CN210397878U - Pneumatic valve detection device - Google Patents
Pneumatic valve detection device Download PDFInfo
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- CN210397878U CN210397878U CN201921394022.5U CN201921394022U CN210397878U CN 210397878 U CN210397878 U CN 210397878U CN 201921394022 U CN201921394022 U CN 201921394022U CN 210397878 U CN210397878 U CN 210397878U
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Abstract
The utility model discloses a pneumatic valve detection device, which comprises an installation box, a mobile unit, a clamping unit and a valve seat, the mounting box is internally provided with a diaphragm, the lower side surface of the diaphragm is provided with a fixed block, the moving unit comprises a first connecting pipe, a connecting box, a connecting block, a valve rod, a spring and a valve head, a first connecting pipe is arranged on the lower side surface of the mounting box, the lower end surface of the first connecting pipe is arranged on the upper side surface of the connecting box, the installation box, the first connecting pipe and the connecting box are communicated, the lower side surface of the connecting box is provided with a connecting block, a through hole is arranged in the middle of the connecting block and is communicated with the connecting box, a valve rod is connected inside the through hole in a sliding way, the upper end face of the valve rod is fixed on the lower end face of the fixing block, and the circumferential face of the valve rod is sleeved with the spring, so that the working state of the pneumatic valve can be effectively detected.
Description
Technical Field
The utility model relates to a detection device technical field specifically is a pneumatic valve detection device.
Background
For all semiconductor devices, a pneumatic valve (a valve controlled by compressed gas) is used to control the on/off of a process gas pipeline, but whether the pneumatic valve is normally opened or not is in place, so far, no reliable method is available for detecting and judging, which results in that the process gas may cause unstable flow (not completely opened) due to the uncontrolled state of the pipeline or flow into a reaction cavity to participate in reaction (not completely closed) when not needed, thereby causing the quality of wafer (wafer) products to be defective or even scrapped.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to overcome current defect, provide a pneumatic valve detection device, can effectually detect the operating condition of pneumatic valve, can effectively solve the problem in the background art.
In order to achieve the above object, the utility model provides a following technical scheme: a pneumatic valve detection device comprises an installation box, a moving unit, a clamping unit and a valve seat;
installing a box: a diaphragm is arranged in the mounting box, and a fixing block is arranged on the lower side surface of the diaphragm;
a mobile unit: the moving unit comprises a first connecting pipe, a connecting box, a connecting block, a valve rod, a spring and a valve head, a first connecting pipe is arranged on the lower side surface of the mounting box, the lower end surface of the first connecting pipe is arranged on the upper side surface of the connecting box, the installation box, the first connecting pipe and the connecting box are communicated, the lower side surface of the connecting box is provided with a connecting block, a through hole is arranged in the middle of the connecting block and is communicated with the connecting box, a valve rod is connected inside the through hole in a sliding way, the upper end surface of the valve rod is fixed on the lower end surface of the fixed block, the circumferential surface of the valve rod is sleeved with a spring, the upper end of the spring is fixed on the lower end surface of the fixed block, the lower end of the spring is fixed on the upper side surface of the connecting box, a valve head is fixed on the lower end surface of the valve rod, and the valve head is controlled to move to control the closing and opening of the utility model;
valve seat: the upper side surface of the valve seat is provided with an installation groove, and the connecting block is fixed in the installation groove;
a clamping unit: the clamping unit is arranged in the valve seat;
wherein: the smoke exhaust valve further comprises a PLC, an installation block, an infrared transmitter, an infrared receiver, a smoke generator, a second connecting pipe and a smoke sensor, wherein the PLC is installed on the front side face of the connecting box, the installation block is located inside the connecting box, the installation block is fixed on the circumferential face of the valve rod, the infrared transmitter is installed on the right side face of the installation block, the infrared receiver is installed on the right side wall of the connecting box, the smoke sensor is installed on the right side inside the valve seat, the second connecting pipe is installed on the circumferential face of the left side of the valve seat and communicated with the inner cavity of the valve seat, one end, far away from the valve seat, of the second connecting pipe is fixed in the output port of the smoke generator, the input end of the PLC is electrically connected with the output end of an external power supply, and the output end of the PLC is electrically connected with the input ends, the PLC controller is respectively in bidirectional electric connection with the infrared receiver and the smoke sensor, and generates smoke through the smoke generator.
Further, the joint unit contains fixed plate, first connecting plate, second connecting plate and draw-in groove, fixed plate, first connecting plate and second connecting plate are all fixed in the inside of disk seat, the downside of first connecting plate is fixed at the side of going up of fixed plate, the downside at the fixed plate is fixed to the side of going up of second connecting plate, the draw-in groove has been seted up at the middle part of fixed plate, the draw-in groove cooperatees with the valve head.
Further, still include electric telescopic handle and fixture block, install electric telescopic handle on the periphery of disk seat, the fixture block is located the inside of disk seat, electric telescopic handle's flexible arm is fixed on the downside of fixture block, the fixture block corresponds with the second connecting pipe each other, the output of PLC controller is connected to electric telescopic handle's input electricity, makes through setting up the fixture block the utility model discloses the processing procedure gas can not get into the second connecting pipe in the course of the work.
Further, still include the LED lamp, the LED lamp is provided with two, and two LED lamps are installed at the leading flank of connecting block, the output of PLC controller is connected to the input electricity of LED lamp, reminds the staff through setting up the LED lamp.
Further, still include the intake pipe, the side-mounting of going up of install bin has the intake pipe, the intake pipe communicates with each other with the inner chamber of install bin, makes compressed air can get into the inside of install bin through setting up the intake pipe.
Compared with the prior art, the beneficial effects of the utility model are that: the pneumatic valve detection device has the following advantages:
when the air tightness of the utility model needs to be detected, the electric telescopic rod is controlled to work by the PLC controller, the electric telescopic rod drives the clamping block to move downwards, the clamping block moves downwards to open the second pipeline, then the smoke generator is controlled to work by the PLC controller, the smoke generator works to generate smoke, the generated smoke enters the interior of the valve seat through the second pipeline, when the utility model is not completely closed, the smoke sensor can sense the smoke generated by the smoke generator, the smoke sensor senses the smoke and then sends a signal to the PLC controller, the PLC controller receives the signal and then controls the work of the left LED lamp to remind the worker that the utility model is not completely closed, when the utility model is completely opened, the infrared receiver can receive the signal emitted by the work of the infrared emitter, and the infrared receiver receives the signal and then sends the signal to the PLC controller, the LED lamp work on PLC controller received signal back control right side, works as the utility model discloses the LED lamp stop work on right side when not opening completely to can remind the staff the utility model discloses do not open completely, can be effectual right through above device the utility model discloses an operating condition detects.
Drawings
FIG. 1 is a schematic front side view of the present invention;
fig. 2 is a schematic diagram of the mobile unit structure of the present invention;
fig. 3 is a rear sectional view of the present invention;
fig. 4 is an enlarged view of the position a of the present invention.
In the figure: 1 install bin, 2 diaphragms, 3 fixed blocks, 4 mobile unit, 41 first connecting pipes, 42 connecting bins, 43 connecting blocks, 44 valve rods, 45 springs, 46 valve heads, 5 joint units, 51 fixed plates, 52 first connecting plates, 53 second connecting plates, 54 draw-in grooves, 6PLC controller, 7 valve seats, 8 installation blocks, 9 infrared emitter, 10 infrared receiver, 11 smoke generator, 12 second connecting pipes, 13 smoke inductor, 14 electric telescopic rod, 15 clamping blocks, 16 LED lamps, 17 intake pipes.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: a pneumatic valve detection device comprises an installation box 1, a moving unit 4, a clamping unit 5 and a valve seat 7;
installation box 1: a diaphragm 2 is arranged in the installation box 1, and a fixed block 3 is arranged on the lower side surface of the diaphragm 2;
the mobile unit 4: the mobile unit 4 comprises a first connection pipe 41, a connection box 42, a connection block 43, valve rod 44, spring 45 and valve head 46, first connecting pipe 41 is installed to the downside of installation box 1, the lower terminal surface of first connecting pipe 41 is installed on the upper side of connecting box 42, installation box 1, first connecting pipe 41 communicates with connecting box 42, connecting block 43 is installed to the downside of connecting box 42, the through-hole has been seted up at the middle part of connecting block 43, the through-hole communicates with connecting box 42, the inside sliding connection of through-hole has valve rod 44, the up end of valve rod 44 is fixed on the lower terminal surface of fixed block 3, spring 45 has been cup jointed on the periphery of valve rod 44, the upper end of spring 45 is fixed on the lower terminal surface of fixed block 3, the lower extreme of spring 45 is fixed on the upper side of connecting box 42, be fixed with valve head 46 on the lower terminal surface of valve rod 44, move through control valve head 46 and control the utility model;
valve seat 7: an installation groove is formed in the upper side face of the valve seat 7, and the connecting block 43 is fixed in the installation groove;
the clamping unit 5: the clamping unit 5 is installed inside the valve seat 7, the clamping unit 5 comprises a fixing plate 51, a first connecting plate 52, a second connecting plate 53 and a clamping groove 54, the fixing plate 51, the first connecting plate 52 and the second connecting plate 53 are all fixed inside the valve seat 7, the lower side surface of the first connecting plate 52 is fixed on the upper side surface of the fixing plate 51, the upper side surface of the second connecting plate 53 is fixed on the lower side surface of the fixing plate 51, the clamping groove 54 is formed in the middle of the fixing plate 51, and the clamping groove 54 is matched with the valve head 46;
wherein: the smoke alarm device further comprises a PLC (programmable logic controller) 6, a mounting block 8, an infrared emitter 9, an infrared receiver 10, a smoke generator 11, a second connecting pipe 12 and a smoke sensor 13, wherein the PLC 6 is mounted on the front side surface of the connecting box 42, the mounting block 8 is positioned inside the connecting box 42, the mounting block 8 is fixed on the circumferential surface of the valve rod 44, the infrared emitter 9 is mounted on the right side surface of the mounting block 8, the infrared receiver 10 is mounted on the right side wall of the connecting box 42, the smoke sensor 13 is mounted on the right side inside the valve seat 7, the second connecting pipe 12 is mounted on the circumferential surface on the left side of the valve seat 7, the second connecting pipe 12 is communicated with the inner cavity of the valve seat 7, one end, far away from the valve seat 7, of the second connecting pipe 12 is fixed in an output port of the smoke generator 11, the input end of the PLC 6 is electrically connected with the output end of an external, the PLC controller 6 is electrically connected to the infrared receiver 10 and the smoke sensor 13 in both directions, respectively, and generates smoke by the smoke generator 11.
Wherein: still include electric telescopic handle 14 and fixture block 15, install electric telescopic handle 14 on the periphery of disk seat 7, fixture block 15 is located disk seat 7's inside, and electric telescopic handle 14's flexible arm is fixed on fixture block 15's downside, and fixture block 15 corresponds each other with second connecting pipe 12, and PLC controller 6's output is connected to electric telescopic handle 14's input electricity, makes through setting up fixture block 15 the utility model discloses the process gas can not get into second connecting pipe 12 in the course of the work.
Wherein: still include LED lamp 16, LED lamp 16 is provided with two, and two LED lamps 16 are installed at the leading flank of connecting block 43, and PLC controller 6's output is connected to the input electricity of LED lamp 16, reminds the staff through setting up LED lamp 16.
Wherein: still include intake pipe 17, the side-mounting has intake pipe 17 on the install bin 1, and intake pipe 17 communicates with each other with the inner chamber of install bin 1, makes compressed air can get into the inside of install bin 1 through setting up intake pipe 17.
When in use: compressed air is introduced into the mounting box 1 through the air inlet pipe 17, the diaphragm 2 moves downwards when the compressed air enters the mounting box 1, the diaphragm 2 moves downwards to drive the valve rod 44 to move downwards, the valve rod 44 moves downwards to drive the valve head 46 to move downwards, when the valve head 46 moves downwards to the inside of the clamping groove 54, the air tightness of the air tightness testing device is closed, when the air tightness testing device needs to be tested, the PLC controller 6 controls the electric telescopic rod 14 to work, the electric telescopic rod 14 works to drive the clamping block 15 to move downwards, the clamping block 15 moves downwards to open the second pipeline 12, then the PLC controller 6 controls the smoke generator 11 to work, the smoke generator 11 works to generate smoke, the generated smoke enters the inside of the valve seat 7 through the second pipeline 12, when the air tightness testing device is not closed completely, the smoke sensor 13 senses the smoke generated by the smoke generator 11, with signal transmission to PLC controller 6 after smog inductor 13 senses smog, PLC controller 6 receives the left LED lamp 16 work of control after the signal, reminds the staff the utility model discloses do not close completely the utility model discloses when opening completely, infrared receiver 10 can receive the signal that infrared emitter 9 work launches, with signal transmission to PLC controller 6 after infrared receiver 10 received the signal, PLC controller 6 receives LED lamp 16 work on signal back control right side, works as the utility model discloses 16 stop work of LED lamp on right side when not opening completely to can remind the staff the utility model discloses do not open completely, can be effectual right through above device the utility model discloses an operating condition detects.
It should be noted that the specific model of the PLC controller 6 disclosed in this embodiment is siemens S7-200, and the PLC controller 6 controls the infrared emitter 9, the smoke generator 11, the electric telescopic rod 14 and the two LED lamps 16 to operate by a method commonly used in the prior art.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. A pneumatic valve detection device is characterized in that: comprises an installation box (1), a moving unit (4), a clamping unit (5) and a valve seat (7);
mounting case (1): a diaphragm (2) is arranged in the mounting box (1), and a fixing block (3) is arranged on the lower side surface of the diaphragm (2);
mobile unit (4): the utility model discloses a valve, including mobile unit (4), installation case (42), connecting block (43), valve rod (44), spring (45) and valve head (46), first connecting pipe (41) are installed to the downside of installation case (1), install on the last side of connecting case (42) lower terminal surface of first connecting pipe (41), installation case (1), first connecting pipe (41) and connecting case (42) communicate with each other, connecting block (43) are installed to the downside of connecting case (42), the through-hole has been seted up at the middle part of connecting block (43), the through-hole communicates with each other with connecting case (42), the inside sliding connection of through-hole has valve rod (44), the up end of valve rod (44) is fixed on the lower terminal surface of fixed block (3), spring (45) have been cup jointed on the periphery of valve rod (44), the upper end of spring (45) is fixed on the lower terminal surface of fixed block (3), the lower end of the spring (45) is fixed on the upper side surface of the connecting box (42), and the lower end surface of the valve rod (44) is fixed with a valve head (46);
valve seat (7): an installation groove is formed in the upper side face of the valve seat (7), and the connecting block (43) is fixed in the installation groove;
clamping unit (5): the clamping unit (5) is arranged in the valve seat (7);
wherein: still include PLC controller (6), installation piece (8), infrared emitter (9), infrared receiver (10), smoke generator (11), second connecting pipe (12) and smoke inductor (13), install on the leading flank of connecting box (42) PLC controller (6), installation piece (8) are located the inside of connecting box (42), install on piece (8) fix the periphery of valve rod (44), install infrared emitter (9) on the right flank of installation piece (8), the right side wall mounting of connecting box (42) has infrared receiver (10), smoke inductor (13) are installed on the inside right side of disk seat (7), install second connecting pipe (12) on the left periphery of disk seat (7), second connecting pipe (12) communicate with each other with the inner chamber of disk seat (7), the one end that disk seat (7) were kept away from to second connecting pipe (12) is fixed at the output of smoke generator (11) In the mouth, the output of external power source is connected to the input electricity of PLC controller (6), the input of infrared emitter (9) and smoke generator (11) is connected to the output electricity respectively of PLC controller (6), PLC controller (6) are connected with infrared receiver (10) and smoke inductor (13) two-way electricity respectively.
2. A pneumatic valve sensing device as set forth in claim 1, further characterized by: clamping unit (5) contain fixed plate (51), first connecting plate (52), second connecting plate (53) and draw-in groove (54), fixed plate (51), first connecting plate (52) and second connecting plate (53) are all fixed in the inside of disk seat (7), the downside of first connecting plate (52) is fixed at the side of going up of fixed plate (51), the downside at fixed plate (51) is fixed to the side of going up of second connecting plate (53), draw-in groove (54) have been seted up at the middle part of fixed plate (51), draw-in groove (54) cooperate with valve head (46).
3. A pneumatic valve sensing device as set forth in claim 1, further characterized by: still include electric telescopic handle (14) and fixture block (15), install electric telescopic handle (14) on the periphery of disk seat (7), fixture block (15) are located the inside of disk seat (7), electric telescopic handle's (14) flexible arm is fixed on the downside of fixture block (15), fixture block (15) and second connecting pipe (12) correspond each other, the output of PLC controller (6) is connected to electric telescopic handle's (14) input electricity.
4. A pneumatic valve sensing device as set forth in claim 1, further characterized by: still include LED lamp (16), LED lamp (16) are provided with two, and the leading flank at connecting block (43) is installed in two LED lamps (16), the output of PLC controller (6) is connected to the input electricity of LED lamp (16).
5. A pneumatic valve sensing device as set forth in claim 1, further characterized by: still include intake pipe (17), intake pipe (17) are installed to the side of going up of install bin (1), intake pipe (17) communicate with each other with the inner chamber of install bin (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921394022.5U CN210397878U (en) | 2019-08-26 | 2019-08-26 | Pneumatic valve detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921394022.5U CN210397878U (en) | 2019-08-26 | 2019-08-26 | Pneumatic valve detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210397878U true CN210397878U (en) | 2020-04-24 |
Family
ID=70338225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921394022.5U Active CN210397878U (en) | 2019-08-26 | 2019-08-26 | Pneumatic valve detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210397878U (en) |
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2019
- 2019-08-26 CN CN201921394022.5U patent/CN210397878U/en active Active
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