CN210464750U - 一种基于石墨烯压阻效应的压力传感器 - Google Patents
一种基于石墨烯压阻效应的压力传感器 Download PDFInfo
- Publication number
- CN210464750U CN210464750U CN201921532520.1U CN201921532520U CN210464750U CN 210464750 U CN210464750 U CN 210464750U CN 201921532520 U CN201921532520 U CN 201921532520U CN 210464750 U CN210464750 U CN 210464750U
- Authority
- CN
- China
- Prior art keywords
- graphene
- triangular prism
- pressure sensor
- oxide layer
- piezoresistive effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 75
- 230000000694 effects Effects 0.000 title claims abstract description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 65
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 28
- 239000010703 silicon Substances 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 18
- 239000010439 graphite Substances 0.000 claims abstract description 18
- -1 graphite alkene Chemical class 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 17
- 239000010408 film Substances 0.000 claims description 34
- 235000012239 silicon dioxide Nutrition 0.000 claims description 17
- 239000010409 thin film Substances 0.000 claims description 6
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 238000001514 detection method Methods 0.000 abstract description 10
- 238000005259 measurement Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 32
- 239000000919 ceramic Substances 0.000 description 5
- 238000004088 simulation Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000011540 sensing material Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000009827 uniform distribution Methods 0.000 description 2
- 238000012795 verification Methods 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Landscapes
- Pressure Sensors (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201921532520.1U CN210464750U (zh) | 2019-09-16 | 2019-09-16 | 一种基于石墨烯压阻效应的压力传感器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201921532520.1U CN210464750U (zh) | 2019-09-16 | 2019-09-16 | 一种基于石墨烯压阻效应的压力传感器 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN210464750U true CN210464750U (zh) | 2020-05-05 |
Family
ID=70432346
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201921532520.1U Active CN210464750U (zh) | 2019-09-16 | 2019-09-16 | 一种基于石墨烯压阻效应的压力传感器 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN210464750U (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112161738A (zh) * | 2020-09-17 | 2021-01-01 | 五邑大学 | 气压传感器及制作方法 |
CN112816780A (zh) * | 2021-01-29 | 2021-05-18 | 淮阴工学院 | 石墨烯压阻因子检测方法 |
CN113624369A (zh) * | 2021-06-24 | 2021-11-09 | 中国矿业大学(北京) | 一种基于石墨烯传感器的压力测量方法 |
CN115655502A (zh) * | 2022-12-29 | 2023-01-31 | 中北大学 | 基于悬浮石墨烯薄膜压阻特性的温度传感器 |
CN116242246A (zh) * | 2023-05-12 | 2023-06-09 | 广东润宇传感器股份有限公司 | 一种超薄型全边框耐高温的半导体应变计及其制备方法 |
-
2019
- 2019-09-16 CN CN201921532520.1U patent/CN210464750U/zh active Active
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112161738A (zh) * | 2020-09-17 | 2021-01-01 | 五邑大学 | 气压传感器及制作方法 |
CN112816780A (zh) * | 2021-01-29 | 2021-05-18 | 淮阴工学院 | 石墨烯压阻因子检测方法 |
CN113624369A (zh) * | 2021-06-24 | 2021-11-09 | 中国矿业大学(北京) | 一种基于石墨烯传感器的压力测量方法 |
CN113624369B (zh) * | 2021-06-24 | 2022-04-29 | 中国矿业大学(北京) | 一种基于石墨烯传感器的压力测量方法 |
CN115655502A (zh) * | 2022-12-29 | 2023-01-31 | 中北大学 | 基于悬浮石墨烯薄膜压阻特性的温度传感器 |
CN116242246A (zh) * | 2023-05-12 | 2023-06-09 | 广东润宇传感器股份有限公司 | 一种超薄型全边框耐高温的半导体应变计及其制备方法 |
CN116242246B (zh) * | 2023-05-12 | 2023-10-03 | 广东润宇传感器股份有限公司 | 一种超薄型全边框耐高温的半导体应变计及其制备方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN210464750U (zh) | 一种基于石墨烯压阻效应的压力传感器 | |
CN110057475B (zh) | 一种高灵敏度石墨烯压阻式应变传感器 | |
CN107748025B (zh) | 一种石墨烯/六方氮化硼异质结构压力传感器及制备方法 | |
CN108291797B (zh) | 含直线诱导的裂纹的高灵敏度传感器及其制造方法 | |
CN203629725U (zh) | 基于石墨烯的mems压力传感器 | |
KR101169943B1 (ko) | 반도체 스트레인 게이지를 이용한 힘 또는 압력 센서 어레이, 힘 또는 압력센서 어레이의 제조방법 및 힘 또는 압력 센서 어레이를 이용한 힘 또는 압력 측정방법 | |
CN104596683A (zh) | 基于层状材料的压力传感器及压电效应测量系统 | |
CN107817364B (zh) | 一种mems直拉直压式两轴加速度计芯片及其制备方法 | |
CN113979405B (zh) | Mems真空计及其制备方法 | |
Han et al. | Microstructure fabrication on a β-phase PVDF film by wet and dry etching technology | |
CN109297622B (zh) | 一种基于二硒化钨的微型压阻式应力传感器 | |
CN112429700A (zh) | 一种压敏结构柔性压力传感器的制备方法 | |
CN103644999A (zh) | 一种低量程高灵敏度mems压力传感器及其制作方法 | |
Liu et al. | A novel capacitive pressure sensor based on non-coplanar comb electrodes | |
Yu et al. | Capacitive stretchable strain sensor with low hysteresis based on wavy-shape interdigitated metal electrodes | |
CN203191141U (zh) | 用于测量气体与液体压力的硅压阻式mems压力传感器 | |
KR102045220B1 (ko) | 스트레인 센싱 소자, 이를 이용한 어레이 센서 및 이의 제조방법 | |
CN113023662A (zh) | 一种mems电容式触觉压力传感器及其制备方法 | |
Choi et al. | Spatially digitized tactile pressure sensors with tunable sensitivity and sensing range | |
CN112964416A (zh) | 一种间接接触式石墨烯压力传感器及其制备方法 | |
CN112798169A (zh) | 一种具有抗高过载能力的高压传感器 | |
Maflin Shaby et al. | Analysis and optimization of sensitivity of a MEMS peizoresistive pressure sensor | |
CN114671399A (zh) | 电容式压力传感器及其制备方法 | |
Yu et al. | Capacitive stretchable strain sensors based on wavy-structured metal electrodes | |
KR101910712B1 (ko) | 압력센서 및 압력센서의 제작 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230721 Address after: Room 8, floor 9 (c), main teaching building, No. 38, Guangdong Road, Gulou District, Nanjing, Jiangsu 210003 Patentee after: NANJING GUOZHIXIN SCIENCE & TECHNOLOGY Co.,Ltd. Address before: 210023 9 Wen Yuan Road, Ya Dong new town, Nanjing, Jiangsu. Patentee before: NANJING University OF POSTS AND TELECOMMUNICATIONS |
|
TR01 | Transfer of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A pressure sensor based on graphene piezoresistive effect Effective date of registration: 20231201 Granted publication date: 20200505 Pledgee: China Construction Bank Corporation Nanjing Gulou sub branch Pledgor: NANJING GUOZHIXIN SCIENCE & TECHNOLOGY Co.,Ltd. Registration number: Y2023980068578 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right |