CN210292860U - Heater fixing device - Google Patents
Heater fixing device Download PDFInfo
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- CN210292860U CN210292860U CN201920870279.7U CN201920870279U CN210292860U CN 210292860 U CN210292860 U CN 210292860U CN 201920870279 U CN201920870279 U CN 201920870279U CN 210292860 U CN210292860 U CN 210292860U
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Abstract
The utility model discloses a heater fixing device, which is used for fixing a heater in a fixing hole on the side wall of a heat treatment chamber, and comprises a fixing plate and a supporting frame, wherein the fixing plate comprises a first connecting part and a through hole; the first connecting part is used for connecting the fixing plate to the outer side wall of the heat treatment chamber, and the through hole penetrates through the fixing plate and corresponds to the fixing hole in position; the supporting frame comprises a second connecting part and supporting double arms, the second connecting part is used for connecting the supporting frame to the fixing plate, and the supporting double arms are arranged corresponding to the through holes; the heater is arranged in the fixing hole, the tail end of the heater extends out of the fixing hole and penetrates through the through hole to be fixed in the two supporting arms, and a gap is formed between the outer wall of the heater and the inner wall of the fixing hole. The beneficial effects of the utility model reside in that: the heater fixing device supports the tail end of the heater, so that a gap is reserved around the heater, heat dissipation of the heater is facilitated, and the service life of the heater is prolonged.
Description
Technical Field
The utility model relates to a firing equipment field, more specifically relates to a heater fixing device.
Background
In the semiconductor manufacturing process, heat treatment is necessary, and a vertical furnace, a horizontal furnace, and rapid heat treatment are generally used as heat treatment equipment. Rapid Thermal Processing (RTP) refers to heating the wafer surface at a very high speed to achieve the purposes of stress relief, annealing, etc. In order to maintain the stability of the process, an airtight chamber or a vacuum environment is provided, and the wafer is placed therein. The airtight cavity is isolated with the external world through the quartz capsule, and the wafer heating in the airtight cavity is penetrated through the quartz capsule to the light of heating fluorescent tube radiation, and the heating fluorescent tube is directly placed in the bottom of quartz capsule usually, does not be favorable to the heat dissipation because of the bottom does not have the heat dissipation space, influences the life of heating fluorescent tube.
Therefore, a structure that can improve such a heating method to facilitate heat dissipation is desired.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a heater fixing device has supported the end of heater, makes to reserve the space around the heater, does benefit to the heat dissipation of heater, extension heater life. In order to achieve the above object, the present invention provides a heater fixing device for fixing a heater in a fixing hole formed in a side wall of a heat treatment chamber, the heater fixing device including: a fixed plate and a supporting frame,
the fixing plate comprises a first connecting part and a through hole;
the first connecting part is used for connecting the fixing plate to the outer side wall of the heat treatment chamber, and the through hole penetrates through the fixing plate and corresponds to the fixing hole in position;
the supporting frame comprises a second connecting part and two supporting arms, the second connecting part is used for connecting the supporting frame to the fixing plate, and the two supporting arms are arranged corresponding to the through holes;
the heater is arranged in the fixing hole, the tail end of the heater extends out of the fixing hole and penetrates through the through hole to be fixed in the two supporting arms, and a gap is formed between the outer wall of the heater and the inner wall of the fixing hole.
Preferably, the first connecting portion is a first threaded hole and a first bolt which are matched with each other, and the second connecting portion is a second threaded hole and a second bolt which are matched with each other.
Preferably, the through hole is provided with a projection, the projection is disposed opposite to the support double arms, and the tip of the heater is fixed between the projection and the support double arms.
Preferably, the supporting frame is a sheet-shaped baffle, the supporting arms are two protrusions on the upper portion of the baffle, the bottoms of the two protrusions are separated, the tops of the two protrusions are close to each other, and an inverted V-shaped structure with an opening at the top end is formed.
Preferably, the fixing plate is provided with a first surface and a second surface opposite to the first surface, the first surface is connected to an outer sidewall of the heat treatment chamber, the second surface is stepped with a height difference, the height of the step is consistent with the thickness of the baffle plate, and the baffle plate is connected to the surface of the lower end of the step.
Preferably, the heater is a cylinder, the heater includes a heater body and a heater tip connected to the heater body, the heater tip has a diameter smaller than that of the heater body, and the heater tip is provided between the projection and the support double arms.
Preferably, the fixing holes are parallel to each other, one heater is disposed in each fixing hole, the fixing plate is provided with a plurality of through holes corresponding to the fixing holes, the support frame is provided with a plurality of support arms corresponding to the through holes, and each heater corresponds to one through hole and one support arm.
Preferably, the heat treatment chamber is rectangular, the fixing plate is rectangular, the fixing holes penetrate through two opposite side surfaces of the heat treatment chamber, and the fixing plate is connected to two corresponding outer walls of the heat treatment chamber.
Preferably, the heater is a heat radiation lamp tube or a thermal resistance wire with adjustable power, and the heating temperature is 500-1200 ℃.
Preferably, the contact surface of the fixing hole and the heat treatment chamber is a quartz tube wall, and the quartz tube wall and the heat treatment chamber form a sealed cavity.
The beneficial effects of the utility model reside in that:
the heater fixing device enables a gap to be reserved between the periphery of the heater and the fixing hole by fixing the tail end of the heater on the side wall of the heat treatment chamber, so that heat dissipation of the heater is facilitated, and the service life of the heater is prolonged.
The apparatus of the present invention has other features and advantages which will be apparent from or are set forth in more detail in the accompanying drawings and the following detailed description, which are incorporated herein, and which together serve to explain certain principles of the invention.
Drawings
The above and other objects, features and advantages of the present invention will become more apparent by describing in more detail exemplary embodiments of the present invention with reference to the attached drawings, in which like reference numerals generally represent like parts.
Fig. 1 shows an exploded view of a heater fixture according to an embodiment of the present invention
Fig. 2 is a partially enlarged cross-sectional view illustrating a heater fixture according to an embodiment of the present invention
Fig. 3 shows an external view of a heat treatment apparatus according to an embodiment of the present invention.
Description of reference numerals:
1-fixing the plate; 2-a support frame; 3-heating the lamp tube; 4-a first connection; 5-a second connecting portion; 6-through holes; 7-a projection; 8-support both arms; 9-fixing hole
Detailed Description
The invention will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present invention have been illustrated in the accompanying drawings, it is to be understood that the invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, this embodiment is provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
According to the utility model, the heater fixing device is used for fixing the heater in the fixing hole on the side wall of the heat treatment chamber, the heater fixing device comprises a fixing plate and a supporting frame,
the fixing plate comprises a first connecting part and a through hole;
the first connecting part is used for connecting the fixing plate to the outer side wall of the heat treatment chamber, and the through hole penetrates through the fixing plate and corresponds to the fixing hole in position;
the supporting frame comprises a second connecting part and supporting double arms, the second connecting part is used for connecting the supporting frame to the fixing plate, and the supporting double arms are arranged corresponding to the through holes;
the heater is arranged in the fixing hole, the tail end of the heater extends out of the fixing hole and penetrates through the through hole to be fixed in the two supporting arms, and a gap is formed between the outer wall of the heater and the inner wall of the fixing hole.
Specifically, the heating device main body related to the utility model is a closed cavity, the cavity comprises a heater and a heating object, the heating object needs to be heated to different temperatures or needs to react with other reactants due to different process requirements, in the heating process, a small amount of evaporant is accompanied, in order to prevent the evaporant from polluting the heater and influencing the heating effect and the service life of the heater, the heater and the heating object are generally separated by a layer of quartz plate and are divided into an upper cavity and a lower cavity, the upper cavity is internally provided with the heater, the lower cavity is used for placing the heating object, the heater needs to be connected with the outside and is not sealed in the cavity, the upper cavity is provided with a fixing hole communicated with the outside (the fixing hole is the inside of a pipe body sealed with the cavity), the heater is placed in the fixing hole, and the heater heats the heating object through the pipe wall, if the heater is directly placed on the pipe wall, be unfavorable for the heat dissipation of heater and pipe wall contact surface, cause the shortening of heater life-span, consequently the utility model discloses in add heater fixing device on the outer wall of airtight cavity, prop up the end of heater, make the surface of heater not with the pipe wall contact, fixed when the heater is propped up.
More specifically, the fixing device includes a fixing plate having a through-hole, which is coupled to the outer wall of the vacuum chamber, and a support frame having a support structure, the through-hole of the fixing plate corresponding to the fixing hole such that the distal end of the heater can pass through the through-hole. The support frame is connected with the fixing plate, a support double arm is arranged on the support frame, the support double arm corresponds to the through hole, and the tail end of the heater extends out of the through hole and is fixed on the side wall of the heat treatment chamber through the support double arm.
In one example, the first connecting portion is a first threaded hole and a first bolt which are matched with each other, and the second connecting portion is a second threaded hole and a second bolt which are matched with each other.
Specifically, the fixing plate and the sealing chamber, and the connection mode of the support frame and the fixing plate can adopt the existing mode commonly used, considering that the heater is taken as a consumable, the maintenance or the replacement is needed, the detachable connection mode is more convenient to select, in one example, the connection mode of the fixing plate and the sealing chamber, and the connection mode of the support frame and the fixing plate all select the bolt connection, and when the heater fixing device is connected with the sealing chamber, the support frame can be positioned above or below the heater.
In one example, the through-hole of the fixing plate is provided with a projection disposed opposite to the supporting double arms, and the distal end of the heater is fixed between the projection and the supporting double arms.
Specifically, the inner contour shape of the through hole of the fixing plate is determined by the shape of the tail end of the heater and the shape of the supporting structure of the supporting frame, the purpose is to match with the supporting structure of the supporting frame to complete the support of the tail end of the heater, the specific shape is not limited, when the supporting structure of the supporting frame has two supporting points, a supporting point (protruding part) can be arranged on the through hole, so that the protruding part of the through hole is positioned above the center of two supporting points of the supporting frame, and stable three-point support is realized.
In one example, the support frame is a sheet-like baffle, the two arms are two protrusions on the upper part of the baffle, the bottoms of the two protrusions are separated, and the tops of the two protrusions are close to each other to form an inverted V-shaped structure with an open top end.
Specifically, the support frame is the slice baffle, and the bottom of slice baffle is equipped with the screw hole, is connected with the fixed plate through the bolt, and processing has two archs on the slice baffle, and there is certain distance two bellied bottoms, and the top draws close mutually, and the distance between two protruding tops is less than the width of heating pipe, and the end of heater if for the arc, two bellied top surfaces can set up corresponding cambered surface, make the terminal surface of heater laminate completely with two bellied surfaces.
In one example, the fixing plate is provided with a first surface connected to an outer sidewall of the heat treatment chamber and a second surface opposite to the first surface, the second surface being stepped with a height difference, the height of the step corresponding to the thickness of the sheet baffle, the sheet baffle being connected to a surface of a lower end of the step.
Specifically, the connected mode of fixed plate and the lateral wall of thermal treatment cavity is the fixed plate laminating on thermal treatment cavity's lateral wall, and the connected mode of slice baffle and fixed plate is the laminating of slice separation blade on the surface of fixed plate, and there is partial undercut on the surface that fixed plate and slice baffle laminated mutually, and sunken degree of depth is unanimous with slice separation blade thickness, and the laminating of slice baffle is in sunken surface department, and the surface of slice separation blade flushes with the non-sunken surface of fixed plate.
In one example, the heater is a cylinder, the heater includes a heater body and a heater tip connected to the heater body, the heater tip having a diameter smaller than a diameter of the heater body, the heater tip being disposed between the projection and the support arms.
Specifically, the main body of the heater is cylindrical for radiating heat, the tail end of the heater is used for connecting an external circuit and is also cylindrical, the diameter of the end face of the tail end of the heater is smaller than that of the main body, and the tail end of the heater is longitudinally fixed and then the heater is transversely fixed due to the fact that the tail end of the heater is not consistent with the diameter of the main body.
In one example, the fixing holes are multiple and parallel to each other, each fixing hole is provided with a heater, the fixing plate is provided with multiple through holes corresponding to the fixing holes, the support frame is provided with multiple support arms corresponding to the through holes, and each heater corresponds to one through hole and one support arm.
Specifically, the temperature of the sealed chamber is provided by heaters, the distribution of the heaters determines the temperature of different areas of the sealed chamber, and normally, the different areas of the sealed chamber are expected to have the same temperature, so a plurality of heaters can be arranged.
In one example, the heat treatment chamber has a rectangular shape, the fixing plate has a rectangular shape, the fixing holes penetrate through two opposite sides of the heat treatment chamber, and the fixing plates are connected to two corresponding outer walls of the heat treatment chamber.
Specifically, the heat treatment chamber is rectangular, the fixing plate is rectangular, the pipe body sealed with the heat treatment chamber is a straight pipe, the straight pipe penetrates through two opposite side faces of the heat treatment chamber, the inside of the straight pipe is communicated with the outside, the two heater fixing devices are respectively connected to two corresponding side faces of the heat treatment chamber, and two tail ends of the heaters are supported and fixed from two sides.
In one example, the heater is a heat radiation lamp tube or a thermal resistance wire with adjustable power, and the heating temperature is 500-1200 ℃. The contact surface of the fixing hole and the heat treatment chamber is a quartz tube wall, and the quartz tube wall and the heat treatment chamber form a sealed cavity.
Specifically, the tube body sealed with the heat treatment cavity is a quartz tube, the heater can select a thermal radiation lamp tube which generates short-wavelength radiation, the heating object is heated by selectively absorbing the radiation of the thermal radiation lamp tube, in this way, energy is transmitted between the radiation heat source and the heating object, the heat treatment cavity cannot be heated, the thermal radiation lamp tube has higher heating temperature and faster temperature rising and falling rate, the heating temperature can reach 500-1200 ℃, and the temperature rising and falling rate can reach dozens of degrees per second.
Example (b):
fig. 1 shows an exploded view of a heater fixture according to an embodiment of the present invention. Fig. 2 is a partially enlarged sectional view illustrating a heater fixture according to an embodiment of the present invention, and fig. 3 is an external view illustrating a heat treatment apparatus according to an embodiment of the present invention.
Referring to fig. 1-3, fig. 3 is a rapid thermal annealing apparatus in a semiconductor manufacturing process, an apparatus main body is a rectangular heat treatment chamber above, the heat treatment chamber mainly includes a rectangular vacuum chamber, heating lamps 3 and heater fixing devices (including a fixing plate 1 and a support frame 2) located on four side walls of the vacuum chamber, the vacuum chamber is provided with a plurality of quartz tubes with two open ends (the quartz tubes and the same through holes outside are fixing holes 9), the tube walls of the quartz tubes are sealed with the vacuum chamber, the inside of the quartz tubes are communicated with the outside, the quartz tubes are divided into an upper layer and a lower layer, the quartz tubes of the same layer are parallel to each other, the quartz tubes of the upper layer and the lower layer are perpendicular to each other, one heating lamp 3 is placed in each quartz tube, and two ends of the heating lamps 3. The fixing plate 1 is provided with a plurality of through holes 6 with protrusions 7 and a plurality of threaded holes (the threaded holes and the matched bolts on the fixing plate 1 are collectively called as a first connecting part 4), the upper end of the support frame 2 is provided with a plurality of inverted V-shaped support arms 8 with top end openings and a plurality of threaded holes (the threaded holes and the matched bolts on the support frame 2 are collectively called as a second connecting part 5), the support frame 2 is connected to the fixing plate 1 through bolts, and the fixing plate 1 is connected to the outer wall of the vacuum chamber through bolts. The protruding part 7 of the through hole 6 of the fixing plate 1 and the two protrusions of the support frame 2 are used for clamping the tail ends of the heating lamp tubes, the two tail ends of the heating lamp tubes 3 are supported and fixed, gaps are reserved between the periphery of the heating lamp tubes 3 and the wall of the quartz tube, and by adopting the fixing structure, the heat dissipation of the heating lamp tubes 3 is facilitated, and the service life of the lamp tubes is prolonged.
The embodiments of the present invention described above are exemplary, not exhaustive, and are not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments.
Claims (10)
1. A heater fixing device for fixing a heater in a fixing hole of a side wall of a heat treatment chamber, which is characterized in that the heater fixing device comprises a fixing plate and a supporting frame,
the fixing plate comprises a first connecting part and a through hole;
the first connecting part is used for connecting the fixing plate to the outer side wall of the heat treatment chamber, and the through hole penetrates through the fixing plate and corresponds to the fixing hole in position;
the supporting frame comprises a second connecting part and two supporting arms, the second connecting part is used for connecting the supporting frame to the fixing plate, and the two supporting arms are arranged corresponding to the through holes;
the heater is arranged in the fixing hole, the tail end of the heater extends out of the fixing hole and penetrates through the through hole to be fixed in the two supporting arms, and a gap is formed between the outer wall of the heater and the inner wall of the fixing hole.
2. The heater fixture according to claim 1, wherein the first connecting portion is a first threaded hole and a first bolt that are engaged with each other, and the second connecting portion is a second threaded hole and a second bolt that are engaged with each other.
3. The heater fixture according to claim 1, wherein the through hole is provided with a projection which is disposed opposite to the support arms, and the distal end of the heater extends from the middle of the through hole and is fixed between the projection and the support arms.
4. The heater fixture according to claim 1, wherein the support frame is a plate-shaped baffle, the two support arms are two protrusions formed on the upper portion of the baffle, the two protrusions are separated from each other at the bottom, and the top portions of the two protrusions are close to each other to form an inverted "V" shape with an open top.
5. The heater fixture as claimed in claim 4, wherein the fixing plate is provided with a first surface connected to an outer sidewall of the heat treatment chamber and a second surface opposite to the first surface, the second surface being stepped with a height difference, the height of the step corresponding to the thickness of the baffle, the baffle being connected to a surface of a lower end of the step.
6. The heater fixture according to claim 3, wherein the heater is a cylindrical body, the heater includes a heater body and a heater tip connected to the heater body, the heater tip having a diameter smaller than that of the heater body, the heater tip being provided between the projection and the support arms.
7. The heater fixing device according to claim 1, wherein the fixing hole is plural, plural fixing holes are parallel to each other, one heater is provided in each fixing hole, plural through holes corresponding to the fixing holes are provided in the fixing plate, plural supporting arms corresponding to the through holes are provided in the supporting frame, and one through hole and one supporting arm correspond to each heater.
8. The heater fixture according to claim 1, wherein the heat treatment chamber has a rectangular shape, the fixing plate has a rectangular shape, the fixing holes penetrate two opposite sides of the heat treatment chamber, and the fixing plates are connected to two corresponding outer walls of the heat treatment chamber.
9. The heater fixture as claimed in claim 1, wherein the heater is a heat radiation lamp or a thermal resistance wire with adjustable power, and the heating temperature is 500-1200 ℃.
10. The heater fixture according to claim 1, wherein the contact surface between the fixing hole and the heat treatment chamber is a quartz tube wall, and the quartz tube wall and the heat treatment chamber form a sealed cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920870279.7U CN210292860U (en) | 2019-06-11 | 2019-06-11 | Heater fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920870279.7U CN210292860U (en) | 2019-06-11 | 2019-06-11 | Heater fixing device |
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| Publication Number | Publication Date |
|---|---|
| CN210292860U true CN210292860U (en) | 2020-04-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920870279.7U Active CN210292860U (en) | 2019-06-11 | 2019-06-11 | Heater fixing device |
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| CN (1) | CN210292860U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113150340A (en) * | 2021-04-28 | 2021-07-23 | 京东方科技集团股份有限公司 | Heating assembly and baking equipment |
-
2019
- 2019-06-11 CN CN201920870279.7U patent/CN210292860U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113150340A (en) * | 2021-04-28 | 2021-07-23 | 京东方科技集团股份有限公司 | Heating assembly and baking equipment |
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