CN210429743U - Sampling inspection device used in chip manufacturing - Google Patents
Sampling inspection device used in chip manufacturing Download PDFInfo
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- CN210429743U CN210429743U CN201921609841.7U CN201921609841U CN210429743U CN 210429743 U CN210429743 U CN 210429743U CN 201921609841 U CN201921609841 U CN 201921609841U CN 210429743 U CN210429743 U CN 210429743U
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Abstract
The utility model discloses a be arranged in chip manufacturing selective examination device belongs to chip production technical field, be arranged in chip manufacturing selective examination device including the joint sealing, the feed inlet has been seted up to joint sealing right side wall, and joint sealing left side wall has seted up the discharge gate, the feed inlet has linked up the conveyer belt with the discharge gate is inside, conveyer belt bottom transmission is connected with the driving roller, it is connected with the transmission shaft to rotate on the driving roller, transmission shaft power input end is connected with motor power output end, joint sealing top inside wall has linked up step motor. The utility model discloses an increase and have the chip grooving, can play the guide effect to chip transmission in-process, equipment can detect the chip by oneself, need not manual operation, has saved the manpower, through increasing the joint sealing, has avoided factors such as ambient temperature dust to influence the testing process, and then guarantees that the testing result can not produce the error deviation, is fit for being extensively promoted and used.
Description
Technical Field
The utility model relates to a chip production technical field especially relates to a be arranged in chip manufacturing selective examination device.
Background
Chips are a way in electronics to miniaturize circuits, primarily including semiconductor devices, also including passive components, and the like, and are often fabricated on the surface of a semiconductor wafer. The chip needs to be checked randomly in the production and manufacturing process, so that the qualification rate of the first-stage chip product is counted.
Currently, there are certain defects in the spot inspection technology used in chip manufacturing: 1. the chip is not easy to guide when being put into detection; 2. the automation degree of the equipment is low, so that the detection probe needs to be manually held for detection, and the labor consumption is high; 3. thereby receive factors such as ambient temperature dust easily in the testing process and influence the testing result reliability to and the difficult radiating problem in the joint sealing.
SUMMERY OF THE UTILITY MODEL
The utility model provides a be arranged in chip manufacturing selective examination device has the chip grooving through increasing, can play the guide effect in to chip transmission process, and equipment can detect the chip by oneself, need not manual operation, has saved the manpower, through increasing the joint sealing, has avoided factors such as ambient temperature dust to influence the testing process, and then guarantees that the testing result can not produce the error deviation, can effectively solve the problem in the background art.
The utility model provides a specific technical scheme as follows:
the utility model provides a selective examination device used in chip manufacturing, which comprises a sealing box, wherein the right side wall of the sealing box is provided with a feed inlet, the left side wall of the sealing box is provided with a discharge outlet, the feed inlet and the inside of the discharge outlet are connected with a conveyor belt, the bottom of the conveyor belt is in transmission connection with a transmission roller, the transmission roller is in transmission connection with a transmission shaft, the power input end of the transmission shaft is connected with the power output end of a motor, the inner side wall at the top end of the sealing box is connected with a stepping motor, the power output end of the stepping motor is connected with the power input end of a rotating shaft, the end of the rotating shaft is in rotation connection with a gear, the right side of the gear is engaged and connected with a rack, the lower end of the rack is inserted with, the sealing box bottom inside wall fixed connection heating panel, heating panel internally mounted has the heat dissipation fan.
Optionally, the joint sealing surface is inlayed and is connected with the observation mirror surface, and joint sealing bottom fixedly connected with stabilizer blade.
Optionally, the signal input end of the parameter display screen is connected with the signal input end of the switch a, and the outer side wall of the parameter display screen is connected with a fault display lamp.
Optionally, the signal input end of the stepping motor is connected with the signal output end of the switch B, and the signal input end of the motor is connected with the signal output end of the switch C.
Optionally, the signal input end of the heat dissipation fan is connected with the signal output end of the switch D, and the upper surface of the heat dissipation plate is provided with a vent hole.
The utility model has the advantages as follows:
1. the utility model discloses it is practical, convenient operation and excellent in use effect, the staff packs into the chip grooving with the chip that finishes of production in, and the size in chip grooving is set for according to the chip size, can carry out good fixed to putting into wherein chip, through increasing chip grooving to make the chip guarantee in follow-up transmission process that its position can not produce the skew, can play fine guide effect, thereby solved the problem of the chip good direction when specifically dropping into and detecting.
2. The utility model discloses in, after the chip is adorned, open the motor by the staff, the motor is transmission shaft output power and then drives the driving roller rotatory, the driving roller drives the conveyer belt again and adorns the chip of chip dress inslot portion and send, enter into the joint sealing inside from the feed inlet, continue by staff's discharge step motor, step motor is pivot output power, and then it is rotatory to drive the gear, through rack and pinion meshing, can change the rotary motion of gear into the perpendicular linear motion of rack, and step motor has just reversing function. And then drive the detection probe of rack below and carry out the spot check to the chip of fixing on the conveyer belt, can pass through data connection line with corresponding signal transmission for parameter display screen after the detection probe detects, parameter display screen can correspondingly show the parameter after detecting and judge whether qualified for the chip, if unqualified trouble shows the lamp and can light ruddiness, if qualified trouble shows the lamp then can light green light, whole process need not manual work, the degree of automation of device has been improved, thereby solved the low artifical handheld detection probe that leads to of equipment degree of automation and need detect, consume the problem of manpower.
3. The utility model is additionally provided with the sealing box, so that the whole detection process is carried out in a closed state, and the influence of factors such as external temperature and dust on the detection process is avoided, thereby ensuring that the detection result does not generate error deviation, confirming that no problem chip is transmitted from the discharge hole after the spot check is finished, displaying that the unqualified chip can be taken out by the working personnel when being transmitted, in the process, workers can observe the sampling inspection process inside the sealed box in real time through the observation mirror surface, and through adding the heat dissipation plate, when the chip generates heat in the transmission and detection process, the worker can effectively radiate the heat of the device in the sealing box by opening the heat radiating fan and the air flow penetrates through the air vent, thereby solved and received thereby factors such as ambient temperature dust easily among the testing process influence the testing result reliability to and the difficult radiating problem in the joint sealing inside.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic perspective view of a sampling inspection device used in chip manufacturing according to an embodiment of the present invention;
fig. 2 is a schematic overall structure diagram of a spot inspection device used in chip manufacturing according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a transmission device for a spot inspection device in chip manufacturing according to an embodiment of the present invention;
fig. 4 is a schematic view of a heat dissipation plate structure of a spot inspection device used in chip manufacturing according to an embodiment of the present invention;
fig. 5 is a schematic circuit diagram of a spot inspection apparatus for chip manufacturing according to an embodiment of the present invention;
in the figure: 1. sealing the box; 2. a feed inlet; 3. a discharge port; 4. a conveyor belt; 5. a parameter display screen; 6. a fault display lamp; 7. observing the mirror surface; 8. a support leg; 9. a data link; 10. a rack; 11. detecting the probe; 12. a stepping motor; 13. a rotating shaft; 14. a gear; 15. a driving roller; 16. a drive shaft; 17. a motor; 18. a heat dissipation plate; 19. a heat dissipation fan; 20. a vent hole; 21. a switch A; 22. a switch B; 23. a switch C; 24. a switch D; 25. and (6) loading the chip into a groove.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the present invention will be described in further detail with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
A spot check device used in chip manufacturing according to an embodiment of the present invention will be described in detail with reference to fig. 1 to 5.
As shown in fig. 1-5, a spot inspection device used in chip manufacturing comprises a sealing box 1, a feed inlet 2 is arranged on the right side wall of the sealing box 1, a discharge outlet 3 is arranged on the left side wall of the sealing box 1, a conveyor belt 4 is connected inside the feed inlet 2 and the discharge outlet 3, a transmission roller 15 is connected to the bottom of the conveyor belt 4 in a transmission manner, a transmission shaft 16 is rotatably connected to the transmission roller 15, the power input end of the transmission shaft 16 is connected to the power output end of a motor 17, a stepping motor 12 is connected to the inner side wall of the top end of the sealing box 1, the power output end of the stepping motor 12 is connected to the power input end of a rotating shaft 13, a gear 14 is rotatably connected to the tail end of the rotating shaft 13, a rack 10 is engaged and connected to the right side of the gear 14, a detection probe, the signal output end of the data connecting line 9 is connected with the signal input end of the parameter display screen 5, the inner side wall of the bottom of the sealing box 1 is fixedly connected with a heat dissipation plate 18, and a heat dissipation fan 19 is arranged inside the heat dissipation plate 18.
In this embodiment, as shown in fig. 1 to 5, the worker loads the produced chip into the chip loading slot 25, the size of the chip loading slot 25 is set according to the size of the chip, the chip loaded therein can be well fixed, and by adding the chip loading slot 25, thereby ensuring that the position of the chip can not generate deviation in the subsequent transmission process, playing a good role in guiding, by adding the seal box 1, the whole detection process is carried out in a closed state, the influence of factors such as external temperature dust on the detection process is avoided, thereby ensuring that the detection result does not generate error deviation, confirming that no problem chip is transmitted from the discharge port 3 after the spot check is finished, displaying that the unqualified chip can be taken out by the working personnel when being transmitted, in the process, workers can observe the sampling process inside the sealed box 1 in real time through the observation mirror surface 7; through increasing there is heating panel 18, when the chip can produce the heat at transmission testing in-process instrument, produces certain influence to detecting, and the staff opens heat dissipation fan 19, and the ventilation hole 20 is passed through in the distinguished and admirable wind, can effectively dispel the heat to joint sealing 1 internal device.
Wherein, the outer surface of the sealing box 1 is inlaid with an observation mirror surface 7, and the bottom of the sealing box 1 is fixedly connected with a support leg 8.
In this embodiment, as shown in fig. 1, the staff can observe the sampling process inside the sealing box 1 in real time through the observation mirror 7, and the support legs 8 can provide a certain supporting force for the whole device.
Wherein, the signal input end of the parameter display screen 5 is connected with the signal input end of the switch A21, and the outer side wall of the parameter display screen 5 is connected with the fault display lamp 6.
In this embodiment, as shown in fig. 1 and 5, after the detection probe 11 detects, the corresponding signal is transmitted to the parameter display screen 5 through the data connection line 9, the parameter display screen 5 correspondingly displays the detected parameter and determines whether the chip is qualified, if the unqualified fault display lamp 6 lights up red light, and if the qualified fault display lamp 6 lights up green light.
The signal input end of the stepping motor 12 is connected with the signal output end of the switch B22, and the signal input end of the motor 17 is connected with the signal output end of the switch C23.
In this embodiment, as shown in fig. 4, the worker turns on the motor 17, the motor 17 drives the driving roller 15 to rotate for the power output of the driving shaft 16, the driving roller 15 drives the conveying belt 4 to load and convey chips inside the chip loading slot 25, the chips enter the sealing box 1 from the feeding port 2, the worker continues to turn on the stepping motor 12, the stepping motor 12 outputs power for the rotating shaft 13, and then drives the gear 14 to rotate, the gear 14 is engaged with the rack 10 through the gear 14, the rotating motion of the gear 14 can be converted into the vertical linear motion of the rack 10, and the stepping motor 12 has the forward and reverse rotation function. And then the detection probe 11 below the rack 10 is driven to perform sampling inspection on the chip fixed on the conveyor belt 4.
The signal input end of the heat dissipation fan 19 is connected with the signal output end of the switch D24, and the upper surface of the heat dissipation plate is provided with a vent hole.
In this embodiment, as shown in fig. 4 to 5, when the chip generates heat in the transmission and detection process and the detection is affected to some extent, the worker turns on the heat dissipation fan 19 and the airflow passes through the ventilation hole 20, so that the heat of the device inside the enclosure 1 can be effectively dissipated.
It should be noted that, the utility model relates to a be arranged in chip to make selective examination device, during operation, the staff puts into chip dress groove 25 with the chip that finishes producing, and the size of chip dress groove 25 is set for according to the chip size, can carry out good fixed to the chip put into it, through adding chip dress groove 25, thereby make the chip guarantee its position can not produce the skew in the follow-up transmission process, can play fine guide effect; after the chip is mounted, the motor 17 is started by the worker, the motor 17 outputs power for the transmission shaft 16 so as to drive the transmission roller 15 to rotate, the transmission roller 15 drives the conveyor belt 4 to mount and convey the chip inside the chip mounting groove 25, the chip enters the sealing box 1 from the feeding hole 2, the stepping motor 12 is continuously started by the worker, the stepping motor 12 outputs power for the rotating shaft 13, the gear 14 is further driven to rotate, the gear 14 is meshed with the rack 10 through the gear 14, the rotating motion of the gear 14 can be converted into the vertical linear motion of the rack 10, and the stepping motor 12 has the function of forward and reverse rotation. And then drive the chip that detection probe 11 below rack 10 fixed on conveying belt 4 to carry out the selective examination, detection probe 11 detects the back and will transmit corresponding signal for parameter display screen 5 through data connecting line 9, parameter display screen 5 can correspondingly show the parameter after detecting and judge whether the chip is qualified, if unqualified trouble shows lamp 6 can light ruddiness, if qualified trouble shows lamp 6 can light green light, whole process need not manual work, the degree of automation of device has been improved, and through increasing there is seal box 1, make whole detection process go on under airtight state, the factor of having problems such as ambient temperature dust has avoided influencing the testing process, and then guarantee that the testing result can not produce wrong deviation, the selective examination is finished and confirmed that no chip spreads from discharge gate 3, show that unqualified chip can be taken out by the staff when spreading, this process staff can carry out the selective examination process of seal box 1 inside through observation mirror 7 in real time and observe the selective examination process Measuring; through increasing there is heating panel 18, when the chip can produce the heat at transmission testing in-process instrument, produces certain influence to detecting, and the staff opens heat dissipation fan 19, and the ventilation hole 20 is passed through in the distinguished and admirable wind, can effectively dispel the heat to joint sealing 1 internal device. The specific model of the component is an IDZ2065-8AE02-2 motor; Y07-43D4-5040 stepper motor; C21-RH2104 heat dissipation fan.
The utility model discloses a sealing case 1; a feed inlet 2; a discharge port 3; a conveyor belt 4; a parameter display screen 5; a failure display lamp 6; an observation mirror surface 7; a leg 8; a data connection line 9; a rack 10; a detection probe 11; a stepping motor 12; a rotating shaft 13; a gear 14; a driving roller 15; a drive shaft 16; a motor 17; a heat dissipation plate 18; a heat radiation fan 19; a vent hole 20; switch a 21; a switch B22; a switch C23; a switch D24; the chip-housing 25 components are all standard or known to those skilled in the art, and their structure and principle are known to those skilled in the art through technical manuals or through routine experimentation.
It is apparent that those skilled in the art can make various changes and modifications to the embodiments of the present invention without departing from the spirit and scope of the embodiments of the present invention. Thus, if such modifications and variations of the embodiments of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (5)
1. The utility model provides a be arranged in chip to make selective examination device, includes joint box (1), its characterized in that, feed inlet (2) have been seted up to joint box (1) right side wall, and joint box (1) left side wall seted up discharge gate (3), feed inlet (2) link up conveyer belt (4) with discharge gate (3) inside, conveyer belt (4) bottom transmission is connected with driving roller (15), it is connected with transmission shaft (16) to rotate on driving roller (15), transmission shaft (16) power input end is connected with motor (17) power output end, joint box (1) top inside wall has step motor (12), step motor (12) power output end is connected with pivot (13) power input end, pivot (13) end rotates and is connected with gear (14), gear (14) right side meshing is connected with rack (10), the lower end of the rack (10) is spliced with a detection probe (11), a signal output end of the detection probe (11) is connected with a signal input end of a data connecting line (9), a signal output end of the data connecting line (9) is connected with a signal input end of a parameter display screen (5), the inner side wall of the bottom of the sealing box (1) is fixedly connected with a heat dissipation plate (18), and a heat dissipation fan (19) is arranged inside the heat dissipation plate (18).
2. The sampling device for chip manufacturing according to claim 1, wherein the outer surface of the sealing box (1) is embedded with a viewing mirror (7), and the bottom of the sealing box (1) is fixedly connected with a support leg (8).
3. The spot inspection device for chip manufacturing according to claim 1, wherein the signal input end of the parameter display screen (5) is connected with the signal input end of the switch A (21), and the outer side wall of the parameter display screen (5) is connected with the fault display lamp (6).
4. The sampling device for chip manufacturing according to claim 1, wherein the signal input terminal of the stepping motor (12) is connected with the signal output terminal of the switch B (22), and the signal input terminal of the motor (17) is connected with the signal output terminal of the switch C (23).
5. The spot inspection device for chip manufacturing according to claim 1, wherein the signal input terminal of the heat dissipation fan (19) is connected to the signal output terminal of the switch D (24), and the top surface of the heat dissipation plate is provided with a vent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921609841.7U CN210429743U (en) | 2019-09-25 | 2019-09-25 | Sampling inspection device used in chip manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921609841.7U CN210429743U (en) | 2019-09-25 | 2019-09-25 | Sampling inspection device used in chip manufacturing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210429743U true CN210429743U (en) | 2020-04-28 |
Family
ID=70367682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921609841.7U Expired - Fee Related CN210429743U (en) | 2019-09-25 | 2019-09-25 | Sampling inspection device used in chip manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210429743U (en) |
-
2019
- 2019-09-25 CN CN201921609841.7U patent/CN210429743U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200428 Termination date: 20210925 |
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| CF01 | Termination of patent right due to non-payment of annual fee |