CN210379000U - Long-movement-stroke push-pull boat mechanism - Google Patents
Long-movement-stroke push-pull boat mechanism Download PDFInfo
- Publication number
- CN210379000U CN210379000U CN201921385312.3U CN201921385312U CN210379000U CN 210379000 U CN210379000 U CN 210379000U CN 201921385312 U CN201921385312 U CN 201921385312U CN 210379000 U CN210379000 U CN 210379000U
- Authority
- CN
- China
- Prior art keywords
- guide rail
- screw
- pitching
- machine body
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Transmission Devices (AREA)
Abstract
The utility model discloses a long movement stroke push-and-pull boat mechanism, its basic structure includes: a body; a slide base; a vertical sliding table; a pitch mechanism; a cantilever; a first driving device; a second driving device; and a third driving device. According to the utility model discloses a long movement stroke push-and-pull boat mechanism can adapt to load to the support relative level of messenger's quartz boat for example.
Description
Technical Field
The utility model relates to a push-and-pull boat mechanism.
Background
The push-pull boat mechanism is mainly used for loading and unloading materials of a quartz boat in a vacuum furnace, for example, the quartz boat for a solar cell silicon wafer is specified by the industry standard JC/T2065 and 2011, the required size precision of the quartz boat is high, and an individual is relatively large, so that the load of the push-pull boat mechanism for taking and placing materials is relatively large.
One of the push-pull boat mechanisms is called a cantilever type push-pull boat mechanism, typically, as in chinese patent document CN102061456A, which discloses a cantilever type push-pull boat system for a PECVD apparatus, the system includes a cantilever rod mechanism, a side connecting mechanism and a rolling linear guide sleeve pair mechanism, the rolling linear guide sleeve pair mechanism for guiding horizontal movement and vertical movement of the cantilever rod mechanism is disposed on a frame of a PECVD apparatus, and the cantilever rod mechanism is fixed on the side connecting mechanism. Because the cantilever rod is relatively long, even if no load exists, the cantilever rod can generate natural deflection deformation, and after the load is carried, the weight of the end of the cantilever rod is not less than 25kg (medium load), and the end of the cantilever rod has obvious sagging and obviously does not adapt to the relevant specification requirements.
The push-pull boat mechanism suitable for medium load belongs to a long-motion stroke push-pull boat mechanism, and the working stroke of the push-pull boat mechanism is usually more than 2 m. To increase the stiffness of the cantilevered beam, in some implementations, thickening the cantilevered beam to increase the overall stiffness inevitably results in a more bulky cantilevered beam.
In some implementations, additional supports are provided both inside and outside the furnace for holding the quartz boats relatively level after the cantilever bars are loaded with, for example, quartz boats. However, because of the different loads, the support height of the additional supports is often fixed, and the level difference inevitably occurs when the cantilever rod end transitions between two additional supports, and if the loads are exactly the same each time, the fixed level difference can be set between the additional supports, however, in actual production it is not possible to achieve the same load each time, or even a large difference. The presence of the step makes it possible for the rod end to interfere with the movement of the additional support and not to advance any further. If the additional support with adjustable height is arranged, the difficulty of the whole arrangement is inevitably increased, and particularly the additional support positioned in the furnace is influenced by the environment in the furnace and is not easily configured into a movable structure.
In addition, since the push-pull boat mechanism needs to travel as a whole, the additional support needs to be arranged to avoid the movable mechanical part of the push-pull boat mechanism, so that the additional support is relatively difficult to arrange.
Disclosure of Invention
In view of the above, it is an object of the present invention to provide a long movement stroke push-pull boat mechanism capable of adapting to a load so as to make a support of, for example, a quartz boat relatively horizontal.
In an embodiment of the present invention, a long motion stroke push-pull boat mechanism is provided, the basic structure of which includes:
the machine body is provided with a machine body guide rail which is a horizontal linear guide rail;
the sliding seat is matched with the machine body guide rail to form a machine body guide rail pair, a vertical frame is arranged on the sliding seat, and a lifting guide rail is arranged on the vertical frame and is a vertical linear guide rail;
the vertical sliding table is matched with the lifting guide rail to form a lifting guide rail pair;
the pitching mechanism is arranged on the vertical sliding table and is provided with a pitching output component;
the cantilever is arranged on the pitching output component, is suspended in the extending direction of the machine body guide rail and can be driven by the pitching mechanism to perform pitching adjustment;
the first driving device is used for driving the sliding seat to run along the machine body guide rail;
the second driving device is used for driving the vertical sliding table to run along the lifting guide rail; and
and the third driving device is used for driving the pitching mechanism to do pitching motion.
Optionally, the long-stroke boat-pushing and pulling mechanism further includes:
the screw rod of the screw nut screw mechanism is parallel to the guide rail of the machine body, and the nut of the screw nut screw mechanism is arranged on the sliding seat;
the feedback unit is used for detecting the current position of the nut; and
and the first motor or the first motor reducer is used for output connection of the screw nut and screw rod mechanism.
Optionally, the feedback unit is a grating scale installed on one side of the lead screw or a rotary encoder located at one end of the lead screw.
Optionally, the nut-screw mechanism is configured to:
the screw nut lead screw mechanism is positioned between two linear guide rails forming a guide rail of the machine body; or
The two-nut screw mechanism is respectively arranged outside two linear guide rails forming the guide rail of the machine body; correspondingly, the two nut screw mechanisms are synchronized through a synchronizing mechanism.
Optionally, the synchronization mechanism comprises:
the transmission shaft is driven by the first motor or the first motor reducer;
the output gears are respectively arranged at two ends of the transmission shaft;
and the driven gear is arranged at the rod end of the corresponding lead screw and is meshed with the output gear on the side of the driven gear.
Optionally, the cantilever is mounted on the vertical sliding table through a rotating shaft, and the corresponding pitching mechanism has:
the first structure: a large gear is arranged on the rotating shaft, a pitching output component of the pitching mechanism is a small gear meshed with the large gear, and the transmission ratio of a gear set formed by the large gear and the small gear is not less than 7;
a second structure: the cantilever extends backwards from the rotating shaft to form a tail section; the output member of the pitch mechanism is a cam that engages the tail section.
Optionally, the third driving device is a driving device of a motor matching with a pitch reducer, and an output shaft of the pitch reducer or an on-shaft part on the output shaft forms the pitch output component.
Optionally, the electric machine distributed by the third driving device is an electric machine with a band-type brake.
Optionally, the second driving device is a motor-driven screw mechanism.
Optionally, a limit sensor for determining the maximum up-and-down stroke of the vertical sliding table is arranged on the sliding seat.
According to the utility model discloses long movement stroke push-and-pull boat mechanism, it possesses that conventional push-and-pull boat mechanism possesses horizontal migration is vice and vertical removal is vice, is different from prior art, and it still has a every single move guiding mechanism for the angle of elevation of adjustment cantilever. When the cantilever is loaded with a quartz boat, the elevation angle of the cantilever can be changed by driving the elevation adjusting mechanism, and the deflection deformation generated after the cantilever is loaded is balanced. The structure does not need to be provided with an additional supporting structure, and movement interference cannot be caused. In particular, since the deflection of the pivot arm can be balanced by adjusting the angle of rotation of the base end, i.e., the mounting end, of the cantilever, the presence of the balance can effectively reduce the weight of the pivot arm itself, making the structure more compact.
Drawings
Fig. 1 is a schematic perspective view of a long-stroke boat-pushing and-pulling mechanism in one embodiment.
FIG. 2 is a schematic top view of the long stroke boat pushing and pulling mechanism in one embodiment.
FIG. 3 is a schematic left view of the long stroke boat pushing and pulling mechanism in one embodiment.
FIG. 4 is a schematic front view of the boat pushing and pulling mechanism with a long movement stroke according to an embodiment.
In the figure: 1. the lifting mechanism comprises a sliding seat, 2, a first motor, 3, an encoder, 4, a coupler, 5, a nut, 6, a lead screw, 7, a bottom plate, 8, a machine body guide rail, 9, a cantilever, 10, a vertical frame, 11, a seat part, 12, a pitching speed reducer, 13, a second motor, 14, a third motor, 15, a lifting lead screw, 16, a lifting guide rail, 17, a limit switch, 18, a cam shaft, 19, a synchronous belt wheel, 20, a synchronous belt wheel and 21, and a cam.
Detailed Description
In order to realize the basic furnace inlet and outlet operation, the push-pull boat mechanism has a driving direction adaptive to the inlet and outlet direction of the furnace opening, and meanwhile, in order to ensure the stability of the inlet and outlet of the furnace, a guide rail is generally used for guiding. Adapted to the structure shown in fig. 1, a machine body guide rail 8 mounted on the base plate 7 guides the part carrying the boom 9 by means of a guide rail pair.
The motion stroke of the long motion stroke is more than or equal to 2m, the cantilever 9 is relatively long, the longer the cantilever 9 is suspended, the larger the torque generated by the suspended end of the cantilever 9 under the condition of bearing the same load, the larger the deflection deformation of the cantilever 9, and the influence on the entrance and exit of a quartz boat and the placement in a furnace is caused.
The deflection of the cantilever 9 inevitably causes the loading surface of, for example, a quartz boat to tilt, in an embodiment of the invention, by adjusting the elevation angle of the cantilever 9, the tilt of, for example, a quartz boat is balanced.
The machine body, illustrated in fig. 1 as a bottom plate 7, ensures the reliability of the foundation, and is shown as an integral plate body to eliminate or reduce the problem of poor accuracy of the site foundation.
Two linear guides are mounted on the bottom plate 7, forming a body guide 8 as shown in fig. 1, it being apparent that the direction of arrangement of the body guide 8 is adapted to the furnace mouth, in a horizontal direction, for guiding the part carrying the cantilever 9, which horizontal direction is the main direction, enabling loading and unloading.
The guide rail pair has high precision and is a main part for guiding in the field of current precision machinery.
The basic structures forming the guide rail pair are a guide rail and a slide block.
It can be understood that the sliding friction between the guide rail and the sliding block is in the field of precision machinery, and in some applications, the sliding block is matched with a rail wheel, so that the influence of the fit clearance between the roller wheel and the rail on the guiding precision is reduced through pre-tightening.
The sliding block adapted to the body guide rail 8 is the sliding base 1 shown in fig. 1, the sliding base 1 can be understood as a seat, and should have a certain weight to prevent the cantilever 9 from overturning after bearing a quartz boat, for example, and if the seat is relatively simple, a counterweight can be installed to ensure the stability of the whole body.
Besides the stroke of the cantilever 9 in the furnace entering and exiting direction, the cantilever also needs to be matched with a lifting mechanism, and is suitable for adjusting the position of the cantilever 9 in the vertical direction.
The boom 9 has an adjustment in a two-dimensional vertical plane on the basis of the body guide 8 and the lifting guide 16 perpendicular to the body guide 8, whereby a reference plane is determined two-dimensionally, which is a vertical plane. Hereinafter, the direction perpendicular to the reference plane is the left-right direction.
Correspondingly, a vertical frame 10 is provided, which is mounted on the slide 1, and the vertical frame 10 is used as a mounting base body of the lifting guide rail 16, and is fixedly connected with the slide by welding or bolts.
With respect to linear guides, which are typically bolted or screwed to a given mounting base, likewise, the body guide 8 and the lift guide 16 are also bolted or screwed to the respective bases in the preferred embodiment.
The screw holes adapted to the body guide rail 8 on the bottom plate 7 are relatively clear, that is, circular primitives distributed in the extending direction of the body guide rail 8 in the figure.
Likewise, the lift rail 16 is also preferably mounted to the stand 10 as shown in FIG. 1 using screws or bolts.
In some embodiments, the lift rail 16 and the body rail 8 may be mounted on the respective bases using, for example, rail clips.
In some embodiments, the linear guides may be mounted to the respective substrates by welding.
Further, a vertical slide table, such as the seat 11 shown in fig. 1, is provided, both ends of which in the left-right direction cooperate with the elevation guide rails 16 at the respective ends to form an elevation guide rail pair, and the suspension arm 9 is mounted on the seat 11.
The mounting of the boom 9 and the seat 11 is by means of a rotating shaft, the axis of which is perpendicular to the reference plane, i.e. arranged in the left-right direction.
It should be noted that the amount of deformation of the arm 9 is not large, and therefore, the range of the rotation angle to which the arm 9 is fitted by the rotation shaft is not large, and even in the case of a long-stroke push-pull mechanism, the range of the rotation angle to be fitted is less than 5 degrees, although the corresponding arm 9 is relatively long.
Furthermore, it will be appreciated that for some relatively less stiff cantilevers 9, the corresponding deflection is relatively large, and the angular extent of the cantilever 9 can be adjusted.
In contrast, the cantilever 9 is constrained in its rotation angle range by a constraint structure, and ideally, the cantilever 9 is kept horizontal and parallel to the machine body guide rail 8. It will be appreciated that the cantilever 9 itself has a certain weight, plus for example the weight of the quartz boat it carries and the articles it carries, in which case the cantilever 9 may have an initial elevation angle relative to the horizontal, which is set according to the stiffness of the cantilever 9 itself.
In the preferred embodiment, the initial elevation angle of the cantilever 9 is 0.5-1.5 degrees.
Suitably, a pitching mechanism is provided which is mounted on the vertical slide, i.e. on the seat 11 as shown in fig. 1. The output member of the pitch mechanism is used for mounting of the boom 9.
The two linear guide rail pairs, i.e. the linear guide rail pair formed by the machine body guide rail 8 and the sliding seat 1 and the linear guide rail pair formed by the lifting guide rail 16 and the seat part 11, have the basic motion form of linear motion. Whereas for pitch motion the motion is in the form of rotation. Above two kinds of motion forms all belong to the most basic motion in mechanical field, relatively speaking, two linear guide pair requirements to the motion precision are than higher, likewise in the embodiment of the utility model, also relatively higher to the motion precision requirement of pitch motion, borrow this, technical personnel in the field have the motivation to select suitable the first drive arrangement who is used for driving slide 1 along organism guide rail 8 operation, the second drive arrangement that the slip table was followed along the riser guide operation to and the third drive arrangement that pitch motion was done to the drive pitching mechanism.
As mentioned above, the two linear guide pairs require relatively high precision in movement, and therefore, in a preferred embodiment, the first driving device comprises:
a nut screw mechanism, such as that shown in fig. 1, in which a screw 6 is engaged with a nut 5 (i.e., a screw nut). Wherein the threaded spindle 6 is parallel to the body guide 8 and wherein the nut 5 is mounted on the slide 1.
The nut screw mechanism is a common driving mechanism on a numerical control machine tool and has high motion precision. A ball screw mechanism is preferred in some embodiments.
The nut-screw mechanism may be controlled with precision using basic purely mechanical control, for example controlling the adapted number of revolutions of a first motor 2 as shown in fig. 1, the first motor 2 being a servo motor or a stepper motor.
In some embodiments, a feedback unit may be provided for detecting the current position of the nut, based on closed-loop control, and the first motor 2 is deactivated after the target position is reached.
The first motor 2 can be matched with a speed reducer, and the first motor 2 and the speed reducer can form an integrated machine, namely, a first motor speed reducer is formed.
When closed-loop control is adopted, a grating ruler can be arranged on one side of the machine body guide rail 8, an encoder 3 can also be configured at the end part of the lead screw 6, and correspondingly, the encoder 3 is a rotary encoder.
With regard to the configuration of the screw nut mechanism, in some embodiments, the nut screw machine may be provided with only one nut screw mechanism located between two linear rails constituting the body rail 8, whereby the additional load generated by the linear rails is relatively small.
In some embodiments, the two-nut screw mechanism is used for driving, and the two-nut screw mechanism is respectively arranged outside the two linear guide rails forming the machine body guide rail 8; correspondingly, the two nut screw mechanisms are synchronized through a synchronizing mechanism.
In some embodiments, the synchronization mechanism comprises:
the transmission shaft is driven by the first motor or the first motor reducer, and the transmission shaft is a rigid shaft and can adopt a tubular shaft, for example. Two ends of the transmission shaft are respectively provided with an output gear which can be a bevel gear.
The drive shaft may be mounted with a pair of bevel gears to the motor shaft of, for example, the first motor, wherein the drive shaft is mounted on the base plate 7 through bearings in a direction perpendicular to the body guide rail 8.
The transmission shaft may be provided with two half shafts located on the left and right sides of the shaft of the first motor 2.
Correspondingly, a driven gear, which is suitably a bevel gear, is provided on the spindle 6, which is in engagement with the output gear on the side thereof.
As mentioned above, in some embodiments, the boom 9 is mounted on the skid via a pivot, so that it has a corresponding pitch capability and, as mentioned above, its range of rotation can be constrained. It will be appreciated that the angular range may be limited by mechanical means, for example, by providing mechanical blocking members at two stops of the angular range.
In some embodiments, a gear wheel is mounted on the rotating shaft, the pitching output member of the pitching mechanism is a pinion gear meshed with the gear wheel, and the gear ratio of a gear set formed by the gear wheel and the pinion gear is not less than 7, so as to obtain a good jogging effect, that is, the pinion gear with a higher rotating speed makes the angular speed of the gear wheel meshed with the pinion gear relatively smaller.
In some embodiments, the cantilever arm 8 extends rearward from the axis of rotation to form a tail section; the output member of the pitch mechanism is a cam 21, and the cam 21 is engaged with the tail section.
The cantilever arm 8 and the cam 21 are connected by a high pair, for example, a roller is arranged at the tail end of the cantilever arm 8, and a cam groove is formed on the cam 21, and the roller runs in the cam groove.
In some embodiments, the third drive is a motor-driven drive that cooperates with the pitch reducer 12, and the output shaft of the pitch reducer 12 or an on-shaft feature on the output shaft constitutes the pitch output member.
In order to avoid the sudden sagging of the boom 9, the motor distributed by the third driving device is a motor with a band-type brake.
The motor distributed by the third driving device can be also matched with a self-locking RV reducer.
In addition, the second driving device is a screw nut and screw mechanism driven by a motor.
The sliding base 1 is provided with a limit sensor, such as a limit switch 17 shown in fig. 2, for determining the maximum up-and-down stroke of the vertical sliding table.
Claims (10)
1. A long motion stroke push-pull boat mechanism, characterized by that includes:
the machine body is provided with a machine body guide rail which is a horizontal linear guide rail;
the sliding seat is matched with the machine body guide rail to form a machine body guide rail pair, a vertical frame is arranged on the sliding seat, and a lifting guide rail is arranged on the vertical frame and is a vertical linear guide rail;
the vertical sliding table is matched with the lifting guide rail to form a lifting guide rail pair;
the pitching mechanism is arranged on the vertical sliding table and is provided with a pitching output component;
the cantilever is arranged on the pitching output component, is suspended in the extending direction of the machine body guide rail and can be driven by the pitching mechanism to perform pitching adjustment;
the first driving device is used for driving the sliding seat to run along the machine body guide rail;
the second driving device is used for driving the vertical sliding table to run along the lifting guide rail; and
and the third driving device is used for driving the pitching mechanism to do pitching motion.
2. The long motion stroke push-pull boat mechanism of claim 1, wherein said first drive means comprises:
the screw rod of the screw nut screw mechanism is parallel to the guide rail of the machine body, and the nut of the screw nut screw mechanism is arranged on the sliding seat;
the feedback unit is used for detecting the current position of the nut; and
and the first motor or the first motor reducer is used for output connection of the screw nut and screw rod mechanism.
3. The long motion stroke push-pull boat mechanism of claim 2, wherein the feedback unit is a grating scale installed on one side of the lead screw or a rotary encoder located at one end of the lead screw.
4. The long motion stroke push-pull boat mechanism of claim 2, wherein the nut screw mechanism is configured to:
the screw nut lead screw mechanism is positioned between two linear guide rails forming a guide rail of the machine body; or
The two-nut screw mechanism is respectively arranged outside two linear guide rails forming the guide rail of the machine body; correspondingly, the two nut screw mechanisms are synchronized through a synchronizing mechanism.
5. The long motion stroke push-pull boat mechanism of claim 4 wherein the synchronization mechanism comprises:
the transmission shaft is driven by the first motor or the first motor reducer;
the output gears are respectively arranged at two ends of the transmission shaft;
and the driven gear is arranged at the rod end of the corresponding lead screw and is meshed with the output gear on the side of the driven gear.
6. The long motion stroke push-pull boat mechanism of claim 1 wherein the suspension arm is mounted on the vertical slide by a pivot, the corresponding pitch mechanism having:
the first structure: a large gear is arranged on the rotating shaft, a pitching output component of the pitching mechanism is a small gear meshed with the large gear, and the transmission ratio of a gear set formed by the large gear and the small gear is not less than 7;
a second structure: the cantilever extends backwards from the rotating shaft to form a tail section; the output member of the pitch mechanism is a cam that engages the tail section.
7. The long motion stroke push-pull boat mechanism of claim 6, wherein the third driving means is a motor coupled to a pitch reducer, the pitch output member being formed by an output shaft of the pitch reducer or an on-shaft component on the output shaft.
8. The long travel push-pull boat mechanism of claim 7, wherein the motor of the third driving device is a motor with a brake.
9. The long motion stroke push-pull boat mechanism of claim 1 wherein said second drive means is a motor driven screw lead mechanism.
10. The long travel push-pull boat mechanism of claim 1 wherein the slide carriage has a limit sensor for determining the maximum vertical travel of the slide carriage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921385312.3U CN210379000U (en) | 2019-08-26 | 2019-08-26 | Long-movement-stroke push-pull boat mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921385312.3U CN210379000U (en) | 2019-08-26 | 2019-08-26 | Long-movement-stroke push-pull boat mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210379000U true CN210379000U (en) | 2020-04-21 |
Family
ID=70252647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921385312.3U Active CN210379000U (en) | 2019-08-26 | 2019-08-26 | Long-movement-stroke push-pull boat mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210379000U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114613707A (en) * | 2022-03-11 | 2022-06-10 | 北京北方华创微电子装备有限公司 | Wafer boat bearing device, paddle arm position adjusting method and semiconductor process equipment |
-
2019
- 2019-08-26 CN CN201921385312.3U patent/CN210379000U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114613707A (en) * | 2022-03-11 | 2022-06-10 | 北京北方华创微电子装备有限公司 | Wafer boat bearing device, paddle arm position adjusting method and semiconductor process equipment |
| CN114613707B (en) * | 2022-03-11 | 2024-04-16 | 北京北方华创微电子装备有限公司 | Wafer boat bearing device, paddle arm position adjusting method and semiconductor process equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102042792B (en) | Electric lifting stator inner cavity cyclometer | |
| CN102022990B (en) | Large gear measuring instrument | |
| CN210379000U (en) | Long-movement-stroke push-pull boat mechanism | |
| CN106006459A (en) | Compact small precise lifter | |
| CN103353368A (en) | Torque test platform | |
| CN207915209U (en) | A kind of bull metal composite plate-polishing machine | |
| CN102267049A (en) | Automatic bolt tightening device | |
| CN116871615B (en) | Large taper mechanism with balance adjusting function | |
| CN109269605A (en) | A kind of organic waste weighing-appliance of the high reliablity with cleaning function | |
| JP2000153994A (en) | Elevation positioning device | |
| CN109129427B (en) | Plane parallel mechanism device driven by double five-rod mechanism and control method | |
| CN110039443A (en) | A kind of main shaft proceeding equipment of biplane grinding machine | |
| JPH1148064A (en) | Table elevating and sinking device | |
| CN214470806U (en) | Image scanning system based on CIS linear array | |
| CN104668875A (en) | Axial-float controllable cylinder flaw detecting and welding roller carrier | |
| CN201960838U (en) | Printing platform lifting device for flat plate printer | |
| CN111634688B (en) | Electric cylinder lifting device and ceramic tile conveying device | |
| CN209273985U (en) | One kind manually adjusting 3D printer workbench rotating lifting gear | |
| CN209830895U (en) | High-precision large-diameter shaft workpiece supporting sliding table | |
| CN209061992U (en) | A kind of equipment with plate and adjustable plate discharge position function is helped | |
| CN220119029U (en) | Force control displacement platform with adjustable verticality and angle | |
| CN208147801U (en) | Parallel adjustable self-powered platform | |
| CN112173544A (en) | Conveying roller lifting device for automobile part conveying line | |
| CN115839966A (en) | Spectrometer mechanical support platform | |
| CN111922091A (en) | Method for adjusting side support stress of eighteen-roller rolling mill |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 250101 area a, building 13, Sino German Industrial Park, 8 Zidong Avenue, Tianqiao District, Jinan City, Shandong Province Patentee after: Shandong Liguan microelectronics equipment Co., Ltd Address before: 250119 Shandong Province Flyover District of Ji'nan City Shun Hing Sangzi Town Road No. 66 Ji'nan new materials industry science and Technology Park Building 1, 1 floor West Patentee before: JINAN LIGUAN ELECTRONIC TECHNOLOGY Co.,Ltd. |