CN216898348U

CN216898348U - Zone melting furnace

Info

Publication number: CN216898348U
Application number: CN202220589389.8U
Authority: CN
Inventors: 牛晓东; 赵青松; 狄聚青; 顾小英
Original assignee: Anhui Guangzhi Technology Co Ltd
Current assignee: Anhui Guangzhi Technology Co Ltd
Priority date: 2022-03-17
Filing date: 2022-03-17
Publication date: 2022-07-05
Anticipated expiration: 2032-03-17

Abstract

The utility model discloses a zone melting furnace, comprising: a zone melting furnace main body; an induction coil sleeved on the zone melting furnace main body; and the heat preservation part is arranged between the zone melting furnace main body and the induction coil. In this scheme, through add the heat preservation piece between district's smelting pot main part and induction coil to make the graphite boat comparatively even by induction heating in-process production of heat, be favorable to reducing the liquation undulant so that form the melting zone stable, and then help forming germanium ingot surfacing, this not only can improve purification efficiency, improves the detection accuracy when probe detection resistance in addition again.

Description

Zone melting furnace

Technical Field

The utility model relates to the technical field of zone melting equipment, in particular to a zone melting furnace.

Background

The zone melting is also called zone purification and is mainly used for purifying metal and semiconductor materials. Generally, the material is loaded into a graphite or quartz boat, a small segment of solid is melted into liquid state by local induction heating, and the melting zone slowly moves from one end of the material to the other end along with the movement of the induction coil. At the end of the melting zone, the melt is solidified, impurity elements are respectively enriched at the head and tail of the material due to different solubilities in solid phase and liquid phase, a part of the head and a part of the tail are cut off, and the middle part is the material with higher purity.

The induction coil is used for induction heating, and germanium is placed in a graphite boat for zone melting purification, however, many technical difficulties are faced, such as: no matter use single turn coil or multiturn coil, because graphite boat design is usually the opening upwards, it is inhomogeneous by the induction process production heat, and this can lead to melting zone unstability, and the solution is undulant easily, and then leads to forming germanium ingot surface unevenness, both influences purification efficiency, again can influence when measuring resistance and detect the accuracy.

SUMMERY OF THE UTILITY MODEL

In view of the above, the present invention provides a zone melting furnace, in which a heat insulation member is additionally disposed between a main body of the zone melting furnace and an induction coil, so that heat generated by a graphite boat in an induction heating process is uniform, which is beneficial to reducing fluctuation of a molten liquid to form a stable melting zone, and further beneficial to forming a flat surface of a germanium ingot, thereby not only improving purification efficiency, but also improving detection accuracy when a probe detects a resistor.

In order to achieve the purpose, the utility model provides the following technical scheme:

a zone furnace comprising:

a zone melting furnace main body;

the induction coil is sleeved on the zone melting furnace main body;

and the heat preservation piece is arranged between the zone melting furnace main body and the induction coil.

Preferably, the heat retaining member comprises:

and the heat preservation ring is sleeved on the zone melting furnace main body and is positioned between the zone melting furnace main body and the induction coil.

Preferably, the zone melting furnace body, the induction coil and the heat retaining ring are concentrically arranged, and the heat retaining ring is located at a position intermediate the zone melting furnace body and the induction coil.

Preferably, the heat retaining ring comprises an alumina silicate ceramic cylinder.

Preferably, the device further comprises a connecting piece;

the induction coil and the heat preservation ring are fixedly connected through the connecting piece.

Preferably, the connector comprises a U-shaped bracket;

the middle horizontal part of the U-shaped support is fixedly connected with the induction coil, and the end parts of the vertical parts at two sides are fixedly connected with the heat preservation ring respectively.

Preferably, the number of the U-shaped supports is multiple, and the U-shaped supports are uniformly distributed along the circumferential direction of the induction coil or the heat preservation ring.

Preferably, the zone melting furnace main body comprises a quartz tube, a first flange, a second flange, a furnace door and a furnace cover;

the first end of the first flange is provided with the furnace door, and the second end of the first flange is connected with the first end of the quartz tube; and the first end of the second flange is connected with the second end of the quartz tube, and the second end of the second flange is provided with the furnace cover.

Preferably, the middle part of the first flange and/or the second flange is provided with a cooling water inlet and outlet pipeline structure.

Preferably, the middle part of the first flange is provided with an air inlet pipeline communicated with a flange hole of the first flange; and the middle part of the second flange is provided with an air outlet pipeline communicated with the flange hole of the second flange.

According to the technical scheme, the heat preservation piece is additionally arranged between the zone melting furnace main body and the induction coil in the zone melting furnace provided by the utility model, so that the graphite boat generates more uniform heat in the induction heating process, the fluctuation of the molten liquid is favorably reduced, the stability of a melting zone is conveniently formed, the surface flatness of a germanium ingot is further favorably formed, the purification efficiency can be improved, and the detection accuracy is improved when a probe detects the resistance.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a perspective view of a zone melting furnace according to an embodiment of the present invention;

FIG. 2 is a front view of a zone melting furnace according to an embodiment of the present invention.

The furnace comprises a furnace door 1, a first flange 2, an induction coil 3, a heat preservation ring 4, a U-shaped support 5, a quartz tube 6, a second flange 7, a furnace cover 8, an air inlet pipeline 9 and an air outlet pipeline 10.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The zone melting furnace provided by the embodiment of the utility model, as shown in fig. 1, comprises:

a zone melting furnace main body;

an induction coil 3 sleeved on the zone melting furnace main body;

and the heat preservation piece is arranged between the zone melting furnace main body and the induction coil 3.

The induction coil 3 is fitted to the outside of the zone melting furnace main body (zone melting tube main body). Of course, it is understood that the induction coil 3 generates heat through the induction graphite boat, and the local heat of the main body of the zone melting furnace close to the induction coil 3 is obviously higher than that of other parts under the condition of no heat preservation design; to this end, this scheme is through add the heat preservation piece between district smelting pot main part and induction coil 3 to make the temperature difference that district smelting pot main part is close to induction coil 3's local and other positions reduce, thereby help making the heat that induction heating produced comparatively even.

According to the technical scheme, the heat preservation piece is additionally arranged between the main body of the zone melting furnace and the induction coil in the zone melting furnace provided by the embodiment of the utility model, so that the graphite boat generates more uniform heat in the process of induction heating, the fluctuation of molten liquid is favorably reduced, the stability of a melting zone is conveniently formed, the surface flatness of a germanium ingot is further favorably formed, the purification efficiency is improved, and the detection accuracy is improved when a probe detects resistance.

In this aspect, as shown in fig. 1, the heat retaining member includes:

a heat-preserving ring 4 sleeved on the zone melting furnace main body and positioned between the zone melting furnace main body and the induction coil 3. This scheme is so designed to form and encircle heat retaining effect, this not only helps making the graphite boat more even by induction heating in-process production heat, also is favorable to further reinforcing heat preservation effect, can make induction coil 3 required power reduce, saves the electric quantity, also is convenient for reduce the heat simultaneously and scatters and disappears, reduces site environment temperature, improve equipment life.

Specifically, as shown in fig. 1, the zone melting furnace main body, the induction coil 3 and the heat retaining ring 4 are concentrically arranged, and the heat retaining ring 4 is located at a middle position of the zone melting furnace main body and the induction coil 3. By adopting the design, the graphite boat can further generate heat more uniformly in the process of induction heating, and meanwhile, the graphite boat also contributes to ensuring that the zone melting furnace main body obtains a better heat preservation effect.

Preferably, the heat retaining ring 4 comprises an alumina silicate ceramic cylinder. Wherein, the aluminum silicate ceramic cylinder has the characteristics of long service life, excellent thermal stability and the like.

Further, the zone melting furnace provided by the embodiment of the utility model further comprises a connecting piece;

induction coil 3 is connected fixedly through the connecting piece with heat preservation ring 4 to make induction coil 3 and heat preservation ring 4 form a whole, and along with induction coil 3 moves together, thereby so that realize induction heating and the poor synchronous motion's of heat preservation cooling effect.

Still further, as shown in fig. 1, the connecting member includes a U-shaped bracket 5;

as shown in fig. 2, the middle horizontal part of the U-shaped bracket 5 is fixedly connected to the induction coil 3, and the end parts of the two side vertical parts are fixedly connected to the heat-insulating ring 4. The connecting piece of this scheme so designs, can make induction coil 3 more simple and convenient, the connection effect is more firm with the connection structure of heat preservation ring 4. The middle horizontal part of the U-shaped support 5 is fixedly connected with the induction coil 3 through an inner hexagonal screw, and the end parts of the vertical parts at two sides are fixedly connected with the heat preservation ring 4 through the inner hexagonal screw respectively.

In order to further optimize the above technical solution, as shown in fig. 2, the number of the U-shaped brackets 5 is multiple and is uniformly distributed along the circumferential direction of the induction coil 3 or the heat preservation ring 4. Therefore, the induction coil 3 and the heat preservation ring 4 can form a plurality of connecting and fixing effects, and the connecting stability of the induction coil and the heat preservation ring can be further improved. As shown in FIG. 2, the number of the U-shaped brackets 5 is two, and the two U-shaped brackets are arranged in an up-and-down symmetrical manner about the heat preservation ring 4.

Specifically, as shown in fig. 1 and 2, the zone melting furnace main body includes a quartz tube 6, a first flange 2, a second flange 7, a furnace door 1, and a furnace cover 8;

the first end of the first flange 2 is provided with a furnace door 1, and the second end (namely the second end of the flange hole of the first flange 2) is connected with the first end of the quartz tube 6; a first end of the second flange 7 (namely, a first end of a flange hole of the second flange 7) is connected with a second end of the quartz tube 6, and the second end is provided with a furnace cover 8. Wherein the furnace door 1 is used for sealing a first end of the quartz tube 6, the furnace cover 8 is used for sealing a second end of the quartz tube 6, and the quartz tube 6 is used for loading a graphite boat, namely the graphite boat is used for being positioned in the quartz tube 6. That is, the furnace door 1, the first flange 2, the quartz tube 6, the second flange 7 and the furnace cover 8 together form a sealing system of the zone melting furnace.

In the scheme, in order to avoid the flange from being too high in temperature when the induction coil 3 moves to be close to the flange, circulating cooling water needs to be introduced into the flange to protect the flange from being damaged; accordingly, the intermediate portion of the first flange 2 and/or the second flange 7 is provided with a cooling water inlet and outlet piping structure. Taking the first flange 2 as an example, as shown in fig. 1, the outer wall of the middle portion of the first flange 2 is respectively provided with a water inlet pipe and a water outlet pipe, and a flow channel having one end communicated with the water inlet pipe and the other end communicated with the water outlet pipe is arranged inside the middle portion of the first flange 2. In addition, the cooling water inlet and outlet pipeline structure of the second flange 7 is the same as that of the first flange 2, and the description thereof is omitted.

Still further, as shown in fig. 1, the middle portion of the first flange 2 is provided with an air inlet duct 9 communicated with the flange hole thereof; the middle part of the second flange 7 is provided with an outlet pipe 10 communicating with the flange hole thereof. The scheme is designed so as to conveniently introduce protective gas into the quartz tube 6 and ensure the smelting effect of the quartz tube 6.

The present solution is further described below with reference to specific embodiments:

the utility model adopts the following technical scheme: a zone furnace, comprising: the device comprises a flange, a quartz tube, an induction coil, a U-shaped support and a heat-insulating ring.

The flange comprises a front flange (namely a first flange, the same below) and a rear flange (namely a second flange, the same below), the front flange is positioned at the first end of the quartz tube, and a furnace door is arranged on the front flange and used for charging, discharging and sealing the first end of the quartz tube; the rear flange is positioned at the second end of the quartz tube, and a rear furnace cover is arranged on the rear flange and used for sealing the second end of the quartz tube; circulating cooling water is filled in the flange, and the front flange, the rear flange, the furnace door, the rear furnace cover and the quartz tube form a zone melting furnace sealing system together;

the induction coil is positioned outside the quartz tube, forms a concentric circle with the quartz tube on the cross section, and inductively heats the graphite boat through alternating current so as to melt germanium materials, wherein the induction coil is a two-turn or three-turn copper coil, and circulating cooling water is introduced into the induction coil;

the heat-insulating ring is positioned between the induction coil and the quartz tube and is composed of an aluminum silicate ceramic cylinder with the thickness of 4-8 mm; the U-shaped support is used for connecting the heat preservation ring and the induction coil, the middle part of the U-shaped support is fixed on the induction coil through the inner hexagonal screws, and the two end parts of the U-shaped support are fixed on the heat preservation ring through the inner hexagonal screws, so that the heat preservation ring and the induction coil form a whole and move together along with the induction coil, and the two U-shaped supports are arranged on the heat preservation ring in an up-and-down symmetrical mode.

The utility model has the beneficial effects that:

1. the arrangement of the heat-insulating ring ensures that the graphite boat generates uniform heat in the process of being heated by induction, is beneficial to reducing the fluctuation of molten liquid, forms a stable molten zone and further forms a germanium ingot with smooth surface, thereby improving the purification efficiency and improving the detection accuracy when a probe detects resistance;

2. the heat preservation effect is enhanced, the power required by the induction coil is reduced, and the electric quantity is saved; reduce heat loss, reduce the temperature of the site environment and prolong the service life of the equipment.

Key points and protection points of the utility model:

1. set up the heat preservation ring in the middle of induction coil and the quartz capsule, its constitution is: aluminum silicate ceramic with the thickness of 4-8 mm;

2. the heat preservation ring and the induction coil are connected through the two U-shaped supports, so that the heat preservation ring and the induction coil form a whole and move together along with the induction coil.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A zone furnace, comprising:

a zone melting furnace main body;

an induction coil (3) sleeved on the zone melting furnace main body;

and the heat preservation piece is arranged between the zone melting furnace main body and the induction coil (3).

2. The zone furnace of claim 1, wherein the holding member comprises:

and the heat preservation ring (4) is sleeved on the zone melting furnace main body and is positioned between the zone melting furnace main body and the induction coil (3).

3. The zone furnace according to claim 2, characterized in that the zone furnace body, the induction coil (3) and the retaining ring (4) are arranged concentrically, and the retaining ring (4) is located in an intermediate position between the zone furnace body and the induction coil (3).

4. A zone furnace according to claim 2, characterized in that the retaining ring (4) comprises an aluminosilicate ceramic cylinder.

5. The zone furnace of claim 2, further comprising a connecting member;

the induction coil (3) and the heat preservation ring (4) are fixedly connected through the connecting piece.

6. Zone furnace according to claim 5, characterized in that the connection comprises a U-shaped bracket (5);

the middle horizontal part of the U-shaped support (5) is fixedly connected with the induction coil (3), and the end parts of the vertical parts at two sides are fixedly connected with the heat preservation ring (4) respectively.

7. Zone furnace according to claim 6, characterized in that the number of U-shaped brackets (5) is multiple and evenly distributed along the circumference of the induction coil (3) or the heat retaining ring (4).

8. Zone furnace according to claim 1, characterized in that the zone furnace body comprises a quartz tube (6), a first flange (2), a second flange (7), a furnace door (1) and a furnace cover (8);

the first end of the first flange (2) is provided with the furnace door (1), and the second end of the first flange is connected with the first end of the quartz tube (6); the first end of the second flange (7) is connected with the second end of the quartz tube (6), and the second end is provided with the furnace cover (8).

9. Zone furnace according to claim 8, characterized in that the intermediate part of the first flange (2) and/or the second flange (7) is provided with cooling water inlet and outlet piping structures.

10. Zone furnace according to claim 8, characterized in that the first flange (2) is provided in its middle part with an inlet duct (9) communicating with its flange hole; and the middle part of the second flange (7) is provided with an air outlet pipeline (10) communicated with the flange hole of the second flange.