CN210426423U - Ultra-precise roundness measuring device based on two-step method - Google Patents
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- CN210426423U CN210426423U CN201921343531.5U CN201921343531U CN210426423U CN 210426423 U CN210426423 U CN 210426423U CN 201921343531 U CN201921343531 U CN 201921343531U CN 210426423 U CN210426423 U CN 210426423U
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Abstract
The utility model discloses an ultra-precise roundness measuring device based on a two-step method, which comprises a base, a first rotary table, a second rotary table, a three-jaw chuck, a displacement sensor and a height adjusting mechanism; the first rotating platform is arranged on the base; the second rotary table is arranged on the first rotary table through a magnetic suction seat; the three-jaw chuck is arranged on the second rotary table; the central axis of the first rotary table, the central axis of the second rotary table and the central axis of the three-jaw chuck are all positioned on the same straight line; the lower end of the height adjusting mechanism is arranged on the base; one end of the displacement sensor is mounted on the height adjusting mechanism, and the axis of a probe of the displacement sensor is parallel to the surface of the base. The utility model discloses a measuring device simple structure, and adopt effectual means in order to restrain the propagation of measuring uncertainty, make and measure the uncertainty and reach minimum, measurement accuracy reaches the highest.
Description
Technical Field
The utility model relates to a roundness measurement technical field, concretely relates to ultra-precision roundness measurement device based on two-step method.
Background
Roundness measurement is one of the most fundamental measurement tasks in the manufacturing industry. According to Calzaxis, Germany (Carl Zeiss), roundness measurements account for 50-60% of the total measurement task in the manufacturing industry. This is mainly due to the fact that modern industrial equipment largely employs rotating parts, such as bearings, optical lenses, seals, etc.; in addition, such parts often play a decisive role, being the key to ensuring the performance of the equipment. In order to process ultra-precise and high-performance rotary parts, the precondition is to establish ultra-precise and reliable roundness measurement technology and instrument to provide a measurement basis.
Currently, the roundness measurement task is generally completed by a roundness meter, and the measurement precision of the roundness measurement task is mainly determined by the precision of a rotary table. Currently, the turntable error of the most precise commercial roundness measuring instrument in the world, Talyrnd 595H, is only 10 nanometers. However, the roundness error of the ultra-precision part is sometimes only several nanometers. At this time, even if the most advanced Talyrond 595H roundness measuring instrument is adopted, the turntable error still introduces an excessive system measurement deviation, resulting in invalid measurement results.
In order to eliminate the system measurement deviation caused by the rotary table, scholars at home and abroad propose an error separation technology, which comprises various implementation forms, such as a turning method, a multi-step method, a three-point method and the like. The technology can separate the error of the rotary table from the roundness of the workpiece, theoretically can realize zero system deviation measurement, and breaks through the accuracy limit of the existing roundness measuring instrument. Because the precision machinery in China has a weak foundation and does not have the capability of developing a nanometer-level precision turntable, the current situation that the market of the roundness measuring instrument in China is monopolized by European and American enterprises for a long time can be turned back by developing the domestic ultra-precision roundness measuring instrument by means of an error separation technology.
However, the measurement accuracy of the error separation technique is not stable and is often disturbed by harmonic suppression problems: when the determinant | w (k) of the harmonic transfer matrix is equal to 0, the harmonic component of the circularity cannot be estimated, which is called a suppressed harmonic; when | w (k) | approaches 0, the estimated value of the harmonic tends to contain a large harmonic measurement error, and thus, the harmonic is referred to as a sensitive harmonic. Researchers have conducted a great deal of intensive research into the harmonic suppression problem and have proposed various approaches to solving the problem.
The utility model patent (application number: 201410667811.7, name: a sensor installation angle selection method for three-point method roundness error separation technology) proposes an angle optimization method to alleviate the "harmonic suppression" problem. The angle optimization strategy is to maximize the minimum value of the determinant of the transfer matrix, namely max [ min | w (k) | ].
The utility model patent (application number: CN201511021695.2, name: an improved three-point method for measuring gyration error and roundness error) proposes a hybridization three-point method, which comprises the following steps: firstly, implementing a plurality of three-point methods to measure a plurality of estimated values for each harmonic; then, the optimal estimated value is screened out for each harmonic according to the optimization function max | W (k) |, so that the measurement error of each harmonic is minimized, and meanwhile, the total measurement error is greatly reduced.
However, studies have shown that the determinant | w (k) | of the transfer matrix does not have a strict negative correlation with harmonic measurement uncertainty. This substantially reduces the effectiveness of the above-mentioned solution: the optimal harmonic estimation value cannot be screened out according to max | W (k) |; the highest measurement accuracy is not ensured by max [ min | w (k) | ].
The nature of the harmonic rejection problem is some special cases where the measurement uncertainty propagates in the frequency domain: suppression of harmonics means that the uncertainty of the harmonics is amplified infinitely during the measurement; sensitive harmonics refer to the uncertainty of the harmonic being amplified by a large factor during the measurement; in addition, other harmonics also have propagation and amplification of uncertainty. Therefore, in order to substantially and thoroughly solve the problem of harmonic suppression, a propagation rule and a quantitative evaluation method for measuring uncertainty are established aiming at an error separation technology; on the basis, an effective means is adopted to inhibit the propagation of the measurement uncertainty, so that the measurement uncertainty is minimized, and the measurement precision is maximized.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the defects existing in the prior art, and providing an ultra-precise roundness measuring device based on a two-step method. The ultra-precise roundness measuring method based on the two-step method can reduce the system error and the random error in the measuring process, improve the accuracy and precision of the measuring result and reduce the multiple operations in the measuring process.
The purpose of the utility model is realized through the following technical scheme: an ultra-precise roundness measuring device based on a two-step method comprises a base, a first rotary table, a second rotary table, a three-jaw chuck, a displacement sensor and a height adjusting mechanism; the first rotating platform is arranged on the base; the second rotary table is arranged on the first rotary table through a magnetic suction seat; the three-jaw chuck is arranged on the second rotary table; the central axis of the first rotary table, the central axis of the second rotary table and the central axis of the three-jaw chuck are all positioned on the same straight line; the lower end of the height adjusting mechanism is arranged on the base; one end of the displacement sensor is mounted on the height adjusting mechanism, and the axis of a probe of the displacement sensor is parallel to the surface of the base.
Preferably, the first rotating platform and the second rotating platform are both provided with a rotation angle measuring unit.
The height adjusting mechanism comprises a guide rail and a sliding table; the lower extreme of guide rail is installed on the base, the slip table is connected with the guide rail, displacement sensor's one end is installed in the slip table.
Preferably, a clamping piece is arranged on the sliding table, and the axis of the clamping piece is parallel to the base; one end of the displacement sensor is clamped by a clamping piece.
Preferably, the lower extreme of slip table is equipped with two at least dogs, and all dogs set up one row, and the up end of all dogs all is parallel with the base, the downside side of clamping piece pastes tightly mutually with the up end of dog.
Preferably, the height adjusting mechanism further comprises a lifting motor and a screw rod, the two ends of the sliding table are respectively connected with the corresponding guide rails, the middle of the sliding table is connected with the screw rod through a screw rod nut, and the screw rod is connected with the motor.
Preferably, the height adjusting mechanism further comprises a hand wheel and a screw rod, the two ends of the sliding table are respectively connected with corresponding guide rails, the middle of the sliding table is connected with the screw rod, and the screw rod is connected with the hand wheel.
The utility model discloses for prior art have following advantage:
1. the utility model discloses a roundness measurement is accomplished to two-step method error separation technique, compares with other error separation methods, and the two-step method has the comparison advantage. Compared with a three-point measurement method, the two-step method only needs one displacement sensor, so that the configuration quantity of expensive displacement sensors can be reduced; compared with a multi-step measurement method, the two-step method only needs two times of measurement, and the defects of multiple measurement steps and long measurement process of the multi-step method are avoided; compared with the turnover method, the two-step method only needs to rotate the workpiece without moving or rotating the sensor during the second measurement, so that the required measuring device is relatively simple.
2. The utility model discloses a two-step method separates revolving stage error and work piece circularity, eliminates the systematic measurement deviation that the revolving stage introduced, can break through the measurement accuracy limit of current roundness measuring equipment (because the revolving stage error, Talyrond 595H exists about 10 nanometers's systematic measurement deviation throughout, and the roundness measuring equipment based on the two-step method can realize zero system deviation measurement theoretically).
3. China has weak precision machinery foundation and does not have the capacity of developing a nanometer precision turntable for the moment, so that the precision machinery also does not have the capacity of developing the traditional ultra-precision roundness measuring instrument. The roundness measuring instrument based on the two-step method has lower precision requirement on the rotary table, so domestic enterprises can choose to develop the ultra-precise roundness measuring instrument based on the two-step method, which is also beneficial to turning the current situation that the roundness measuring instrument market in China is monopolized by European and American enterprises for a long time.
4. The utility model provides an uncertainty propagation law of two-step method, based on this, can realize the quantitative aassessment of roundness measurement uncertainty. Further, the utility model discloses use the minimum objective function that is of measurement uncertainty: minφ∈(0,2π)Ur(phi), the optimal measurement angle is selected, so that the measurement accuracy is maximized, and the harmonic suppression problem is solved essentially and completely.
5. The utility model discloses an ultra-precision roundness measuring device based on two-step method carries out the roundness measurement, reducible numerous operation, and has improved the accuracy that detects.
Drawings
Fig. 1 is a schematic structural diagram of an ultra-precise roundness measuring apparatus based on a two-step method.
Fig. 2 is a schematic diagram of a first signal acquisition process of an ultra-precise roundness measurement process based on a two-step method.
FIG. 3 is a schematic diagram of a second signal acquisition process in the ultra-precise roundness measurement process based on a two-step method
FIG. 4 is the reciprocal of the uncertainty estimate for roundness measurements
FIG. 5 is a polar plot of roundness profiles measured at different measurement angles.
Wherein, 1 is the base, 2 is first revolving stage, 3 is the second revolving stage, 4 are three-jaw chucks, 5 are displacement sensor, 6 are height adjustment mechanism, 7 are the guide rail, 8 are the slip table, 9 are the work piece that is surveyed, 10 are the clamping piece.
Detailed Description
The present invention will be further explained with reference to the drawings and examples.
As shown in fig. 1 to 3, an ultra-precise roundness measuring apparatus based on a two-step method includes a base, a first turntable, a second turntable, a three-jaw chuck, a displacement sensor, and a height adjusting mechanism; the first rotating platform is arranged on the base; the second rotary table is arranged on the first rotary table through a magnetic suction seat; the three-jaw chuck is arranged on the second rotary table; the central axis of the first rotary table, the central axis of the second rotary table and the central axis of the three-jaw chuck are all positioned on the same straight line; the lower end of the height adjusting mechanism is arranged on the base; one end of the displacement sensor is mounted on the height adjusting mechanism, and the axis of a probe of the displacement sensor is parallel to the surface of the base. Specifically, when the magnetic suction seat is released, the second rotary table can rotate relative to the first rotary table to adjust the relative angle between the first rotary table and the second rotary table; when the relative angle is adjusted and the magnetic suction seat is sucked to fix the second rotary table on the first rotary table, the second rotary table rotates synchronously with the first rotary table and does not move relatively. The mechanism is convenient for adjusting the relative angle between the second rotary table and the first rotary table, and can ensure that a workpiece to be measured and the first rotary table rotate synchronously in the measuring process.
The height adjusting mechanism comprises a guide rail and a sliding table; the lower extreme of guide rail is installed on the base, the slip table is connected with the guide rail, displacement sensor's one end is fixed in the slip table. Specifically, the movement of the sliding table can be driven by a motor or a hand wheel.
When the sliding table is driven by a motor, the height adjusting mechanism further comprises a lifting motor and a screw rod, the two ends of the sliding table are connected with the two guide rails, the middle part of the sliding table is connected with the screw rod through a screw rod nut, and one end of the screw rod is connected with the motor. When the motor is started, the screw rod is driven to rotate, and the screw rod nut drives the sliding table to move up and down along the axis of the screw rod.
When the sliding table is driven manually, the height adjusting mechanism further comprises a hand wheel and a screw rod, the two ends of the sliding table are connected with corresponding guide rails respectively, the middle of the sliding table is connected with the screw rod through a screw rod nut, and the screw rod is connected with the hand wheel. When the mode is adopted, a user rotates the screw rod through the hand wheel so that the screw rod nut drives the sliding table to move up and down along the axis of the screw rod.
The clamping piece is arranged on the sliding table, and the axis of the clamping piece is parallel to the base; one end of the displacement sensor is clamped by a clamping piece. The structure can facilitate the fixation of the displacement sensor and confirm the levelness of the detection direction of the displacement sensor. And for further guaranteeing displacement sensor's the levelness of direction of detection, can the lower extreme of slip table is equipped with two at least dogs, and all dogs set up one row, and the up end of all dogs all is parallel with the base, the downside side of clamping piece pastes closely with the up end of dog mutually. The stop block can prevent the clamping piece from swinging downwards. Meanwhile, the clamping piece adopts a cylindrical clamping piece, the displacement sensor adopts a cylindrical capacitive displacement sensor, and the displacement sensor with the structure is matched with the clamping piece, so that the displacement sensor is convenient to install and fix.
And the first rotary table and the second rotary table are both provided with a corner measuring unit. The rotation angle measuring unit arranged on the first rotary table is a first rotation angle measuring unit and used for detecting the absolute rotation angle of the first rotary table; the rotation angle measuring unit mounted on the second turntable is a second rotation angle measuring unit for determining a relative angle between the second turntable and the first turntable. The structure is simple, and the measuring accuracy is ensured. Specifically, the first rotation angle measuring unit and the second rotation angle measuring unit in this embodiment both employ rotary encoders.
The ultra-precise roundness measuring method based on the two-step method comprises the following steps:
(1) fixing the measured workpiece on a second rotary table of the roundness measuring device, aligning a displacement sensor of the roundness measuring device to the measured section of the measured workpiece, synchronously acquiring a radial runout signal of the surface of the measured workpiece by the displacement sensor in the process that a first rotary table of the roundness measuring device rotates for a plurality of circles, and recording the signal as m0(θ) in terms of m0(theta) counting the harmonic uncertainty p (k) of the displacement sensor. Specifically, the statistical algorithm of the harmonic uncertainty p (k) of the displacement sensor comprises the following steps:
(1-1) calculating a noise signal noise (theta) of the displacement sensor:
in formula 1), theta ∈ [ 02 π ]]Denotes an absolute rotation angle of the first turntable; m is0(theta) c circles of displacement signals collected by the displacement sensor are stored as a c multiplied by n matrix, wherein c is the number of turns of the first rotating platform, c is a natural number greater than 2, and n is the number of sampling points in each circle;
the mean value of c circle displacement signals is represented as a 1 multiplied by n matrix;
(1-2) calculating the frequency spectrum of the displacement sensor noise signal noise (theta) in each row of the matrix:
in the formula 2), the reaction mixture is,
k represents a harmonic order;
(1-3) calculating the harmonic uncertainty p (k) of the displacement sensor, wherein the value of the harmonic uncertainty p (k) is equal to the mean value of the noise signal noise (theta) power spectrum:
(2) and predicting the uncertainty of the roundness measurement result under different measurement angles according to the harmonic uncertainty p (k) of the displacement sensor and the uncertainty propagation rule of the two-step method, and finding out the optimal measurement angle phi. The method for determining the optimal test angle phi comprises the following steps:
(2-1) predicting the harmonic uncertainty p of the roundness measurement result at any angle according to the uncertainty propagation rule of the two-step method when the harmonic uncertainty of the displacement sensor is known to be p (k)noise,r(k)：
And total uncertainty U of roundness measurementr(φ)：
According to the equations 4) and 5), the uncertainty U of the roundness measurement results at all angles is predictedr(φ)；
(2-2) according to formula 4) and formula 5)Determining an optimal measurement angle phi to minimize uncertainty of the roundness measurement resultφ∈(0,2π)Ur(φ)。
(3) Adjusting the relative angle between the second rotary table and the first rotary table to enable the relative angle between the second rotary table and the first rotary table to be 0 degree, and implementing the first signal acquisition in the two-step method: in the process that the first rotating platform rotates for one circle, the displacement sensor synchronously acquires a radial runout signal of the surface of the workpiece to be measured, and the signal is recorded as m1(θ)；
(4) And adjusting the second rotary table again to enable the relative angle between the second rotary table and the first rotary table to be the optimal measurement angle phi, and implementing second-time signal acquisition in the two-step method: in the process that the first rotating platform rotates for one circle, the displacement sensor synchronously acquires radial runout signals of the surface of the workpiece to be measured, and the signals are recorded as m2(θ)；
(5) Measuring the radial runout signal m twice1(theta) and m2And (theta) substituting the two-step algorithm to calculate the roundness of the workpiece to be measured. The two-step algorithm comprises the following steps:
(5-1) in the step (3), the radial runout signal m acquired for the first time in the two-step method1(theta) the signal comprises the revolution error of the first rotary table and the roundness of the measured workpiece, wherein in the first acquisition process, the revolution error of the first rotary table is x (theta), the roundness of the measured workpiece is r (theta), and then m is1(θ)＝x(θ)+r(θ)；
(5-2) in the step (4), the radial runout signal m acquired for the second time in the two-step method2(θ), the signal also including a gyration error of the first turntable and a roundness of the workpiece under test; however, due to the relative angle phi between the second rotary table and the first rotary table, the roundness of the workpiece to be measured also has a phase lag phi, so that in the second acquisition process, the rotation error of the first rotary table is also x (theta), and the roundness of the workpiece to be measured at this time is r (theta-phi), m2(θ)＝x(θ)+r(θ-φ)；
(5-3) carrying out difference on the radial runout signals obtained by the two times of acquisition to construct a weight function m (theta):
m(θ)＝m1(θ)-m2(θ) ═ r (θ) -r (θ - Φ), this is formula 6)；
The weight function m (theta) only contains a roundness component of the measured workpiece, and the spindle error of the first rotary table is eliminated;
(5-4) multiplying the weight function m (theta) by the transfer function
To calculate the laplace transform of the roundness of the measured workpiece:
in formula 7), m(s) and r(s) represent laplace transforms of m (θ) and r (θ), respectively, and s is a complex number;
(5-5) bringing s-jk into formula (7) to obtain Fourier coefficient R (jk) of the roundness of the workpiece, and then calculating by inverse Fourier transform to obtain the roundness r of the workpiecemeasured(θ)：
Specifically, in the present embodiment, the harmonic uncertainty of the displacement sensor is p (k) 10-3μm2. In the present embodiment, equation 4) and equation 5) are used in combination with fig. 4 to determine the optimum measurement angle of 15.7 ° or 344.3 °, where the uncertainty U of the roundness measurement result isr(phi) to a minimum, Ur(15.7°)＝5.90×10-2μm2. From the polar plot of the two-degree measurements shown in FIG. 5, the middle reference circle radius is 10 μm; therein, the gray dot-and-dash line shows 100 estimated values measured at an angle of 33.1 ° with a measurement uncertainty Ur(33.1°)＝74.3×10-2μm2(ii) a The estimate shown by the solid black line was taken at an optimum angle of 15.7 deg., and the measurement uncertainty was Ur(15.7°)＝6.10×10-2μm2. Therefore, after angle optimization is carried out, the uncertainty of the roundness measurement result is obviously reduced, and harmonic suppression does not exist. Thereby completing the ultra-precise roundness of the rotary workpiece based on a two-step methodThe whole process of measurement.
The above-mentioned specific implementation is the preferred embodiment of the present invention, can not be right the utility model discloses the limit, any other does not deviate from the technical scheme of the utility model and the change or other equivalent replacement modes of doing all contain within the scope of protection of the utility model.
Claims (7)
1. An ultra-precise roundness measuring device based on a two-step method is characterized in that: the device comprises a base, a first rotary table, a second rotary table, a three-jaw chuck, a displacement sensor and a height adjusting mechanism; the first rotating platform is arranged on the base; the second rotary table is arranged on the first rotary table through a magnetic suction seat; the three-jaw chuck is arranged on the second rotary table; the central axis of the first rotary table, the central axis of the second rotary table and the central axis of the three-jaw chuck are all positioned on the same straight line; the lower end of the height adjusting mechanism is arranged on the base; one end of the displacement sensor is mounted on the height adjusting mechanism, and the axis of a probe of the displacement sensor is parallel to the surface of the base.
2. The ultra-precise roundness measuring apparatus according to claim 1, based on a two-step method, wherein: and the first rotary table and the second rotary table are both provided with a corner measuring unit.
3. The ultra-precise roundness measuring apparatus according to claim 1, based on a two-step method, wherein: the height adjusting mechanism comprises a guide rail and a sliding table; the lower extreme of guide rail is installed on the base, the slip table is connected with the guide rail, displacement sensor's one end is installed in the slip table.
4. The ultra-precise roundness measuring apparatus according to claim 3, wherein: the clamping piece is arranged on the sliding table, and the axis of the clamping piece is parallel to the base; one end of the displacement sensor is clamped by a clamping piece.
5. The ultra-precise roundness measuring apparatus according to claim 3, wherein: the lower extreme of slip table is equipped with two at least dogs, and all dogs set up one row, and the up end of all dogs all is parallel with the base, the downside side of clamping piece pastes tightly with the up end of dog mutually.
6. The ultra-precise roundness measuring apparatus according to claim 3, wherein: the height adjusting mechanism further comprises a lifting motor and a screw rod, the two ends of the sliding table are respectively connected with corresponding guide rails, the middle of the sliding table is connected with the screw rod through a screw rod nut, and the screw rod is connected with the motor.
7. The ultra-precise roundness measuring apparatus according to claim 3, wherein: the height adjusting mechanism further comprises a hand wheel and a screw rod, the two ends of the sliding table are respectively connected with corresponding guide rails, the middle of the sliding table is connected with the screw rod, and the screw rod is connected with the hand wheel.
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| CN115112082A (en) * | 2022-06-30 | 2022-09-27 | 哈尔滨工业大学 | Coaxiality measuring device and method based on digital twinning technology |
| CN115112082B (en) * | 2022-06-30 | 2023-05-30 | 哈尔滨工业大学 | Coaxiality measuring device and calibration method based on digital twin technology |
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