reach the reflector, and is reflected back by the two-dimensional rotating reflector and then is output from any output port. The structure only uses one 1xN optical switch material, selects two paths of optical fibers as incidence, can realize the function of the 2xN optical switch by adjusting the rotation angle of the reflector, and obviously improves the size, the cost and the manufacturing process compared with the traditional spliced 2xN optical switch.

Description

2 XN's MEMS photoswitch

[ technical field ] A method for producing a semiconductor device

The utility model relates to an optical communication and light sensing technical field, concretely relates to 2 XN's MEMS photoswitch.

[ background of the invention ]

An Optical Switch (OSW) is a logic device for switching on/off or selectively switching transmission paths of Optical signals and Optical energy in an Optical network, and is widely applied in the fields of automatic Optical path switching protection, Optical network cross connection, Optical network monitoring, Optical device testing, Optical module testing and the like. Currently, optical switches in the market are mainly classified into conventional Mechanical optical switches, magneto-optical switches, thermo-optical switches, acousto-optical switches, Micro-Electro-Mechanical Systems (MEMS) optical switches, and the like. The MEMS optical switch not only has the characteristics of low insertion loss, high isolation, low polarization sensitivity, etc. of the conventional mechanical optical switch, but also has the characteristics of small size, high integration level, etc., and thus has been popular in the industry.

The basic principle of the MEMS optical switch is to etch a plurality of tiny mirrors on a silicon wafer, and lift or mechanically rotate the movable micromirrors by static electricity or other control force to change the propagation direction of the input light, thereby implementing the switching function, and having a switching speed of millisecond. At present, most of reflective 1xN MEMS optical switches adopt a coaxial package optical path structure, as shown in fig. 1, the MEMS optical switches are composed of an optical fiber array 01, a lens 02 and a mirror chip 03, an optical signal is input from the optical fiber array 01, collimated and projected onto the mirror chip 03 which rotates in two dimensions through the lens 02, reflected and then transmitted in reverse direction through the lens 02, and the optical signal is output from any other optical fiber of the optical fiber array 01. For a 2xN optical switch, a 2x1 optical switch and a 1xN optical switch are usually spliced at present, which not only increases the volume relative to the 1xN optical switch, but also makes the control method and the driving circuit more complicated and more costly.

In view of the above, it is an urgent problem in the art to overcome the above-mentioned drawbacks of the prior art.

[ Utility model ] content

The utility model discloses the technical problem that needs to solve is:

the conventional 2xN optical switch is usually formed by splicing a 2x1 optical switch and a 1xN optical switch, which not only increases the size of the optical switch relative to the 1xN optical switch, but also has more complicated control mode and driving circuit and higher cost.

The utility model discloses a following technical scheme reaches above-mentioned purpose:

the utility model provides a 2XN MEMS photoswitch, which comprises a two-dimensional optical fiber array 1, a collimating lens group 2 and a two-dimensional MEMS reflector group 3 which are arranged in sequence along the light path direction;

the two-dimensional optical fiber array 1 is used for inputting and outputting optical signals and consists of N optical fibers which are arranged in a two-dimensional mode, wherein two optical fibers serve as input ports, and the rest optical fibers serve as output ports;

the collimating lens group 2 comprises one or more collimating lenses for collimating and converging light beams; the two-dimensional MEMS mirror group 3 comprises one or more MEMS mirrors which can rotate in two dimensions and is used for controlling the selection of optical signal channels;

after entering from any input port of the two-dimensional fiber array 1, the optical signal is converged by the collimating lens group 2 to reach the two-dimensional MEMS mirror group 3, and the reflected optical signal is collimated by the collimating lens group 2 through two-dimensional rotation of one or more MEMS mirrors and then output from any output port of the two-dimensional fiber array 1.

Preferably, the collimating lens group 2 comprises a collimating lens 20, and the two-dimensional MEMS mirror group 3 comprises a two-dimensional rotatable MEMS mirror 30;

after entering from any input port of the two-dimensional fiber array 1, the optical signal is converged by the collimating lens 20 to reach the MEMS mirror 30, and the reflected optical signal is collimated by the collimating lens 20 by the two-dimensional rotation of the MEMS mirror 30 and then output from any output port of the two-dimensional fiber array 1.

Preferably, the two-dimensional fiber array 1 is disposed on a front focal plane of the collimating lens 20, and the MEMS mirror 30 is disposed on a back focal plane of the collimating lens 20.

Preferably, the two-dimensional optical fiber array 1 is divided into four optical fiber array regions according to a shape like a Chinese character tian, which are a first optical fiber array region 11, a second optical fiber array region 12, a third optical fiber array region 13 and a fourth optical fiber array region 14; wherein, the two input ports are respectively positioned in two different optical fiber array areas;

the collimating lens group 2 comprises a first collimating lens 21, a second collimating lens 22, a third collimating lens 23 and a fourth collimating lens 24, which correspond to the four optical fiber array regions respectively;

the two-dimensional MEMS mirror group 3 includes a first MEMS mirror 31, a second MEMS mirror 32, a third MEMS mirror 33, and a fourth MEMS mirror 34, which correspond to the four optical fiber array regions, respectively.

Preferably, the four collimating lenses of the collimating lens group 2 are located on the same plane and arranged in a shape like a Chinese character 'tian'; the four MEMS reflectors of the two-dimensional MEMS reflector group 3 are positioned on the same plane and are arranged in a shape like a Chinese character 'tian';

the four optical fiber array areas are respectively and correspondingly located on the front focal planes of the four collimating lenses, and the four MEMS reflectors are respectively and correspondingly located on the rear focal planes of the four collimating lenses.

Preferably, when two input ports are located in the first fiber array region 11 and the second fiber array region 12, respectively, the following optical path structures exist:

after entering from the input port of the first fiber array region 11, the optical signal is converged by the first collimating lens 21 to reach the first MEMS mirror 31, and by two-dimensional rotation of the first MEMS mirror 31, the reflected optical signal is collimated by the first collimating lens 21 and then output from any output port of the first fiber array region 11;

after entering from the input port of the first fiber array region 11, the optical signal is converged by the first collimating lens 21 to reach the first MEMS mirror 31, and by two-dimensional rotation of the first MEMS mirror 31 and the third MEMS mirror 33, the reflected optical signal is collimated by the third collimating lens 23 and then output from any output port of the third fiber array region 13;

after entering from the input port of the first fiber array region 11, the optical signal is converged by the first collimating lens 21 to reach the first MEMS mirror 31, and through the two-dimensional rotation of the first MEMS mirror 31 and the fourth MEMS mirror 34, the reflected optical signal is collimated by the fourth collimating lens 24 and then output from any output port of the fourth fiber array region 14.

Preferably, the collimating lens group 2 is a collimating lens array composed of N silicon lenses, and the N silicon lenses and the N optical fibers are respectively arranged in a one-to-one correspondence.

Preferably, the two-dimensional optical fiber array 1 includes a fiber holder 1A having a two-dimensional array of holes and a two-dimensional arrangement of optical fiber bundles 1B, and one optical fiber is inserted into each hole of the fiber holder 1A.

Preferably, the MEMS mirror is used for switching the channel of the optical signal in the X direction when rotating in the X direction; when the MEMS mirror is rotated in the Y direction, it is used to switch the path of the optical signal in the Y direction.

Preferably, the N optical fibers are all cladding-etched optical fibers.

The utility model has the advantages that:

the utility model provides a in 2 XN's MEMS photoswitch, only utilize a 1xN photoswitch material, two-dimensional fiber array, collimating lens and two-dimensional speculum chip promptly, select two way optic fibre as the incidence, the rotation angle through adjustment speculum chip can realize 2xN photoswitch's function. The 2xN optical switch is consistent with the 1xN optical switch in terms of volume, cost and driving circuit, and compared with the traditional spliced 2xN optical switch, the size, cost and manufacturing process of the optical switch are obviously improved, and the corner requirement when two optical signals are jointly incident can be realized.

[ description of the drawings ]

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments of the present invention will be briefly described below. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be obtained from these drawings without inventive effort.

FIG. 1 is a schematic diagram of a 1XN MEMS optical switch according to the prior art;

fig. 2 is a schematic optical path diagram of a 2XN MEMS optical switch according to an embodiment of the present invention;

fig. 3 is a schematic diagram of optical fiber distribution of a two-dimensional optical fiber array according to an embodiment of the present invention;

fig. 4 is a schematic perspective view of a two-dimensional optical fiber array according to an embodiment of the present invention;

fig. 5 is a schematic perspective view of a collimating lens array according to an embodiment of the present invention;

fig. 6 is a schematic optical path diagram of another 2XN MEMS optical switch according to an embodiment of the present invention;

fig. 7 is a schematic distribution diagram of a two-dimensional fiber array, a collimating lens and a MEMS mirror provided in an embodiment of the present invention;

fig. 8 is a schematic optical path diagram of another 2XN MEMS optical switch according to an embodiment of the present invention.

[ detailed description ] embodiments

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

In the description of the present invention, the terms "inner", "outer", "longitudinal", "lateral", "up", "down", "top", "bottom", "left", "right", "front", "back", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description of the present invention and do not require that the present invention must be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the technical features mentioned in the embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other. The present invention will be described in detail with reference to the accompanying drawings and examples.

Example 1:

the embodiment of the utility model provides a 2 XN's MEMS photoswitch, as shown in FIG. 2, include two-dimensional fiber array 1, collimating lens group 2 and two-dimensional MEMS speculum group 3 that set up in order along the light path direction. The two-dimensional optical fiber array 1 is used for inputting and outputting optical signals and consists of N optical fibers which are arranged in a two-dimensional mode, wherein two optical fibers serve as input ports, and the rest optical fibers serve as output ports; and the N paths of optical fibers are cladding corrosion optical fibers.

after entering from any input port of the two-dimensional fiber array 1, the optical signal is converged by the collimating lens group 2 to reach the two-dimensional MEMS mirror group 3, and the reflected optical signal is collimated by the collimating lens group 2 through two-dimensional rotation of one or more MEMS mirrors and then can be output from any output port of the two-dimensional fiber array 1.

The embodiment of the utility model provides an in the MEMS photoswitch of above-mentioned 2XN, only utilize a 1xN photoswitch material, two-dimensional fiber array, collimating lens and two-dimensional speculum chip promptly, select two way optic fibre as the incidence, can realize 2xN photoswitch's function through the rotation angle of adjustment speculum chip. The 2xN optical switch is consistent with the 1xN optical switch in terms of volume, cost and driving circuit, and compared with the traditional spliced 2xN optical switch, the size, cost and manufacturing process of the optical switch are obviously improved, and the corner requirement when two optical signals are jointly incident can be realized.

With continued reference to fig. 2, in a specific embodiment, the collimating lens group 2 comprises only one collimating lens 20, the two-dimensional MEMS mirror group 3 comprises only one MEMS mirror 30, and the MEMS mirror 30 is two-dimensionally rotatable, i.e., rotatable in both X and Y dimensions; when the MEMS reflector rotates in the X direction, the MEMS reflector can be used for switching a channel of an optical signal in the X direction; when the MEMS mirror is rotated in the Y direction, it can be used to switch the path of the optical signal in the Y direction. The two-dimensional optical fiber array 1 is arranged on a front focal plane of the collimating lens 20, and the MEMS mirror 30 is arranged on a back focal plane of the collimating lens 20. The space between the optical fibers in the two-dimensional optical fiber array 1 can be properly reduced on the basis of the existing optical fiber array, because the narrow space has lower requirements on the rotation angle of the MEMS reflector, the rotation angle requirements when two paths of light are incident together are convenient to realize, and the processing and manufacturing difficulty of the MEMS reflector is reduced.

With reference to fig. 2 and fig. 3, it is assumed that the optical fiber a and the optical fiber B in the two-dimensional optical fiber array 1 are taken as two incident optical fibers, and two input ports are correspondingly denoted as an a port and a B port, respectively. When the optical fiber a is used as an incident optical fiber, an optical signal can be emitted from these

optical fibers

1, 2, 3.. n by rotating the MEMS mirror 30 in two dimensions; when the optical fiber B is used as an incident optical fiber, an optical signal can also be emitted from these

optical fibers

1, 2, 3. In summary, after entering from any input port (a port or B port) of the two-dimensional fiber array 1, the optical signal is converged by the collimating lens 20 to reach the MEMS mirror 30, and by two-dimensional rotation of the MEMS mirror 30, the reflected optical signal is collimated by the collimating lens 20 and then output from any output port of the two-dimensional fiber array 1.

With reference to fig. 1, assuming that X is a direction perpendicular to the paper surface, when an optical signal is input from the a port, the optical signal is converged by the collimating lens 20 and reaches the MEMS mirror 30, and at this time, the optical signal is reflected by the MEMS mirror 30, collimated by the collimating lens 20, and output from the n port of the two-dimensional fiber array 1. Referring to fig. 2, after the MEMS mirror 30 rotates by an angle along the X axis, the light reaching the MEMS mirror 30 changes the transmission direction, is collimated by the collimating lens 20, and is output from the m port of the two-dimensional fiber array 1, thereby implementing the channel selection function in the X direction. When the MEMS mirror 30 rotates by an angle along the Y axis, the light reaching the MEMS mirror 30 changes the transmission direction, and is collimated by the collimating lens 20 and then output from the a port of the two-dimensional fiber array 1, thereby implementing the channel selection function in the Y direction. When the MEMS mirror 30 rotates an angle along the X and Y axes at the same time, the light reaching the MEMS mirror 30 changes the transmission direction, is collimated by the collimating lens 20, and is output from the 1 port of the two-dimensional fiber array 1, thereby implementing the channel selection function in the X and Y directions. As can be seen, by controlling the rotation angles of the MEMS mirrors 30 in the X and Y directions, the function of the 1xN optical switch can be realized.

With reference to fig. 1, when an optical signal is input from the B port, the optical signal is converged by the collimating lens 20 and reaches the MEMS mirror 30, and at this time, the optical signal is reflected by the MEMS mirror 30, collimated by the collimating lens 20, and output from the n port of the two-dimensional fiber array 1. Referring to fig. 2, after the MEMS mirror 30 rotates by an angle along the X axis, the light reaching the MEMS mirror 30 changes the transmission direction, is collimated by the collimating lens 20, and is output from the m port of the two-dimensional fiber array 1, thereby implementing the channel selection function in the X direction. When the MEMS mirror 30 rotates by an angle along the Y axis, the light reaching the MEMS mirror 30 changes the transmission direction, and is collimated by the collimating lens 20 and then output from the a port of the two-dimensional fiber array 1, thereby implementing the channel selection function in the Y direction. When the MEMS mirror 30 rotates an angle along the X and Y axes at the same time, the light reaching the MEMS mirror 30 changes the transmission direction, is collimated by the collimating lens 20, and is output from the 1 port of the two-dimensional fiber array 1, thereby implementing the channel selection function in the X and Y directions. As can be seen, by controlling the rotation angles of the MEMS mirrors 30 in the X and Y directions, the function of the 1xN optical switch can be realized.

In summary, when light beams are respectively input from the a port and the B port, the function of the 2xN optical switch can be realized by controlling the rotation angles of the MEMS mirror 30 in the X and Y directions. If the rotation angle of the MEMS mirror 30 in the X direction is large enough, other optical fibers in the same row as the optical fiber a and the optical fiber B can also be used as incident light, thereby implementing the MxN optical switch function.

Further, the specific structure of the two-dimensional optical fiber array 1 may be as shown in fig. 4, and includes an optical fiber holder 1A having two-dimensional array hole features and an optical fiber bundle 1B arranged two-dimensionally, where an optical fiber is inserted into each hole of the optical fiber holder 1A; each optical fiber bundle 1B corresponds to the optical fibers A, B, 1, 2.. times.n in fig. 2 and 3. Correspondingly, the collimating lens group 2 may specifically be a collimating lens array composed of N silicon lenses, as shown in fig. 5, where the N silicon lenses and the N optical fibers are respectively arranged in a one-to-one correspondence manner, that is, the collimating lens array and the two-dimensional optical fiber array 1 have the same periodic pitch. In addition, since the semiconductor process has high processing precision on silicon wafers, the optical fiber holder 1A can be preferably made of silicon material.

Example 2:

on the basis of the above embodiment 1, the embodiment of the present invention further provides another MEMS optical switch of 2XN, as shown in fig. 6 and fig. 7. The main difference from embodiment 1 is that four MEMS mirrors and four collimating lenses are provided in this embodiment, and the two-dimensional fiber array 1 is also divided into four fiber array regions, so that when two input ports simultaneously input optical signals, selection control of respective channels of two optical signals is more independent and convenient.

Referring to fig. 6 and 7, the 2XN MEMS optical switch provided in this embodiment includes a two-dimensional fiber array 1, a collimating lens group 2, and a two-dimensional MEMS mirror group 3 sequentially arranged along the optical path direction. The two-dimensional optical fiber array 1 is divided into four optical fiber array areas according to a shape like a Chinese character tian, and the four optical fiber array areas are respectively marked as a first optical fiber array area 11, a second optical fiber array area 12, a third optical fiber array area 13 and a fourth optical fiber array area 14 in a clockwise direction. The collimating lens group 2 comprises a first collimating lens 21, a second collimating lens 22, a third collimating lens 23 and a fourth collimating lens 24 in a clockwise direction, and the first collimating lens, the second collimating lens, the third collimating lens and the fourth collimating lens are respectively arranged in one-to-one correspondence with the four optical fiber array areas; the two-dimensional MEMS mirror group 3 includes a first MEMS mirror 31, a second MEMS mirror 32, a third MEMS mirror 33, and a fourth MEMS mirror 34 in a clockwise direction, and is respectively disposed in one-to-one correspondence with the four optical fiber array regions. The two input ports (i.e., the a port and the B port) are preferably located in two different fiber array regions, respectively, so as to avoid the two input optical signals from sharing one MEMS mirror, which results in the invariance of channel selection control.

As shown in fig. 7, the four collimating lenses of the collimating lens group 2 are located on the same plane and arranged in a shape of "tian"; the four MEMS reflectors of the two-dimensional MEMS reflector group 3 are positioned on the same plane and are arranged in a shape like a Chinese character 'tian'; the four optical fiber array areas are respectively and correspondingly located on the front focal planes of the four collimating lenses, and the four MEMS reflectors are respectively and correspondingly located on the rear focal planes of the four collimating lenses. In the two-dimensional MEMS mirror group 3, each MEMS mirror can rotate two-dimensionally, that is, can rotate in two dimensions of X and Y; when the MEMS reflector rotates in the X direction, the MEMS reflector can be used for switching a channel of an optical signal in the X direction; when the MEMS mirror is rotated in the Y direction, it can be used to switch the path of the optical signal in the Y direction.

Assuming that the optical fibers a and B in the two-dimensional optical fiber array 1 are two incident optical fibers, the optical fibers a and B are located in the first optical fiber array region 11 and the second optical fiber array region 12, respectively. When optical signals are input into the port a and the port B at the same time, the optical signals input into the port a can be output from any output port of the remaining three optical fiber array regions except the second optical fiber array region 12 (i.e., the optical fiber array region where the port B is located); the optical signal input from the B port can be output from any output port of the remaining three fiber array regions except the first fiber array region 11 (i.e., the fiber array region where the a port is located). For an optical signal entering from the a port, the specific optical path structure is as follows:

referring to fig. 6, after an optical signal enters from an input port (i.e., an a port) of the first fiber array region 11, the optical signal is converged by the first collimating lens 21 to reach the first MEMS mirror 31, and the reflected optical signal is collimated by the first collimating lens 21 by two-dimensional rotation of the first MEMS mirror 31 and then output from any output port (e.g., 2 ports) of the first fiber array region 11. In this process, since the input port and the output port are located in the same fiber array region, the selection of the output port can be achieved only by two-dimensional rotation of the MEMS mirror corresponding to the fiber array region, and the specific control method may refer to embodiment 1, which is not described herein again.

After an optical signal enters from an input port (i.e., an a port) of the first fiber array region 11, the optical signal is converged by the first collimating lens 21 to reach the first MEMS mirror 31, and the optical signal is reflected by the first MEMS mirror 31 and the fourth MEMS mirror 34 in sequence through two-dimensional rotation, and then the reflected optical signal is collimated by the fourth collimating lens 24 and output from any output port (e.g., an m port) of the fourth fiber array region 14, as shown in fig. 8. In this process, since the input port and the output port are located in different fiber array regions, the two-dimensional rotation of the two MEMS mirrors corresponding to the two fiber array regions is required to select the output port.

After an optical signal enters from an input port (i.e., an a port) of the first fiber array region 11, the optical signal is converged by the first collimating lens 21 to reach the first MEMS mirror 31, and the optical signal is reflected by the first MEMS mirror 31 and the third MEMS mirror 33 in sequence through two-dimensional rotation, and then the reflected optical signal is collimated by the third collimating lens 23 and output from any output port (e.g., an n port) of the third fiber array region 13. Likewise, in this process, since the input port and the output port are located in different fiber array regions, the two-dimensional rotation of the two MEMS mirrors corresponding to the two fiber array regions is required to select the output port.

For the optical signal entering from the B port, the specific optical path structure is similar to that described above, and details are not repeated. In this way, through the rotation of one or two MEMS mirrors, the optical signal inputted from the a port can be outputted from any output port of the optical fiber array region except the second optical fiber array region 12, and the optical signal inputted from the B port can be outputted from any output port of the optical fiber array region except the first optical fiber array region 11.

In embodiment 1, since only one MEMS mirror is provided, when an optical signal enters from both the a and B input ports at the same time, the channel selection of two optical signals is controlled by the MEMS mirror 30 at the same time. Assuming that the optical signal inputted from the a port is outputted from the p port when the MEMS mirror 30 selects a certain angle, the optical signal inputted from the B port can only be outputted from the q port correspondingly at this time, but cannot be outputted from other ports. That is, both optical signals cannot be simultaneously controlled to be output from any output port at the same time, but there is a certain constraint relationship between the two output ports.

In embodiment 2, the four MEMS mirrors and the four fiber array regions are provided, and the two input ports are provided in different fiber array regions, so that the channel selection of the two optical signals can be ensured to be independent of each other. That is, both optical signals can be simultaneously controlled to be output from any output port at the same time without mutual restriction. Meanwhile, the four collimating lenses matched with the optical fiber array area are arranged in the embodiment 2, and compared with the case that only one collimating lens or collimating lens array with a larger size is arranged in the embodiment 1, the manufacturing cost is lower.

The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims

1. A2 XN MEMS optical switch is characterized by comprising a two-dimensional optical fiber array (1), a collimating lens group (2) and a two-dimensional MEMS reflector group (3) which are sequentially arranged along the direction of an optical path;

the two-dimensional optical fiber array (1) is used for inputting and outputting optical signals and consists of N optical fibers which are arranged in a two-dimensional mode, wherein two optical fibers serve as input ports, and the rest optical fibers serve as output ports;

the collimating lens group (2) comprises one or more collimating lenses for collimating and converging light beams; the two-dimensional MEMS mirror group (3) comprises one or more MEMS mirrors capable of rotating in two dimensions and is used for controlling the selection of optical signal channels;

after entering from any input port of the two-dimensional fiber array (1), the optical signal is converged by the collimating lens group (2) to reach the two-dimensional MEMS reflector group (3), and the reflected optical signal is collimated by the collimating lens group (2) through two-dimensional rotation of one or more MEMS reflectors and then output from any output port of the two-dimensional fiber array (1).

2. 2XN MEMS optical switch according to claim 1, characterized in that said collimating lens group (2) comprises a collimating lens (20) and said two-dimensional MEMS mirror group (3) comprises a two-dimensional rotatable MEMS mirror (30);

after entering from any input port of the two-dimensional fiber array (1), the optical signal is converged by the collimating lens (20) to reach the MEMS mirror (30), and the reflected optical signal is collimated by the collimating lens (20) through the two-dimensional rotation of the MEMS mirror (30) and then output from any output port of the two-dimensional fiber array (1).

3. The 2XN MEMS optical switch according to claim 2, characterized in that said two-dimensional optical fiber array (1) is arranged in the front focal plane of said collimating lens (20) and said MEMS mirror (30) is arranged in the back focal plane of said collimating lens (20).

4. The 2XN MEMS optical switch according to claim 1, characterized in that said two-dimensional fiber array (1) is divided into four fiber array areas according to the "tian" shape, respectively a first fiber array area (11), a second fiber array area (12), a third fiber array area (13) and a fourth fiber array area (14); wherein, the two input ports are respectively positioned in two different optical fiber array areas;

the collimating lens group (2) comprises a first collimating lens (21), a second collimating lens (22), a third collimating lens (23) and a fourth collimating lens (24) which respectively correspond to the four optical fiber array areas;

the two-dimensional MEMS reflector group (3) comprises a first MEMS reflector (31), a second MEMS reflector (32), a third MEMS reflector (33) and a fourth MEMS reflector (34) which respectively correspond to the four optical fiber array areas.

5. The 2XN MEMS optical switch according to claim 4, characterized in that the four collimating lenses of said collimating lens group (2) are located on the same plane and arranged in a "tian" shape; the four MEMS reflectors of the two-dimensional MEMS reflector group (3) are positioned on the same plane and are arranged in a shape like a Chinese character 'tian';

6. The 2XN MEMS optical switch according to claim 4, characterized in that when the two input ports are located in the first fiber array region (11) and the second fiber array region (12), respectively, the following optical path structure exists:

after entering from an input port of the first fiber array area (11), an optical signal is converged by the first collimating lens (21) to reach the first MEMS mirror (31), and the reflected optical signal is collimated by the first collimating lens (21) through two-dimensional rotation of the first MEMS mirror (31) and then output from any output port of the first fiber array area (11);

after entering from an input port of the first fiber array region (11), an optical signal is converged by the first collimating lens (21) to reach the first MEMS mirror (31), and the reflected optical signal is collimated by the third collimating lens (23) through two-dimensional rotation of the first MEMS mirror (31) and the third MEMS mirror (33) and then output from any output port of the third fiber array region (13);

after entering from the input port of the first fiber array region (11), the optical signal is converged by the first collimating lens (21) to reach the first MEMS mirror (31), and the reflected optical signal is collimated by the fourth collimating lens (24) through the two-dimensional rotation of the first MEMS mirror (31) and the fourth MEMS mirror (34) and then output from any output port of the fourth fiber array region (14).

7. The 2XN MEMS optical switch according to claim 1, wherein the collimating lens group (2) is a collimating lens array composed of N silicon lenses, and the N silicon lenses are respectively disposed in one-to-one correspondence with the N optical fibers.

8. The 2XN MEMS optical switch according to any of claims 1-7, wherein said two-dimensional fiber array (1) comprises a fiber holder (1A) featuring a two-dimensional array of holes and a two-dimensional arrangement of fiber bundles (1B), one fiber being inserted in each hole of said fiber holder (1A).

9. The 2XN MEMS optical switch of any of claims 1-7, wherein when the MEMS mirror is rotated in the X direction, it is used to switch the path of the optical signal in the X direction; when the MEMS mirror is rotated in the Y direction, it is used to switch the path of the optical signal in the Y direction.

10. The 2XN MEMS optical switch of any of claims 1-7, wherein said N optical fibers are all cladding etched fibers.