CN210458350U

CN210458350U - Substrate fixing device and physical vapor deposition equipment

Info

Publication number: CN210458350U
Application number: CN201920991708.6U
Authority: CN
Inventors: 王浩
Original assignee: Dongtai Hi Tech Equipment Technology Co Ltd
Current assignee: Zishi Energy Co.,Ltd.
Priority date: 2019-06-28
Filing date: 2019-06-28
Publication date: 2020-05-05
Anticipated expiration: 2029-06-28

Abstract

The utility model provides a substrate fixing device and physical vapor deposition equipment, which comprises a support plate, a pressing block and at least one pair of pressing structures; the support plate is used for bearing a substrate, the pressing block is located above the support plate, each pair of pressing structures are respectively arranged at two ends corresponding to the pressing block and the support plate, each pressing structure comprises an elastic piece, a first elastic plate and a second elastic plate, the first end of each first elastic plate is connected with the pressing block, the first end of each second elastic plate is connected with the support plate in a telescopic mode, the second end of each first elastic plate and the second end of each second elastic plate are connected through the elastic pieces, and the elastic pieces are used for enabling the first end of each first elastic plate and the first end of each second elastic plate to be away from each other. The pressing block is pressed on the carrier plate by the aid of the pressing structure, so that parts such as an air cylinder and the like are avoided, a substrate on the carrier plate can be fixed in a vacuum environment, a magnetic attraction mode is avoided, and interference on an electromagnetic field in magnetron sputtering is avoided.

Description

Substrate fixing device and physical vapor deposition equipment

Technical Field

The utility model belongs to the solar cell field of making, concretely relates to substrate fixing device and physical vapor deposition equipment.

Background

Physical Vapor Deposition (PVD) refers to a process in which atoms or molecules are transferred from a source to the surface of a substrate by a Physical process to achieve mass transfer. PVD equipment is a commonly used production equipment to implement this process. Among them, vertical PVD apparatuses are commonly used in more and more factories due to their various advantages, such as reduced cost, good film quality, etc.

In the production process of the vertical PVD equipment, a mechanical arm loads a substrate into a carrier plate to be coated, and then a pressing block is used for fixing the substrate so that the substrate is kept at a fixed position in the coating process. Because the vacuum substrate is produced in a vacuum environment, conventional parts such as an air cylinder and the like cannot be used for fixing the vacuum substrate, the conventional scheme adopts a magnetic suction mode to adsorb the pressing block on the carrier plate so as to achieve the purpose of fixing the substrate.

However, in the actual production process of the PVD device, a magnetron sputtering method is usually adopted, and the movement locus of the particles is controlled by an electromagnetic field, and the magnetic field applied to the compact may interfere with the magnetic field of the magnetron sputtering, affect the movement locus of the particles, and finally affect the quality of the product.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving among the prior art at least briquetting and adsorb the problem that leads to influencing magnetron sputtering's magnetic field on the support plate with the magnetism mode of inhaling, provide a substrate fixing device and physical vapor deposition equipment.

In order to solve the above problems, the present invention provides a substrate fixing device, which comprises a support plate, a pressing block and at least one pair of pressing structures; wherein the content of the first and second substances,

the carrier plate is used for bearing the substrate;

the pressing block is positioned above the support plate;

every right press the structure set up respectively in the briquetting reaches the corresponding both ends of support plate, press the structure and all include elastic component, first bullet board and second bullet board, the first end of first bullet board with the briquetting is connected, the first end of second bullet board with the support plate telescopic is connected, the second end of first bullet board with the second end of second bullet board passes through the elastic component is connected, the elastic component is used for making the first end of first bullet board with the first end of second bullet board is kept away from each other.

The elastic piece is a torsion spring, and the second end of the first elastic plate and the second end of the second elastic plate are hinged through the torsion spring.

The carrier plate is provided with elastic plate stoppers which correspond to the second elastic plates one to one, a gap is formed between the elastic plate stoppers and the carrier plate, and the first end of the second elastic plate extends into the gap and can move around relative to the elastic plate stoppers.

The carrier plate is provided with clamping blocks which correspond to the second elastic plates one to one, clamping grooves are formed in the opposite sides of each clamping block respectively, and when the first end of each second elastic plate is far away from the first end of the corresponding first elastic plate, the first end of each second elastic plate is clamped in the corresponding clamping groove.

Wherein, the shape and the size of the first elastic plate and the second elastic plate are the same.

The support plate is provided with bosses corresponding to the second elastic plates one to one, and the elastic plate stop blocks or the clamping blocks are arranged on the upper surfaces of the bosses.

Wherein, the first bullet board deviate from one side of second bullet board is provided with the first groove of snatching, the second bullet board deviate from one side of first bullet board is provided with the second and snatchs the groove, first snatch the groove with the second snatchs the groove symmetry setting.

The first end of the first elastic plate is fixed with a first supporting leg, the first supporting leg is a plate-shaped body, the first elastic plate and the first supporting leg are included angles larger than 90 degrees, and the first elastic plate is connected with the pressing block through the first supporting leg.

The first end of the second elastic plate is fixed with a second supporting leg, the second supporting leg is a plate-shaped body, the second elastic plate and the second supporting leg are included angles larger than 90 degrees, the second supporting leg extends into the elastic plate stop block and the space between the support plates, or the second supporting leg extends into the clamping groove.

The manipulator is further included, and the grabbing end of the manipulator is matched with the first grabbing groove and the second grabbing groove.

As another aspect of the utility model, the utility model also provides a physical vapor deposition equipment, including substrate fixing device, wherein, substrate fixing device does the utility model provides a substrate fixing device.

The utility model discloses following beneficial effect has:

the utility model provides a substrate fixing device, which comprises a support plate, a pressing block and at least one pair of pressing structures; the support plate is used for bearing a substrate, the pressing block is located above the support plate, each pair of pressing structures are respectively arranged at two ends corresponding to the pressing block and the support plate, each pressing structure comprises an elastic piece, a first elastic plate and a second elastic plate, the first end of each first elastic plate is connected with the pressing block, the first end of each second elastic plate is connected with the support plate in a telescopic mode, the second end of each first elastic plate and the second end of each second elastic plate are connected through the elastic pieces, and the elastic pieces are used for enabling the first end of each first elastic plate and the first end of each second elastic plate to be away from each other. The pressing block is pressed on the carrier plate by the aid of the pressing structure, so that parts such as an air cylinder and the like are avoided, a substrate on the carrier plate can be fixed in a vacuum environment, a magnetic attraction mode is avoided, and interference on an electromagnetic field in magnetron sputtering is avoided.

Drawings

Fig. 1 is a schematic structural diagram of a substrate fixing device according to an embodiment of the present invention;

FIG. 2 is a top view of the substrate fixture of FIG. 1;

FIG. 3 is an enlarged view of a portion of FIG. 1;

fig. 4 is a schematic structural diagram of a substrate fixing device according to a second embodiment of the present invention.

Wherein:

10-torsion spring; 11-a first springboard; 12-a second springboard; 13-a first grasping slot; 14-a second grasping slot; 2-briquetting; 3-a carrier plate; 31-springboard stop; 32-boss; 33-card slot.

Detailed Description

In order to make those skilled in the art better understand the technical solution of the present invention, the substrate fixing device and the physical vapor deposition apparatus provided by the present invention are described in detail below with reference to the accompanying drawings.

Fig. 1 is a schematic structural diagram of a substrate fixing device according to an embodiment of the present invention; FIG. 2 is a top view of the substrate fixture of FIG. 1; fig. 3 is a partially enlarged view of fig. 2.

Referring to fig. 1 to 3, the present invention provides a substrate fixing device, which includes a support plate 3, a pressing block 2 and at least one pair of pressing structures. Wherein, the carrier plate 3 is used for carrying a substrate; briquetting 2 is located the top of support plate 3, every pair of pressing structure sets up respectively in briquetting 2 and the corresponding both ends of support plate 3, wherein, every pressing structure includes the elastic component, first bullet board 11 and second bullet board 12, the first end of first bullet board 11 is connected with briquetting 2, the first end of second bullet board 12 is connected with support plate 3 telescopic, the second end of first bullet board 11 and the second end of second bullet board 12 are connected through the elastic component, the elastic component is used for making the first end of first bullet board 11 and the first end of second bullet board 12 keep away from each other, and at this in-process, press briquetting 2 on support plate 3.

Under the action of the elastic force of the elastic member, the first end of the first elastic plate 11 and the first end of the second elastic plate 12 are away from each other, and because the first end of the second elastic plate 12 is telescopically connected with the carrier plate 3, under the combined action of the limitation of the carrier plate 3 and the elastic force of the elastic member, the second end of the first elastic plate 11 moves downwards to drive the second elastic plate 12 to press downwards, so that the pressing block 2 is pressed on the carrier plate 3.

The utility model discloses in, press briquetting 2 on support plate 3 with the help of pressing the structure, avoid using parts such as cylinder to can fix the substrate on support plate 3 in vacuum environment, in addition, avoid using the mode of magnetism to inhale, thereby avoided the electromagnetic field production interference in the magnetic control spatters.

In this embodiment, the elastic member is a torsion spring 10, and the second end of the first elastic plate 11 and the second end of the second elastic plate 12 are hinged through the torsion spring 10.

In this embodiment, the carrier plate 3 is provided with the springboard stoppers 31 corresponding to the second springboard 12 one by one, each springboard stopper 31 has a gap in the vertical direction with the carrier plate 3, the first end of the second springboard 12 extends into the gap, and the distance of the gap in the vertical direction is greater than the thickness of the first end of the second springboard 12, so that the first end of the second springboard 12 extending into the gap can move around relative to the springboard stopper 31.

The first end of the first elastic plate 11 is provided with a first support leg, the included angle between the first elastic plate 11 and the first support leg is larger than 90 degrees, and the first elastic plate 11 is connected with the pressing block 2 through the first support leg; the first end of the second elastic plate 12 is provided with a second supporting leg, the included angle between the second elastic plate 12 and the second supporting leg is larger than 90 degrees, and the second elastic plate 12 is telescopically connected with the elastic plate stop block 31 through the second supporting leg.

Wherein, the utility model discloses in not prescribing a limit to the concrete shape of first stabilizer blade and second stabilizer blade, as long as first stabilizer blade can be connected first diving board 11 and briquetting 2, the second stabilizer blade can be connected diving board dog 31, all belong to the utility model discloses a protection scope. As a specific embodiment of the first leg and the second leg, the first leg and the second leg are plate-shaped bodies.

Further, in the case that the first end of the second springboard 12 has the second leg, when the first end of the second springboard 12 is inserted into the springboard stopper 31, the first leg is inserted into the springboard stopper 31, at this time, the position of the second springboard 12 is not completely fixed, and in the vertical direction, there is a certain gap between the springboard stopper 31 and the second leg, so that the second springboard 12 can have a certain moving space in the springboard stopper 31.

In the present embodiment, the first elastic plate 11 and the second elastic plate 12 have the same shape and size. That is, the length, width and thickness of the first elastic plate 11 and the second elastic plate 12 are the same, the length, width and thickness of the first leg and the second leg are the same, and the angle between the first elastic plate 11 and the first leg is the same as the angle between the second elastic plate 12 and the second leg. Thereby facilitating the manufacturing of the first springboard 11 and the second springboard 12.

As shown in fig. 1, the carrier plate 3 is provided with bosses 32 corresponding to the second springboards 12 one by one, and the springboard stoppers 31 are provided on the upper surfaces of the bosses 32. By providing the boss 32, the second spring plate 12 is lifted up, so that the press block 2 has enough space to be pressed downward.

In this embodiment, one side of the first elastic plate 11 departing from the second elastic plate 12 is provided with a first grabbing groove 13, one side of the second elastic plate 12 departing from the first elastic plate 11 is provided with a second grabbing groove 14, and the first grabbing groove 13 and the second grabbing groove 14 are symmetrically arranged.

The substrate fixing device further comprises a manipulator, the grabbing end of the manipulator is matched with the first grabbing groove 13 and the second grabbing groove 14, and the grabbing end is connected with the first grabbing groove 13 and the second grabbing groove 14 in a clamping mode to grab the pressing structure.

Through setting up first groove 13, the second groove 14 of snatching, can make the manipulator better mutually support with first bullet board 11 and second bullet board 12 to can press first bullet board 11 and second bullet board 12 through the manipulator, make first bullet board 11 and second bullet board 12 draw close gradually in order to overcome the elasticity of torsional spring 10, and make the second stabilizer blade of second bullet board 12 move into or shift out from the interval between bullet board dog 31 and the support plate 3.

The following describes in detail the usage steps of the substrate fixing device provided by the present invention.

In the initial position, the pressing block 2 and the first leg of the first elastic plate 11 are fixed by a screw, and the first leg of the second elastic plate 12 is not inserted into the elastic plate stopper 31.

When a substrate on the carrier plate 3 needs to be pressed, firstly, two manipulators are controlled to respectively grab the first elastic plate 11 and the second elastic plate 12 of the two pressing structures, the grabbing ends of the two manipulators are respectively clamped to the first grabbing groove 13 and the second grabbing groove 14 of the two pressing structures, the two pairs of first elastic plate 11 and the second elastic plate 12 are clamped, then, the two manipulators are simultaneously controlled, the second legs of the two second elastic plates 12 are lifted to the height of the boss 32, the two manipulators are gradually loosened, so that the second legs of the two second elastic plates 12 are inserted into the elastic plate stopper 31, then, the two manipulators are continuously gradually loosened, under the action of the torsion spring 10, the included angle between the first elastic plate 11 and the second elastic plate 12 is gradually increased, the second legs of the two second elastic plates 12 are wound in the two elastic plate stoppers 31, and the axis of the torsion spring 10 moves downwards, so that the two first elastic plates 11 are connected with the pressing block 2 and pressed on the substrate.

In the present invention, besides the elastic plate stopper 31 provided on the carrier plate 3, a clamping block can be provided on the carrier plate 3.

Specifically, referring to fig. 4, the carrier plate 3 is provided with clamping blocks corresponding to the second elastic plate 12 one to one, opposite sides of each clamping block are respectively provided with a clamping groove 33, and when the first end of the second elastic plate 12 is far away from the first end of the first elastic plate 11, the first end of the second elastic plate 12 can be clamped in the clamping groove 33, so as to fix the second elastic plate 12 and the carrier plate 3.

As another aspect of the utility model, the utility model also provides a physical vapor deposition equipment, including substrate fixing device, wherein, substrate fixing device does the embodiment of the utility model provides a substrate fixing device.

The pressing block is pressed on the carrier plate by the aid of the pressing structure of the substrate fixing device, so that components such as an air cylinder and the like are avoided, the substrate on the carrier plate can be fixed in a vacuum environment, the magnetic attraction mode is avoided, and interference to an electromagnetic field in magnetron sputtering is avoided.

It is to be understood that the above embodiments are merely exemplary embodiments that have been employed to illustrate the principles of the present invention, and that the present invention is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.

Claims

1. The substrate fixing device is characterized by comprising a carrier plate (3), a pressing block (2) and at least one pair of pressing structures; wherein the content of the first and second substances,

the carrier plate (3) is used for carrying the substrate;

the pressing block (2) is positioned above the carrier plate (3);

every is every it sets up respectively in briquetting (2) and the corresponding both ends of support plate (3), press the structure all including elastic component, first bullet board (11) and second bullet board (12), the first end of first bullet board (11) with briquetting (2) are connected, the first end of second bullet board (12) with support plate (3) telescopic is connected, the second end of first bullet board (11) with the second end of second bullet board (12) passes through the elastic component is connected, the elastic component is used for making the first end of first bullet board (11) with the first end of second bullet board (12) is kept away from each other.

2. The substrate fixing device according to claim 1, wherein the elastic member is a torsion spring (10), and the second end of the first elastic plate (11) and the second end of the second elastic plate (12) are hinged by the torsion spring (10).

3. The substrate fixing device according to claim 1, wherein the carrier plate (3) is provided with a spring plate stopper (31) corresponding to the second spring plate (12) one by one, a space is provided between the spring plate stopper (31) and the carrier plate (3), and the first end of the second spring plate (12) extends into the space and can rotate relative to the spring plate stopper (31).

4. The substrate fixing device according to claim 1, wherein the carrier plate (3) is provided with two clamping blocks corresponding to the second elastic plate (12) one by one, the two clamping blocks are respectively provided with a clamping groove (33) at opposite sides of each clamping block, and when the first end of the second elastic plate (12) is far away from the first end of the first elastic plate (11), the first end of the second elastic plate (12) is clamped in the clamping groove (33).

5. The substrate holder according to claim 3, wherein the first spring plate (11) and the second spring plate (12) have the same shape and size.

6. A substrate holding apparatus according to claim 3, wherein said carrier plate (3) is provided with bosses (32) corresponding one-to-one to said second spring plates (12), and said spring plate stoppers (31) are provided on upper surfaces of said bosses (32).

7. The substrate fixing device according to claim 4, wherein the carrier plate (3) is provided with bosses (32) corresponding to the second spring plates (12) one by one, and the locking blocks are arranged on the upper surfaces of the bosses (32).

8. The substrate fixing device according to claim 3 or 4, characterized in that a side of the first spring plate (11) facing away from the second spring plate (12) is provided with a first catching groove (13), a side of the second spring plate (12) facing away from the first spring plate (11) is provided with a second catching groove (14), and the first catching groove (13) and the second catching groove (14) are symmetrically arranged.

9. The substrate fixing device according to claim 3 or 4, wherein a first leg is fixed at a first end of the first elastic plate (11), the first elastic plate (11) forms an included angle of more than 90 degrees with the first leg, and the first elastic plate (11) is connected with the pressing block (2) through the first leg.

10. A substrate holder according to claim 3, wherein a second leg is fixed to the first end of the second springboard (12), the second springboard (12) and the second leg forming an angle of more than 90 °, the second leg extending into the space between the springboard stop (31) and the carrier board (3).

11. The substrate holder according to claim 4, wherein a second leg is fixed to the first end of the second elastic plate (12), the second elastic plate (12) and the second leg form an angle greater than 90 °, and the second leg extends into the slot (33).

12. The substrate holding apparatus according to claim 8, further comprising a robot having a grasping end adapted to the first grasping groove (13) and the second grasping groove (14).

13. A physical vapor deposition apparatus comprising a substrate holder, wherein the substrate holder is the substrate holder of any one of claims 1 to 12.