CN210414577U - Novel manipulator take and put palm mechanism - Google Patents
Novel manipulator take and put palm mechanism Download PDFInfo
- Publication number
- CN210414577U CN210414577U CN201921046951.7U CN201921046951U CN210414577U CN 210414577 U CN210414577 U CN 210414577U CN 201921046951 U CN201921046951 U CN 201921046951U CN 210414577 U CN210414577 U CN 210414577U
- Authority
- CN
- China
- Prior art keywords
- palm
- plate
- front sealing
- rotating
- bottom plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Manipulator (AREA)
Abstract
The utility model provides a novel manipulator palm picking and placing mechanism, which comprises a palm supporting plate, wherein the top end of the palm supporting plate is provided with a pressing and rotating U-shaped frame and a palm front sealing plate, the palm front sealing plate is positioned on the back surface of the pressing and rotating U-shaped frame, and the palm front sealing plate is higher than the pressing and rotating U-shaped frame; a deflection bottom plate is arranged on the inner side of the pressing and rotating U-shaped frame and connected with the palm front sealing plate, and the top surface of the deflection bottom plate and the top surface of the palm front sealing plate are positioned on the same horizontal plane; and the bottom ends of the deflection bottom plate and the palm front sealing plate are provided with sliding block mounting seats. The utility model provides a stable material taking and feeding mechanism for the automatic material taking manipulator, the material on the palm can be accurately judged by the hand material identification function, the structure is simple and reliable, and the identification accuracy is high; the anti-collision alarm function is triggered quickly, so that production accidents can be effectively avoided, and the production loss is reduced; the mechanical parts of the mechanism are simple and easy to manufacture, the production cost is low, and the used sensor is an economic and reliable microswitch.
Description
Technical Field
The utility model relates to a manipulator is automatic gets to put and expects technical field, specifically is a novel manipulator get and puts palm mechanism.
Background
In the production and manufacturing process of solar silicon wafers, the former process has obvious influence on the quality of finished silicon wafers, the two processes of diffusion and film coating are particularly important, under the production mode of large capacity and fast beat, the diffusion and PECVD film coating equipment provides a mechanical arm to realize the automatic loading and unloading process, which becomes a normal state, and the fetching and delivering media for loading and unloading are quartz boats or graphite boats fully loaded with silicon wafers.
Because the full boat has large mass and large inertia in the movement process, the manipulator palm mechanism is required to ensure the stable pick-and-place process of the full boat; in addition, the quartz boat and the graphite boat have high manufacturing cost, and the full-load boat under large production capacity has higher economic cost, so that the manipulator palm mechanism is required to have an excellent anti-collision mechanism to avoid production loss.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a novel manipulator get and put palm mechanism to solve the problem of proposing in the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
a novel manipulator palm picking and placing mechanism comprises a palm supporting plate, wherein a pressing and rotating U-shaped frame and a palm front sealing plate are arranged at the top end of the palm supporting plate, the palm front sealing plate is positioned on the back of the pressing and rotating U-shaped frame, and the palm front sealing plate is higher than the pressing and rotating U-shaped frame; a deflection bottom plate is arranged on the inner side of the pressing and rotating U-shaped frame and connected with the palm front sealing plate, and the top surface of the deflection bottom plate and the top surface of the palm front sealing plate are positioned on the same horizontal plane; the bottom ends of the deflection bottom plate and the palm front sealing plate are provided with sliding block mounting seats;
a swing trigger plate is arranged at the center of the inner side of the deflection bottom plate, and an anti-collision microswitch is arranged on the inner side of the deflection bottom plate and the surface of the palm front sealing plate; an anti-collision micro contact is arranged on one side of the anti-collision micro switch close to the swing trigger plate; spring plungers are arranged at the tops of two ends of the pressing and rotating U-shaped frame respectively, a fixing plate is arranged on the side wall of one side, close to the swinging trigger plate, of each spring plunger, and the spring plungers are connected with the deflection bottom plate through the fixing plates; a boat-shaped induction microswitch is arranged on one side of the spring plunger, which is far away from the fixed plate, and the spring plunger and the boat-shaped induction microswitch are both fixed on the surface of the palm front sealing plate; and the back end of the top of the palm supporting plate is provided with a taking and delivering boat.
As a further aspect of the present invention: the bottom end of the inner side of the deflection bottom plate is provided with a connecting rod; pull rings are respectively arranged on two sides of the bottom end of the swinging trigger plate and are sleeved on the surface of the connecting rod;
and an anti-collision reset spring is arranged between the pull ring and the inner side wall of the deflection bottom plate and is sleeved on the surface of the connecting rod.
As a further aspect of the present invention: the bottom end of the swinging trigger plate is provided with a through hole matched with the connecting rod, and the inner diameter of the through hole is larger than the diameter of the connecting rod; the connecting rod is located at the center of the through hole, and two ends of the connecting rod are connected with two inner side walls of the deflection bottom plate respectively.
As a further aspect of the present invention: the top end of the deflection bottom plate is provided with a connecting piece, and the upper end of the connecting piece is positioned in the sliding block mounting seat; the surface of the connecting piece is provided with a micro-motion rotating shaft, and the connecting piece is movably connected with the sliding block mounting seat through the micro-motion rotating shaft; the top end of the swing trigger plate penetrates through the top of the deflection bottom plate and is fixedly connected with the sliding block mounting seat.
As a further aspect of the present invention: the pressing and rotating U-shaped frame is welded with the palm supporting plate; the side wall of the pressing and rotating U-shaped frame is provided with a swinging shaft, and the pressing and rotating U-shaped frame is movably connected with the deflection bottom plate through the swinging shaft.
As a further aspect of the present invention: the number of the anti-collision micro switches is two, and the two anti-collision micro switches are symmetrical by taking the center line of the front surface of the front sealing plate of the palm as a symmetry axis and are respectively arranged on two sides of the swinging trigger plate.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model provides a stable material taking and feeding mechanism for the automatic material taking manipulator, the material on the palm can be accurately judged by the hand material identification function, the structure is simple and reliable, and the identification accuracy is high; the anti-collision alarm function is triggered quickly, so that production accidents can be effectively avoided, and the production loss is reduced; mechanical parts of the mechanism are simple and easy to manufacture, the production cost is low, and the used sensor is an economic and reliable microswitch, so that the manufacturing cost of the whole mechanism has economic advantages compared with other products with the same type and the same function under the condition of ensuring the perfect use function; the mechanism is convenient to install, can be matched with various manipulators theoretically only by being matched with the original manipulator sliding blocks, and has extremely high transportability.
Drawings
Fig. 1 is a schematic structural view of a novel manipulator palm picking and placing mechanism;
fig. 2 is a schematic structural view of a swing trigger plate in a novel manipulator picking and placing palm mechanism;
FIG. 3 is a material-free state diagram of a novel manipulator palm picking and placing mechanism;
fig. 4 is a material state diagram of a novel manipulator palm picking and placing mechanism.
In the figure: 1. a palm rest; 2. pressing and rotating the U-shaped frame; 3. a palm front closing plate; 4. a deflection bottom plate; 5. a slider mounting base; 6. swinging the trigger plate; 7. an anti-collision microswitch; 8. an anti-collision micro-contact; 9. a connecting rod; 10. a pull ring; 11. an anti-collision return spring; 12. a through hole; 13. a spring plunger; 14. a fixing plate; 15. a boat induction microswitch; 16. a connecting member; 17. a micro-motion rotating shaft; 18. a swing shaft; 19. and (4) taking and delivering the boat.
Detailed Description
The technical solution of the present patent will be described in further detail with reference to the following embodiments.
Referring to fig. 1-4, a novel manipulator palm picking and placing mechanism includes a palm support plate 1, a pressing and rotating U-shaped frame 2 and a palm front sealing plate 3 are disposed at the top end of the palm support plate 1, the palm front sealing plate 3 is located at the back of the pressing and rotating U-shaped frame 2, and the palm front sealing plate 3 is higher than the pressing and rotating U-shaped frame 2; a deflection bottom plate 4 is arranged on the inner side of the pressing and rotating U-shaped frame 2, the deflection bottom plate 4 is connected with the palm front sealing plate 3, and the top surface of the deflection bottom plate 4 and the top surface of the palm front sealing plate 3 are positioned on the same horizontal plane; the bottom ends of the deflection bottom plate 4 and the palm front sealing plate 3 are provided with a sliding block mounting seat 5;
a swing trigger plate 6 is arranged at the center of the inner side of the deflection bottom plate 4, and an anti-collision microswitch 7 is arranged on the inner side of the deflection bottom plate 4 and the surface of the palm front sealing plate 3; an anti-collision micro contact 8 is arranged on one side of the anti-collision micro switch 7 close to the swing trigger plate 6; spring plungers 13 are respectively arranged at the tops of two ends of the pressing and rotating U-shaped frame 2, a fixing plate 14 is arranged on the side wall of one side, close to the swinging trigger plate 6, of each spring plunger 13, and each spring plunger 13 is connected with the corresponding deflection bottom plate 4 through the corresponding fixing plate 14; a boat-shaped induction microswitch 15 is arranged on one side of the spring plunger 13, which is far away from the fixed plate 14, and the spring plunger 13 and the boat-shaped induction microswitch 15 are both fixed on the surface of the palm front sealing plate 3; the back end of the top of the palm supporting plate 1 is provided with a taking and sending boat 19.
Preferably, a connecting rod 9 is arranged at the bottom end of the inner side of the deflection bottom plate 4; pull rings 10 are respectively arranged on two sides of the bottom end of the swinging trigger plate 6, and the pull rings 10 are sleeved on the surface of the connecting rod 9;
be provided with anticollision reset spring 11 between pull ring 10 and the inside wall of beat bottom plate 4, and anticollision reset spring 11 cup joints in the surface of connecting rod 9, when the manipulator has the foreign matter to obstruct on the direction of motion, the manipulator is touched to the foreign matter, whole palm just can take place to deflect under the effect of power, and swing trigger plate 6 just can drive pull ring 10 and extrude anticollision reset spring 11, swing trigger plate 6 can touch anticollision micro-gap contact 8 and trigger anticollision micro-gap switch 7, send the anticollision signal, manipulator stop motion, the external force is removed after having handled the warning, swing trigger plate 6 can reset under the effect of elasticity.
Preferably, the bottom end of the swing trigger plate 6 is provided with a through hole 12 matched with the connecting rod 9, the whole palm does circular motion, and the inner diameter of the through hole 12 is larger than the diameter of the connecting rod 9; make things convenient for whole palm to deflect, connecting rod 9 is located the positive center department of through-hole 12, and the both ends of connecting rod 9 link to each other with two inside walls of beat bottom plate 4 respectively.
Preferably, a connecting piece 16 is arranged at the top end of the deflection bottom plate 4, and the upper end of the connecting piece 16 is positioned in the slider mounting seat 5; the surface of the connecting piece 16 is provided with a micro-motion rotating shaft 17, and the connecting piece 16 is movably connected with the sliding block mounting seat 5 through the micro-motion rotating shaft 17; the top end of the swing trigger plate 6 penetrates through the top of the deflection bottom plate 4 and is fixedly connected with the sliding block mounting seat 5.
Preferably, the pressing and rotating U-shaped frame 2 is welded with the palm supporting plate 1; the lateral wall that presses U type frame 2 to change is provided with oscillating axle 18, and presses U type frame 2 to pass through oscillating axle 18 and 4 swing joint of beat bottom plate, when not expecting, palm layer board 1 can upwards perk about 2.5, and micro-gap switch does not respond, gets the boat under this state, and when expecting, the boat handle is from locating and pushing down the palm with palm layer board 1 for press and change U template 2 and be circular motion with 18 position centers of oscillating axle, thereby trigger and have boat response micro-gap switch 15.
Preferably, the quantity of anticollision micro-gap switch 7 is two, and two anticollision micro-gap switches 7 use the front central line of shrouding 3 before the palm as symmetry axis symmetry, set up respectively in the both sides that the board 6 was triggered in the swing, when arbitrary one side of manipulator bumps, all can trigger anticollision micro-gap switch 7, manipulator stop motion.
The utility model discloses a theory of operation is: when the novel manipulator palm taking and placing mechanism is used, before taking materials, the palm supporting plate 1 is in a material-free state, the plunger head of the spring plunger 13 props against the back surface of the palm front sealing plate 3, and the palm supporting plate 1 is tilted by about 2.5 degrees and does not respond to a micro switch because the palm supporting plate 1, the pressing and rotating U-shaped frame 2, the spring plunger 13 and the boat sensing micro switch 15 are connected to the same component and are deflected by the oscillating shaft 18, so that the boat is taken out in the state; when the boat is taken and lifted, the boat handle and the palm supporting plate 1 are self-positioned and the palms are pressed downwards, the palm bracket 1, the pressing and rotating U-shaped frame 2, the spring plunger 13 and the boat-provided induction microswitch 15 integrally deflect around the swinging shaft 18 to a vertical state under the action of gravity, at the moment, the spring plunger 13 is compressed, the contact of the microswitch touches the back of the palm front sealing plate 1, a material signal is sent out after response, and when both palms have the signal, the boat-taking position can be judged and follow-up action is carried out; in the moving process of the manipulator, if the manipulator touches a foreign body in the advancing process of the taking and sending boat, the manipulator deflects by the micro rotating shaft 17, after the manipulator deflects by a certain angle, the swinging trigger plate 6 touches the micro switch and sends out an anti-collision signal, the manipulator stops acting, external force is removed after alarm is processed, and the palm is restored by the reset spring.
Although the preferred embodiments of the present patent have been described in detail, the present patent is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present patent within the knowledge of those skilled in the art.
Claims (6)
1. A novel manipulator palm picking and placing mechanism comprises a palm supporting plate (1), and is characterized in that a pressing and rotating U-shaped frame (2) and a palm front sealing plate (3) are arranged at the top end of the palm supporting plate (1), the palm front sealing plate (3) is positioned on the back of the pressing and rotating U-shaped frame (2), and the palm front sealing plate (3) is higher than the pressing and rotating U-shaped frame (2); a deflection bottom plate (4) is arranged on the inner side of the pressing and rotating U-shaped frame (2), the deflection bottom plate (4) is connected with the palm front sealing plate (3), and the top surface of the deflection bottom plate (4) and the top surface of the palm front sealing plate (3) are positioned on the same horizontal plane; the bottom ends of the deflection bottom plate (4) and the palm front sealing plate (3) are provided with a sliding block mounting seat (5);
a swing trigger plate (6) is arranged at the center of the inner side of the deflection bottom plate (4), and an anti-collision microswitch (7) is arranged on the inner side of the deflection bottom plate (4) and the surface of the palm front sealing plate (3); an anti-collision micro contact (8) is arranged on one side, close to the swing trigger plate (6), of the anti-collision micro switch (7); spring plungers (13) are respectively arranged at the tops of two ends of the pressing and rotating U-shaped frame (2), a fixing plate (14) is arranged on the side wall of one side, close to the swinging trigger plate (6), of each spring plunger (13), and each spring plunger (13) is connected with the corresponding deflection bottom plate (4) through the corresponding fixing plate (14); a boat inductive microswitch (15) is arranged on one side, away from the fixing plate (14), of the spring plunger (13), and the spring plunger (13) and the boat inductive microswitch (15) are both fixed on the surface of the palm front sealing plate (3); the back end of the top of the palm supporting plate (1) is provided with a taking and delivering boat (19).
2. The novel manipulator palm picking and placing mechanism is characterized in that a connecting rod (9) is arranged at the bottom end of the inner side of the deflection bottom plate (4); pull rings (10) are respectively arranged on two sides of the bottom end of the swinging trigger plate (6), and the pull rings (10) are sleeved on the surface of the connecting rod (9);
an anti-collision return spring (11) is arranged between the pull ring (10) and the inner side wall of the deflection bottom plate (4), and the anti-collision return spring (11) is sleeved on the surface of the connecting rod (9).
3. The novel manipulator palm picking and placing mechanism is characterized in that a through hole (12) matched with the connecting rod (9) is formed in the bottom end of the swinging trigger plate (6), and the inner diameter of the through hole (12) is larger than the diameter of the connecting rod (9); the connecting rod (9) is positioned in the center of the through hole (12), and two ends of the connecting rod (9) are respectively connected with two inner side walls of the deflection bottom plate (4).
4. The novel manipulator palm picking and placing mechanism is characterized in that a connecting piece (16) is arranged at the top end of the deflection bottom plate (4), and the upper end of the connecting piece (16) is positioned in the slider mounting seat (5); a micro-motion rotating shaft (17) is arranged on the surface of the connecting piece (16), and the connecting piece (16) is movably connected with the sliding block mounting seat (5) through the micro-motion rotating shaft (17); the top end of the swing trigger plate (6) penetrates through the top of the deflection bottom plate (4) and is fixedly connected with the sliding block mounting seat (5).
5. The novel manipulator palm picking and placing mechanism is characterized in that the pressing and rotating U-shaped frame (2) is welded with the palm supporting plate (1); the side wall of the pressing and rotating U-shaped frame (2) is provided with a swinging shaft (18), and the pressing and rotating U-shaped frame (2) is movably connected with the deflection bottom plate (4) through the swinging shaft (18).
6. The novel manipulator palm picking and placing mechanism is characterized in that the number of the anti-collision micro switches (7) is two, and the two anti-collision micro switches (7) are symmetrical by taking the center line of the front surface of the palm front sealing plate (3) as a symmetry axis and are respectively arranged on two sides of the swinging trigger plate (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921046951.7U CN210414577U (en) | 2019-07-06 | 2019-07-06 | Novel manipulator take and put palm mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921046951.7U CN210414577U (en) | 2019-07-06 | 2019-07-06 | Novel manipulator take and put palm mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210414577U true CN210414577U (en) | 2020-04-28 |
Family
ID=70379113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921046951.7U Active CN210414577U (en) | 2019-07-06 | 2019-07-06 | Novel manipulator take and put palm mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210414577U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115610991A (en) * | 2022-12-07 | 2023-01-17 | 广州城市理工学院 | Charging device |
-
2019
- 2019-07-06 CN CN201921046951.7U patent/CN210414577U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115610991A (en) * | 2022-12-07 | 2023-01-17 | 广州城市理工学院 | Charging device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN210414577U (en) | Novel manipulator take and put palm mechanism | |
| CN209504144U (en) | A kind of cup grasping mechanism | |
| CN203664219U (en) | Automatic detection equipment | |
| CN207902596U (en) | A kind of robot gravity adjusting device | |
| CN211978271U (en) | Anti performance detection device that falls is used in electronic product production | |
| CN105097609B (en) | A kind of ejector pin mechanism, reaction chamber and semiconductor processing equipment | |
| CN109384181A (en) | Bearing bottle automatic capping device, working method and bottling vanning assembly line | |
| CN207027503U (en) | A kind of goods transfer robot | |
| CN105173679A (en) | Automatic material feeding device for silver coating of magnetic sheets of buzzers | |
| CN111069874B (en) | Pre-assembly correcting mechanism for fork handle of fishing fork | |
| CN211588863U (en) | Automatic welding device | |
| CN210702040U (en) | Stamping forming mould of upset in mould | |
| CN208978303U (en) | A kind of wireless key assembly line | |
| CN206898900U (en) | A kind of clamping jaw Jia Kong testing agencies | |
| CN210400836U (en) | Spring testing device | |
| CN110961368A (en) | Intelligent gauge for position degree of motor bearing bush cover | |
| CN214040302U (en) | Weighing device is received and sold to old and useless article | |
| CN217007720U (en) | Plane detection device for placing material sheets in place | |
| CN203738806U (en) | Pressure sensing claw of industrial robot | |
| CN215696943U (en) | Stamping die prevents area material sensor subassembly | |
| CN216729553U (en) | Automatic material taking mechanism with double manipulators after hard alloy molding | |
| CN210256214U (en) | Manipulator buffer | |
| CN219668599U (en) | Paper box suction tool mechanism | |
| CN215796225U (en) | Automatic production line thickness measuring equipment | |
| CN210040134U (en) | A intensity detection device for miniature wafer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210519 Address after: Room 402, building 3, 3255 Sixian Road, Songjiang District, Shanghai Patentee after: Ideal semiconductor equipment (Shanghai) Co.,Ltd. Address before: 214135 rooms 101 and 201, building 12 (B3), Wuxi Zhongguancun Software Park, Xinwu District, Wuxi City, Jiangsu Province Patentee before: WUXI HUAYUAN JIANDIAN TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A New Kind of Manipulator's Palm Mechanism Effective date of registration: 20230209 Granted publication date: 20200428 Pledgee: Agricultural Bank of China Limited Shanghai Songjiang Sub-branch Pledgor: Ideal semiconductor equipment (Shanghai) Co.,Ltd. Registration number: Y2023310000023 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |