CN210495454U - MO source recovery processing device for filter element for epitaxial growth equipment - Google Patents
MO source recovery processing device for filter element for epitaxial growth equipment Download PDFInfo
- Publication number
- CN210495454U CN210495454U CN201921221640.XU CN201921221640U CN210495454U CN 210495454 U CN210495454 U CN 210495454U CN 201921221640 U CN201921221640 U CN 201921221640U CN 210495454 U CN210495454 U CN 210495454U
- Authority
- CN
- China
- Prior art keywords
- washing
- outlet
- inlet
- alkali
- path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model discloses a MO source recovery processing device for epitaxial growth is filter core for equipment, including the charge pump, wash the case, case and epitaxial growth equipment filter are washed to alkali, wash the incasement and be equipped with clear water, alkali wash the incasement and be equipped with alkali lye, the import and the branching of this charge pump are connected, the export of charge pump is connected with epitaxial growth equipment filter through a washing total route, this epitaxial growth equipment filter is connected with a branching outward route through a washing total route again, wherein, the branching outward route is including washing the forward route and alkali wash the forward route, washing the forward route and the exit linkage of washing the case, alkali wash the forward route and the exit linkage of alkali washing case, the branching outward route is including washing the forward route and alkali wash the forward route, washing the forward route and the access linkage of washing the case, alkali wash the forward route and alkali washing the access linkage of case. The recovery processing device can clean the filter element for the epitaxial growth equipment and recover the MO source deposited on the filter element, has high recovery processing efficiency, and is beneficial to energy conservation and environmental protection.
Description
Technical Field
The utility model relates to a MO source recovery processing device that is used for epitaxial growth equipment to use filter core.
Background
At present, the LED industry is in a rapid development stage, and the demand of epitaxial chips is multiplied. When an epitaxial factory uses an MOCVD (metal organic chemical vapor phase epitaxy) method to prepare an LED epitaxial chip, harmful tail gases are generated, and the tail gases generally need to be filtered by a filter. The black solid particles deposited on the filter element in the filter are converted from the MO source. The prior art does not have a good treatment mode for recycling the black solid particles, and only treats the black solid particles as waste materials. However, with the rapid development of LEDs, more and more waste materials are generated, which is not only harmful to environmental protection, but also causes waste of MO source.
SUMMERY OF THE UTILITY MODEL
For solving the technical problem, an object of the utility model is to provide a MO source recovery processing device for epitaxial growth equipment filter core, utilize this recovery processing device can wash and carry out recovery processing to the sedimentary MO source on the filter core to the epitaxial growth equipment filter core, recovery processing efficiency is high, does benefit to energy-concerving and environment-protective.
For realizing above-mentioned technical purpose, reach above-mentioned technological effect, the utility model discloses a following technical scheme realizes: an MO source recovery processing device for a filter core for epitaxial growth equipment comprises an electric pump, a water washing tank, an alkali washing tank and an epitaxial growth equipment filter, wherein clear water is filled in the water washing tank, alkali liquor is filled in the alkali washing tank, an inlet of the electric pump is connected with a bifurcated inlet path, an outlet of the electric pump is connected with the epitaxial growth equipment filter through a main washing inlet path, the epitaxial growth equipment filter is connected with a bifurcated outlet path through a main washing outlet path, a bifurcated inlet path comprises a water washing inlet path and an alkali washing inlet path, the water washing inlet path is connected with an outlet of the water washing tank, the alkali washing inlet path is connected with an outlet of the alkali washing tank, the bifurcated outlet path comprises a water washing outlet path and an alkali washing outlet path, the water washing outlet path is connected with an inlet of the water washing tank, the alkali washing outlet path is connected with an inlet of the alkali washing tank, a water washing inlet valve is arranged on the water washing inlet path, an alkali washing inlet valve is arranged on the alkali washing inlet path, the water washing outlet is provided with a water washing outlet valve, and the alkaline washing outlet is provided with an alkaline washing outlet valve.
As the utility model discloses above-mentioned technical scheme's further improvement, alkali wash the inlet road with wash between the total inlet road still parallel connection have the washing liquid to retrieve the inlet road, should wash total inlet road with alkali wash out between the road parallel connection have the washing liquid to retrieve the outlet road.
As the utility model discloses above-mentioned technical scheme further improve, be equipped with first washing liquid recovery valve on the washing liquid recovery inlet path, be equipped with second washing liquid recovery valve on the washing liquid recovery outlet path.
As a further improvement of the above technical solution of the present invention, a cleaning control valve is disposed at a portion of the cleaning main inlet and the cleaning liquid recovery outlet connected in parallel.
As a further improvement of the above technical scheme of the utility model, the washing incasement is equipped with the washing and collects the filter core, and the washing incasement is equipped with alkali and collects the filter core.
As a further improvement of the technical proposal of the utility model, the bottom of the water washing box and the bottom of the alkali washing box are both provided with collecting barrels.
As a further improvement of the above technical solution of the present invention, the cleaning main inlet is connected to the filter of the epitaxial growth apparatus through a hose.
As a further improvement of the technical proposal of the utility model, an outlet valve is arranged at the outlet of the washing tank.
The utility model has the advantages that: the recovery processing device is provided with two modules, one is a water washing circulating module, and the other is an alkali washing circulating module; the recovery processing device realizes the switching of the water washing circulation module and the alkali washing circulation module through the matching of different pipelines and valves, thereby realizing the water washing process and the alkali washing process. The recovery processing device firstly enables a part of deposited substances on a filter element of the epitaxial growth equipment filter to react through the water washing circulation module so as to avoid the safety risk generated in the recovery processing process of the deposited substances with too high concentration; then, performing alkali washing treatment on the filter element through an alkali washing circulating module to dissolve deposited substances; and finally, returning the mixed substance subjected to water washing treatment to a water washing tank for precipitation, and returning the mixed substance subjected to alkali washing treatment to an alkali washing tank for precipitation, so as to realize cleaning treatment of the filter element for the epitaxial growth equipment and MO source recovery. The utility model discloses not only recovery processing is efficient, and safe and reliable does benefit to energy-concerving and environment-protective moreover.
Drawings
Fig. 1 is the utility model discloses a MO source recovery processing device's for epitaxial growth equipment filter core structural schematic diagram.
Detailed Description
The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.
As shown in fig. 1, an embodiment of the present invention provides an MO source recycling device for a filter element of an epitaxial growth apparatus, including an electric pump 1, a water washing tank 2, an alkali washing tank 3 and an epitaxial growth apparatus filter 4, the water washing tank 2 is filled with clear water, the alkali washing tank 3 is filled with alkali lye, an inlet of the electric pump 1 is connected with a branch inlet, an outlet of the electric pump 1 is connected with a washing main inlet 5, the washing main inlet 5 is connected with the epitaxial growth apparatus filter 4 through a hose 6, the epitaxial growth apparatus filter 4 is connected with a branch outlet through a washing main outlet 7, wherein the branch inlet includes a water washing inlet 8 and an alkali washing inlet 9; the water washing inlet path 8 is connected with the outlet of the water washing tank 2, and the water washing inlet path 8 is provided with an outlet valve 16 close to the outlet of the water washing tank 2; the alkaline washing inlet 9 is connected with an outlet of the alkaline washing box 3; the branched outlet comprises a water washing outlet 10 and an alkaline washing outlet 11, the water washing outlet 10 is connected with an inlet of the water washing tank 1, and the alkaline washing outlet 11 is connected with an inlet of the alkaline washing tank 3; the washing inlet path 8 is provided with a washing inlet valve 12, the alkaline washing inlet path 9 is provided with an alkaline washing inlet valve 13, the washing outlet path 10 is provided with a washing outlet valve 14, and the alkaline outlet path 11 is provided with an alkaline washing outlet valve 15.
In the technical scheme, a water washing circulation module is formed among the water washing tank 2, the outlet valve 16, the water washing inlet path 8, the water washing inlet path valve 12, the electric pump 1, the washing main inlet path 5, the epitaxial growth equipment filter 4, the washing main outlet path 7, the water washing inlet path valve 14 and the water washing outlet path 10; an alkali washing circulation module is formed among the alkali washing box 3, the alkali washing inlet valve 13, the alkali washing inlet 9, the electric pump 1, the washing main inlet 5, the epitaxial growth equipment filter 4, the washing main outlet 7, the alkali washing outlet valve 15 and the alkali washing outlet 11.
In addition, the recovery processing device also comprises a cleaning liquid recovery module; specifically, a cleaning liquid recycling inlet 20 is connected in parallel between the alkaline cleaning inlet 9 and the cleaning main inlet 5, and a cleaning liquid recycling outlet 21 is connected in parallel between the cleaning main inlet 5 and the alkaline cleaning outlet 11; a first cleaning liquid recovery valve 22 is arranged on the cleaning liquid recovery inlet path 20, and a second cleaning liquid recovery valve 23 is arranged on the cleaning liquid recovery outlet path 21; a cleaning control valve 24 is provided at a portion of the cleaning main passage 5 connected in parallel to the cleaning liquid recovery outlet 21.
In order to realize the rapid precipitation and collection of mixed substances generated in the water washing process and the alkali washing process, a water washing collection filter element 17 is arranged in the water washing tank 2, and an alkali washing collection filter element 18 is arranged in the alkali washing tank 3. The bottom of the water washing tank 2 and the bottom of the alkali washing tank 3 are both provided with collecting barrels 19 to recover the precipitated MO source substances.
The specific process of recycling by using the MO source recycling device is as follows:
firstly, washing with a washing circulation module, specifically, opening an outlet valve 16, a washing inlet valve 12, a washing control valve 24 and a washing outlet valve 14, and closing other valves; under the action of the electric pump 1, clean water in the water washing tank 2 enters a water washing inlet 8 through an outlet valve 16, then enters a washing main inlet 5 through a water washing inlet valve 12, then enters an epitaxial growth equipment filter 4, washes a filter element of the epitaxial growth equipment filter 4 to perform reaction treatment on a part of deposited substances, after washing treatment, water with mixed substances enters a washing main outlet 7, then enters a water washing outlet 10 through a water washing outlet valve 14, finally returns to the water washing tank 2, and enters the next water washing process according to the process; the whole water washing process is circulated for 1 hour.
Then, performing alkaline washing by using an alkaline washing circulating module; the method specifically comprises the following steps: opening an alkaline washing inlet valve 13, a cleaning control valve 24 and an alkaline washing outlet valve 15, and closing other valves; the alkali liquor in the alkali washing box 3 enters an alkali washing inlet 9 through an alkali washing inlet valve 13 under the action of an electric pump 1, then enters a washing main inlet 5, then enters an epitaxial growth equipment filter 4, performs alkali washing on a filter element of the epitaxial growth equipment filter 4 to dissolve deposited substances, and after alkali washing treatment, the alkali liquor with mixed substances enters a washing main outlet 7, then enters an alkali washing outlet 11 through an alkali washing inlet valve 15, finally returns to the alkali washing box 3, and enters the next alkali washing process according to the process; the whole alkaline washing process is circulated for 10 hours.
After the water washing process and the alkali washing process, the epitaxial growth equipment filter 4 can be replaced by the next epitaxial growth equipment filter to be washed after being cleaned; before replacement, the first cleaning liquid recovery valve 22 and the second cleaning liquid recovery valve 23 are opened, other valves are closed, liquid in the epitaxial growth equipment filter 4 enters the alkali cleaning tank 3 through the first cleaning liquid recovery valve 22 and the second cleaning liquid recovery valve 23 under the action of the electric pump 1, and then the epitaxial growth equipment filter 4 can be detached for replacement.
The water washing collecting filter element 17 in the water washing tank 2 and the alkali washing collecting filter element 18 in the alkali washing tank 3 can realize the precipitation collection of the mixed substances. The collecting barrels 19 arranged at the bottom of the water washing tank 2 and the bottom of the alkali washing tank 3 can recover the precipitated MO source substances.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.
Claims (8)
1. The utility model provides a MO source recovery processing apparatus that is used for epitaxial growth equipment to use filter core which characterized in that: comprises an electric pump, a water washing tank, an alkali washing tank and an epitaxial growth equipment filter, wherein clear water is filled in the water washing tank, alkali liquor is filled in the alkali washing tank, the inlet of the electric pump is connected with a bifurcation inlet, the outlet of the electric pump is connected with the epitaxial growth equipment filter through a cleaning main inlet, the epitaxial growth equipment filter is connected with a bifurcation outlet through a cleaning main outlet, wherein the branched inlet path comprises a water washing inlet path and an alkali washing inlet path, the water washing inlet path is connected with an outlet of the water washing tank, the alkali washing inlet path is connected with an outlet of the alkali washing tank, the branched outlet path comprises a water washing outlet path and an alkali washing outlet path, the water washing outlet path is connected with an inlet of the water washing tank, the alkali washing outlet path is connected with an inlet of the alkali washing tank, the washing inlet path is provided with a washing inlet valve, the alkaline washing inlet path is provided with an alkaline washing inlet valve, the washing outlet path is provided with a washing outlet valve, and the alkaline washing outlet path is provided with an alkaline washing outlet valve.
2. The apparatus of claim 1, wherein the apparatus comprises: and a cleaning liquid recycling inlet path is also connected in parallel between the alkaline washing inlet path and the cleaning main inlet path, and a cleaning liquid recycling outlet path is connected in parallel between the cleaning main inlet path and the alkaline washing outlet path.
3. The apparatus of claim 2, wherein the apparatus further comprises a filter element for epitaxial growth equipment, and the apparatus further comprises: and a first cleaning liquid recovery valve is arranged on the cleaning liquid recovery inlet path, and a second cleaning liquid recovery valve is arranged on the cleaning liquid recovery outlet path.
4. The apparatus of claim 2, wherein the apparatus further comprises a filter element for epitaxial growth equipment, and the apparatus further comprises: and a cleaning control valve is arranged at the part of the cleaning main inlet path, which is connected with the cleaning liquid recovery outlet path in parallel.
5. The apparatus of claim 1, wherein the apparatus comprises: the washing tank is internally provided with a washing collecting filter element, and the alkaline washing tank is internally provided with an alkaline washing collecting filter element.
6. The apparatus of claim 1, wherein the apparatus comprises: and collecting barrels are arranged at the bottom of the water washing tank and the bottom of the alkali washing tank.
7. The apparatus of claim 1, wherein the apparatus comprises: the cleaning main inlet is connected with the epitaxial growth equipment filter through a hose.
8. The apparatus of claim 1, wherein the apparatus comprises: an outlet valve is arranged at the outlet of the water washing tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921221640.XU CN210495454U (en) | 2019-07-31 | 2019-07-31 | MO source recovery processing device for filter element for epitaxial growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921221640.XU CN210495454U (en) | 2019-07-31 | 2019-07-31 | MO source recovery processing device for filter element for epitaxial growth equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210495454U true CN210495454U (en) | 2020-05-12 |
Family
ID=70586575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921221640.XU Active CN210495454U (en) | 2019-07-31 | 2019-07-31 | MO source recovery processing device for filter element for epitaxial growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210495454U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110302584A (en) * | 2019-07-31 | 2019-10-08 | 苏州普耀光电材料有限公司 | A kind of source MO recycling and processing device for epitaxial growth equipment filter core |
-
2019
- 2019-07-31 CN CN201921221640.XU patent/CN210495454U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110302584A (en) * | 2019-07-31 | 2019-10-08 | 苏州普耀光电材料有限公司 | A kind of source MO recycling and processing device for epitaxial growth equipment filter core |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101885520B (en) | Method and device for recovering nickel resource and water resource in nickel plating wastewater | |
| CN104294549B (en) | Washing machine and control method for washing | |
| CN205096196U (en) | Clean system of steel bottle | |
| CN210495454U (en) | MO source recovery processing device for filter element for epitaxial growth equipment | |
| CN102399040A (en) | Process for comprehensively treating sulfur dye waste water | |
| CN104475410B (en) | Circulating treating system and process for cleaning solution in bottle cleaning process | |
| CN205062185U (en) | Alkaline etching waste liquid resource recycling processing apparatus | |
| CN107159646A (en) | The automatic flushing device and its method of MO carrying shields steel loading bottle | |
| CN107554541B (en) | Vehicle ash water recycling handles reuse means | |
| CN107199055A (en) | Hydrogen leads resin and dynamically cleans regenerating unit and its operating method | |
| CN206882307U (en) | The automatic flushing device of MO carrying shield steel loading bottles | |
| CN110302584A (en) | A kind of source MO recycling and processing device for epitaxial growth equipment filter core | |
| CN201420167Y (en) | Recycling system of lye | |
| CN207057103U (en) | A kind of decontamination plant for being used for primary Ioops equipment and part | |
| CN109494179A (en) | A kind of automatic organic washing machine, cleaning system and cleaning method | |
| CN202438485U (en) | Silicon wafer cleaning system capable of reusing water resource and cleaning slot of same | |
| CN203393463U (en) | Desizing and mercerizing waste heat recovery device | |
| CN103755078B (en) | Rush clear dual-purpose type Sewage treatment systems and control method thereof | |
| CN110467293A (en) | A kind of processing method and processing system of chemistry nickel waste water | |
| CN208949025U (en) | A kind of electroplating wastewater circulation recycling system | |
| CN208791402U (en) | A kind of stainless steel cleaning containing acid wastewater zero discharge waste water unit equipment | |
| CN208245316U (en) | A kind of liquid separation CIP cleaning system | |
| CN112875804A (en) | Process for reducing ultrafiltration self-water utilization rate and improving water yield recovery rate | |
| CN206715955U (en) | Hydrogen leads resin dynamic and cleans regenerating unit | |
| CN206064635U (en) | A kind of rinse-system of electrostatic precipitator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |