CN210506494U - Constant temperature treatment equipment for plasma spraying target material back tube - Google Patents
Constant temperature treatment equipment for plasma spraying target material back tube Download PDFInfo
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- CN210506494U CN210506494U CN201920885921.9U CN201920885921U CN210506494U CN 210506494 U CN210506494 U CN 210506494U CN 201920885921 U CN201920885921 U CN 201920885921U CN 210506494 U CN210506494 U CN 210506494U
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Abstract
The utility model discloses a constant temperature treatment facility of plasma spraying target back of body pipe, including the circulating liquid container that is used for splendid attire and retrieves circulation heat exchange medium, be used for circulating pipe and the constant temperature control module through the target back of body pipe, circulating pipe communicates in the circulating liquid container, is provided with the circulating pump between circulating pipe and the circulating liquid container, is provided with temperature detector and heater in the circulating liquid container, and constant temperature control module is connected to temperature detector and heater electricity respectively. The utility model discloses a constant temperature processing equipment realizes multi-functional temperature control, can play fine preheating, heat preservation and refrigerated effect to the target back of the body pipe.
Description
Technical Field
The utility model belongs to the technical field of rotatory target production facility technique and specifically relates to a constant temperature treatment facility of plasma spraying target back of body pipe is related to.
Background
Stainless steel pipe often regards as the target back of body pipe of rotatory target, and the target back of body pipe gets into plasma spraying after handling such as sandblast and bottoming, and in the initial stage of production, need preheat the target back of body pipe earlier to the adhesion nature of reinforcing spraying layer and target back of body pipe, at different production stages simultaneously, need keep the uniformity of target back of body pipe temperature, reduce the target back of body pipe because of expend with heat and contract with cold, also can reduce internal stress gathering simultaneously.
At present, room temperature water circulation is adopted to cool a base pipe, and as the room temperature water is greatly influenced by the temperature of the external environment, the temperature is uncontrollable, the cooling effect is not ideal, overheating expansion of a target material back pipe is caused to crack a coating sprayed by plasma, and internal stress of the target material is gathered to crack the target material after being heated when a client uses the target material.
Meanwhile, the existing cooling equipment can only cool the target back tube in production, the target back tube needs to be preheated and insulated in different stages of production, the preheating and insulation of the target back tube need to be realized through other equipment, the function of the production equipment is single, the quantity of the production equipment is large, and the operation is inconvenient.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a constant temperature treatment equipment of plasma spraying target back of body pipe, realize multi-functional temperature control, can play fine preheating, heat preservation and refrigerated effect to the target back of body pipe.
In order to realize the purpose, the utility model discloses the technical scheme who adopts is: the utility model provides a constant temperature treatment facility of plasma spraying target back of body pipe, is used for circulating water pipe and the constant temperature control module through the target back of body pipe including the circulation liquid container that is used for splendid attire and retrieves circulation heat exchange medium, circulating water pipe intercommunication in circulation liquid container, is provided with the circulating pump between circulating water pipe and the circulation liquid container, is provided with temperature detector and heater in the circulation liquid container, and constant temperature control module is connected to temperature detector and heater electricity respectively.
In a further technical scheme, the heater is provided with a starting state and a stopping state, when the temperature detected by the temperature detector reaches or exceeds a set temperature, the constant-temperature control module is disconnected from the electric connection with the heater, and the heater is in the stopping state; when the temperature detected by the temperature detector is lower than the set temperature, the constant-temperature control module is connected with the heater in an electric connection mode, and the heater is in a starting state; the heat exchange medium is selected from water, oil, alcohol and other liquids.
In a further technical scheme, constant temperature treatment equipment is provided with the fluid infusion device, and the fluid infusion device is including fluid infusion pipe and the level sensor who is used for adding cooling liquid to the circulating liquid container, and the outer end of fluid infusion pipe is provided with the fluid infusion mouth, and in the fluid infusion mouth stretched into the circulating liquid container, be provided with level switch in the fluid infusion pipe, level switch and level sensor electricity respectively connect in constant temperature control module, level switch signal connection level sensor, fluid infusion pipe communicate in the circulating liquid container, level sensor installs in the inner wall on circulating liquid container's upper portion.
In a further technical scheme, an opening is formed in the upper portion of the circulating liquid container, a fan support is fixedly mounted at the opening in the upper portion of the circulating liquid container, a cooling fan is fixed on the fan support and provided with an air outlet face, the air outlet face faces the upper portion of the opening and is used for pumping away hot air in the circulating liquid container, the cooling fan is located in the middle of the opening of the circulating liquid container, an air inlet channel is formed between the periphery of the cooling fan and the inner wall of the circulating liquid container, and the cooling fan is electrically connected with the constant temperature control module.
In a further technical scheme, the constant temperature control module is provided with an ultrahigh temperature state, a temperature reaching state and a low temperature state, when the constant temperature control module is in the ultrahigh temperature state, the constant temperature control module is connected with the heat radiation fan, the liquid level switch is turned on, and the heater is disconnected from the constant temperature control module; when the constant temperature control module is in a temperature state, the constant temperature control module is respectively disconnected from the electric connection of the heat radiation fan and the heater, and the liquid level switch is closed; when the constant temperature control module is in a low-temperature state, the constant temperature control module is disconnected from the electric connection with the radiating fan, the liquid level switch is closed, and the heater is connected with the electric connection with the constant temperature control module.
In a further technical scheme, circulating water pipe includes inlet and liquid outlet, inlet and liquid outlet respectively with circulation liquid container intercommunication, the inlet sets up in the bottom of circulation liquid container, and the liquid outlet sets up on the upper portion of circulation liquid container.
In a further technical scheme, the temperature detector is arranged at the bottom of the circulating liquid container, and the temperature detector is arranged at the same side of the liquid inlet.
In a further technical scheme, the heater is arranged in the middle of the circulating liquid container and extends to the bottom of the circulating liquid container.
In a further technical scheme, a liquid outlet is formed in the bottom of the circulating liquid container, and one side of the liquid outlet is opposite to one side of the liquid inlet.
In a further technical scheme, a liquid circulator is installed on the fan support and comprises a driving motor, a stirring rod and an impeller, the driving motor is installed on the fan support, one end of the stirring rod is connected to the driving motor, and the other end of the stirring rod is rotatably connected with the impeller.
After the structure is adopted, compared with the prior art, the utility model the advantage that has is:
1. the utility model discloses a constant temperature treatment facility can guarantee the temperature of the water through the target back of the body pipe, reduces the target back of the body pipe and causes the inside stress gathering of target back of the body pipe because of the temperature difference in temperature is big in the course of working, plasma spraying layer binding force chamber, and target processingquality is good.
2. The utility model discloses a constant temperature treatment facility is through the regulation to the temperature degree in the circulating liquid container to can preheat, keep warm and cool off the target in a plurality of stages of production, realize multi-functional combination, it is easy and simple to handle.
Drawings
The present invention will be further explained with reference to the drawings and examples.
Fig. 1 is a schematic structural diagram of the present invention.
In the figure: 10-a target material back pipe, 11-a circulating pump, 12-a temperature control module, 13-a radiating fan, 14-a water flow circulator and 15-a fan bracket;
20-a circulating water container, 21-a temperature detector and 22-a heater;
30-water replenishing pipe, 31-water level sensor, 32-water level switch and 33-liquid replenishing port;
40-circulating water pipe, 41-water inlet, 42-water outlet and 43-water outlet;
50-driving motor, 51-stirring rod and 52-impeller.
Detailed Description
The following are only preferred embodiments of the present invention, and the protection scope of the present invention is not limited thereby.
A constant temperature treatment device for a plasma spraying target back tube is shown in figure 1 and comprises a circulating liquid container 20 for containing and recycling a circulating heat exchange medium, a circulating water pipe 40 for passing through a target back tube 10 and a constant temperature control module 12, wherein the circulating water pipe 40 is communicated with the circulating liquid container 20, a circulating pump 11 is arranged between the circulating water pipe 40 and the circulating liquid container 20, a temperature detector 21 and a heater 22 are arranged in the circulating liquid container 20, and the temperature detector 21 and the heater 22 are respectively and electrically connected with the constant temperature control module 12.
The target backing tube 10 needs to be preheated, insulated or cooled at different production stages. However, the existing production equipment has a single function, and can only cool the target back tube 10, and the target back tube 10 is cooled by directly using room temperature water. The temperature of the water in the room temperature water is greatly influenced by the temperature of the external environment, and the temperature is uncontrollable, so that the internal stress of the target material back tube 10 is easily accumulated, and the rotary target is easily cracked by heat when in use. The utility model discloses a temperature detector 21 carries out temperature measurement to the liquid in the circulation liquid container 20, feeds back the measuring result to constant temperature control module 12 again, and constant temperature control module 12 starts or stops heater 22 through the judgement to the temperature measurement result again to reach the purpose of the temperature of liquid in the accurate regulation circulation liquid container 20. Thereby enabling the temperature of the target backing tube 10 to be in a small variation range during the production process so as to keep the temperature of the liquid in the circulating liquid container 20 close to the temperature of the target backing tube 10.
Specifically, the heater 22 is set to a start state and a stop state, when the temperature detected by the temperature detector 21 reaches or exceeds a set temperature, the thermostatic control module 12 is disconnected from the heater 22, and the heater 22 is in the stop state; when the temperature detected by the temperature detector 21 is lower than the set temperature, the thermostatic control module 12 is connected with the heater 22, and the heater 22 is in a starting state. The heat exchange medium is selected from water, oil, alcohol, etc. The structure or function of the constant temperature treatment apparatus of the present invention will be described below using water as an exchange medium.
Before the constant temperature processing equipment is started, the water temperature can be set in the constant temperature processing equipment to be kept at a required temperature, the temperature detector 21 continuously measures the temperature of the water in the circulating liquid container 20, the measured result is fed back to the constant temperature control module 12 at regular time, the constant temperature control module 12 judges the temperature fed back by the temperature detector 21, if the fed back temperature is higher than the set temperature, the heater 22 is controlled to stop heating the water in the circulating liquid container 20, and if the fed back temperature is lower than the set temperature, the constant temperature control module 12 controls the heater 22 to start stopping heating the water in the circulating liquid container 20. The temperature probe 21 sends temperature measurement information to the thermostatic control module 12 at regular intervals, although the shorter this interval, the more accurate the temperature control of the water in the circulating liquid container 20.
The constant temperature treatment equipment is provided with a liquid supplementing device, the liquid supplementing device comprises a liquid supplementing pipe 30 and a liquid level sensor 31, the liquid supplementing pipe 30 is used for adding cooling liquid into the circulating liquid container 20, a liquid supplementing port 33 is formed in the outer end of the liquid supplementing pipe 30, the liquid supplementing port 33 extends into the circulating liquid container 20, a liquid level switch 32 is arranged in the liquid supplementing pipe 30, the liquid level switch 32 and the liquid level sensor 31 are respectively and electrically connected to the constant temperature control module 12, the liquid level switch 32 is in signal connection with the liquid level sensor 31, the liquid supplementing pipe 30 is communicated with the circulating liquid container 20, and the liquid level sensor 31 is installed on the inner wall of the upper portion of the.
The level sensor 31 is mainly used for monitoring the water level in the circulating liquid container 20, and the high water level is close to or lower than the container opening of the circulating liquid container 20, and water can overflow if the high water level exceeds the container opening. If the water level reaches the set high water level position, the liquid level sensor 31 sends a signal to the liquid level switch 32, the liquid level switch 32 is turned off, and the liquid replenishing pipe 30 stops replenishing water to the circulating liquid container 20, so that water overflow is prevented. The low water level is located above the top of the heater 22 and if the water level is below the top of the heater 22, damage to the heater 22 may result. If the water level reaches the set low water level position, the liquid level sensor 31 sends a signal to the liquid level switch 32, the liquid level switch 32 is turned on, and the liquid replenishing pipe 30 replenishes water to the circulating liquid container 20 to prevent the heater 22 from being damaged.
The constant temperature treatment equipment is provided with a liquid supplementing device for two purposes, wherein the first purpose is to supplement lost water, because the water in the circulating liquid container 20 is evaporated and lost along with the rise of the temperature or lost in the target material back pipe 10 in the circulating process, so that the water in the circulating liquid container 20 is reduced; the second purpose is to rapidly cool the water in the circulation liquid container 20, because the back pipe temperature after plasma spraying is higher, the temperature of the water in the circulation liquid container 20 will rise along with the rise of the back pipe temperature, so that the temperature of the water in the liquid outlet 42 in the circulation water pipe 40 is higher than that of the water in the liquid inlet 41, after the water passes through heat accumulation, the temperature of the water in the circulation liquid container 20 will gradually rise, the temperature exceeds the preset temperature, the constant temperature control module 12 controls the liquid level switch 32 to be opened, and room temperature water is added into the circulation liquid container 20, thereby achieving the effect of water temperature regulation.
In a preferred embodiment, the fluid replacement pipe 30 is connected to an upper portion of the circulating fluid container 20. Because the water in the circulating liquid container 20 is heated to the set temperature, the liquid outlet 42 of the liquid supplementing pipe 30 is arranged above or at the upper part of the circulating liquid container 20, the water in the liquid supplementing pipe 30 enters from the upper part of the circulating liquid container 20, the instant influence on the temperature of the water in the circulating liquid container 20 is reduced, and the whole temperature of the water in the circulating liquid container 20 is kept relatively stable.
An opening is formed in the upper portion of the circulating liquid container 20, a fan support 15 is fixedly installed on the opening in the upper portion of the circulating liquid container 20, a cooling fan 13 is fixed on the fan support 15, the cooling fan 13 is provided with an air outlet face, the air outlet face faces the upper portion of the opening and is used for pumping hot air in the circulating liquid container 20 away, the cooling fan 13 is located in the middle of the opening of the circulating liquid container 20, an air inlet channel is formed between the periphery of the cooling fan 13 and the inner wall of the circulating liquid container 20, and the cooling fan 13 is electrically connected with the constant temperature control module 12.
The heat radiating fan 13 can radiate heat from the water in the circulation liquid container 20. When the natural cooling of the constant temperature treatment equipment cannot meet the processing requirement, namely the temperature of the water in the circulating liquid container 20 is higher than a certain range of the set temperature, the radiating fan 13 is triggered to be started to perform air draft and heat dissipation on the circulating liquid container 20.
The thermostatic processing device of the utility model realizes the adjustment of the temperature of the water in the circulating liquid container 20 mainly through the mutual cooperation of the three aspects of the cooling fan 13, the supplementary heat exchange medium and the heater 22. Of course, the cooperation relationship among them is mainly to control the heat dissipation fan 13, the supplementary heat exchange medium, and the heater 22 through the thermostatic control module 12. The set temperature can be adjusted and realized more quickly and accurately by the combined action of the three aspects of the heat radiation fan 13, the supplementary heat exchange medium and the heater 22.
More specifically, the constant temperature control module 12 is provided with an ultra high temperature state, a temperature reaching state, and a low temperature state. The ultra-high temperature state refers to a state in which the temperature of water in the circulating liquid container 20 is higher than the temperature of water in a certain range or more of the set temperature, and in which the temperature of water in the circulating liquid container 20 needs to be rapidly lowered, otherwise the quality of the produced target material is affected. When the constant temperature control module 12 is in an ultrahigh temperature state, the constant temperature control module 12 is electrically connected with the cooling fan 13, the liquid level switch 32 is turned on, and the heater 22 is electrically disconnected with the constant temperature control module 12; the heat radiation fan 13 radiates heat to the water in the circulation liquid container 20, the liquid level switch 32 is turned on to add room temperature water to the water in the circulation liquid container 20 for cooling, and the heater 22 stops heating the water in the circulation liquid container 20. The three aspects work together to rapidly lower the temperature of the water in the circulation fluid tank 20. In this process, the liquid level sensor 31 also monitors the water level in the circulating liquid container 20, and if the water level in the circulating liquid container 20 reaches the set high level, the liquid level sensor 31 also sends a stop signal of the liquid level switch 32 to the liquid level switch 32, so that the liquid level switch 32 is turned off to prevent the water in the circulating liquid container 20 from overflowing due to excessive water.
The temperature-reached state is a water temperature state in which the temperature of the water in the circulating liquid container 20 reaches a set temperature. When the constant temperature control module 12 is in a temperature state, the constant temperature control module 12 disconnects the electric connection between the cooling fan 13 and the heater 22, and the liquid level switch 32 is turned off; i.e., the temperature of the water in the circulating liquid container 20 in this state does not need to be adjusted.
The low temperature state refers to a water temperature state in which the temperature of the water in the circulating liquid container 20 is lower than a set temperature. When the thermostatic control module 12 is in a low-temperature state, the thermostatic control module 12 is disconnected from the heat radiation fan 13, the liquid level switch 32 is closed, and the heater 22 is connected with the thermostatic control module 12, until the water temperature in the circulating liquid container 20 reaches the set temperature, the heater 22 stops heating.
Specifically, the circulating water pipe 40 includes a liquid inlet 41 and a liquid outlet 42, the liquid inlet 41 and the liquid outlet 42 are respectively communicated with the circulating liquid container 20, the liquid inlet 41 is disposed at the bottom of the circulating liquid container 20, and the liquid outlet 42 is disposed at the upper portion of the circulating liquid container 20. The temperature detector 21 is arranged at the bottom of the circulating liquid container 20, and the temperature detector 21 is arranged at the same side of the liquid inlet 41. The heater 22 is disposed at the middle of the circulation liquid container 20 and extends to the bottom of the circulation liquid container 20. The bottom of the circulation liquid container 20 is provided with a liquid outlet 43, the side of the liquid outlet 43 is opposite to the side of the liquid inlet 41, and the bottom of the circulation liquid container 20 is provided with a liquid circulator 14. The liquid circulator 14 is mounted on the fan bracket 15, the liquid circulator 14 comprises a driving motor 50, a stirring rod 51 and an impeller 52, the driving motor 50 is mounted on the fan bracket 15, one end of the stirring rod 51 is connected to the driving motor 50, and the other end of the stirring rod 51 is rotatably connected to the impeller 52.
In a preferred embodiment, the temperature detector 21 is installed near the liquid inlet 41 to ensure that the temperature of the water entering the target backing tube 10 is a set temperature, so as to ensure the processing quality of the target backing tube 10. The heater 22 is disposed in the middle of the circulation liquid container 20 and extends to the bottom thereof to accelerate the heating of the water in the circulation liquid container 20, and preferentially heats the water in the middle and lower part of the circulation liquid container 20, since the temperature of the water in the upper part of the circulation liquid container 20 is relatively changed greatly, and the liquid inlet 41 is disposed at the bottom of the circulation liquid container 20, the temperature rising speed of the water in the bottom of the circulation liquid container 20 is accelerated, so that the circulation liquid container can be put into a working state as soon as possible. The purpose of providing the liquid circulator 14 in the circulation liquid container 20 is to increase the flow rate of water in the circulation liquid container 20 so that the difference between the water temperatures at the upper and lower portions of the circulation liquid container 20 is reduced.
In the constant temperature treatment equipment, the temperature of the water in the circulating liquid container 20 is controllable, the temperature detector 21 is used for monitoring the temperature of the water in the circulating liquid container 20 in real time, the liquid supplementing pipe 30 and the radiating fan 13 are used for cooling the water in the circulating container, and the heater 22 is used for heating the water in the circulating liquid container 20, so that the constant temperature treatment equipment has the functions of preheating, heat preservation and cooling the target material back pipe 10. The water in the circulating liquid container 20 is set to be heated in a stepped manner in the constant temperature treatment equipment, so that the target material back pipe 10 can be preheated; if the target material back pipe 10 needs to be insulated after preheating, setting a fixed temperature in constant temperature processing equipment; if the target back tube 10 needs to be cooled, the water in the circulating liquid container 20 can be set in the constant temperature treatment equipment to carry out stepped temperature reduction; the step-type temperature reduction or heating refers to heating or temperature reduction within a smaller range, so that the situation of stress concentration inside the target material back tube 10 is reduced, and the produced target material is good in quality.
Of course, the constant temperature treatment equipment of the utility model is not only suitable for the circulation heating and cooling of water, but also suitable for the circulation heating and cooling of other various heat exchange media.
The constant temperature control module 12 is a master control module of a circuit of the constant temperature processing device.
The above description is only for the preferred embodiment of the present invention, and for those skilled in the art, there are variations on the detailed description and the application scope according to the idea of the present invention, and the content of the description should not be construed as a limitation to the present invention.
Claims (10)
1. The utility model provides a constant temperature treatment facility of plasma spraying target back of body pipe which characterized in that: the device comprises a circulating liquid container (20) for containing and recycling a circulating heat exchange medium, a circulating water pipe (40) and a constant temperature control module (12), wherein the circulating water pipe (40) is used for passing through a target back pipe (10), the circulating water pipe (40) is communicated with the circulating liquid container (20), a circulating pump (11) is arranged between the circulating water pipe (40) and the circulating liquid container (20), a temperature detector (21) and a heater (22) are arranged in the circulating liquid container (20), and the temperature detector (21) and the heater (22) are respectively and electrically connected with the constant temperature control module (12).
2. The constant-temperature treatment equipment for the plasma spraying target material back tube as claimed in claim 1, wherein: the heater (22) is provided with an on state and an off state,
when the temperature detected by the temperature detector (21) reaches or exceeds a set temperature, the constant temperature control module (12) is disconnected from the heater (22), and the heater (22) is in a stop state;
when the temperature detected by the temperature detector (21) is lower than the set temperature, the constant temperature control module (12) is connected with the electric connection of the heater (22), and the heater (22) is in a starting state;
the heat exchange medium is selected from water, oil or alcohol.
3. The constant-temperature treatment equipment for the plasma spraying target material back tube as claimed in claim 2, wherein: constant temperature treatment equipment is provided with the fluid infusion device, and the fluid infusion device is including fluid infusion pipe (30) and level sensor (31) that are used for adding cooling liquid to circulating liquid container (20), and the outer end of fluid infusion pipe (30) is provided with fluid infusion mouth (33), and fluid infusion mouth (33) stretch into in circulating liquid container (20), is provided with liquid level switch (32) in fluid infusion pipe (30), and liquid level switch (32) and level sensor (31) electricity respectively connect in constant temperature control module (12), liquid level switch (32) signal connection level sensor (31), fluid infusion pipe (30) communicate in circulating liquid container (20), inner wall in the upper portion of circulating liquid container (20) is installed in level sensor (31).
4. The constant-temperature treatment equipment for the plasma spraying target material back tube as claimed in claim 3, wherein: circulation liquid container (20) upper portion is provided with an opening, the opening fixed mounting on the upper portion of circulation liquid container (20) has fan bracket (15), fan bracket (15) are fixed with radiator fan (13), radiator fan (13) have the air-out face, the air-out face is towards open-ended top, a hot-air for taking away in circulation liquid container (20), radiator fan (13) are located the open-ended middle part of circulation liquid container (20), be provided with inlet air channel around radiator fan (13) and between the inner wall of circulation liquid container (20), radiator fan (13) electricity is connected constant temperature control module (12).
5. The constant-temperature treatment equipment for the plasma spraying target material back tube as claimed in claim 4, wherein: the constant temperature control module (12) is provided with an ultra-high temperature state, a temperature reaching state and a low temperature state,
when the constant temperature control module (12) is in an ultrahigh temperature state, the constant temperature control module (12) is connected with the heat radiation fan (13), the liquid level switch (32) is turned on, and the heater (22) is disconnected from the constant temperature control module (12);
when the constant temperature control module (12) is in a temperature reaching state, the constant temperature control module (12) is respectively disconnected from the electric connection of the heat radiation fan (13) and the heater (22), and the liquid level switch (32) is closed;
when the constant temperature control module (12) is in a low temperature state, the constant temperature control module (12) is disconnected from the electric connection with the radiating fan (13), the liquid level switch (32) is closed, and the heater (22) is connected with the electric connection with the constant temperature control module (12).
6. The constant-temperature treatment equipment for the plasma spraying target material back tube as claimed in claim 5, wherein: the circulating water pipe (40) comprises a liquid inlet (41) and a liquid outlet (42), the liquid inlet (41) and the liquid outlet (42) are respectively communicated with the circulating liquid container (20), the liquid inlet (41) is arranged at the bottom of the circulating liquid container (20), and the liquid outlet (42) is arranged at the upper part of the circulating liquid container (20).
7. The constant-temperature treatment equipment for the plasma spraying target material back tube as claimed in claim 6, wherein: the temperature detector (21) is arranged at the bottom of the circulating liquid container (20), and the temperature detector (21) is arranged at the same side of the liquid inlet (41).
8. The constant-temperature processing equipment for the plasma spraying target material back tube as claimed in claim 7, wherein: the heater (22) is arranged in the middle of the circulating liquid container (20) and extends to the bottom of the circulating liquid container (20).
9. The constant-temperature processing equipment for the plasma spraying target material back tube as claimed in claim 8, wherein: a liquid outlet (43) is formed in the bottom of the circulating liquid container (20), and one side where the liquid outlet (43) is located is opposite to one side where the liquid inlet (41) is located.
10. The constant-temperature processing equipment for the plasma spraying target material back tube as claimed in claim 9, wherein: install a liquid circulator (14) on fan bracket (15), liquid circulator (14) are including driving motor (50), puddler (51) and impeller (52), and driving motor (50) are installed on fan bracket (15), and the one end of puddler (51) is connected in driving motor (50), and the other end swivelling joint impeller (52) of puddler (51).
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| CN201920885921.9U CN210506494U (en) | 2019-06-13 | 2019-06-13 | Constant temperature treatment equipment for plasma spraying target material back tube |
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| CN201920885921.9U CN210506494U (en) | 2019-06-13 | 2019-06-13 | Constant temperature treatment equipment for plasma spraying target material back tube |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114657519A (en) * | 2020-12-22 | 2022-06-24 | 东京毅力科创株式会社 | Substrate processing apparatus, temperature control method thereof, program, and storage medium |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114657519A (en) * | 2020-12-22 | 2022-06-24 | 东京毅力科创株式会社 | Substrate processing apparatus, temperature control method thereof, program, and storage medium |
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