CN210341123U

CN210341123U - Water-cooling heat shield device and single crystal furnace with same

Info

Publication number: CN210341123U
Application number: CN201921071816.8U
Authority: CN
Inventors: 包娜娜; 关树军; 陈辉
Original assignee: Beijing Tianneng Yuntong Crystal Technology Co ltd
Current assignee: Beijing Tianneng Yuntong Crystal Technology Co ltd
Priority date: 2019-07-09
Filing date: 2019-07-09
Publication date: 2020-04-17
Anticipated expiration: 2029-07-09

Abstract

The application relates to a water-cooling heat shield device and a single crystal furnace with the same, wherein the water-cooling heat shield device comprises a water inlet pipe, a water outlet pipe, a water-cooling heat shield body, a first bearing block group and a second bearing block group; the first bearing block group comprises a first bearing block and a second bearing block which are used for suspending a first thermal field device of the single crystal furnace; the first bearing block is fixedly arranged on the pipe surface of one side of the water inlet pipe, which is adjacent to the water-cooling heat shield body, and the second bearing block is fixedly arranged on the pipe surface of one side of the water outlet pipe, which is adjacent to the water-cooling heat shield body; the second bearing block group comprises a third bearing block and a fourth bearing block which are used for suspending a second thermal field device of the single crystal furnace; the third bearing block is positioned on the first bearing block and is detachably connected with the first bearing block; the fourth bearing block is positioned on the second bearing block and is detachably connected with the second bearing block. The first thermal field device is installed through the first bearing block group in a hanging mode, and the second thermal field device is installed through the second bearing block group in a hanging mode, so that the flexibility of the water-cooling heat shield device is effectively improved.

Description

Water-cooling heat shield device and single crystal furnace with same

Technical Field

The disclosure relates to the technical field of semiconductor process equipment, in particular to a water-cooling heat shield device and a single crystal furnace with the same.

Background

Along with the continuous development of global photovoltaic market demands, domestic production capacity continues, and the reduction of the production cost of monocrystalline silicon is increasingly urgent. Under the background, a water-cooling heat shield device for monocrystalline silicon is urgently needed, which can not only improve the pulling speed, but also fully utilize the repeated feeding and multiple charging to save time and improve the efficiency.

The existing water-cooling heat shield can only be applied to one heat field generally, and the applicability is single.

Disclosure of Invention

In view of this, the present disclosure provides a water-cooling heat shield device, which is compatible with at least two different thermal fields, so as to effectively improve the applicability of the water-cooling heat shield device.

According to one aspect of the disclosure, a water-cooling heat shield device is provided, which comprises a water inlet pipe, a water outlet pipe, a water-cooling heat shield body, a first bearing block group and a second bearing block group;

the water-cooling heat shield body is provided with an inner cavity, and a water-cooling pipeline is arranged in the inner cavity;

the water inlet pipe is communicated with a water inlet of the water cooling pipeline, and the water outlet pipe is communicated with a water outlet of the water cooling pipeline;

the first bearing block group comprises a first bearing block and a second bearing block which are used for suspending a first thermal field device of the single crystal furnace;

the first bearing block is fixedly arranged on the pipe surface of the water inlet pipe, which is adjacent to one side of the water-cooling heat shield body, and the second bearing block is fixedly arranged on the pipe surface of the water outlet pipe, which is adjacent to one side of the water-cooling heat shield body;

the second bearing block group comprises a third bearing block and a fourth bearing block which are used for suspending a second thermal field device of the single crystal furnace;

the third bearing block is positioned on the first bearing block and is detachably connected with the first bearing block; the fourth bearing block is positioned on the second bearing block and is detachably connected with the second bearing block.

In a possible implementation manner, the main body of the first bearing block is a rectangular block;

the end surface of the first bearing block, which is connected with the pipe surface of the water inlet pipe on one side adjacent to the water-cooling heat shield body, is provided with a groove;

the groove is clamped on the pipe surface of one side of the water-cooling heat shield body, which is adjacent to the water inlet pipe, and

the edge of the groove is fixedly connected with the pipe surface of the water-cooling heat shield body, which is adjacent to the water inlet pipe.

In a possible implementation manner, the fixed connection manner between the edge of the groove and the pipe surface of the water inlet pipe, which is adjacent to the water-cooling heat shield body, is welding.

In a possible implementation manner, one end of the first bearing block is provided with a first opening; one end of the second bearing block is provided with a second opening;

the first opening and the second opening are both U-shaped;

the first opening and the second opening are respectively suitable for hanging connecting pieces at two ends of the first thermal field device.

In a possible implementation, the orientation of the first opening is opposite to the orientation of the second opening.

In a possible implementation manner, the third bearing block is detachably connected with the first bearing block in a threaded manner;

the fourth bearing block and the second bearing block are detachably connected in a threaded manner.

In a possible implementation manner, the third bearing block is attached to the first bearing block;

one end of the third bearing block is provided with a third opening suitable for hanging the second thermal field device; the other end of the third bearing block is provided with a first screw hole, and the first screw hole is provided with a first bolt;

the first screw hole is communicated with the first opening of the first bearing block, and the third bearing block is fixedly connected with the first bearing block through a nut after the first bolt penetrates through the first screw hole and the first opening.

In a possible implementation manner, the fourth bearing block is attached to the second bearing block; and is

One end of the fourth bearing block is provided with a fourth opening suitable for hanging the second thermal field device; the other end of the fourth bearing block is provided with a second screw hole, and a second bolt is configured in the second screw hole;

the second screw hole is communicated with the second opening of the second bearing block, and the fourth bearing block is fixedly connected with the second bearing block through a nut after the second bolt penetrates through the second screw hole and the second opening.

In a possible implementation manner, the water inlet pipe comprises a first pipe, a second pipe and a third pipe which are communicated in sequence;

connecting pieces are arranged at the connecting angle between the first pipe fitting and the second pipe fitting and the connecting angle between the second pipe fitting and the third pipe fitting;

the water outlet pipe comprises a fourth pipe fitting, a fifth pipe fitting and a sixth pipe fitting;

the connecting angle between the fourth pipe fitting and the fifth pipe fitting, and the connecting angle between the fifth pipe fitting and the sixth pipe fitting are provided with the connecting piece.

According to an aspect of the disclosure, a single crystal furnace is also provided, which includes the water-cooling heat shield device.

The water-cooling heat shield device of the embodiment of the disclosure is characterized in that two sets of bearing blocks (namely, the first bearing block group and the second bearing block group) are arranged, the first bearing block group and the second bearing block group are arranged and detachably connected, the first heat field device is installed in a suspended mode through the first bearing block group, and the second heat field device is installed in a suspended mode through the second bearing block group, so that the water-cooling heat shield device of the embodiment of the disclosure can be compatible with two different heat fields, and the flexibility of the water-cooling heat shield device is effectively improved.

Other features and aspects of the present disclosure will become apparent from the following detailed description of exemplary embodiments, which proceeds with reference to the accompanying drawings.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate exemplary embodiments, features, and aspects of the disclosure and, together with the description, serve to explain the principles of the disclosure.

Fig. 1 is a view showing a main body structure of a water-cooled heat shield apparatus according to an embodiment of the present disclosure;

fig. 2 shows a main structure view of the water-cooled heat shield apparatus according to the embodiment of the present disclosure in a thermal field.

Detailed Description

Various exemplary embodiments, features and aspects of the present disclosure will be described in detail below with reference to the accompanying drawings. In the drawings, like reference numbers can indicate functionally identical or similar elements. While the various aspects of the embodiments are presented in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.

It should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the invention or for simplicity in description, and do not indicate or imply that the device or element so indicated must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments.

Furthermore, in the following detailed description, numerous specific details are set forth in order to provide a better understanding of the present disclosure. It will be understood by those skilled in the art that the present disclosure may be practiced without some of these specific details. In some instances, methods, means, elements and circuits that are well known to those skilled in the art have not been described in detail so as not to obscure the present disclosure.

Fig. 1 shows a schematic structural diagram of a main body of a water-cooling heat shield device according to an embodiment of the present disclosure. As shown in fig. 1, the water-cooled heat shield apparatus 100 includes: the water cooling heat shield comprises a water inlet pipe 110, a water outlet pipe 120, a first bearing block group 130, a second bearing block group 140 and a water cooling heat shield body 150.

Here, it should be noted that, in the water-cooled heat shield apparatus 100 according to the embodiment of the present disclosure, the water-cooled heat shield body 150 has an inner cavity in which a water-cooled pipe (not shown in the drawings) is disposed. The water inlet pipe 110 is communicated with the water inlet of the water cooling pipeline, and the water outlet pipe 120 is communicated with the water outlet of the water cooling pipeline. That is, the water inlet pipe 110, the water cooling pipe and the water outlet pipe 120 are sequentially communicated to form a water cooling circulation loop, thereby performing water cooling treatment on the drawn single crystal rod.

Meanwhile, in the water-cooled heat shield apparatus 100 according to the embodiment of the present disclosure, referring to fig. 2, the first bearing block set 130 includes a first bearing block 131 and a second bearing block 132 for suspending the first thermal field device of the single crystal furnace. The first bearing block 131 is fixedly installed on the pipe surface of the water inlet pipe 110 adjacent to one side of the water-cooled heat shield body 150, and the second bearing block 132 is fixedly installed on the pipe surface of the water outlet pipe 120 adjacent to one side of the water-cooled heat shield body 150. Here, it should be noted that the first thermal field device may be a crucible containing silicon feedstock, the crucible being heated to a first temperature. Moreover, when the first thermal field device is suspended on the first bearing block 131 and the second bearing block 132, the first thermal field device can be implemented by suspending connecting members (e.g., high temperature resistant connecting chains) installed at both sides of the first thermal field device on the first bearing block 131 and the second bearing block 132, respectively.

Referring to fig. 1, the second load bearing block set 140 includes a third load bearing block 141 and a fourth load bearing block 142 for suspending the second thermal field apparatus of the single crystal furnace. The third bearing block 141 is located on the first bearing block 131 and detachably connected to the first bearing block 131; the fourth bearing block 142 is disposed on the second bearing block 132 and detachably connected to the second bearing block 132. Here, it can be understood by those skilled in the art that the second thermal field device may be a crucible containing silicon raw material with the heating temperature set to the second temperature. And, the installation of the second thermal field device on the third bearing block 141 and the fourth bearing block 142 may also be in a manner of connector suspension. That is, the connecting members (e.g., the high temperature-resistant connecting chains) installed at both sides of the second thermal field device are hung on the third bearing block 141 and the fourth bearing block 142, respectively.

Therefore, the water-cooling heat shield device 100 of the embodiment of the present disclosure is configured with two sets of bearing blocks (i.e., the first bearing block set 130 and the second bearing block set 140), and the first bearing block set 130 and the second bearing block set 140 are detachably connected to each other, and the first heat field device is installed in a suspended manner through the first bearing block set 130, and the second heat field device is installed in a suspended manner through the second bearing block set 140, so that the water-cooling heat shield device 100 of the embodiment of the present disclosure can be compatible with two different heat fields, which effectively improves the flexibility of the water-cooling heat shield device 100.

In one possible implementation manner, referring to fig. 1, the water-cooled heat shield device 100 is provided with a water-cooled heat shield body 150 at the lowest part, and the water-cooled heat shield body 150 is in a circular truncated cone shape and has an inner cavity. The inner cavity is surrounded into a hollow structure, the hollow structure is suitable for a pulled single crystal rod to pass through, and therefore when the single crystal rod passes through the hollow structure, the single crystal rod is cooled through a water cooling pipeline in the inner cavity.

One way of placing the truncated cone-shaped water-cooled heat shield body 150 may be a large opening on the top and a small opening on the bottom, and the material may be steel. Two openings (namely, a water inlet and a water outlet) are arranged on two sides of the inner wall and are respectively connected with a water inlet pipe 110 and a water outlet pipe 120, water flows into the inner cavity from the water inlet pipe 110 and then is discharged out of the inner cavity from the water outlet pipe 120 through a water cooling pipeline.

In addition, it should be noted that the guide plate can be placed in the inner cavity of the water-cooling heat shield body 150, and the guide plate enables the retention time of water flow in the inner cavity to be longer, so that the water flow can absorb heat more sufficiently, the cooling speed is increased when the single crystal is pulled, and the production efficiency is improved. Further, in the water-cooling heat shield apparatus 100 according to the embodiment of the disclosure, the water inlet pipe 110 and the water outlet pipe 120 may be made of steel, and are respectively connected to two sides of the inner shield of the water-cooling heat shield main body 150, and the connection manner may be a welding connection and is located above the water-cooling heat shield main body 150. Referring to fig. 1, the water inlet pipe 110 includes a first pipe 111, a second pipe 112, and a third pipe 113. The water outlet pipe 120 includes a fourth pipe 121, a fifth pipe 122, and a sixth pipe 123.

The connection ends of the first and second pipe members 111 and 112 (i.e., the connection angle between the first and second pipe members 111 and 112) may be connected by a connection member 160. Accordingly, the connection ends of the second pipe member 112 and the third pipe member 113 (i.e., the connection angle between the second pipe member 112 and the third pipe member 113) may also be connected by the connection member 160.

When the connection ends of the first pipe 111 and the second pipe 112 are connected by the connection member 160, referring to fig. 1 and 2, the main body of the connection member 160 may be an "L" shaped adaptor block, and the adaptor block is a hollow structure. Therefore, after the pipe orifice at one side of the first pipe 111 is inserted into one end of the connecting piece 160, the first pipe 111 can be fixedly mounted on the connecting piece 160 by welding. Correspondingly, the pipe orifice at one side of the second pipe 112 is inserted into the other end of the connecting member 160 and then fixed by welding.

Similarly, the connection mode when the connection ends of the second pipe element 112 and the third pipe element 113 are connected by the connection element 160, the connection mode when the fourth pipe element 121 and the fifth pipe element 122 are connected by the connection element 160, and the connection mode when the fifth pipe element 122 and the sixth pipe element 123 are connected by the connection element 160 are the same as or similar to the connection mode between the first pipe element 111 and the second pipe element 112, and are not repeated herein.

The connection between each pipe in the water inlet pipe 110 and each pipe in the water outlet pipe 120 is performed by using the connection member 160, so that the structures of the water inlet pipe 110 and the water outlet pipe 120 are effectively simplified, and the installation manner is simple and easy to implement.

Further, in the water-cooled heat shield apparatus 100 according to the embodiment of the disclosure, the first bearing block set 130 includes a first bearing block 131 and a second bearing block 132. The material of the first bearing block 131 and the second bearing block 132 may be steel.

The first bearing block 131 is fixedly installed above the second pipe 112, and the second bearing block 132 is fixedly installed above the second pipe 122 of the water outlet pipe 120, and the connection manner may be welding.

For example, referring to fig. 1, the main body of the first bearing block 131 is a rectangular block. The end surface of the first bearing block 131 connected to the pipe surface of the water inlet pipe 110 adjacent to the water-cooled heat shield body 150 (i.e., the pipe surface of the second pipe 112) is provided with a groove. The concave surface of the groove is matched with the pipe surface of the water inlet pipe 110 adjacent to one side of the water-cooling heat shield body 150.

Wherein, the groove is clamped on the pipe surface of the water inlet pipe 110 adjacent to one side of the water-cooling heat shield body 150. And the edge of the groove is fixedly connected with the pipe surface of the water inlet pipe 110 adjacent to the water-cooled heat shield body 150. Such as: the edge of the groove and the tube surface of the water inlet tube 110 adjacent to the water-cooled heat shield body 150 can be fixed by welding.

The second bearing block 132 has the same structure as the first bearing block 131. That is, the body of the second bearing block 132 is also configured as a rectangular block. The end surface of the second bearing block 132 connected to the pipe surface of the water outlet pipe 120 adjacent to the water-cooled heat shield body 150 (i.e., the pipe surface of the fifth pipe 122) is provided with a groove, and the groove is matched with the pipe surface of the water outlet pipe 120 adjacent to the water-cooled heat shield body 150. The groove is clamped on the pipe surface of the water outlet pipe 120 adjacent to one side of the water-cooling heat shield body 150. And the edge of the groove is fixedly connected with the pipe surface of the water outlet pipe 120 adjacent to the water-cooling heat shield body 150. Such as: the edge of the groove and the tube surface of the water outlet tube 120 adjacent to the water-cooled heat shield body 150 can be fixed by welding.

A first opening is formed at one end of the first bearing block 131; the second opening has been seted up to the one end of second bearing block 132, and first opening and second opening all are "U" shape, and first opening and second opening can be used for hanging the connecting piece at first thermal field device both ends.

Here, it is to be noted that the orientation of the first opening and the orientation of the second opening may be reversed in order to match the structure of the first thermal field device (i.e., the heating crucible containing the silicon material).

Therefore, when the first thermal field device is mounted on the first bearing block 131 and the second bearing block 132 with the above structure, the connecting member (e.g., the connecting chain) in the first thermal field device can be directly hung on the first opening of the first bearing block 131 and the second opening of the second bearing block 132, and then the first thermal field device and the second thermal field device are fixed. The operation is simple and the realization is easy. Moreover, by arranging the first bearing block 131 and the second bearing block 132 to have the same or similar structures, the same process can be adopted for processing when the first bearing block 131 and the second bearing block 132 are processed, which effectively simplifies the processing process of the first bearing block group 130.

Further, according to the foregoing, in the water-cooled heat shield apparatus 100 according to the embodiment of the present disclosure, the second bearing block group 140 may include the third bearing block 141 and the fourth bearing block 142. It should be noted that the third bearing block 141 and the fourth bearing block 142 have the same structure. For simplicity, the third bearing block 141 is taken as an example, and the implementation thereof will be described in detail below.

Referring to fig. 1, in the water-cooled heat shield apparatus 100 according to the embodiment of the present disclosure, the body of the third bearing block 141 may have a plate-shaped structure. The material can be stainless steel. That is, the third bearing block 141 may be directly implemented using a stainless steel plate. The third bearing block 141 and the first bearing block 131 may be detachably connected by a screw joint.

Specifically, the third bearing block 141 of the plate-shaped structure is attached to the first bearing block 131. One end of the third bearing block 141 is provided with a third opening suitable for suspending a second thermal field device. Meanwhile, a first screw hole is formed in the other end of the third bearing block 141, a first bolt is configured in the first screw hole, the first screw hole is communicated with a first opening of the first bearing block 131, and the third bearing block 141 and the first bearing block 131 are fixedly connected through a nut after the first bolt penetrates through the first screw hole and the first opening.

By adopting the above manner to realize the detachable connection between the third bearing block 141 and the first bearing block 131, the third bearing block 141 can be directly installed on the first bearing block 131 without any change to the structure of the first bearing block 131, so that the installation manner of the third bearing block 141 and the first bearing block 131 is further simplified, and the cost is also effectively saved.

Similarly, the connection between the fourth bearing block 142 and the second bearing block 132 can also be realized in the above manner. That is, the fourth bearing block 142 is attached to the second bearing block 132, and a fourth opening suitable for hanging the second thermal field device is opened at one end of the fourth bearing block 142. Meanwhile, a second screw hole is formed in the other end of the fourth bearing block 142, a second bolt is configured in the second screw hole, the second screw hole is communicated with a second opening of the second bearing block 132, and the fourth bearing block 142 is fixedly connected with the second bearing block 132 through a nut after the second bolt penetrates through the second screw hole and the second opening.

It should be noted that, the third opening and the fourth opening of the third bearing block 141 and the fourth bearing block 142 may be both configured as "U" shaped openings, the third opening and the fourth opening are used to hang the connecting members at two ends of the second thermal field device, and the directions of the third opening and the fourth opening are opposite to each other, and are used to match the structure of the second thermal field device, and the detachable connection manner between the second bearing block group 140 and the first bearing block group 130 enables the water-cooled heat shield apparatus 100 according to the embodiment of the present disclosure to be compatible with different types of thermal field devices, and is not limited to two types of thermal fields. The mode saves the cost and improves the production efficiency.

It should be noted that the shape of each bearing block in the first bearing block set 130 and the second bearing block set 140 is not limited to the rectangular block, as long as the thermal field device can be suspended.

It should be noted that, although the water-cooled heat shield apparatus of the present application is described by way of example in fig. 1, those skilled in the art will appreciate that the present disclosure should not be limited thereto. In fact, the user can flexibly set the structure of the water-cooling heat shield device according to personal preference and/or practical application scenes as long as the required functional effect is achieved.

In addition, based on any one of the water-cooled heat shield devices 100, the present disclosure also provides a single crystal. The single crystal furnace provided by the present disclosure includes any one of the water-cooled heat shield apparatus 100 described above. The water-cooling heat shield device 100 is installed in a hearth of a single crystal furnace, and is used for cooling a pulled single crystal when a single crystal pulling process is performed by using the single crystal furnace. By installing any one of the water-cooling heat shield devices 100 in the single crystal furnace, the single crystal furnace disclosed by the invention can be compatible with at least two thermal fields, so that the applicability of the single crystal furnace is effectively improved.

Having described embodiments of the present disclosure, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the disclosed embodiments. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A water-cooling heat shield device is characterized by comprising a water inlet pipe, a water outlet pipe, a water-cooling heat shield body, a first bearing block group and a second bearing block group;

2. The water-cooled heat shield apparatus of claim 1, wherein the body of the first bearing block is a rectangular block;

3. The water-cooled heat shield device according to claim 2, wherein the fixed connection between the edge of the groove and the pipe surface of the water inlet pipe adjacent to the water-cooled heat shield body is welding.

4. The water-cooled heat shield apparatus according to claim 2, wherein one end of the first bearing block is provided with a first opening; one end of the second bearing block is provided with a second opening;

the first opening and the second opening are both U-shaped;

5. The water-cooled heat shield apparatus of claim 4, wherein the orientation of said first opening is reversed from the orientation of said second opening.

6. The water-cooled heat shield apparatus according to any one of claims 1 to 5, wherein the third bearing block is detachably connected to the first bearing block by a screw joint;

7. The water-cooled heat shield apparatus of claim 4, wherein said third bearing block is attached to said first bearing block;

8. The water-cooled heat shield apparatus of claim 4, wherein said fourth bearing block is attached to said second bearing block; and is

9. The water-cooled heat shield apparatus of claim 1, wherein the water inlet pipe comprises a first pipe, a second pipe and a third pipe which are sequentially communicated;

10. A single crystal growing furnace comprising the water-cooled heat shield apparatus of any one of claims 1 to 9.