CN209961954U - 1XN MEMS optical switch - Google Patents
1XN MEMS optical switch Download PDFInfo
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- CN209961954U CN209961954U CN201921131562.4U CN201921131562U CN209961954U CN 209961954 U CN209961954 U CN 209961954U CN 201921131562 U CN201921131562 U CN 201921131562U CN 209961954 U CN209961954 U CN 209961954U
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Abstract
The utility model relates to the technical field of optical communication and optical sensing, in particular to a 1XN MEMS optical switch, which comprises an input optical fiber, an imaging lens, an MEMS chip, an off-axis parabolic reflector, a collimating lens array and a multi-core optical fiber array which are arranged in sequence according to the light propagation direction; the MEMS chip comprises a rotatable reflecting mirror surface, a light source and a control circuit, wherein the rotatable reflecting mirror surface is used for changing the propagation direction of input light through rotation and selecting an output port; the off-axis parabolic reflector comprises a paraboloid and is used for collimating the divergent light beams reflected by the MEMS chip; the multi-core fiber array comprises a plurality of output fibers, the collimating lens array comprises a plurality of collimating lenses, and the collimating lenses are used for coupling the light collimated by the off-axis parabolic reflectors to the corresponding output fibers. The utility model discloses an adopt off-axis parabolic reflector, eliminated the optical aberration, reduced the coupling loss effectively, reduced the difference of coupling loss between the output port, can realize the photoswitch of more stable, higher port number.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to an optical communication and optical sensing technical field, concretely relates to 1 XN's MEMS photoswitch.
[ background of the invention ]
The optical switch is a logic device for switching on/off or selectively switching transmission paths of optical signals and optical energy in an optical network, and is widely applied in the fields of automatic optical path switching protection, optical network cross connection (OXC), optical network monitoring, optical device testing, optical module testing and the like. At present, the optical switches on the market are mainly classified into traditional mechanical optical switches, magneto-optical switches, thermo-optical switches, acousto-optical switches, micro-electro-mechanical systems (MEMS) optical switches and the like. The MEMS optical switch not only has the characteristics of low insertion loss, high isolation, low polarization sensitivity, etc. of the conventional mechanical optical switch, but also has the characteristics of small size, high integration level, etc., and is always advocated in the industry.
The basic principle of the MEMS optical switch is to etch a plurality of tiny mirrors on a silicon wafer, and lift or mechanically rotate the movable micromirrors by static electricity or other control force to change the propagation direction of the input light, thereby implementing the switching function, and having a switching speed of millisecond. At present, most of commercial MEMS optical switches adopt a coaxial packaging optical path structure, as shown in fig. 1, the MEMS optical switches include a multi-core optical fiber array 101, a collimating lens 102, and a two-dimensional MEMS chip 103, wherein the collimating lens 102 and the multi-core optical fiber array 101 constitute a multi-core optical fiber collimator, an optical signal enters from an input optical fiber of the multi-core optical fiber array 101, is collimated by the collimating lens 102 and projected onto a reflecting mirror surface of the two-dimensional rotating MEMS chip 103, rotates two-dimensionally by the reflecting mirror surface of the MEMS chip 103, and is transmitted by the collimating lens 102, and the optical signal is selected to be output to any other optical fiber of the multi-core; the more gating ports, the larger the rotation angle required for the MEMS chip. Although the optical switch with such a structure has the characteristics of small size, excellent performance and the like, the optical switch is not suitable for manufacturing an MEMS switch with a plurality of gating ports, and the specific expression is as follows:
first, to reduce the loss of optical energy, the mirror aperture of the MEMS chip must be larger than the effective spot size of the received collimated beam (typically hundreds of microns), and based on the structure of fig. 1, the MEMS chip must have a sufficiently large mirror surface. In the 1x8MEMS optical switch based on the structure in the market, the size of the reflecting mirror surface of the MEMS chip is generally more than 500 micrometers. For optical switches with a large number of gating ports, the MEMS chip requires not only a large mirror surface, but also a large rotation angle range. The MEMS chip with the large corner and the large reflecting mirror surface has the advantages of complex chip structure, high manufacturing difficulty, lower yield and high reliability requirement.
Second, in the MEMS optical switch of the structure of fig. 1, the edge output port has the largest off-axis amount and optical aberration; the more output ports are switched, the greater the coupling loss of the edge output ports is affected by optical aberrations.
Third, in the optical switch with the structure shown in fig. 1, the input port and the output port are on the same side, and the multi-core fiber array 101 includes both an input port fiber and a gated output fiber port. In order to simplify the control and avoid the transient state of switching the optical signal to the input fiber during the switching process of the optical switch, the edge fiber of the multi-core fiber array is generally selected as the input port fiber. And the selection of the edge optical fiber as the input optical fiber necessarily increases the optical aberration difference when coupling between the input optical fiber and the edge output optical fiber. Therefore, based on the optical switch having the structure of fig. 1, when the number of gated output ports exceeds a certain value, the difference in coupling loss between the output ports becomes more and more significant, and it is generally only suitable for manufacturing optical switches with ports of 1 × 16 or less.
In view of the above, it is an urgent problem in the art to overcome the above-mentioned drawbacks of the prior art.
[ Utility model ] content
The utility model discloses the technical problem that needs to solve is:
the traditional MEMS optical switch is only suitable for output ports of 16 or less, when the number of the output ports is more, the output ports are easy to cause larger optical aberration and coupling loss, the difference of the coupling loss between the output ports is obvious, and the input port and the output port are on the same side, so that the transient state of switching an optical signal to an input optical fiber is easy to occur.
The utility model discloses a following technical scheme reaches above-mentioned purpose:
the utility model provides a 1XN MEMS photoswitch, which comprises an input optical fiber 1, an imaging lens 2, an MEMS chip 3, an off-axis parabolic reflector 4, a collimating lens array 5 and a multi-core optical fiber array 6 which are arranged in sequence according to the light propagation direction;
the MEMS chip 3 comprises a rotatable reflecting mirror surface which is used for changing the propagation direction of input light through rotation and selecting an output port; the off-axis parabolic reflector 4 comprises a paraboloid for collimating the diverging light beam reflected by the MEMS chip 3;
the multi-core fiber array 6 comprises a plurality of output fibers, and the collimating lens array 5 comprises a plurality of collimating lenses, wherein the collimating lenses are used for coupling the light collimated by the off-axis parabolic reflector 4 to the corresponding output fibers.
Preferably, the central point of the input optical fiber 1, which is close to the fiber core of the imaging lens 2 and the reflecting mirror surface of the MEMS chip 3, presents an object-image position relationship with respect to the imaging lens 2.
Preferably, the focal point of the off-axis parabolic mirror 4 coincides with the center point of the mirror surface of the MEMS chip 3.
Preferably, the collimating lens array 5 and the multi-core fiber array 6 form a multi-core fiber collimator array; the multi-core fiber array 6 comprises N output fibers arranged in a one-dimensional or two-dimensional manner, and the number N of the output fibers is greater than or equal to the number N of the gating ports;
the collimating lens array 5 includes n collimating lenses arranged in one or two dimensions, and each collimating lens corresponds to one output fiber of the multi-core fiber array 6.
Preferably, when the multi-core fiber array 6 is arranged in one dimension, the reflection mirror surface of the MEMS chip 3 rotates in one dimension;
in the one-dimensional continuous rotation process of the reflector surface, the height of the reflected divergent light beams projected on the paraboloid of the off-axis paraboloid reflector 4 is continuously changed, and the paraboloid collimates the divergent light beams with different heights to form one-dimensional distributed scanning collimated light beams with different heights in space.
Preferably, when the multi-core fiber array 6 is arranged in two dimensions, the reflecting mirror surface of the MEMS chip 3 rotates in two dimensions;
in the two-dimensional rotation process of the reflector surface, the positions of the reflected divergent beams projected on the paraboloid of the off-axis parabolic reflector 4 are continuously changed, and the paraboloid collimates the divergent beams at different positions to form two-dimensional distribution scanning collimated beams in space.
Preferably, when the multi-core fiber array 6 is arranged in two dimensions, the multi-core fiber array 6 includes a fiber holder 6A having two-dimensional array hole characteristics and a fiber bundle 6B arranged in two dimensions, and one fiber is inserted into each hole of the fiber holder 6A.
Preferably, the optical fiber holder 6A is made of silicon material.
Preferably, the input optical fiber 1 is a heat beam expanding optical fiber.
Preferably, the collimating lens array 5 is a silicon lens array.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model provides an in the MEMS photoswitch, through adopting off-axis parabolic reflector, optical aberration has been eliminated, has reduced the coupling loss effectively, has reduced the difference of coupling loss between the output port, and input port and output port have realized the separation moreover, and photoswitch switching in-process can not appear light signal and switch to the transient state of input fiber, can realize more stable, the photoswitch of higher port number.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments of the present invention will be briefly described below. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be obtained from these drawings without inventive effort.
FIG. 1 is a schematic diagram of a commercially available MEMS optical switch with coaxial package;
fig. 2 is a schematic structural diagram of a 1XN MEMS optical switch according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a two-dimensional multicore fiber array according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a two-dimensional collimating lens array according to an embodiment of the present invention;
wherein the reference numbers are as follows:
1-input optical fiber, 2-imaging lens, 3-MEMS chip, 4-off-axis parabolic reflector, 5-collimating lens array, 6-multi-core optical fiber array, 6A-optical fiber holder, 6B-optical fiber bundle.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, the terms "inside", "outside", "longitudinal", "lateral", "up", "down", "top", "bottom", "left", "right", "front", "back", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description of the present invention and do not require that the present invention must be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
In the embodiments of the present invention, the symbol "/" indicates that two functions are simultaneously provided, and the symbol "a and/or B" indicates that the combination between the front and rear objects connected by the symbol includes three cases "a", "B", "a, and B".
Furthermore, the technical features mentioned in the embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other. The present invention will be described in detail with reference to the accompanying drawings and examples.
The embodiment of the utility model provides a 1 XN's MEMS photoswitch, N are gating port quantity. As shown in fig. 2, the MEMS optical switch includes a single-core input optical fiber 1, an imaging lens 2, a MEMS chip 3, an off-axis parabolic mirror 4, a collimating lens array 5, and a multi-core optical fiber array 6, which are sequentially arranged in a light propagation direction.
The MEMS chip 3 includes a rotatable mirror surface, which can be mechanically rotated by static electricity or other control force, so as to change the propagation direction of the input light by rotation, select the output port, and implement the function of switching the gating port of the optical switch.
The off-axis parabolic reflector 4 comprises a paraboloid and is used for collimating the divergent light beams reflected by the MEMS chip 3, and the focus of the off-axis parabolic reflector 4 is coincided with the central point of the reflector surface of the MEMS chip 3.
The collimating lens array 5 and the multi-core fiber array 6 form a multi-core fiber collimator array, the multi-core fiber array 6 includes a plurality of output fibers, the collimating lens array 5 includes a plurality of collimating lenses, and the collimating lenses are used for coupling the light collimated by the off-axis parabolic reflector 4 to the corresponding output fibers.
Referring to fig. 2, the specific optical paths are as follows: after entering from the input optical fiber 1, the optical signal is relayed by the imaging lens 2 and projected onto the rotating reflector of the MEMS chip 3, and then an output port is selected by the rotation of the reflector, and then the optical signal is collimated and transmitted by the paraboloid of the off-axis paraboloidal reflector 4, and finally the collimating lens array 5 couples the optical signal into the selected output optical fiber in the multi-core optical fiber array 6 and outputs the optical signal by the output optical fiber.
The off-axis parabolic reflector 4 is used for collimating the divergent beams reflected by each corner of the MEMS chip 3, so that the problem of optical aberration caused by overlarge switching angle of the conventional MEMS light switch can be solved. The off-axis parabolic reflector 4 transforms a divergent light beam focused on a focal point of the off-axis parabolic reflector 4 into a collimated light beam parallel to an optical axis based on a principle of a paraboloid, theoretically, when the off-axis parabolic reflector is switched to each output port to reflect the collimated light beam, spherical aberration and chromatic aberration do not exist, and all the output ports can realize efficient light coupling output. As the number of output ports of the optical switch increases, the coupling loss between the output ports does not significantly differ. Thus, the present configuration can realize a more stable optical switch with a higher port number.
The utility model provides an in the MEMS photoswitch, through adopting off-axis parabolic reflector, optical aberration has been eliminated, coupling loss has been reduced effectively, the difference of coupling loss between the output port has been reduced, optical signal is from independent input fiber input moreover, input port and output port have realized the separation, optical signal can not appear in the photoswitch switching in-process and switch to the transient state of input fiber, can realize more stable, the photoswitch of higher port number.
The central point of the input optical fiber 1, which is close to the fiber core of the imaging lens 2 and the reflection mirror surface of the MEMS chip 3, presents an object image position relationship with respect to the imaging lens 2. Namely, the imaging lens 2 acts as a relay lens, and the input optical fiber 1 can image the fiber core output light spot on the center point of the reflecting mirror surface of the MEMS chip 3 through the imaging lens 2.
According to the characteristics of the Gaussian beam, the larger the light spot of the Gaussian beam is, the smaller the divergence angle of the Gaussian beam is. Therefore, for the MEMS switches with the same configuration of the off-axis parabolic mirror 4, the larger the spot of the gaussian beam imaged on the mirror surface of the MEMS chip 3 is, the smaller the minimum rotation angle required by the MEMS chip 3 to transform one adjacent gated output port is; the smaller the light spot of the gaussian beam imaged on the reflecting mirror surface of the MEMS chip 3 is, the larger the minimum rotation angle required by the MEMS chip 3 to transform an adjacent gated output port is. The imaging magnification of the imaging lens 2 to the fiber core of the input optical fiber 1 close to the imaging lens 2 directly determines the minimum size required by the reflecting mirror surface of the MEMS chip 3. For figure 1 commercial MEMS photoswitch, MEMS chip 103 receives the big facula of collimation, in the utility model discloses in MEMS chip 3 receives the convergent facula, and the size that the facula was received to the MEMS chip is littleer, and the size of facula by imaging lens 2's magnification (magnification is greater than or equal to 1) independent control. That is to say, the required speculum of well MEMS chip has less mirror surface size, consequently can reduce the preparation degree of difficulty of MEMS chip.
Therefore, the input optical fiber 1 can preferentially adopt a thermal beam expanding optical fiber, so that the divergence angle of an incident Gaussian beam can be reduced, the technical requirement on the magnification of the imaging lens 2 is reduced, and the structural size of the MEMS optical switch is reduced.
With further reference to fig. 2, the multi-core fiber array 6 includes N output fibers arranged in one or two dimensions, where N is greater than or equal to N, where N is the number of gating ports, and the N output fibers are respectively denoted as 6-1, 6-2, and 6-N; correspondingly, the collimating lens array 5 includes n collimating lenses arranged in one or two dimensions, and each collimating lens corresponds to one output optical fiber of the multi-core optical fiber array 6, and the n collimating lenses are respectively denoted as 5-1, 5-2, and 5-n. The fiber core of the output optical fiber is positioned near the focus of the collimating lens, so that the collimating lens converges and couples the collimated light beams switched to the gating output ports to the corresponding output optical fibers.
When the multi-core fiber array 6 is arranged in one dimension, the collimating lens array 5 is also arranged in one dimension, the multi-core fiber array 6 and the collimating lens array 5 form a one-dimensional fiber collimator array, and at this time, the MEMS chip 3 can adopt an MEMS chip with a one-dimensional rotating reflector surface. In the one-dimensional continuous rotation process of the reflector surface of the MEMS chip 3, the height of the divergent light beam reflected on the reflector surface projected on the paraboloid of the off-axis paraboloid reflector 4 is continuously changed; the parabolas of the off-axis parabolic reflector 4 collimate the divergent beams with different heights to form spatially one-dimensional distributed scanning collimated beams with different heights. In this structure, each gate output port of the MEMS optical switch can only receive one linear scanning collimated beam with a fixed height, that is, the collimated beam with a fixed height output by the MEMS chip 3 mirror surface in a fixed rotation angle state can only be received by only one optical fiber collimator in the one-dimensional optical fiber collimator array.
When the multi-core fiber array 6 is arranged in two dimensions, the collimating lens array 5 is also arranged in two dimensions, the multi-core fiber array 6 and the collimating lens array 5 form a two-dimensional fiber collimator array, and at this time, the MEMS chip 3 needs to be an MEMS chip whose reflecting mirror surface can rotate in two dimensions. In the two-dimensional rotation process of the reflector surface of the MEMS chip 3, the positions of divergent beams reflected on the reflector surface and projected on the paraboloid of the off-axis paraboloid reflector 4 are continuously changed, and the paraboloid of the off-axis paraboloid reflector 4 collimates the divergent beams at different positions to form two-dimensional distribution scanning collimated beams in space. In this structure, each gated output port of the MEMS optical switch can only receive a collimated beam at a fixed spatial position, that is, a collimated beam at a fixed spatial position output by the MEMS chip 3 mirror surface in a fixed rotation angle (two-dimensional) state can only be received by only one optical fiber collimator in the two-dimensional optical fiber collimator array. The optical switch is particularly suitable for manufacturing the optical switch with high port number by adopting a two-dimensional collimating lens array and a two-dimensional multi-core optical fiber array.
With further reference to fig. 3 and 4, in a specific embodiment, when the multi-core fiber array 6 is two-dimensionally arranged, the multi-core fiber array 6 includes a fiber holder 6A having a two-dimensional array of holes and a two-dimensional arrangement of fiber bundles 6B, and one optical fiber is inserted into each hole of the fiber holder 6A; each fiber bundle 6B corresponds to the output fibers 6-1, 6-2, 6-n in fig. 2. Since the semiconductor process has a high processing precision for silicon wafers, the fiber holder 6A can be preferably made of silicon material. When arranged in two dimensions, the collimating lens array 5 and the multi-core optical fiber array 6 have the same periodic pitch, as shown in fig. 4, and each convex collimating lens is equivalent to the collimating lenses 5-1, 5-2, 5.... and 5-n in fig. 2; the collimating lens array 5 may preferably be a commercial silicon lens array with a high-precision pitch.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A1 XN MEMS optical switch is characterized by comprising an input optical fiber (1), an imaging lens (2), an MEMS chip (3), an off-axis parabolic reflector (4), a collimating lens array (5) and a multi-core optical fiber array (6) which are sequentially arranged along the light propagation direction;
the MEMS chip (3) comprises a rotatable reflecting mirror surface which is used for changing the propagation direction of input light through rotation and selecting an output port; the off-axis parabolic reflector (4) comprises a paraboloid for collimating the diverging light beam reflected by the MEMS chip (3);
the multi-core optical fiber array (6) comprises a plurality of output optical fibers, the collimating lens array (5) comprises a plurality of collimating lenses, and the collimating lenses are used for coupling the light collimated by the off-axis parabolic reflectors (4) to the corresponding output optical fibers.
2. The 1XN MEMS optical switch according to claim 1, characterized in that the center point of the core of said input fiber (1) close to the imaging lens (2) and the mirror surface of said MEMS chip (3) presents an object image position relation with respect to said imaging lens (2).
3. The 1XN MEMS optical switch according to claim 1, characterized in that the focal point of said off-axis parabolic mirror (4) coincides with the center point of the MEMS chip (3) mirror surface.
4. The 1XN MEMS optical switch according to claim 1, characterized in that said collimating lens array (5) and said multicore fiber array (6) constitute a multicore fiber collimator array; the multi-core optical fiber array (6) comprises N output optical fibers which are arranged in a one-dimensional or two-dimensional manner, and the number N of the output optical fibers is more than or equal to the number N of the gating ports;
the collimating lens array (5) comprises n collimating lenses which are arranged in a one-dimensional or two-dimensional manner, and each collimating lens corresponds to one output optical fiber of the multi-core optical fiber array (6).
5. The 1XN MEMS optical switch according to claim 4, wherein when the multi-core fiber array (6) is arranged in one dimension, the reflection mirror surface of the MEMS chip (3) is rotated in one dimension;
in the one-dimensional continuous rotation process of the reflector surface, the height of the reflected divergent light beams projected on the paraboloid of the off-axis paraboloid reflector (4) is continuously changed, and the paraboloid collimates the divergent light beams with different heights to form one-dimensional distributed scanning collimated light beams with different heights in space.
6. The 1XN MEMS optical switch according to claim 4, wherein when the multi-core fiber array (6) is arranged in two dimensions, the reflection mirror surface of the MEMS chip (3) is rotated in two dimensions;
in the two-dimensional rotation process of the reflector surface, the positions of the reflected divergent beams projected on the paraboloid of the off-axis parabolic reflector (4) are continuously changed, and the paraboloid collimates the divergent beams at different positions to form two-dimensional distribution scanning collimated beams in space.
7. The 1XN MEMS optical switch according to claim 4, wherein when said multi-core fiber array (6) is arranged in two dimensions, said multi-core fiber array (6) comprises a fiber holder (6A) with two-dimensional array hole features and a two-dimensional arrangement of fiber bundles (6B), one fiber being inserted in each hole of said fiber holder (6A).
8. The 1XN MEMS optical switch according to claim 7, characterized in that said fiber holder (6A) is made of silicon material.
9. The 1XN MEMS optical switch according to any of claims 1-8, characterized in that said input fiber (1) is a thermal expanded beam fiber.
10. The 1XN MEMS optical switch according to any of claims 1-8, characterized in that said collimating lens array (5) is a silicon lens array.
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| CN201921131562.4U CN209961954U (en) | 2019-07-18 | 2019-07-18 | 1XN MEMS optical switch |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111290084A (en) * | 2020-03-31 | 2020-06-16 | 武汉光谷信息光电子创新中心有限公司 | Multicast switching optical switch |
| CN112162366A (en) * | 2020-09-01 | 2021-01-01 | 联合微电子中心有限责任公司 | End face coupling device of optical fiber and waveguide chip |
| CN113625400A (en) * | 2020-05-08 | 2021-11-09 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN115877361A (en) * | 2023-01-29 | 2023-03-31 | 深圳煜炜光学科技有限公司 | Laser radar with surface dirt rapid detection function and implementation method thereof |
| CN117288321A (en) * | 2023-09-22 | 2023-12-26 | 无锡迅杰光远科技有限公司 | Optical path switching system for on-line spectrometer and on-line spectrometer |
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2019
- 2019-07-18 CN CN201921131562.4U patent/CN209961954U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111290084A (en) * | 2020-03-31 | 2020-06-16 | 武汉光谷信息光电子创新中心有限公司 | Multicast switching optical switch |
| CN113625400A (en) * | 2020-05-08 | 2021-11-09 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN113625400B (en) * | 2020-05-08 | 2024-05-28 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN112162366A (en) * | 2020-09-01 | 2021-01-01 | 联合微电子中心有限责任公司 | End face coupling device of optical fiber and waveguide chip |
| CN115877361A (en) * | 2023-01-29 | 2023-03-31 | 深圳煜炜光学科技有限公司 | Laser radar with surface dirt rapid detection function and implementation method thereof |
| CN117288321A (en) * | 2023-09-22 | 2023-12-26 | 无锡迅杰光远科技有限公司 | Optical path switching system for on-line spectrometer and on-line spectrometer |
| CN117288321B (en) * | 2023-09-22 | 2024-05-10 | 无锡迅杰光远科技有限公司 | Optical path switching system for on-line spectrometer and on-line spectrometer |
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