CN210281915U - Probe card needle grinding machine - Google Patents
Probe card needle grinding machine Download PDFInfo
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- CN210281915U CN210281915U CN201921171749.7U CN201921171749U CN210281915U CN 210281915 U CN210281915 U CN 210281915U CN 201921171749 U CN201921171749 U CN 201921171749U CN 210281915 U CN210281915 U CN 210281915U
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- grinding
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Abstract
The utility model discloses a probe card needle grinding machine relates to probe card and makes technical field. The utility model comprises a needle grinding mechanism, a clamping mechanism, a cross staff gauge and a vertical staff gauge; the needle grinding mechanism comprises a lower sliding seat and an upper supporting seat, and a lifting mechanism is arranged between the lower sliding seat and the upper supporting seat; the clamping mechanism comprises a fixed clamping body and a movable clamping body; one side of the upper base is rotatably provided with an amplifying device. The utility model realizes the adjustment of the height of the upper support by rotating the screw rod, so that the grinding device on the upper support is contacted with the clamping needle on the probe card, and the distance between the grinding device and the probe card is intuitively obtained through the vertical scale and the side indicating rod, thereby being convenient for controlling the length of the needle point in the grinding process; the probe card is clamped by the clamping mechanism, the telescopic rod is adjusted, the gear and the rack are driven to move, the opening and closing movement of the pressing plate is further realized, and the probe card is clamped or taken down; and the distance between the fixed clamping body and the movable clamping body can be adjusted by referring to the cross ruler, so that the probe card clamping device is suitable for probe cards with different sizes.
Description
Technical Field
The utility model belongs to the technical field of the probe card is made, especially, relate to a probe card grinds needle machine.
Background
In recent years, the technology of semiconductor manufacturing process has been dramatically advanced, and products are now required to be light, thin, small, IC with smaller and smaller size, stronger and stronger functions and more pins. The high-level packaging method has high unit price, if the chip test can be carried out before the packaging, and the wafer is marked if the defective products exist in the wafer, the marked defective products are abandoned until the back-end packaging process, and the unnecessary packaging cost can be saved.
The probe card is to make the probe on the probe card directly contact with the bonding pad or bump on the chip to lead out the chip signal, and then match with the peripheral test instrument and software control to achieve the purpose of automatic measurement. The probe grinding device is used for grinding the tip of the probe in the process of manufacturing the probe card.
Among the prior art, when the needle point to the probe ground, the unable direct observation of needle point length need be dismantled and measured repeatedly, and owing to unable direct observation needle point length for the length of needle point is difficult to control in the grinding process, grinds the needle point short easily, makes the loss of probe big from this, and the product percent of pass is low, and then leads to manufacturing cost to be high. A probe card grinding machine is provided to solve the above problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a probe card needle grinder through the setting of needle grinding mechanism, power unit, fixture, amplification device, side guide bar, staff gauge, the probe card's of being convenient for centre gripping, grinding, during the adjusting position, be convenient for accurate concrete position of learning through side guide bar, staff gauge, improvement machining precision and machining efficiency.
In order to solve the technical problem, the utility model discloses a realize through following technical scheme:
the utility model relates to a probe card needle grinding machine, which comprises a lower base, wherein a vertical support plate is fixed on the lower base, and an upper base is fixed above the vertical support plate; a needle grinding mechanism is arranged on the lower base in a sliding mode and driven by a power mechanism; the lower surface of the upper base is provided with a clamping mechanism; the needle grinding mechanism comprises a lower sliding seat and an upper supporting seat, and a lifting mechanism is arranged between the lower sliding seat and the upper supporting seat; the clamping mechanism comprises a fixed clamping body and a movable clamping body; the fixed clamping body is fixed on the lower surface of the upper base, and the movable clamping body is arranged on the upper base in a sliding manner; a rotating arm is rotatably arranged on one side of the upper base, and an amplifying device is hinged to the end part of the rotating arm; one side of the upper base is provided with a cross ruler which is matched and corresponds to the position of the movable clamping body; and a vertical scale which corresponds to the upper support in a matched manner is arranged on one side of the vertical support plate.
Furthermore, a group of V-shaped sliding grooves which are arranged in parallel are formed in the lower base; the lower sliding seat is arranged on the lower base in a sliding mode in which the sliding block is matched with the V-shaped sliding groove.
Furthermore, the lower sliding seat is of a rectangular structure, positioning screws are arranged on the side face of the lower sliding seat, and a group of channels are formed in two opposite sides of the lower sliding seat; the upper bracket is of a rectangular structure, and a group of channels are formed in two opposite sides of the upper bracket.
Furthermore, the power mechanism is a hydraulic cylinder or a pneumatic cylinder, and is mounted on the lower base, and the telescopic end of the power mechanism is fixedly connected with the lower sliding seat.
Furthermore, the lifting mechanism is a scissor type lifting mechanism, the lifting mechanism comprises two groups of X-shaped structures hinged by connecting rods, and each group is two X-shaped structures arranged side by side; the two groups of X-shaped structures are arranged up and down and hinged through a connecting shaft; the connecting shaft is provided with a threaded hole, and the connecting shaft is screwed with a screw through the threaded hole.
Furthermore, one connecting rod of the lower X-shaped structure is in sliding fit with the groove channel on the lower sliding seat, and the other connecting rod of the lower X-shaped structure is hinged with the lower sliding seat; and one connecting rod of the X-shaped structure is in sliding fit with the channel on the upper support, and the other connecting rod of the X-shaped structure is hinged with the upper support.
Furthermore, a grinding device is arranged on the upper surface of the upper support, and the grinding device is abrasive paper or a grinding disc; one side of the upper support is provided with a side indicating rod which corresponds to the vertical scale in a matched mode, and the side indicating rod is of a telescopic structure.
Furthermore, the fixed clamping body and the movable clamping body have the same structure; the fixed clamping body comprises a clamping box, and a rack is arranged at the bottom of the clamping box in a sliding manner; one end of the rack is provided with a telescopic rod which is fixed on the side wall of the clamping box; a gear is meshed with the rack, and a pressing plate is arranged on the gear; the clamping plate of the probe card to be processed is arranged between the pressing plate and the end face of the clamping box and is pressed tightly through the pressing plate.
Furthermore, the lower surface of the upper base is provided with a slide rail, and the movable clamping body is arranged on the upper base in a sliding manner in a manner of being matched with the slide rail; the side of removing the clamping body installs set screw, the side of removing the clamping body is provided with the last indicator lever that matches and corresponds with the cross staff.
Furthermore, the rotating arm is rotatably arranged on the upper base through a rotating shaft, and the amplifying device is a microscope or a magnifier.
The utility model discloses following beneficial effect has:
1. the utility model discloses a be provided with elevating system between lower carriage, upper bracket, the regulation of rotating screw rod in order to realize the upper bracket height makes the grinder on the upper bracket contact with the card needle on the probe card to the cooperation is equipped with perpendicular scale, side guide bar, is convenient for obtain directly perceived the distance between grinder and the probe card, and convenient to use is convenient for control the length of grinding in-process needle point.
2. The utility model clamps the probe card through the clamping mechanism, the clamping mechanism comprises a fixed clamping body and a movable clamping body, and the movement of the driving gear and the rack is realized by adjusting the telescopic rod, so that the opening and closing movement of the pressing plate is realized, and the probe card is clamped or taken down; and the distance between the fixed clamping body and the movable clamping body can be adjusted by referring to the cross ruler, so that the probe card clamping device is suitable for probe cards with different sizes.
Of course, it is not necessary for any particular product to achieve all of the above-described advantages at the same time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural view of a probe card grinding machine according to the present invention;
FIG. 2 is a front view of the structure of FIG. 1;
FIG. 3 is a right side view of the structure of FIG. 1;
fig. 4 is a schematic view of a partial structure of the probe card grinding machine of the present invention;
fig. 5 is a schematic structural view of the lower slide seat of the present invention;
FIG. 6 is a schematic structural view of the needle grinding mechanism of the present invention;
FIG. 7 is a schematic view of the structure at A in FIG. 6;
fig. 8 is a schematic structural view of the clamping mechanism of the present invention;
fig. 9 is a schematic view of the internal structure of the clamping mechanism of the present invention;
FIG. 10 is a schematic structural view of the fixing and clamping body of the present invention;
FIG. 11 is a schematic structural view of the movable clamping body of the present invention;
fig. 12 is a schematic structural view of the clamping box of the present invention;
fig. 13 is a schematic structural view of the upper base of the present invention;
in the drawings, the components represented by the respective reference numerals are listed below:
1-lower base, 2-lower sliding base, 3-power mechanism, 4-lifting mechanism, 5-vertical scale, 6-vertical support plate, 7-side indicating rod, 8-upper support, 9-fixed clamping body, 10-rotating arm, 11-positioning screw, 12-upper base, 13-horizontal scale, 14-movable clamping body, 15-probe card, 101-V type chute, 201-channel, 401-connecting rod, 402-screw rod, 403-connecting shaft, 901-clamping box, 902-pressing plate, 903-gear, 904-rack, 905-telescopic rod, 1201-sliding rail and 1301-upper indicating rod.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "open hole", "upper", "lower", "thickness", "top", "middle", "length", "inner", "periphery", "side", "end", "bottom", "side by side", and the like, indicate positional or positional relationships, are merely for convenience in describing the invention and to simplify the description, but do not indicate or imply that the referenced component or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the invention.
Referring to fig. 1-13, the present invention relates to a probe card grinding machine, which comprises a lower base 1, wherein a vertical support plate 6 is fixed on the lower base 1, and an upper base 12 is fixed above the vertical support plate 6; the lower base 1 is provided with a needle grinding mechanism in a sliding way, and the needle grinding mechanism is driven by a power mechanism 3; the lower surface of the upper base 12 is provided with a clamping mechanism; the needle grinding mechanism comprises a lower sliding seat 2 and an upper supporting seat 8, and a lifting mechanism 4 is arranged between the lower sliding seat 2 and the upper supporting seat 8; the clamping mechanism comprises a fixed clamping body 9 and a movable clamping body 14; wherein, the fixed clamping body 9 is fixed on the lower surface of the upper base 12, and the movable clamping body 14 is arranged on the upper base 12 in a sliding manner; a rotating arm 10 is rotatably arranged on one side of the upper base 12, and an amplifying device is hinged to the end part of the rotating arm 10; a cross scale 13 corresponding to the position of the movable clamping body 14 is arranged on one side of the upper base 12; one side of the vertical support plate 6 is provided with a vertical scale 5 which corresponds to the upper support 8 in a matching way, so that the distance between the grinding device and the probe card 15 can be conveniently and visually obtained, the use is convenient, and the length of a needle point in the grinding process can be conveniently controlled.
As shown in fig. 5-6, the lower base 1 is provided with a group of V-shaped chutes 101 arranged in parallel; the lower sliding seat 2 is arranged on the lower base 1 in a sliding mode through a sliding block and a V-shaped sliding groove 101 in a matching mode, the lower sliding seat 2 is of a rectangular structure, a positioning screw 11 is arranged on the side face of the lower sliding seat 2, and a group of grooves 201 are formed in two opposite sides of the lower sliding seat 2; the upper support 8 is of a rectangular structure, a group of channels 201 are formed in two opposite sides of the upper support 8, the power mechanism 3 is a hydraulic cylinder or a pneumatic cylinder, the power mechanism 3 is installed on the lower base 1, the telescopic end of the power mechanism is fixedly connected with the lower sliding seat 2, the lower sliding seat 2 is driven to reciprocate through the reciprocating motion of the power mechanism 3, the grinding device conducts grinding of a needle point through the reciprocating motion of the needle clamping position of the probe card 15, and the operation mode is simple.
As shown in fig. 1-4, the lifting mechanism 4 is a scissor-type lifting mechanism, and the lifting mechanism 4 includes two groups of X-shaped structures hinged by a connecting rod 401, each group having two X-shaped structures arranged side by side; the two groups of X-shaped structures are arranged up and down and hinged through a connecting shaft 403; a threaded hole is formed in the connecting shaft 403, a screw 402 is screwed on the connecting shaft 403 through the threaded hole, a connecting rod 401 of a lower X-shaped structure is in sliding fit with the channel 201 on the lower sliding seat 2, and the other connecting rod 401 of the lower X-shaped structure is hinged with the lower sliding seat 2; a connecting rod 401 of top X type structure and the channel 201 sliding fit on the upper bracket 8, another connecting rod 401 of top X type structure is articulated mutually with the upper bracket 8, through adjusting screw 402, makes two sets of X type structures that become by connecting rod 401 hinge realize flexible, even upper bracket 8 gets highly to realize going up and down, and the regulative mode is simple.
Wherein, as shown in fig. 1-4, the upper surface of the upper support 8 is provided with a grinding device; the grinding device is abrasive paper or a grinding disc, can be selected according to specific use requirements, and is mounted on the upper support 8 through a screw or a sucking disc; one side of the upper support 8 is provided with a side indicating rod 7 which corresponds to the vertical scale 5 in a matching mode, the side indicating rod 7 is of a telescopic structure, the initial number of the vertical scale 5 can be set at the flat position of the end face of the clamping box 901, namely, the initial number of the vertical scale can be flush with the surface where the clamping plate of the probe card 15 is located or other positions which facilitate reading, when the grinding device is used specifically, the distance between the grinding device and the probe card can be obtained according to simple calculation or intuition, and the length of a needle point in the grinding process can be controlled conveniently.
8-13, the fixed clamping body 9 and the movable clamping body 14 have the same structure; the fixed clamping body 9 comprises a clamping box 901, the clamping box 901 is of a rectangular box-shaped structure, and a rack 904 is slidably arranged at the bottom of the clamping box 901; one end of the rack 904 is provided with a telescopic rod 905, the telescopic rod 905 is an electric telescopic rod or a hydraulic rod, and the telescopic rod 905 is fixed on the side wall of the clamping box 901; a gear 903 is meshed with the rack 904, a pressing plate 902 is mounted on the gear 903, the pressing plate 902 is a rectangular plate, and a rubber pad is arranged at the end of the pressing plate 902, so that friction or damage to the clamping plate of the probe card 15 due to clamping is avoided; a clamping plate of a probe card 15 to be processed is installed between a pressing plate 902 and an end face of a clamping box 901 and is pressed tightly by the pressing plate 902, as shown in fig. 1 and 2, a sliding rail 1201 is installed on the lower surface of an upper base 12, a sliding block is installed on a movable clamping box of a movable clamping body 14 or a through hole is arranged on a box body, and the movable clamping body 14 is slidably arranged on the upper base 12 in a manner of being matched with the sliding rail 1201; the side surface of the movable clamping body 14 is provided with the positioning screw 11, the position of the positioning screw 11 is matched with the position of the through hole on the sliding block or the box body, the side surface of the movable clamping body 14 is provided with an upper indicating rod 1301 matched with and corresponding to the cross scale 13, the initial number of the cross scale 13 can be arranged at the rightmost end of the fixed clamping body 9, the distance between the fixed clamping body 9 and the movable clamping body 14 can be adjusted by referring to the cross scale 13, and the probe card clamping device is suitable for probe cards with different sizes and is simple to operate.
As shown in fig. 1, the rotary arm 10 is rotatably disposed on the upper base 12 through a rotating shaft, and the magnifying device is a microscope or a magnifier, so as to observe the regularity of the needle tip, the gap between the needle tip and the grinding device, and the length of the needle tip during the grinding process; when not in use, the rotating arm 10 is rotated to be flush with the upper base 12, thereby avoiding damage to the magnifying device when not in use.
A probe card needle grinding machine is characterized in that a clamping needle of a probe card 15 faces downwards, the probe card 15 is clamped through a clamping mechanism, the clamping mechanism comprises a fixed clamping body 9 and a movable clamping body 14, a driving gear 903 and a rack 904 move through adjusting a telescopic rod 905, opening and closing movement of a pressing plate 902 is further achieved, and the probe card 15 is clamped or taken down; the distances between the fixed clamping body 9 and the movable clamping body 14 can be adjusted by referring to the cross ruler 15, and the device is suitable for probe cards 15 with different sizes; through being provided with elevating system 4 between lower carriage 2, upper bracket 8, rotating screw 402 makes the grinder on the upper bracket 8 contact with the card needle on the probe card 15 in order to realize the regulation of the 8 height of upper bracket to the cooperation is equipped with vertical scale 5, side guide bar 7, is convenient for obtain directly perceived the distance between grinder and the probe card 15, and convenient to use is convenient for control the length of the needle point in the grinding process.
In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.
Claims (10)
1. A probe card needle grinding machine comprises a lower base (1), wherein a vertical support plate (6) is fixed on the lower base (1), an upper base (12) is fixed above the vertical support plate (6), and the probe card needle grinding machine is characterized in that:
the lower base (1) is provided with a needle grinding mechanism in a sliding manner, and the needle grinding mechanism is driven by a power mechanism (3);
the lower surface of the upper base (12) is provided with a clamping mechanism;
the needle grinding mechanism comprises a lower sliding seat (2) and an upper supporting seat (8), and a lifting mechanism (4) is arranged between the lower sliding seat (2) and the upper supporting seat (8);
the clamping mechanism comprises a fixed clamping body (9) and a movable clamping body (14);
the fixed clamping body (9) is fixed on the lower surface of the upper base (12), and the movable clamping body (14) is arranged on the upper base (12) in a sliding manner;
a rotating arm (10) is rotatably arranged on one side of the upper base (12), and an amplifying device is hinged to the end part of the rotating arm (10);
a cross scale (13) which is matched and corresponds to the position of the movable clamping body (14) is arranged on one side of the upper base (12);
and a vertical scale (5) which is matched and corresponds to the upper support (8) in position is arranged on one side of the vertical support plate (6).
2. The probe card pin grinder of claim 1, wherein:
a group of V-shaped sliding grooves (101) which are arranged in parallel are formed in the lower base (1);
the lower sliding seat (2) is arranged on the lower base (1) in a sliding mode in which the sliding block is matched with the V-shaped sliding groove (101).
3. The probe card pin grinder of claim 1, wherein:
the lower sliding seat (2) is of a rectangular structure, a positioning screw (11) is arranged on the side face of the lower sliding seat (2), and a group of channels (201) are formed in two opposite sides of the lower sliding seat (2);
the upper support (8) is of a rectangular structure, and a group of channels (201) are formed in two opposite sides of the upper support (8).
4. The probe card grinding machine according to claim 1, wherein the power mechanism (3) is a hydraulic cylinder or a pneumatic cylinder, the power mechanism (3) is mounted on the lower base (1), and the telescopic end of the power mechanism is fixedly connected with the lower sliding seat (2).
5. The probe card pin grinder of claim 1, wherein:
the lifting mechanism (4) is a scissor type lifting mechanism, the lifting mechanism (4) comprises two groups of X-shaped structures hinged by connecting rods (401), and each group is two X-shaped structures arranged side by side;
the two groups of X-shaped structures are arranged up and down, and are hinged through a connecting shaft (403);
the connecting shaft (403) is provided with a threaded hole, and the connecting shaft (403) is screwed with a screw (402) through the threaded hole.
6. The probe card pin grinder of claim 5, wherein:
a connecting rod (401) of the lower X-shaped structure is in sliding fit with a channel (201) on the lower sliding seat (2), and the other connecting rod (401) of the lower X-shaped structure is hinged with the lower sliding seat (2);
and one connecting rod (401) of the upper X-shaped structure is in sliding fit with the channel (201) on the upper support (8), and the other connecting rod (401) of the upper X-shaped structure is hinged with the upper support (8).
7. The probe card pin grinder of claim 1, wherein:
the upper surface of the upper support (8) is provided with a grinding device which is abrasive paper or a grinding disc;
one side of the upper support (8) is provided with a side indicating rod (7) which corresponds to the vertical scale (5) in a matched mode, and the side indicating rod (7) is of a telescopic structure.
8. The probe card pin grinder of claim 1, wherein:
the fixed clamping body (9) and the movable clamping body (14) have the same structure;
the fixed clamping body (9) comprises a clamping box (901), and a rack (904) is arranged at the bottom of the clamping box (901) in a sliding manner;
one end of the rack (904) is provided with a telescopic rod (905), and the telescopic rod (905) is fixed on the side wall of the clamping box (901);
a gear (903) is meshed with the rack (904), and a pressure plate (902) is installed on the gear (903);
a clamping plate of the probe card (15) to be processed is arranged between the pressing plate (902) and the end surface of the clamping box (901) and is pressed by the pressing plate (902).
9. The probe card pin grinder of claim 1, wherein:
the lower surface of the upper base (12) is provided with a sliding rail (1201), and the movable clamping body (14) is arranged on the upper base (12) in a sliding mode in a matching mode with the sliding rail (1201);
the side of the movable clamping body (14) is provided with a positioning screw (11), and the side of the movable clamping body (14) is provided with an upper indicating rod (1301) corresponding to the cross scale (13).
10. The probe card grinding machine according to claim 1, wherein the rotary arm (10) is rotatably disposed on the upper base (12) through a rotating shaft, and the magnifying device is a microscope or a magnifying glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921171749.7U CN210281915U (en) | 2019-07-24 | 2019-07-24 | Probe card needle grinding machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921171749.7U CN210281915U (en) | 2019-07-24 | 2019-07-24 | Probe card needle grinding machine |
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| Publication Number | Publication Date |
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| CN210281915U true CN210281915U (en) | 2020-04-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201921171749.7U Active CN210281915U (en) | 2019-07-24 | 2019-07-24 | Probe card needle grinding machine |
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| CN (1) | CN210281915U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110253436A (en) * | 2019-07-24 | 2019-09-20 | 苏州光和精密测试有限公司 | A kind of probe card needle grinding machine |
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2019
- 2019-07-24 CN CN201921171749.7U patent/CN210281915U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110253436A (en) * | 2019-07-24 | 2019-09-20 | 苏州光和精密测试有限公司 | A kind of probe card needle grinding machine |
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