CN210467749U

CN210467749U - Linear anode layer ion source with multi-aperture gas inlet channel

Info

Publication number: CN210467749U
Application number: CN201921888445.2U
Authority: CN
Inventors: 陈伟; 张静; 高明浩; 江晨
Original assignee: Individual
Current assignee: Individual
Priority date: 2019-11-04
Filing date: 2019-11-04
Publication date: 2020-05-05
Anticipated expiration: 2029-11-04

Abstract

The utility model belongs to the technical field of ion sources, in particular to a linear anode layer ion source with a multi-aperture air inlet channel, which comprises a shell with a long strip-shaped mounting groove, wherein a magnet which is vertically arranged is arranged at the center of a groove cavity of the mounting groove; the magnet and the groove bottom and the two side groove walls of the mounting groove are enclosed to form two independent discharge chambers, an anode support is arranged in each discharge chamber, a gas injection hole penetrating through the shell is formed in the bottom of each discharge chamber, a continuous large-diameter section gas inlet channel and a continuous small-diameter section gas inlet channel are arranged on each anode support and are communicated to the gas injection holes to inject gas into the discharge chambers, and the diameter of each gas injection hole is smaller than that of the large-diameter section gas inlet channel; because of the multi-stage diameter change of the gas channel, the pressure of the gas supply bottle is effectively buffered, and the flow rate of the gas entering the discharge chamber is slowed down; the difference in vacuum pressure outside the discharge chamber and the ion source is changed so that the low flow rate gas achieves sufficient ionization in the discharge chamber.

Description

Linear anode layer ion source with multi-aperture gas inlet channel

Technical Field

The utility model belongs to the technical field of the ion source, concretely relates to linear anode layer ion source with multiple aperture inlet channel.

Background

The anode layer ion source is based on the theory of glow discharge and the movement of charged particles in an electromagnetic field, and the working principle is as follows: the high voltage is applied to the anode, the inner cathode and the outer cathode are grounded, the gas between the anode and the cathode generates glow discharge to generate a large amount of electrons and ions, the plasma enters the vacuum cavity through the slit outlet between the inner cathode and the outer cathode, and the electron movement track in the plasma can be bound due to the approximately orthogonal electric field and magnetic field at the outlet to form annular Hall current, so that the movement range of electrons is limited, the collision probability of the electrons and neutral gas molecules or atoms can be increased, and the ionization rate of the gas is improved. The positive ions in the area near the surface of the anode are extracted from the outlet under the common acceleration of the potential difference between the anode and the cathode and the Hall current to form an ion beam, so that the ion source is the anode layer ion source.

With the development of thin film materials and surface treatment technologies, the application requirements of people on ion sources are continuously improved, the anode layer ion source technology is also rapidly developed, according to different structural characteristics, the anode layer ion source can be divided into a cylindrical anode layer ion source and a linear anode layer ion source, although the two anode layer ion sources are different in geometric form, the anode layer ion source and the linear anode layer ion source both comprise structures such as an outer cathode, an inner cathode, an anode, a magnetic seat and a permanent magnet, and an electromagnetic field system, a gas distribution system, a water cooling system and other main parts of the ion source are constructed by the. In the specific working process of the conventional linear anode layer ion source, because the travel of electrons emitted by a cathode is short and the traveling path is regular, sufficient collision with gas is difficult to form, so that the ionization rate of the gas is low and the ion concentration is low.

SUMMERY OF THE UTILITY MODEL

To solve the above problems, an object of the present invention is to provide a linear anode layer ion source with a multi-aperture gas inlet channel, which can buffer the gas entering the discharge chamber to fully ionize the gas.

In order to achieve the above purpose, the utility model adopts the following technical scheme to realize:

a linear anode layer ion source with a multi-aperture air inlet channel comprises a shell with an elongated mounting groove, wherein a vertically arranged magnet is arranged in the center of a groove cavity of the mounting groove; the magnet with the tank bottom of mounting groove, both sides cell wall enclose to close and form two independent discharge chambers, the discharge chamber in be equipped with the anode holder and be equipped with the gas injection hole that runs through the casing in the bottom of discharge chamber, the anode holder on be equipped with continuous major diameter section inlet channel and minor diameter section inlet channel intercommunication to the gas injection hole supply gas to pour into in the discharge chamber, the aperture of gas injection hole is less than the aperture of major diameter section inlet channel.

Preferably, the aperture ratio of the gas injection hole to the large-diameter section gas inlet passage is 1: (1.5-3); the aperture ratio of the large-diameter section air inlet channel to the small-diameter section air inlet channel is (1.5-2.5): 1.

preferably, the inlet end department in gas injection hole is equipped with the branch gas piece, the branch gas piece a accommodation space has and constitutes the storehouse of admitting air, the branch gas piece on be equipped with inlet channel intercommunication gas injection hole and the storehouse of admitting air, the branch gas piece keep away from one side of casing and be equipped with the air feed subassembly and supply air to in the storehouse of admitting air.

Compared with the prior art, the utility model discloses following technological effect has:

the linear anode layer ion source provided by the utility model can relieve the streaming phenomenon of high pressure gas caused by the gas supply bottle through the gas injection mode of multi-stage aperture change; in addition, the gas enters the discharge chamber through the gas injection hole, the large-diameter section gas inlet channel and the small-diameter section gas inlet channel, the pressure of the gas supply bottle is effectively buffered due to the multi-stage diameter change of the gas channel, and the flow speed of the gas entering the discharge chamber is slowed; the difference in vacuum pressure outside the discharge chamber and the ion source is changed so that the low flow rate gas achieves sufficient ionization in the discharge chamber.

Other features and advantages of the present invention will be described in detail in the following detailed description.

Drawings

Fig. 1 is a cross-sectional view of a linear anode layer ion source having a multi-aperture gas inlet channel according to the present invention;

FIG. 2 is an exploded view of the ion source of the linear anode layer of FIG. 1;

FIG. 3 is a schematic diagram of a linear anode layer ion source with a multi-aperture gas inlet channel according to the present invention;

the reference numbers in the figures illustrate: 1-discharge chamber, 10-shell, 11-mounting groove, 12-anode support, 121-large diameter section air inlet channel, 122-small diameter section air inlet channel, 123-anode insulating pad, 13-air injection hole, 20-magnet, 201-upper pole shoe, 202-lower pole shoe, 30-anode, 40-inner cathode, 401-cathode gap, 41-cavity, 42-cathode cooling tube, 50-outer cathode, 60-air distribution block, 601-air inlet channel, 61-air inlet bin and 62-air supply assembly.

Detailed Description

In order to make the technical means, creation characteristics, achievement purpose and efficacy of the utility model easy to understand and understand, the utility model is further clarified by combining the specific drawings.

It should be noted that, in the present invention, when an element is referred to as being "fixed" to another element, it may be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1 and 2, the present invention provides a linear anode layer ion source with a multi-aperture gas inlet channel, which includes a housing 10 having an elongated mounting groove 11, wherein a vertically arranged magnet 20 is disposed at the center of the groove cavity of the mounting groove 11; the magnet 20 and the groove bottom and two side groove walls of the mounting groove 11 are enclosed to form two independent discharge chambers 1, an anode support 12 is arranged in the discharge chamber 1, a gas injection hole 13 penetrating through the shell 10 is formed in the bottom of the discharge chamber 1, the anode support 12 is provided with a continuous large-diameter section gas inlet channel 121 and a continuous small-diameter section gas inlet channel 122 which are communicated to the gas injection hole 13 to inject gas into the discharge chamber 1, and the aperture of the gas injection hole 13 is smaller than that of the large-diameter section gas inlet channel 121.

The linear anode layer ion source provided by the utility model can relieve the streaming phenomenon of high pressure gas caused by the gas supply bottle through the gas injection mode of multi-stage aperture change; in addition, the gas enters the discharge chamber 1 through the gas injection hole 13, the large-diameter gas inlet channel 121 and the small-diameter gas inlet channel 122, the pressure of the gas supply bottle is effectively buffered due to the multi-stage diameter change of the gas channel, and the flow rate of the gas entering the discharge chamber is slowed; the difference in vacuum pressure outside the discharge chamber and the ion source is changed so that the low flow rate gas achieves sufficient ionization in the discharge chamber.

In the utility model, an anode 30 is arranged between the magnet 20 and the groove wall of the mounting groove 11, an inner cathode 40 is arranged at the center of the notch of the mounting groove 11, outer cathodes 50 are symmetrically arranged at the two sides of the inner cathode 40, and a cathode gap 401 is formed between the outer cathodes 50 and the magnetic pole shoes of the inner cathode 40; the magnet 20 is a columnar permanent magnet capable of forming a magnetic field in a vertical direction. The upper end of the magnet 20 is provided with an upper pole shoe 201 and is abutted against the inner cathode 40, and the lower end is provided with a lower pole shoe 202 and is abutted against the groove bottom of the mounting groove 11; the anode support 12 is provided with an anode insulating pad 123, and the anode 30 is fixed on the anode insulating pad 123. The plurality of gas injection holes 13 are formed along the length direction of the housing 10, so that multi-point gas injection is realized, and the most uniform gas ionization effect can be obtained even if the ion source is lengthened.

Further, the aperture ratio of the gas injection holes 13 to the large-diameter section gas inlet passage 121 is 1: (1.5-3); the aperture ratio of the large-diameter section air inlet passage 121 to the small-diameter section air inlet passage 122 is (1.5-2.5): 1.

the utility model discloses in, the inlet end department of gas injection hole 13 is equipped with branch gas piece 60, branch gas piece 60 have a accommodation space and constitute inlet air storehouse 61, branch gas piece 60 on be equipped with inlet channel 601 intercommunication gas injection hole 13 and inlet air storehouse 61, branch gas piece 60 one side of keeping away from casing 10 be equipped with air feed subassembly 62 to inlet air storehouse 61 in the air feed.

The utility model discloses in, one side that interior negative pole 40 closes on 11 cell cavities in mounting groove is equipped with a plurality of cavities 41, cavity 41 in bury cathode cooling tube 42 underground, cathode cooling tube 42 in the expert have recirculated cooling water. Specifically, two cavities 41 are provided.

In a specific embodiment of the present invention, as shown in fig. 3, the outer cathodes 50 located at both sides of the anode 30 are fixedly connected to the two ends of the casing 10 as a whole to form a structure with a bar-shaped through hole at the center, and the inner cathode 40 is disposed at the bar-shaped through hole and forms an annular cathode gap 401 with the outer cathode.

The utility model provides a linear anode layer ion source of this focus type, its mounting means is nimble, can hoist and mount, also can adopt the flange to install. The inner cathode 40 is fixed on the housing 10 via the magnet 20, and the outer cathode 50 is fixed on the wall of the mounting groove 11, that is, the inner cathode 40 and the outer cathode 50 can be independently disassembled, and maintenance and repair can be performed without disassembling the whole.

The foregoing shows and describes the general principles, essential features, and features of the invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments, and the description of the above embodiments and the description is only illustrative of the principles of the present invention, and that various changes and modifications may be made without departing from the spirit and scope of the present invention, and these changes and modifications are all within the scope of the present invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A linear anode layer ion source with a multi-aperture gas inlet channel is characterized by comprising a shell (10) with an elongated mounting groove (11), wherein a vertically arranged magnet (20) is arranged at the center of a groove cavity of the mounting groove (11); magnet (20) with the tank bottom of mounting groove (11), both sides cell wall enclose to close and form two independent discharge chambers (1), discharge chamber (1) in be equipped with anode holder (12) and be in the bottom of discharge chamber (1) is equipped with gas injection hole (13) that run through casing (10), anode holder (12) on be equipped with continuous big diameter section inlet channel (121) and little diameter section inlet channel (122) communicate to gas injection hole (13) gas supply inject into discharge chamber (1) in, the aperture of gas injection hole (13) is less than the aperture of big diameter section inlet channel (121).

2. The linear anode layer ion source with a multi-aperture gas feed channel of claim 1, wherein the gas injection holes (13) have a hole diameter ratio to the large diameter section gas feed channel (121) of 1: (1.5-3);

the aperture ratio of the large-diameter section air inlet channel (121) to the small-diameter section air inlet channel (122) is (1.5-2.5): 1.

3. the linear anode layer ion source with the multi-aperture gas inlet channel as claimed in claim 1, wherein a gas distribution block (60) is disposed at the gas inlet end of the gas injection hole (13), the gas distribution block (60) has a receiving space to form a gas inlet chamber (61), the gas distribution block (60) is provided with a gas inlet channel (601) to communicate the gas injection hole (13) with the gas inlet chamber (61), and a gas supply assembly (62) is disposed on a side of the gas distribution block (60) away from the housing (10) to supply gas to the gas inlet chamber (61).