CN210512169U - Accurate temperature control system based on indirect heating and multistage cooling - Google Patents
Accurate temperature control system based on indirect heating and multistage cooling Download PDFInfo
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- CN210512169U CN210512169U CN201921079357.8U CN201921079357U CN210512169U CN 210512169 U CN210512169 U CN 210512169U CN 201921079357 U CN201921079357 U CN 201921079357U CN 210512169 U CN210512169 U CN 210512169U
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Abstract
The utility model discloses an accurate temperature control system based on indirect heating and multi-stage cooling, which comprises a circulating pump device, a first proportional three-way valve, a multi-stage function temperature adjusting module and a heat conducting oil supply module, wherein the output end of the circulating pump device enters the multi-stage function temperature adjusting module for temperature adjustment through an input pipe, insert first ratio three-way valve all the way, multi-stage function module output that adjusts temperature inserts first ratio three-way valve through the output tube, first ratio three-way valve output inserts the customer end through going out oil pipe, the customer end is through returning oil pipe access circulating pump device input, conduction oil supply module is through mending oil pipe access circulating pump device input, be provided with the ball valve that produces oil on the benefit oil pipe, be provided with the gas holder on returning oil pipe, multi-stage function module that adjusts temperature includes with the input tube intercommunication and the indirect heating unit of connecting in parallel each other, indirect low temperature cooling unit and indirect ultra-low temperature quick cooling unit. The utility model discloses temperature control precision is high, temperature adjustment speed is high, and has organic heat load long service life.
Description
[ technical field ] A method for producing a semiconductor device
The utility model belongs to the technical field of the temperature control equipment, especially, relate to an accurate temperature control system based on indirect heating and multistage cooling.
[ background of the invention ]
The temperature control is widely applied in modern manufacturing industry and applied in the field of temperature control, and an oil circulation temperature control system is an important component of a temperature control system. The traditional high-temperature oil temperature machine can only control the temperature to be within 280 ℃, along with the development of the technology, the high-temperature oil temperature machine in the prior art can also reach 400 ℃, but the control precision is difficult to meet higher process requirements, and the speed of temperature regulation is not fast enough, in order to regulate the temperature more quickly and adapt to the temperature control requirements in a wider range, a cooling unit is also added into the oil temperature machine in the prior art, the patent application No. 201711342812.4 discloses a high-temperature heat-conducting oil heat energy conversion system, the cooling efficiency in the scheme is low, the temperature regulation is realized between high-temperature heat oil and a cooling medium through flow ratio regulation, and the precision is difficult to reach higher precision; and the heat conducting oil in the expansion tank can contact with air so as to participate in impurities to influence the service life of the organic heat carrier.
Therefore, there is a need to provide a new precise temperature control system based on indirect heating and multi-stage cooling to solve the above problems.
[ Utility model ] content
An object of the utility model is to provide an accurate temperature control system based on indirect heating and multistage cooling, temperature control precision is high, temperature adjustment speed is high, and has organic heat carrier long service life.
The utility model discloses a following technical scheme realizes above-mentioned purpose: the accurate temperature control system based on indirect heating and multistage cooling comprises a circulating pump device, a first proportional three-way valve, a multistage function temperature regulating module and a heat conducting oil supply module, wherein the output end of the circulating pump device is divided into two paths, one path of the output end enters the multistage function temperature regulating module through an input pipe to regulate temperature, the other path of the output end is connected with the first proportional three-way valve, the output end of the multistage function temperature regulating module is connected with the first proportional three-way valve through an output pipe, the output end of the first proportional three-way valve is connected with a client through an oil outlet pipe, the client is connected with the input end of the circulating pump device through an oil return pipe, the heat conducting oil supply module is connected with the input end of the circulating pump device through an oil supply pipe, an oil outlet ball valve is arranged on the oil supply pipe, an air storage tank is arranged on the oil return pipe, An indirect cryogenic cooling unit and an indirect ultra-low temperature rapid cooling unit.
Furthermore, the indirect heating unit comprises a first heat exchanger, a first pneumatic switch two-way valve and a hot oil circulating unit, wherein one end of the first heat exchanger is communicated with the input pipe, the other end of the first heat exchanger is communicated with the output pipe, the first pneumatic switch two-way valve is arranged on a pipeline for communicating the first heat exchanger with the input pipe, and the hot oil circulating unit is used for heating the heat conduction oil at the first heat exchanger.
Furthermore, the hot oil circulating unit comprises a hot oil inlet pipe and a hot oil outlet pipe which are communicated with the first heat exchanger, a circulating pump arranged on the hot oil inlet pipe, and a second proportional three-way valve arranged on the hot oil outlet pipe, wherein a branch pipe is arranged on the upper stream of the circulating pump of the hot oil inlet pipe and is directly connected to the other input end of the second proportional three-way valve;
a stop valve is arranged on the hot oil output pipe and close to the hot oil outlet end;
and a first thermometer and a second thermometer are respectively arranged at one ends of the hot oil inlet pipe and the hot oil output pipe, which are close to the first heat exchanger.
Furthermore, the indirect low-temperature cooling unit comprises a second heat exchanger, a second pneumatic switch two-way valve and a cooling water circulation unit, wherein one end of the second heat exchanger is communicated with the input pipe, the other end of the second heat exchanger is communicated with the output pipe, the second pneumatic switch two-way valve is arranged on the second heat exchanger and the input pipe communicating pipeline, and the second heat exchanger cools heat conducting oil.
Further, the cooling water circulation unit comprises a cooling water inlet pipe and a cooling water outlet pipe which are communicated with the second heat exchanger, a first pneumatic switch ball valve arranged on the cooling water inlet pipe, and a wafer butterfly valve arranged on the cooling water outlet pipe;
and a third thermometer and a fourth thermometer are respectively arranged at one ends of the cooling water inlet pipe and the cooling water outlet pipe, which are close to the second heat exchanger.
Further, the quick cooling unit of indirect ultralow temperature include one end with input tube intercommunication and the other end with the third heat exchanger of output tube intercommunication, set up the third heat exchanger with third pneumatic switch two-way valve on the input tube intercommunication pipeline the third heat exchanger department carries out quick ultralow temperature refrigerated water circulation unit to the conduction oil.
Furthermore, the refrigerated water circulation unit includes with the refrigerated water admission pipe and the refrigerated water output tube of third heat exchanger intercommunication, set up and be in second pneumatic switch ball valve on the refrigerated water admission pipe and setting are in clamp type butterfly valve on the refrigerated water output tube, the refrigerated water admission pipe with the refrigerated water output tube is close to the one end of third heat exchanger is provided with fifth thermometer, sixth thermometer respectively.
Furthermore, an outlet temperature sensing line is arranged on the oil outlet pipe, and an inlet temperature sensing line is arranged on the oil return pipe.
Further, the conduction oil supply module includes the inflation oil tank, respectively with nitrogen gas input tube, defeated oil pipe and blast pipe that the inflation oil tank communicates, be provided with pressure release mouth, manometer, pressure sensor, liquid level switch on the inflation oil tank, the bottom of inflation oil tank is provided with the oil drain port, oil drain port department is provided with the stop valve.
Furthermore, be provided with solenoid valve, check valve on the nitrogen gas input tube, be provided with the solenoid valve on the blast pipe, the expansion tank with be provided with the solenoid valve on through pipeline intercommunication and the intercommunication pipeline between the gas holder.
Compared with the prior art, the utility model relates to an accurate temperature control system based on indirect heating and multistage cooling's beneficial effect lies in: the multi-stage function temperature adjustment switching can be automatically carried out according to the actual required temperature of a client, and the automatic control of the system is facilitated; an indirect heating unit, an indirect low-temperature cooling unit and an indirect quick ultralow-temperature cooling unit are designed in the multi-stage functional temperature regulation module, so that the temperature control in a larger temperature range is realized; hot oil and low-temperature chilled water of a client boiler are reasonably used, so that energy efficiency is reasonably applied, and energy consumption is saved; a proportion regulating valve is arranged in the indirect heating unit, thermometers or temperature sensing lines are arranged at a plurality of positions in the indirect heating unit, in the low-temperature cooling and ultra-low-temperature cooling unit, on the oil outlet pipe and the oil return pipe, and the proportion regulating valve at the end of the oil outlet pipe is matched to realize high-precision temperature control, wherein the temperature control precision can reach +/-0.5 ℃; by designing the low-temperature cooling unit and the ultralow-temperature cooling unit, the temperature reduction efficiency is improved, the reaction time of temperature regulation of the system is shortened, and the temperature control efficiency is improved; the nitrogen is filled in the expansion oil tank, so that the contact between air and heat conduction oil is isolated, and the service life of the heat conduction oil is effectively prolonged; the nitrogen input pipe and the exhaust pipe are matched for use, so that the pressure of the circulating system and the pressure of the expansion oil tank can be effectively and automatically adjusted, the pressure of the system is maintained in a set range, the system is safer, and the temperature is more stable; and the multistage cooling temperature control is designed, cooling water and chilled water are reasonably used, and the energy efficiency of the system is improved.
[ description of the drawings ]
Fig. 1 is a schematic diagram of a system control according to an embodiment of the present invention;
the figures in the drawings represent:
100 accurate temperature control system based on indirect heating and multi-stage cooling; 101 client, 102 thermal resistor;
1 circulating pump device, 11 circulating pump, 12 stop valve;
2 a first proportional three-way valve;
3 a multi-stage function temperature adjusting module,
31 indirect heating unit, 311 first heat exchanger, 312 first pneumatic switch two-way valve, 313 hot oil inlet pipe, 314 hot oil outlet pipe, 315 circulating pump, 316 second proportion three-way valve, 317 filter, 318 stop valve, 319 first thermometer, 3110 second thermometer,
32 indirect low-temperature cooling units, 321 second heat exchangers, 322 second pneumatic switch two-way valves, 323 cooling water inlet pipes, 324 cooling water outlet pipes, 325 first pneumatic switch ball valves, 326 wafer butterfly valves, 327 third temperature meters, 328 fourth temperature meters, 329 filters, 3210 flow meters and 3211 safety valves,
33 indirect ultra-low temperature quick cooling unit, 331 third heat exchanger, 332 third pneumatic switch two-way valve, 333 chilled water inlet pipe, 334 chilled water outlet pipe, 335 second pneumatic switch ball valve, 336 clamp butterfly valve, 337 fifth thermometer, 338 sixth thermometer, 339 filter, 3310 flowmeter, 3311 safety valve;
4 heat conduction oil supply modules, 41 expansion oil tanks, 42 nitrogen input pipes, 421 electromagnetic valves, 422 check valves, 423 threaded gate valves, 424 ball valves, 43 oil conveying pipes, 431 stop valves, 44 exhaust pipes, 441 electromagnetic valves, 442 ball valves, 46 pressure meters, 47 pressure sensors, 48 liquid level switches, 49 oil discharge ports, 410 stop valves, 411 safety valves and 413 electromagnetic valves;
5 input tube, 51 pressure gauge, 52 low-pressure switch; 6 output tube, 61 pressure gauge, 62 first thermal resistance; 7, an oil outlet pipe, 71 a high-pressure switch, 72 an outlet temperature sensing line, 73 a stop valve, 74 a filter and 75 a flowmeter; 8 oil return pipes, 81 inlet temperature sensing lines, 82 stop valves, 83 filters and 84 pressure gauges; 9 oil supply pipes and 91 oil outlet ball valves; 10 gas storage tank; 20 bypass pipe.
[ detailed description ] embodiments
Example (b):
referring to fig. 1, the present embodiment is an accurate temperature control system 100 based on indirect heating and multi-stage cooling, which includes a circulation pump device 1, a first proportional three-way valve 2, a multi-stage function temperature adjusting module 3, and a heat conducting oil supply module 4, wherein an output end of the circulation pump device 1 is divided into two paths, one path of the two paths enters the multi-stage function temperature adjusting module 3 through an input pipe 5 for temperature adjustment, the other path is connected to the first proportional three-way valve 2, an output end of the multi-stage function temperature adjusting module 3 is connected to the first proportional three-way valve 2 through an output pipe 6, an output end of the first proportional three-way valve 2 is connected to a client 101 through an oil outlet pipe 7, the client 101 is connected to an input end of the circulation.
The circulating pump device 1 includes two sets of circulating pumps 11 arranged in parallel, and the input and the output of the circulating pumps 11 are both provided with stop valves 12. Two circulating pump 11 normal use, another is as reserve to when the circulating pump breaks down, can start the stand-by pump and work, guarantee system's normal operating, and close through stop valve 12 around the circulating pump that will break down, conveniently demolish the maintenance to this circulating pump.
The input pipe 5 is provided with a pressure gauge 51 and a low-pressure switch 52, so that the pressure in the system is maintained within a set range, and when a low-pressure phenomenon occurs, the input pipe 5 is closed.
The multi-stage functional tempering module 3 includes an indirect heating unit 31, an indirect low-temperature cooling unit 32, and an indirect ultra-low-temperature rapid cooling unit 33 which are communicated with the input pipe 5 and connected in parallel with each other.
The highest temperature of the indirect heating unit 31 is controlled according to the temperature of an external heat source of a client, the highest design temperature can reach 300 ℃, and the low temperature can be adjusted and accurately controlled to be the temperature of +45 ℃; the indirect low-temperature cooling unit 32 is connected with normal-temperature cooling water, and the temperature of the system is controlled to be 280-50 ℃ through indirect heat exchange; the indirect ultra-low temperature rapid cooling unit 33 can reduce the temperature of the system to 50-10 ℃ lower through external chilled water, although the system can be controlled to 280-50 ℃ by directly using the unit, the consumption of the chilled water is increased, and the chilled water resource is wasted; by adopting different temperature control units to carry out heat exchange control in different temperature control areas, energy can be greatly saved, and the utilization rate of each resource is improved.
The indirect heating unit 31 includes a first heat exchanger 311 having one end communicated with the input pipe 5 and the other end communicated with the output pipe 6, a first pneumatic switch two-way valve 312 disposed on a pipeline connecting the first heat exchanger 311 and the input pipe 5, and a hot oil circulating unit (not shown) for heating the heat transfer oil at the first heat exchanger 311.
The hot oil circulating unit comprises a hot oil inlet pipe 313 and a hot oil outlet pipe 314 which are communicated with the first heat exchanger 311, a circulating pump 315 arranged on the hot oil inlet pipe 313, and a second proportional three-way valve 316 arranged on the hot oil outlet pipe 314, wherein a branch pipe is arranged on the hot oil inlet pipe 313 at the upstream of the circulating pump 315 and is directly connected to the other input end of the second proportional three-way valve 316. A filter 317 is arranged on the hot oil inlet pipe 313 near the hot oil inlet end, and a stop valve 318 is arranged on the hot oil outlet pipe 314 near the hot oil outlet end. One end of the hot oil inlet pipe 313 and the hot oil outlet pipe 314 close to the first heat exchanger 311 are respectively provided with a first thermometer 319 and a second thermometer 3110 which strictly monitor the temperature change of the heating medium entering and exiting the first heat exchanger 311, so that the flow of the heating medium is accurately controlled by the second proportional three-way valve 316. The input end and the output end of the circulation pump 315 are both provided with oil drain ports (not identified in the figure), and the oil drain ports are provided with ball valves (not identified in the figure).
The indirect low-temperature cooling unit 32 includes a second heat exchanger 321 with one end communicated with the input pipe 5 and the other end communicated with the output pipe 6, a second pneumatic switch two-way valve 322 disposed on a pipeline connecting the second heat exchanger 321 and the input pipe 5, and a cooling water circulation unit (not identified in the figure) for cooling the heat-conducting oil at the second heat exchanger 321.
The cooling water circulation unit comprises a cooling water inlet pipe 323 and a cooling water outlet pipe 324 which are communicated with the second heat exchanger 321, a first pneumatic switch ball valve 325 arranged on the cooling water inlet pipe 323, and a wafer butterfly valve 326 arranged on the cooling water outlet pipe 324, wherein a third thermometer 327 and a fourth thermometer 328 are respectively arranged at one ends of the cooling water inlet pipe 323 and the cooling water outlet pipe 324, which are close to the second heat exchanger 321, so that the temperature change of the cooling water entering and exiting the second heat exchanger 321 is strictly monitored. The cooling water inlet pipe 323 is further provided with a filter 329 and a flow meter 3210, and one end close to the second heat exchanger 321 is provided with a water outlet (not shown), and the water outlet is provided with a ball valve (not shown). A safety valve 3211 is further disposed on the cooling water output pipe 324.
The indirect ultra-low temperature rapid cooling unit 33 includes a third heat exchanger 331 with one end communicated with the input pipe 5 and the other end communicated with the output pipe 6, a third pneumatic switch two-way valve 332 disposed on a pipeline communicating the third heat exchanger 331 and the input pipe 5, and a chilled water circulation unit (not shown) for rapidly cooling the heat transfer oil at the third heat exchanger 331.
The chilled water circulation unit comprises a chilled water inlet pipe 333 and a chilled water outlet pipe 334 which are communicated with the third heat exchanger 331, a second pneumatic switch ball valve 335 arranged on the chilled water inlet pipe 333, and a wafer butterfly valve 336 arranged on the chilled water outlet pipe 334, wherein a fifth temperature gauge 337 and a sixth temperature gauge 338 are respectively arranged at one ends of the chilled water inlet pipe 333 and the chilled water outlet pipe 334, which are close to the third heat exchanger 331, and the temperature change of the chilled water entering and exiting the third heat exchanger 331 is strictly monitored. The chilled water inlet pipe 333 is further provided with a filter 339 and a flow meter 3310, and one end of the chilled water inlet pipe close to the second heat exchanger 331 is provided with a water outlet (not shown), and the water outlet is provided with a ball valve (not shown). A safety valve 3311 is also arranged on the chilled water output pipe 334.
A water outlet (not shown) is arranged on the output pipe 6 between the indirect low-temperature cooling unit 32 and the indirect ultra-low-temperature rapid cooling unit 33, and a ball valve (not shown) is arranged at the water outlet.
A pressure gauge 61 and a first heat resistor 62 are provided on one end of the output pipe 6 near the first proportional three-way valve 2. The pressure value of the output end of the multi-stage function temperature adjusting module 3 is monitored through the pressure gauge 61, and the temperature of the output end of the multi-stage function temperature adjusting module 3 is monitored through the first thermal resistor 62.
The oil outlet pipe 7 is provided with a high-voltage switch 71 for blocking the oil outlet pipe 7 when the pressure in the oil outlet pipe 7 is higher than a set range. An outlet temperature sensing line 72 is arranged on the oil outlet pipe 7 and used for monitoring the temperature of the medium heat conducting oil entering the client 101. The outlet pipe 7 is also provided with a shutoff valve 73, a filter 74, and a flow meter 75.
A plurality of thermal resistors 102 are also arranged inside the client 101. The temperature inside the client 101 is monitored for changes.
An air storage tank 10 is arranged on the oil return pipe 8, and a bypass pipe 20 is communicated between the oil outlet pipe 7 and the oil return pipe 8. The output end of the gas storage tank 10 is provided with a water outlet (not marked in the figure), and the water outlet is provided with a ball valve (not marked in the figure).
An inlet temperature sensing line 81, a stop valve 82, a filter 83 and a pressure gauge 84 are arranged between the client and the air storage tank 10 on the oil return pipe 8, and the temperature of a medium returning to the circulating system of the oil temperature machine is monitored through the inlet temperature sensing line 81.
The heat conducting oil supply module 4 comprises an expansion oil tank 41, a nitrogen input pipe 42, an oil delivery pipe 43 and an exhaust pipe 44 which are respectively communicated with the expansion oil tank 41, wherein a pressure relief opening, a pressure gauge 46, a pressure sensor 47 and a liquid level switch 48 are arranged on the expansion oil tank 41. An oil discharge port 49 is provided at the bottom of the expansion oil tank 41, and a shutoff valve 410 is provided at the oil discharge port 49. The nitrogen gas inlet pipe 42 is provided with a solenoid valve 421, a check valve 422, and a screw gate valve 423. The nitrogen input pipe 42 is provided with a branch pipe which is directly communicated with the expansion oil tank 41 and is provided with a ball valve 424, the electromagnetic valve 421 may damage in operation, and in order to ensure the normal and safe operation of the system, the bypass ball valve 424 may be opened to continuously supplement proper nitrogen to the expansion oil tank 41, thereby ensuring the normal operation of the system. When the heat exchanger operates at high temperature, the pressure in the expansion oil tank 41 can be controlled by inputting nitrogen, the contact between air and the heat conducting oil of the organic heat carrier can be isolated, and the service life of the organic heat carrier is prolonged. A safety valve 411 is arranged at the pressure relief opening. The oil delivery pipe 43 is provided with a shutoff valve 431. The exhaust pipe 44 is provided with an electromagnetic valve 441, and automatic exhaust is realized through PLC control in combination with the pressure sensor 47. The exhaust pipe 44 is further provided with a branch pipe directly connected to the expansion tank 41 and provided with a ball valve 442.
The expansion oil tank 41 is communicated with the air storage tank 10 through a pipeline, and the communication pipeline is provided with an electromagnetic valve 413. The function of the expansion tank is that the exhaust action can be automatically adjusted, the exhaust of a general system is only one exhaust oil supplementing communicating pipe 9, and the exhaust is slow, so that an exhaust pipe is added in the design, if the exhaust pipe is not controlled by a valve, hot oil can be exhausted into the expansion oil tank 41 under the condition that the system is still aerated at high temperature, so that the temperature of the expansion oil tank 41 is overhigh, and when the electromagnetic valve 413 is controlled, the electromagnetic valve 413 can be controlled to be closed under the set high temperature condition, so that the expansion mailbox 41 is protected.
An oil outlet ball valve 91 is arranged on the oil supplementing pipe 9.
Before starting up, the oil outlet ball valve 91 on the oil supplementing pipe 9 is opened to add heat conducting oil, and the circulating pump 11 is started; after the system is started, according to the required temperature, when heating is required, the first pneumatic switch two-way valve 312 is opened, the second pneumatic switch two-way valve 322 and the third pneumatic switch two-way valve 332 are closed, the circulating pump 315 is opened, high-temperature heat conducting oil is supplemented, and the temperature of a client is accurately controlled by controlling the second proportional three-way valve 316 and the first proportional three-way valve 2; during high-temperature control operation, according to temperature and pressure control, the on-off electromagnetic valve 421 on the nitrogen input pipe 42 and the electromagnetic valve 441 on the exhaust pipe 44 control the nitrogen pressure in the expansion oil tank 41; when the temperature needs to be controlled at low temperature, the second pneumatic switch two-way valve 322 is opened, the first pneumatic switch two-way valve 312 and the third pneumatic switch two-way valve 332 are closed, the system is cooled, and the first proportional three-way valve 2 and the first pneumatic switch ball valve 325 are controlled to accurately control the temperature of the client; when the temperature needs to be controlled at an ultra-low temperature (below the normal temperature) or during rapid cooling, the third pneumatic switch two-way valve 332 is opened, the first pneumatic switch two-way valve 312 and the second pneumatic switch two-way valve 322 are closed, the system is cooled at a low temperature, and the first proportional three-way valve 2 and the second pneumatic switch ball valve 335 are controlled to accurately control the temperature of the client.
The hot oil and chilled water in this embodiment may be provided by a customer free boiler reaction system.
The accurate temperature control system 100 based on indirect heating and multi-stage cooling has the advantages that: the multi-stage function temperature adjustment switching can be automatically carried out according to the actual required temperature of a client, and the automatic control of the system is facilitated; an indirect heating unit, an indirect low-temperature cooling unit and an indirect quick ultralow-temperature cooling unit are designed in the multi-stage functional temperature regulation module, so that the temperature control in a larger temperature range is realized; hot oil and low-temperature chilled water of a client boiler are reasonably used, so that energy efficiency is reasonably applied, and energy consumption is saved; a proportion regulating valve is arranged in the indirect heating unit, thermometers or temperature sensing lines are arranged at a plurality of positions in the indirect heating unit, in the low-temperature cooling and ultra-low-temperature cooling unit, on the oil outlet pipe and the oil return pipe, and the proportion regulating valve at the end of the oil outlet pipe is matched to realize high-precision temperature control, wherein the temperature control precision can reach +/-0.5 ℃; by designing the low-temperature cooling unit and the ultralow-temperature cooling unit, the temperature reduction efficiency is improved, the reaction time of temperature regulation of the system is shortened, and the temperature control efficiency is improved; the nitrogen is filled in the expansion oil tank, so that the contact between air and heat conduction oil is isolated, and the service life of the heat conduction oil is effectively prolonged; the nitrogen input pipe and the exhaust pipe are matched for use, so that the pressure of the circulating system and the pressure of the expansion oil tank can be effectively and automatically adjusted, the pressure of the system is maintained in a set range, the system is safer, and the temperature is more stable; and the multistage cooling temperature control is designed, cooling water and chilled water are reasonably used, and the energy efficiency of the system is improved.
What has been described above are only some embodiments of the invention. For those skilled in the art, without departing from the inventive concept, several modifications and improvements can be made, which are within the scope of the invention.
Claims (10)
1. The utility model provides an accurate temperature control system based on indirect heating and multistage cooling which characterized in that: which comprises a circulating pump device, a first proportional three-way valve, a multi-stage function temperature adjusting module and a heat conducting oil supply module, wherein the output end of the circulating pump device is divided into two paths, one path of the water enters the multi-stage functional temperature adjusting module through the input pipe for temperature adjustment, the other path of the water enters the first proportional three-way valve, the output end of the multi-stage function temperature regulating module is connected with the first proportional three-way valve through an output pipe, the output end of the first proportional three-way valve is connected with the client through an oil outlet pipe, the client end is connected with the input end of the circulating pump device through an oil return pipe, the heat conducting oil supply module is connected with the input end of the circulating pump device through an oil supplementing pipe, the multi-stage function temperature adjusting module comprises an input pipe, an indirect heating unit, an indirect low-temperature cooling unit and an indirect ultra-low-temperature quick cooling unit, wherein the input pipe is communicated with the input pipe, and the input pipe is connected with the input pipe in parallel.
2. The system of claim 1, wherein the system comprises: the indirect heating unit comprises a first heat exchanger, a first pneumatic switch two-way valve and a hot oil circulating unit, wherein one end of the first heat exchanger is communicated with the input pipe, the other end of the first heat exchanger is communicated with the output pipe, the first pneumatic switch two-way valve is arranged on a pipeline for communicating the first heat exchanger with the input pipe, and the hot oil circulating unit is used for heating heat-conducting oil at the first heat exchanger.
3. The system of claim 2, wherein the system comprises: the hot oil circulating unit comprises a hot oil inlet pipe and a hot oil outlet pipe which are communicated with the first heat exchanger, a circulating pump arranged on the hot oil inlet pipe, and a second proportional three-way valve arranged on the hot oil outlet pipe, wherein a branch pipe is arranged on the upper stream of the circulating pump of the hot oil inlet pipe and is directly connected to the other input end of the second proportional three-way valve;
a stop valve is arranged on the hot oil output pipe and close to the hot oil outlet end;
and a first thermometer and a second thermometer are respectively arranged at one ends of the hot oil inlet pipe and the hot oil output pipe, which are close to the first heat exchanger.
4. The system of claim 1, wherein the system comprises: the indirect low-temperature cooling unit comprises a second heat exchanger, a second pneumatic switch two-way valve and a cooling water circulation unit, wherein one end of the second heat exchanger is communicated with the input pipe, the other end of the second heat exchanger is communicated with the output pipe, the second pneumatic switch two-way valve is arranged on the second heat exchanger and the input pipe communicated pipeline, and the second heat exchanger cools heat conducting oil.
5. The system of claim 4, wherein the system comprises: the cooling water circulation unit comprises a cooling water inlet pipe and a cooling water outlet pipe which are communicated with the second heat exchanger, a first pneumatic switch ball valve arranged on the cooling water inlet pipe, and a wafer butterfly valve arranged on the cooling water outlet pipe;
and a third thermometer and a fourth thermometer are respectively arranged at one ends of the cooling water inlet pipe and the cooling water outlet pipe, which are close to the second heat exchanger.
6. The system of claim 1, wherein the system comprises: the indirect ultra-low temperature rapid cooling unit comprises a third heat exchanger, a chilled water circulation unit and a cooling water circulation unit, wherein one end of the indirect ultra-low temperature rapid cooling unit is communicated with the input pipe, the other end of the indirect ultra-low temperature rapid cooling unit is communicated with the output pipe, the third heat exchanger is provided with a third pneumatic switch two-way valve on the input pipe communicated pipeline, and the third heat exchanger is used for rapidly cooling the heat conduction oil at the ultra-low temperature.
7. The system of claim 6, wherein the system comprises: the chilled water circulation unit comprises a chilled water inlet pipe, a chilled water output pipe, a second pneumatic switch ball valve and a wafer butterfly valve, wherein the chilled water inlet pipe is communicated with the third heat exchanger, the second pneumatic switch ball valve is arranged on the chilled water inlet pipe, the wafer butterfly valve is arranged on the chilled water output pipe, and the chilled water inlet pipe and the chilled water output pipe are close to one end of the third heat exchanger and are respectively provided with a fifth thermometer and a sixth thermometer.
8. The system of claim 1, wherein the system comprises: an outlet temperature sensing line is arranged on the oil outlet pipe, and an inlet temperature sensing line is arranged on the oil return pipe.
9. The system of claim 1, wherein the system comprises: the heat-conducting oil supply module comprises an expansion oil tank, a nitrogen input pipe, an oil conveying pipe and an exhaust pipe, wherein the nitrogen input pipe, the oil conveying pipe and the exhaust pipe are communicated with the expansion oil tank respectively, a pressure relief opening, a pressure gauge, a pressure sensor and a liquid level switch are arranged on the expansion oil tank, an oil discharge opening is formed in the bottom of the expansion oil tank, and a stop valve is arranged at the oil discharge opening.
10. The system of claim 9, wherein the system comprises: the device is characterized in that an electromagnetic valve and a check valve are arranged on the nitrogen input pipe, an electromagnetic valve is arranged on the exhaust pipe, and an electromagnetic valve is arranged between the expansion oil tank and the gas storage tank and communicated with the gas storage tank through a pipeline.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921079357.8U CN210512169U (en) | 2019-07-11 | 2019-07-11 | Accurate temperature control system based on indirect heating and multistage cooling |
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| CN201921079357.8U CN210512169U (en) | 2019-07-11 | 2019-07-11 | Accurate temperature control system based on indirect heating and multistage cooling |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110285574A (en) * | 2019-07-11 | 2019-09-27 | 苏州奥德机械有限公司 | A kind of precise temperature control system based on indirect heating and multistage cooling |
| CN111486596A (en) * | 2020-05-20 | 2020-08-04 | 阜新瀚邦科技有限公司 | Two-stage temperature regulating system based on critical temperature of organic heat carrier |
| CN113893790A (en) * | 2021-10-19 | 2022-01-07 | 云南能投硅材科技发展有限公司 | Temperature control method of organic silicon monomer synthesis fluidized bed |
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2019
- 2019-07-11 CN CN201921079357.8U patent/CN210512169U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110285574A (en) * | 2019-07-11 | 2019-09-27 | 苏州奥德机械有限公司 | A kind of precise temperature control system based on indirect heating and multistage cooling |
| CN111486596A (en) * | 2020-05-20 | 2020-08-04 | 阜新瀚邦科技有限公司 | Two-stage temperature regulating system based on critical temperature of organic heat carrier |
| CN111486596B (en) * | 2020-05-20 | 2024-04-12 | 阜新瀚邦科技有限公司 | Two-stage temperature regulating system based on critical temperature of organic heat carrier |
| CN113893790A (en) * | 2021-10-19 | 2022-01-07 | 云南能投硅材科技发展有限公司 | Temperature control method of organic silicon monomer synthesis fluidized bed |
| CN113893790B (en) * | 2021-10-19 | 2024-06-04 | 云南能投硅材科技发展有限公司 | Temperature control method of organosilicon monomer synthesis fluidized bed |
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